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2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)最新文献

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Design and fabrication of diffractive phase element for minimizing the focusing spot size beyond diffraction limit 衍射相位元件的设计与制造，以使超过衍射极限的聚焦光斑最小
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196796
N. Atthi, S. Boonruang, W. Mohammed, W. Jeamsaksiri, C. Hruanun, A. Poyai
{"title":"Design and fabrication of diffractive phase element for minimizing the focusing spot size beyond diffraction limit","authors":"N. Atthi, S. Boonruang, W. Mohammed, W. Jeamsaksiri, C. Hruanun, A. Poyai","doi":"10.1109/NEMS.2012.6196796","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196796","url":null,"abstract":"This paper proposes a fabrication apparatus of high numerical aperture (NA) diffractive lens (Concentric Chirped Grating, CCG). The fabrication scheme is based on photolithography incorporating with Double Patterning (DP) technique and Litho-Etch-Litho-Etch (LELE) process. The CCG element having NA up to 1.4 in a glass substrate (n=1.5) at 940 nm wavelength and feature size down to 320 nm is successfully fabricated. The fabricated element can be very useful in integrated Surface Plasmon sensors and beam shaping applications. When controlling the shift between the odd and even rings during the second exposure, the novel phase element that can minimize the optical beam spot size beyond the diffraction limit is generated.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"71 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124436950","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Investigation of electrical properties of DNA-attached carbon nano-particles for biological applications 应用于生物领域的dna附着碳纳米粒子的电学性质研究
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196810
M. Ouyang, W. Li, K. Wong, Wing-keung Liu
{"title":"Investigation of electrical properties of DNA-attached carbon nano-particles for biological applications","authors":"M. Ouyang, W. Li, K. Wong, Wing-keung Liu","doi":"10.1109/NEMS.2012.6196810","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196810","url":null,"abstract":"Carbon nano-particles are nano-sized crystalline with predominantly graphitic structure. Our recent work showed that DNA-attached Carbon Nano-Particles (DAC) can be positioned between microelectrodes in a microfluidic system to investigate its electrical properties. Dielectrophoretic based “deposition” led to a robust adhesion of various DACs with the chip substrate even after repeatedly DI water flushing. The IV characteristics and stability of three types of DACs under different conditions (i.e., towards open environment, sealed in dry microchannel, or immerged in DI water) were compared and analyzed. In addition, experiments were conducted to determine the temperature and humidity dependency of the DACs.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116848501","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
An adhesion strength measurement method for particle transfer and assembly in dry environment 一种干燥环境中颗粒转移和组装的粘附强度测量方法
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196792
Shouqiang Wang, Yen‐Ting Lin, Yan-Bo Lin, Kerwin Wang
{"title":"An adhesion strength measurement method for particle transfer and assembly in dry environment","authors":"Shouqiang Wang, Yen‐Ting Lin, Yan-Bo Lin, Kerwin Wang","doi":"10.1109/NEMS.2012.6196792","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196792","url":null,"abstract":"This research presents a new and noncontact method to measure the adhesion strength between micro-particles and substrates in parallel. It is cost effective and time saving. In this study, the adhesion strength between micro solder ball and PDMS (polydimethylsiloxane) and ReproRubber® (polymethylhylhydrogen) are investigated. The setup is capable of evaluating more than 8 particles separately each run. The experiment results indicated that the adhesion strength is highly dependent on surface conditions, parts geometry and material properties. The testing results also have been applied to successive parts transferring and assembling.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"201 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123031888","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A silicon-on-glass Z-axis accelerometer with vertical sensing comb capacitors 一种带有垂直传感梳状电容器的玻璃上硅z轴加速度计
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196843
Jiankun Wang, Zhenchuan Yang, G. Yan
{"title":"A silicon-on-glass Z-axis accelerometer with vertical sensing comb capacitors","authors":"Jiankun Wang, Zhenchuan Yang, G. Yan","doi":"10.1109/NEMS.2012.6196843","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196843","url":null,"abstract":"A Z-axis accelerometer with asymmetrical vertical sensing comb capacitors and high aspect ratio single crystal mechanical structures is presented. A 5-mask silicon-on-glass (SOG) process combined with silicon/glass anodic bonding and multiple deep ion reactive etching (DRIE) is used to fabricate the accelerometer. With the specially designed out-of-plane springs, the accelerometer shows a cross-axis sensitivity of 0.46%. The scale factor and the non-linearity of the accelerometer are measured to be 172.5 mV/g and 0.47% with the input range of ±1 g (gravity), respectively. The noise floor of the accelerometer is 0.22 mg/Hz1/2 at 100 Hz and for a bandwidth of 400 Hz. The short term (10 min) zero bias stability of the fabricated accelerometer is also evaluated to be about 0.47 mg.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122711863","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Microfluidic circulatory system for the raise of liver urea assay 用于肝尿素测定的微流控循环系统
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196832
Yu-Shih Chen, Tzu-Hsuan Dai, L. Ke, Cheng-Hsien Liu
{"title":"Microfluidic circulatory system for the raise of liver urea assay","authors":"Yu-Shih Chen, Tzu-Hsuan Dai, L. Ke, Cheng-Hsien Liu","doi":"10.1109/NEMS.2012.6196832","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196832","url":null,"abstract":"In this research, we propose an in vitro liver circulatory system via the concept of cell pattern technology and microfluidic system. Liver lobule structure in our body consisted of several blood vessel and hepatic tissue. The fluid direction of blood would get in from hepatic portal vein, liver lobule tissue to the hepatic central vein. Hence, in order to mimic the liver circular system in vitro, a connected microchannel system is proposed in this research. This connected system consisted of three parts of channel design, blood vessel chamber, Lobule-flow-mimic channel and liver tissue chamber. Liver circulatory system chip is consisted of blood vessel chamber and liver tissue chamber via dielectrophoresis pattern method and microfluidic channel design.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122939671","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
In situ study of thermal deformation of metal resistive heater on silicon nitride membrane by digital holographic microscopy 数字全息显微镜对氮化硅膜上金属电阻加热器热变形的原位研究
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196837
Y. Lai, Joshua E-Y Lee
{"title":"In situ study of thermal deformation of metal resistive heater on silicon nitride membrane by digital holographic microscopy","authors":"Y. Lai, Joshua E-Y Lee","doi":"10.1109/NEMS.2012.6196837","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196837","url":null,"abstract":"Metal resistive heater on dielectric membrane structures are common in MEMS. In this paper, the evolution of the surface topography of this type of structure during operation is studied by in situ digital holographic microscopy with nanometer-scale resolution. Devices of a typical design with platinum resistive heater lying on 200 nm silicon nitride membrane were fabricated by standard MEMS processes. A permanent out-of-plane surface deformation up to 200 nm could be detected when applying heating cycles via real-time in situ images of the device surface profile. Such deformation bears the risk of failure in the thin membrane device.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124903494","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Nano-scale mechanical relays fabricated by nanoimprint technology 纳米压印技术制备的纳米级机械继电器
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196719
Y. J. Chang, D. Liu, C. Kuo
{"title":"Nano-scale mechanical relays fabricated by nanoimprint technology","authors":"Y. J. Chang, D. Liu, C. Kuo","doi":"10.1109/NEMS.2012.6196719","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196719","url":null,"abstract":"In this paper, we first demonstrate nanoscale mechanical relays fabricated by a nanoimprint technology, called Contact-Transfer and Mask-Embedded Lithography (CMEL). With this technology, the nanoscale metallic source electrode can be easily fabricated in one step at a low cost. We successfully fabricated the three-terminal nanorelays with various lengths. The nanorelays are demonstrated by measuring the I-V curve of each device. The measured pull-in voltages are compared with the simulation results.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128916118","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A carbon nanotube network conjugated by semiconductor nanoparticles with defined nanometer-scaled gaps 由半导体纳米粒子共轭的碳纳米管网络，具有确定的纳米尺度的间隙
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196727
S. Kumagai, N. Okamoto, Mime Kobayashi, I. Yamashita
{"title":"A carbon nanotube network conjugated by semiconductor nanoparticles with defined nanometer-scaled gaps","authors":"S. Kumagai, N. Okamoto, Mime Kobayashi, I. Yamashita","doi":"10.1109/NEMS.2012.6196727","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196727","url":null,"abstract":"Carbon nanotubes (CNTs) have been attracting broad interest in many research fields including nano-electronics and micro-/nano-electromechanical systems because of their unique physical and electronic properties. Utilizing a biological material, a novel nanostructure of carbon nanotube conjugated by semiconductor nanoparticles were synthesized intended for electronics devices with unprecedented properties. A peptide aptamer that has an affinity for carbonaceous materials was fused to a cage-shaped protein, LiDps, to be displayed on its outer surface. Semiconductor nanoparticle was synthesized within a cavity of the engineered protein, NHBP-LiDps. By the affinity of the peptide aptamer, the NHBP-LiDps proteins accommodating semiconductor nanoparticles were adhered to surround the CNTs with nanometer-scaled gap defined by the thickness of the protein-cage. The CNTs conjugated by the NHBP-LiDps were adsorbed onto a pair of electrodes, making CNT network with dispersed nanoparticles. We report our attempt to characterize the electronic property of the structure.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128790819","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A SWNTs thin film solar microcell prepared by simple solution-evaporation method 简单溶液蒸发法制备单壁碳纳米管薄膜太阳能微电池
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196829
C. C. Chen, Yiyang Chang, Jimeng Zhang
{"title":"A SWNTs thin film solar microcell prepared by simple solution-evaporation method","authors":"C. C. Chen, Yiyang Chang, Jimeng Zhang","doi":"10.1109/NEMS.2012.6196829","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196829","url":null,"abstract":"This paper reports a solar microcell based on single-walled carbon nanotubes (SWNTs) thin film-silicon heterojunction prepared by very simple and low cost solution-evaporation (SE) method. The nano-material of SWNTs, which has a one-dimensional structure and direct band gap with unique electric properties, is applied and plays the role of the energy conversion in the solar microcells, including exciton generation, carrier collection and transportation. The intrinsic p-SWNTs film was deposited conformally on the n-type silicon substrate to form the p-n heterojunction by SE method. Under 100mA/cm2 illumination, the SWNTs thin film microcell shows the open voltage (Voc) of 230mV, short circuit current density (Jsc) of 73.7μA/cm2, and fill factor (FF) of about 19%, proving that SE method is promising for achieving SWNTs thin film for application in microdevices.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130026642","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Nanopatterning by phase change nanolithography 采用相变纳米光刻技术制备纳米图案
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196708
X. Miao, B. Zeng, Z. Li, W. L. Zhou
{"title":"Nanopatterning by phase change nanolithography","authors":"X. Miao, B. Zeng, Z. Li, W. L. Zhou","doi":"10.1109/NEMS.2012.6196708","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196708","url":null,"abstract":"Several techniques such as the electron beam technology and ion beam technology are employed to obtain the high resolution nanopatterns. However, these techniques cause some problems, for example, the vacuum installation, high voltage power supply and low throughput, which consequently make these techniques more expensive. On the other hand, the organic resists used for lithography are important to control the shape and size of the patterns. The reactivity of the resist is dominated by the total irradiation amounts of a beam, that is, the number of electrons or ions or photons absorbed by the resist. As a result, the precision control of the shape and size for nanopatterns become difficult due to their intrinsic accumulation effect of the absorption in the resists.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"105 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117209383","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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