Study of thin film adhesion properties of multilayer flexible electronics composites

2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI:10.1109/NEMS.2012.6196877

C. C. Li, Zong-Hsin Liu, C. Pan, J. Tseng, H. L. Huang, S. Mao, S. Shen, S. Chang

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引用次数: 6

Abstract

The deformation between interface and adhesion mechanism of multi-layer flexible electronics composite were discussed. First, ITO (Indium tin oxide), Al (Aluminum) and ZnO (Zinc oxide) were directly deposited on a PET (Polyethylene terephthalate) substrate by RF (Radiofrequency) magnetron sputtering in room temperature to form the flexible multi-layer structures (ZnO/ITO/PET and ZnO/Al/PET) for piezoelectric transducers. ZnO thin film reveals a high (002) c-axis preferred orientation at 2θ=34.45° with an excellent piezoelectric property. To analyze adhesion following a periodic mechanical stress by vibrating flexible composite plates, nano-scratching test (Nanoindenter XP system) was used for scratch process to learn the relationship between normal force and penetration depth. The results show that the plastic deformation can be observed from SEM and OM observation between Al film and PET substrate. This behavior means that the deposited ZnO film has excellent adhesion with Al/PET conductive substrate compared with ITO/PET. Through nano-indentation test, ZnO film deposited on Al/PET substrate decreased the elastic modulus and hardness compared with ITO/PET substrate.

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多层柔性电子复合材料薄膜粘附性能研究

讨论了多层柔性电子复合材料的界面变形和粘接机理。首先，在室温下通过射频磁控溅射将ITO(氧化铟锡)、Al(铝)和ZnO(氧化锌)直接沉积在PET(聚对苯二甲酸乙二醇酯)衬底上，形成用于压电换能器的柔性多层结构(ZnO/ITO/PET和ZnO/Al/PET)。ZnO薄膜在2θ=34.45°处表现出高(002)c轴择优取向，具有优异的压电性能。为了分析振动柔性复合材料板在周期性机械应力作用下的粘附性，采用纳米划痕测试(nanoindentter XP系统)对划痕过程进行测试，了解法向力与穿透深度的关系。结果表明，通过SEM和OM观察，可以观察到Al薄膜与PET衬底之间的塑性变形。这意味着与ITO/PET相比，沉积的ZnO薄膜与Al/PET导电衬底具有优异的附着力。通过纳米压痕测试，ZnO薄膜沉积在Al/PET衬底上，与ITO/PET衬底相比，弹性模量和硬度降低。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

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