Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference最新文献

An investigation of SEM overlay metrology 扫描电镜覆盖计量研究

Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference Pub Date : 1999-07-06 DOI: 10.1109/IMNC.1999.797541

T. Koike, T. Ikeda, H. Abe, F. Komatsu

引用次数: 1

Scanning tunneling microscopy study of annealing effects on Si nanoscaled pn junctions formed by ion implantation 扫描隧道显微镜研究离子注入形成的Si纳米pn结的退火效应

Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference Pub Date : 1999-07-06 DOI: 10.1109/IMNC.1999.797470

H. Fukutome, S. Hasegawa, T. Okui, H. Nakashima, Takayuki Aoyama, Hiroshi Arimoto

引用次数: 0

High density metal dot arrays formed by electron beam induced nucleation method 电子束诱导成核法制备高密度金属点阵列

Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference Pub Date : 1999-07-06 DOI: 10.1109/IMNC.1999.797458

K. Tsutsui, A. Himura, M. Mochizuki, K. Kawasaki

引用次数: 0

Manipulations of densities and sizes during self-assembling quantum dots in MOVPE 量子点自组装过程中密度和尺寸的操纵

Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference Pub Date : 1999-07-06 DOI: 10.1109/IMNC.1999.797456

W. Seifert, J. Johansson, N. Carlsson

引用次数: 0

Ghost exposure of chemically amplified resist caused by acids generated in environmental air with KrF exposure 环境空气中产生的酸引起的化学放大抗蚀剂幽灵暴露与KrF暴露

Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference Pub Date : 1999-07-06 DOI: 10.1109/IMNC.1999.797550

Y. Kawai, K. Deguchi, J. Nakamura

引用次数: 0

Development of kHz F/sub 2/ laser for 157 nm lithography 157nm光刻用kHz F/sub / 2激光器的研制

Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference Pub Date : 1999-07-06 DOI: 10.1109/IMNC.1999.797478

S. Nagai, T. Enami, T. Nishisaka, J. Fujimoto, O. Wakabayashi, H. Mizoguchi

引用次数: 3

Spatial distribution of mask-scattered electrons through scattering stencil mask 散射模板掩模中掩模散射电子的空间分布

Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference Pub Date : 1999-07-06 DOI: 10.1109/IMNC.1999.797461

H. Yamashita, S. Manako, E. Nomura, K. Nakajima, H. Nozue

引用次数: 0

Microfabricated structures for cell characterization, separation and culture 用于细胞表征、分离和培养的微加工结构

Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference Pub Date : 1999-07-06 DOI: 10.1109/IMNC.1999.797449

Y. Kikuchi

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引用次数: 0

First operation of compact SR ring "AURORA-2S" 紧凑型SR环“AURORA-2S”首次运行

Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference Pub Date : 1999-07-06 DOI: 10.1109/IMNC.1999.797454

T. Hori

引用次数: 0

In situ monitoring of semiconductor processes using synchrotron radiation [growth and cleaning] 使用同步辐射的半导体工艺现场监测[生长和清洗]

Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference Pub Date : 1999-07-06 DOI: 10.1109/IMNC.1999.797531

Y. Takaku

引用次数: 0