Micro device array design and fabrication in monolithic MEMS SoC

This study presents novel micro-device-array designs and fabrications potentially for accelerometer, gyro or even bio-sensor applications based on an advanced 0.35μm 4 metal bipolar-CMOS-DMOS (BCD) technology. Structures built by pure metal single layer have better mechanical properties and multi-electrodes design provide more actuating and sensing possibilities for both out-of-plane and in-plane motions and signal fine-tunes. MEMS devices and integrated circuits can be fabricated monolithically. SEMs show the delicate array matrices by post-process micromachining and finished die with circuit area protected by passivation. No warpages are observed by interferometer in our devices, and linear out-of-plane movements are being electrically driven. At last, frequency responses of 14.22 kHz and 2.71 kHz are also characterized for device mode shapes.