Nano-scale mechanical relays fabricated by nanoimprint technology

In this paper, we first demonstrate nanoscale mechanical relays fabricated by a nanoimprint technology, called Contact-Transfer and Mask-Embedded Lithography (CMEL). With this technology, the nanoscale metallic source electrode can be easily fabricated in one step at a low cost. We successfully fabricated the three-terminal nanorelays with various lengths. The nanorelays are demonstrated by measuring the I-V curve of each device. The measured pull-in voltages are compared with the simulation results.