Toshiyuki Tsuchiya, Takefumi Yoshida, M. Tsutsumi, S. Maeda, Y. Tsukada
{"title":"Apply to the package substrate of low low-CTE polyimide laminate sheet","authors":"Toshiyuki Tsuchiya, Takefumi Yoshida, M. Tsutsumi, S. Maeda, Y. Tsukada","doi":"10.1109/IEMT.2010.5746736","DOIUrl":"https://doi.org/10.1109/IEMT.2010.5746736","url":null,"abstract":"","PeriodicalId":133127,"journal":{"name":"2010 34th IEEE/CPMT International Electronic Manufacturing Technology Symposium (IEMT)","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133453796","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Lee Kuan Fang, O. Kwon, O. Yauw, D. Capistrano, B. Milton
{"title":"Ultra low loop conversion from gold to copper wire","authors":"Lee Kuan Fang, O. Kwon, O. Yauw, D. Capistrano, B. Milton","doi":"10.1109/IEMT.2010.5746666","DOIUrl":"https://doi.org/10.1109/IEMT.2010.5746666","url":null,"abstract":"It has been a trend to convert gold wire to copper wire in manufacturing of semiconductor chip due to cost effectiveness. Another motivation for the conversion comes from the physical properties of copper wire. Copper wire offers the advantages of presenting higher mechanical strength, lower electrical resistance and slower intermetallic growth. Aside from the differences in term of chemical stability, copper is a stiffer material as compared to gold. It has been determined that copper wire requires new process optimization in comparison to gold wire. Parameter adjustments for ball bond formation, stitch bond formation, and looping profile are needed during conversion from gold to copper.","PeriodicalId":133127,"journal":{"name":"2010 34th IEEE/CPMT International Electronic Manufacturing Technology Symposium (IEMT)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132115457","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Teng Seng Kiong, I. Ruzaini, Kesvakumar, Foong Chee Seng
{"title":"Package warpage challenges for LQFP 144 lead CMOS 90 device and it's impact to lead coplanarity","authors":"Teng Seng Kiong, I. Ruzaini, Kesvakumar, Foong Chee Seng","doi":"10.1109/IEMT.2010.5746703","DOIUrl":"https://doi.org/10.1109/IEMT.2010.5746703","url":null,"abstract":"Package warpage or generally referred to as plastic package deformation has become more challenging with larger and thinner package body sizes. The detrimental effects of the package warpage are more prominent in peripheral packages with leads such as fine pitch LQFP (Low Profile Quad Flat Package). As all the leads are embedded in the plastic body, the warpage will displace the leads in the same direction of the warp after the trim and form step. In the first half of the paper, we characterized the warpage of different LQFP packages designs using Akrometrix Thermoire. It was found that larger die size and smaller down set are favorable to reducing package warpage. In the second half of this paper, we explored various factors such as molding process parameters, post mold cure conditions, effects of direct materials properties, and package geometry to determine their impact on the package warpage and lead coplanarity for the LQFP molded package. Molding parameters such as cure time and molding temperature were evaluated in a series of DOEs in attempts to find the most promising factors that can control the warpage. Similar DOEs were also carried out in the post mold cure process coupled with various methods of clamping. As for the direct materials, studies focusing on molding compound properties such as coefficient of thermal expansion (CTE), higher filler content, higher glass transition temperature Tg, and lower mold shrinkage factor have been completed as well. From these series of analyses and experiments, we understood how the leads formed with spring back effect in a warped package will end up with poor coplanarity measures. It is also found that the combination of several material properties that are not optimal will further deteriorate warpage and cause poor lead coplanarity. These findings and results will be shared in this paper and recommendations to correct the issue are presented.","PeriodicalId":133127,"journal":{"name":"2010 34th IEEE/CPMT International Electronic Manufacturing Technology Symposium (IEMT)","volume":"294 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116313000","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Optimization of an isotropic etching process on silicon wafers","authors":"R. Dolah, H. Musa","doi":"10.1109/IEMT.2010.5746677","DOIUrl":"https://doi.org/10.1109/IEMT.2010.5746677","url":null,"abstract":"Etching process involves various chemical reactions and reflects significantly on silicon wafer quality. Etching parameters are evaluated in order to optimize the isotropic etching process. For optimization purpose, Design of Experiment (DOE) with full factorial design is employed. Etching factors namely the bubbling flow rate, wafer rotation, and etchant temperature are randomised with additional three centre points to observe any curvature. The responses studied are etching removal, total thickness variation (TTV) and wafer brightness. It is found that etchant temperature gives major impact on all three responses stated above. The etchant temperature is the main effect factor and significantly affects TTV. Additionally, the etchant temperature and bubbling flow rate provide interaction effects on both the etching removal and wafer brightness. A higher bubbling flow rate is required to ensure etching removal and brightness within specification. Besides studying these three responses, the wafer surface after etching is additionally analysed using ADE Infotool software which captures the etched profile and its thickness. The ADE result indicates that a higher temperature contributes to a more concave shape of etched wafer, thus resulting in higher TTV and sending the wafers out of specification. Finally, the optimum condition is tested on a final run. The removal uniformity is observed in removal distribution graphs. The etching performance is enhanced with the optimized value of bubbling flow rate, etchant temperature and wafer rotation to achieve the best removal distribution.","PeriodicalId":133127,"journal":{"name":"2010 34th IEEE/CPMT International Electronic Manufacturing Technology Symposium (IEMT)","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127338401","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"State-of-the-art and trends in 3D IC/Si integrations and WLP","authors":"J. Lau","doi":"10.1109/IEMT.2010.5746774","DOIUrl":"https://doi.org/10.1109/IEMT.2010.5746774","url":null,"abstract":"Moore's law has been the most powerful driver for the development of the microelectronic industry. This law emphasizes on lithography scaling and integration (in 2D) of all functions on a single chip, perhaps through system-on-chip (SoC). On the other hand, the integration of all these functions can be achieved through system-in-package (SiP) or, ultimately, 3D IC/Si integration, which is a very complicate subject. It involves component and system designs, FAB, packaging assembly and testing, material suppliers, and equipment suppliers. The key enabling technologies for 3D IC integration are, e.g., electrical, thermal, and mechanical designs and tests, known good die (KGD), TSV (through silicon via) forming and filling, wafer thinning and handling, thin chip strength measurement and improving, lead-free microbump forming and assembly, low temperature C2W and W2W bonding, and thermal management. In this course, all these enabling technologies (except electrical) will be discussed. Most of the materials are based on the technical papers published within the past 3 years by others and the instructor.","PeriodicalId":133127,"journal":{"name":"2010 34th IEEE/CPMT International Electronic Manufacturing Technology Symposium (IEMT)","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125442353","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Power gating techniques on Platform Controller Hub","authors":"F. Tan, S. G. Pang, L. K. Yong, Chee Siong Lee","doi":"10.1109/IEMT.2010.5746728","DOIUrl":"https://doi.org/10.1109/IEMT.2010.5746728","url":null,"abstract":"Energy efficiency has long been a first-order goal for mobile devices such as cell phones to extend battery life. In the last decade, effective energy use has also become a focus for larger computing devices for several reasons; namely expansion of mobile computing and data centers. Customers require maximum battery life from notebooks, netbooks, and tablets. Achieving optimal battery performance requires careful management of energy consumption. This paper describes the power gating techniques which has achieved ∼1000mW of effective power savings on Platform Controller Hub (PCH) and is proven to be a good strategy for preserving mobile computing power and extension of battery life span. However, to make power savings possible without performance trade-off, many design considerations combining architecture, floorplanning, innovative hardware design and software configurations are required. This paper presents the power gating strategies starting from early design planning to post silicon validation correlation methodology considering: 1) silicon floorplan partitioning into multiple power domains 2) stages of PFET switches assignment 3) The trade-off between a wake-up overhead and leakage savings design 4) the complete definition of power gate/ungate power sequence from partition level to system level 5) PDN noise analysis and leveraging of “zero-cost” noise mitigation techniques to address the various possible worst case power noise droop events cause by power gate/ungate activities. These power gating strategies are consider successful, when not only the desired power target is achieved; but a smooth transition of power state from sleep mode to full power mode and vice versa, is achieved without system hang or performance corruption. The paper is concluded with post silicon validation results correlated to selected individual power partition's gate/ungate activity; which is controlled by a specially customized test script to examine the power fet's gating/ungating functionality v.s. design expectation.","PeriodicalId":133127,"journal":{"name":"2010 34th IEEE/CPMT International Electronic Manufacturing Technology Symposium (IEMT)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123727249","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Yung Hsiang Lee, K. Ong, W. K. Loh, Shaw Fong Wong, P. Gill, Kah Kee Tan
{"title":"The correlation of package coplanarity and reflow warpage to SMT","authors":"Yung Hsiang Lee, K. Ong, W. K. Loh, Shaw Fong Wong, P. Gill, Kah Kee Tan","doi":"10.1109/IEMT.2010.5746680","DOIUrl":"https://doi.org/10.1109/IEMT.2010.5746680","url":null,"abstract":"Flip Chip Ball Grid Array (FCBGA) package with large silicon chip and package size typically exhibits high warpage and coplanarity. Many percieved that such package design faced surface mount technology (SMT) challenges. In this study, the warpage characteristic and the SMT validation for such large package was investigated. A hybrid methodology utilizing both numerical and empirical data to predict the coplanarity of this package is presented. SMT validation was performed on range of coplanarity to demonstrate the process robustness together with solder joint reliability (SJR) data. With all the studies, the correlation between package room temperature coplanarity and reflow warpage has been established without comprising SMT quality and SJR performance. In the end, an improved FCBGA coplanarity specification limit has been defined and aligned with the Alternate Warpage Specification in JEDEC standard.","PeriodicalId":133127,"journal":{"name":"2010 34th IEEE/CPMT International Electronic Manufacturing Technology Symposium (IEMT)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130478040","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Alternative robust reliability solution for silver finishing","authors":"S. Goh, S. Lee, Din-Ghee Neoh, Sia-Wing Kok","doi":"10.1109/IEMT.2010.5746708","DOIUrl":"https://doi.org/10.1109/IEMT.2010.5746708","url":null,"abstract":"In this paper, a silver adhesion promoter process, namely “AgPrep” was introduced for the semiconductor leadframes. The concept of how AgPrep works to improve the adhesion between the silver surface of a leadframe and the epoxy molding compound (EMC) was presented. X-ray Photoelectron Spectroscopy (XPS) analysis was also carried out to study the chemical state of the silver surface after AgPrep's treatment. Besides, the surface energy of AgPrep's treated silver was characterized through the contact angle measurements using a drop shape analyzer. Finally, the adhesion performance of AgPrep process was verified in the button shear tests and a series of reliability tests.","PeriodicalId":133127,"journal":{"name":"2010 34th IEEE/CPMT International Electronic Manufacturing Technology Symposium (IEMT)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129661242","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Rusli Ibrahim, M. Leoni, Au Yin Kheng, Poh Zi Song Kenny, P. Eu
{"title":"Investigation of bond pad etching chemistries for passivation crack","authors":"Rusli Ibrahim, M. Leoni, Au Yin Kheng, Poh Zi Song Kenny, P. Eu","doi":"10.1109/IEMT.2010.5746662","DOIUrl":"https://doi.org/10.1109/IEMT.2010.5746662","url":null,"abstract":"Wire bonding is still a very common method for connecting the pads on a chip to the package. During the ultrasonic wire bonding process, several failures such as ball neck failure, missing ball, bond metal peeling or crack etc., may be generated. Of those failures, bond pad peeling or crack is a phenomenon detected after bonding process and is identified as a critical reliability problem and is known as a complex defect to investigate. Bond pad cracks pose a high reliability risk and potential failure during environmental stress testing. Damage to the bond pad may be the result of sub optimized probe or wirebond process parameters, as well as poor pad design. In addition, bond pad cracks may be unintentionally induced by the cratering test chemical etch solution. There is a case where an assembly folk reported had a bond pad crack, but none of the parts have failure during electrical test or even after reliability stress. In such case, we believe the crack found at assembly was an artifact induced by etching chemical, resulting the over-rejecting the parts. This paper specifically discusses a comparative analysis of various bond pad etching methods and their impact on bond pad cracking. There are few interesting findings will also be shared during the discussions. Failure analysis results are also briefly discussed.","PeriodicalId":133127,"journal":{"name":"2010 34th IEEE/CPMT International Electronic Manufacturing Technology Symposium (IEMT)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130663986","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Adaptation of brass core lead frame material in IC packaging","authors":"Koo Kok Kiat, T. Min","doi":"10.1109/IEMT.2010.5746710","DOIUrl":"https://doi.org/10.1109/IEMT.2010.5746710","url":null,"abstract":"In today's lead frame IC packages, the cost of lead frames account for one of the largest portion of material costs. Etched lead frames can cost 50% of the total package cost where as stamped frames can cost around 30%.","PeriodicalId":133127,"journal":{"name":"2010 34th IEEE/CPMT International Electronic Manufacturing Technology Symposium (IEMT)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132982612","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}