Fast self-resonant startup procedure for digital MEMS gyroscope system

Abstract

This paper describes a control procedure for the startup of a digital MEMS gyroscope system. Unlike the normal operating mode in which the gyroscope is actuated by synthesized sinusoidal drive signal, self-resonance of the gyroscope is stimulated by feeding back the drive-sense signal and converting it to a square-wave drive signal. During this procedure the resonant frequency that is near the natural frequency of the gyroscope can be calculated, and then provides a key parameter for the sinusoidal wave synthesizer, which will generate high-quality reference signals for driving and demodulation. Experiment shows a rapid rising of the magnitude of vibration, resulting a faster startup procedure for the system.