数字MEMS陀螺仪系统的快速自谐振启动程序

2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI:10.1109/NEMS.2012.6196864

Fei Ge, Dachuan Liu, Longtao Lin, Zhenchuan Yang, G. Yan

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引用次数: 2

摘要

本文介绍了数字微机电系统陀螺仪系统的启动控制程序。与一般由合成正弦驱动信号驱动陀螺仪的工作方式不同，陀螺仪的自谐振是通过反馈驱动感测信号并将其转换为方波驱动信号来激发的。在此过程中，可以计算出陀螺仪固有频率附近的谐振频率，从而为正弦波合成器提供一个关键参数，为驱动和解调提供高质量的参考信号。实验表明，振动幅度迅速上升，导致系统启动速度加快。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Fast self-resonant startup procedure for digital MEMS gyroscope system

This paper describes a control procedure for the startup of a digital MEMS gyroscope system. Unlike the normal operating mode in which the gyroscope is actuated by synthesized sinusoidal drive signal, self-resonance of the gyroscope is stimulated by feeding back the drive-sense signal and converting it to a square-wave drive signal. During this procedure the resonant frequency that is near the natural frequency of the gyroscope can be calculated, and then provides a key parameter for the sinusoidal wave synthesizer, which will generate high-quality reference signals for driving and demodulation. Experiment shows a rapid rising of the magnitude of vibration, resulting a faster startup procedure for the system.

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来源期刊

2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

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