IEEE Transactions on Materials for Electron Devices最新文献

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Integrating Hybrid Supercapacitors With Batteries: Unravelling the Mechanism in Zn-I2/MnO2 Systems 集成混合超级电容器与电池:揭开锌- i2 /MnO2系统的机制
IEEE Transactions on Materials for Electron Devices Pub Date : 2026-02-09 DOI: 10.1109/TMAT.2026.3662625
Zanxiang Nie;Guodong Fu;Kwun Nam Hui;Kwan San Hui;Pritesh Hiralal;Gehan A.J. Amaratunga;Yue Liu;Yaotang Zhong;Shiwei Liu;Shiqiang Luo
{"title":"Integrating Hybrid Supercapacitors With Batteries: Unravelling the Mechanism in Zn-I2/MnO2 Systems","authors":"Zanxiang Nie;Guodong Fu;Kwun Nam Hui;Kwan San Hui;Pritesh Hiralal;Gehan A.J. Amaratunga;Yue Liu;Yaotang Zhong;Shiwei Liu;Shiqiang Luo","doi":"10.1109/TMAT.2026.3662625","DOIUrl":"https://doi.org/10.1109/TMAT.2026.3662625","url":null,"abstract":"Supercapatteries, integrating supercapacitors and batteries, offer a promising route to combine high power and energy density. This study decouples their charging behavior by constructing hybrid (Zn//AC) and symmetric (AC//AC) supercapacitors coupled with I<sub>2</sub>/MnO<sub>2</sub> batteries. We identify a stepwise mechanism where supercapacitor charging precedes battery reactions. The Zn//AC configuration successfully integrates with the I<sub>2</sub> battery, while the symmetric AC//AC system fails due to the shuttle effect. The zinc anode enables both efficient capacitive charging and stable battery operation. Furthermore, charge transfer between the supercapacitor and battery subsystems is observed, highlighting their dynamic interplay. These findings provide key insights for designing integrated, high-performance energy storage systems with tunable capacitive and battery-like behavior.","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"3 ","pages":"55-60"},"PeriodicalIF":0.0,"publicationDate":"2026-02-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146223692","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Bottom Palladium Quasi-Ohmic Contact to Atomic Layer Deposited Zinc Tin Oxide Thin Film 底部钯准欧姆接触原子层沉积锌锡氧化薄膜
IEEE Transactions on Materials for Electron Devices Pub Date : 2026-02-02 DOI: 10.1109/TMAT.2026.3660582
Tonglin L. Newsom;Jasper Scherz;Rebecca L. Peterson
{"title":"Bottom Palladium Quasi-Ohmic Contact to Atomic Layer Deposited Zinc Tin Oxide Thin Film","authors":"Tonglin L. Newsom;Jasper Scherz;Rebecca L. Peterson","doi":"10.1109/TMAT.2026.3660582","DOIUrl":"https://doi.org/10.1109/TMAT.2026.3660582","url":null,"abstract":"We report using evaporated palladium (Pd) to create a quasi-ohmic bottom contact to an atomic layer deposited zinc tin oxide semiconductor film. Vertical conduction test structures show that current scales with device area. A maximum current density of 165 A⋅cm<sup>-2</sup> was achieved at a bias voltage of +1 V. The specific contact resistance between the bottom Pd and zinc tin oxide is found to be 6.43 × 10<sup>-3</sup>Ω⋅cm<sup>-2</sup> .<sup> Measurements between adjacent bottom Pd contacts show linear <italic>I-V</i> behavior. These results indicate that the bottom Pd contact is quasi-ohmic. In the future, such vertical conducting structures can be used in emerging device applications such as high-density vertical back end of line oxide transistors and two-transistors-zero-capacitor (2T0C) DRAM.","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"3 ","pages":"61-64"},"PeriodicalIF":0.0,"publicationDate":"2026-02-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147362406","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Self-Powered, Fast Response Quadruple Cation Perovskite Photodetector With Al2O3 Nanoparticles as Interfacial Modification Layer 以Al2O3纳米颗粒为界面修饰层的自供电、快速响应四重阳离子钙钛矿光电探测器
IEEE Transactions on Materials for Electron Devices Pub Date : 2026-02-02 DOI: 10.1109/TMAT.2026.3659862
Surya Ketaraju;Naba Kumar Rana;Santu Mazumder;Nikhil Chander
{"title":"Self-Powered, Fast Response Quadruple Cation Perovskite Photodetector With Al2O3 Nanoparticles as Interfacial Modification Layer","authors":"Surya Ketaraju;Naba Kumar Rana;Santu Mazumder;Nikhil Chander","doi":"10.1109/TMAT.2026.3659862","DOIUrl":"https://doi.org/10.1109/TMAT.2026.3659862","url":null,"abstract":"This study presents the fabrication and characterization of self-powered (0 V bias) perovskite photodetectors with a fast response time. We fabricated a RbCsMAFAPb(IBr)<inline-formula><tex-math>$_{3}$</tex-math></inline-formula> perovskite photodetector in an n-i-p planar architecture and systematically analyzed its performance. The device achieves an external quantum efficiency (EQE) exceeding 55% and a peak responsivity of 0.306 A/W at 730 nm. At the same wavelength, it demonstrates a detectivity of <inline-formula><tex-math>$2.36 times 10^{11}$</tex-math></inline-formula> Jones. With a rise time of 0.286ms, the detector exhibits a competitive response speed among perovskite photodetectors. The device exhibited good stability over the course of 10 days. Furthermore, we investigated the incorporation of Al<inline-formula><tex-math>$_{2}$</tex-math></inline-formula>O<inline-formula><tex-math>$_{3}$</tex-math></inline-formula> nanoparticles in the electron transport layer (ETL) and their impact on the morphology of the perovskite film.","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"3 ","pages":"47-54"},"PeriodicalIF":0.0,"publicationDate":"2026-02-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146175798","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
2025 Index IEEE Transactions on Materials for Electron Devices 电子器件材料学报
IEEE Transactions on Materials for Electron Devices Pub Date : 2026-01-20 DOI: 10.1109/TMAT.2026.3654827
{"title":"2025 Index IEEE Transactions on Materials for Electron Devices","authors":"","doi":"10.1109/TMAT.2026.3654827","DOIUrl":"https://doi.org/10.1109/TMAT.2026.3654827","url":null,"abstract":"","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"2 ","pages":"166-173"},"PeriodicalIF":0.0,"publicationDate":"2026-01-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11359568","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146026394","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Scalable CVD Graphene Field-Effect Transistor Platform for Viral Detection: Application to COVID-19 用于病毒检测的可扩展CVD石墨烯场效应晶体管平台:在COVID-19中的应用
IEEE Transactions on Materials for Electron Devices Pub Date : 2026-01-12 DOI: 10.1109/TMAT.2026.3653243
Leonardo Martini;Ylea Vlamidis;Ileana Armando;Domenica Convertino;Vaidotas Mišeikis;Valerio Voliani;Camilla Coletti
{"title":"Scalable CVD Graphene Field-Effect Transistor Platform for Viral Detection: Application to COVID-19","authors":"Leonardo Martini;Ylea Vlamidis;Ileana Armando;Domenica Convertino;Vaidotas Mišeikis;Valerio Voliani;Camilla Coletti","doi":"10.1109/TMAT.2026.3653243","DOIUrl":"https://doi.org/10.1109/TMAT.2026.3653243","url":null,"abstract":"The rapid and global spread of coronavirus disease 2019 (COVID-19), caused by the severe acute respiratory syndrome coronavirus 2 (SARS-CoV-2), underscored the urgent need for fast, reliable, and adaptable diagnostic tools capable of responding to current and future viral threats. Early diagnosis is key to limiting transmission, and biosensors based on nanomaterials offer promising solutions for accurate and rapid bioanalyte detection. In this work, we present a scalable matrix of graphene-based field-effect transistors (GFETs) for the direct and rapid detection of the SARS-CoV-2 spike protein. High-quality graphene is functionalized in a single step with ACE2–His, enabling detection of the spike protein with a limit of detection as low as 1 fg/mL in phosphate-buffered saline (PBS). A robust statistical analysis, based on measurements from approximately 70 devices per analyte concentration, demonstrates the reproducibility and reliability of the platform. This label-free, scalable, and reproducible COVID-19 antigen sensor can be readily adapted to detect emerging SARS-CoV-2 variants or other viral pathogens, offering a flexible approach for future diagnostic applications.","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"3 ","pages":"39-46"},"PeriodicalIF":0.0,"publicationDate":"2026-01-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11347479","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146175737","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fabrication of VS2/MXene Heterostructure Electrode-Based Micro-Supercapacitor for On-Chip Energy Source Applications 片上能量源用VS2/MXene异质结构电极微超级电容器的制备
IEEE Transactions on Materials for Electron Devices Pub Date : 2026-01-01 Epub Date: 2026-04-16 DOI: 10.1109/TMAT.2026.3684739
Ashish Kumar Yadav;Jasil T K;Muhammed Anees P. K.;Nivedya Thathron;Ajith Kulangara Madam;Sib Sankar Mal;Partha Pratim Das;Sushil Kumar Pandey
{"title":"Fabrication of VS2/MXene Heterostructure Electrode-Based Micro-Supercapacitor for On-Chip Energy Source Applications","authors":"Ashish Kumar Yadav;Jasil T K;Muhammed Anees P. K.;Nivedya Thathron;Ajith Kulangara Madam;Sib Sankar Mal;Partha Pratim Das;Sushil Kumar Pandey","doi":"10.1109/TMAT.2026.3684739","DOIUrl":"https://doi.org/10.1109/TMAT.2026.3684739","url":null,"abstract":"Vanadium disulfide, a transition metal dichalcogenide, has emerged as a highly promising electrode material for next-generation micro-supercapacitors. In this study, the growth optimization of vanadium disulfide single crystals and films was performed using a chemical vapor deposition system by tuning different parameters such as growth temperature, precursor amount, and duration. Vanadium disulfide single crystals edge length of up to ˜330 μm were achieved at a growth temperature of 825°C, the largest crystals reported to date. Under similar conditions, textured thin films were also achieved by adjusting the argon carrier gas flow and precursor concentration. Atomic force microscopy confirmed a thickness of about 18 nm, indicating the formation of multilayer crystals. Density functional theory calculations revealed the metallic nature of the vanadium disulfide electrode adsorbed with sulfate ions, and a maximum quantum capacitance of 28 μF/cm<sup>2</sup> at −0.5 V, indicating its suitability as an electrode for a supercapacitor. After material investigation, a vanadium disulfide electrode-based supercapacitor was fabricated using a metal mask-assisted technique. The prototype supercapacitor fabricated device demonstrates an areal capacitance of 41.16 mF/cm<sup>2</sup>, which further improved nearly sixfold to 250.3 mF/cm<sup>2</sup> after incorporating an MXene layer above the vanadium disulfide electrode. The fabricated device has excellent capacitance retention of 88.9% during 1000 cycles of Galvanostatic Charge-Discharge at a current density of 0.5 mA/cm<sup>2</sup>. Our findings establish a link between synthesis conditions, material properties, and electrochemical performance, highlighting the potential for the commercialization of vanadium disulfide electrode-based micro-supercapacitors as on-chip energy sources.","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"3 ","pages":"65-74"},"PeriodicalIF":0.0,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147828835","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Combined Impedance Spectroscopy and Physical Characterization Unveils Kinetics of Ag Cations in the SET State of Ag/ZrOx:Al/Pt-RRAM With Variable Oxygen Vacancies 结合阻抗谱和物理表征揭示了具有可变氧空位的Ag/ZrOx:Al/Pt-RRAM在SET状态下Ag阳离子的动力学
IEEE Transactions on Materials for Electron Devices Pub Date : 2026-01-01 Epub Date: 2026-04-20 DOI: 10.1109/TMAT.2026.3685954
Suman Gora;Mandeep Jangra;Deepak Yadav;Jay Singh;Monojit Bag;Arnab Datta
{"title":"Combined Impedance Spectroscopy and Physical Characterization Unveils Kinetics of Ag Cations in the SET State of Ag/ZrOx:Al/Pt-RRAM With Variable Oxygen Vacancies","authors":"Suman Gora;Mandeep Jangra;Deepak Yadav;Jay Singh;Monojit Bag;Arnab Datta","doi":"10.1109/TMAT.2026.3685954","DOIUrl":"https://doi.org/10.1109/TMAT.2026.3685954","url":null,"abstract":"Kinetics and complementary roles of Ag cations and oxygen vacancies to the formation of dual-conduction filament (dual-CF) in the SET state of an Al-doped ZrO<sub>x</sub> (ZrO<sub>x</sub>:Al)-based (Ag/ZrO<sub>x</sub>:Al/Pt) resistive random access memory (RRAM) have been investigated here. Al doping increased oxygen vacancies in ZrO<sub>x</sub>, which impacted diffusion and reduction of the injected Ag<sup>+</sup> ions (from top contact) during the SET state of this RRAM. Detail impedance spectroscopy demonstrates faster Ag<sup>+</sup> diffusion in a vacancy richer background, which was eventually tailored by Al doping. Traces of Ag in ZrO<sub>x</sub>:Al film was found through separate XPS and EDX characterization. Furthermore, a vacancy migration until the counter electrode (Pt) complemented the said Ag<sup>+</sup> diffusion and reduction, which was corroborated by dielectric relaxation behaviour of Ag/ZrO<sub>x</sub>:Al/Pt RRAM for variable Al doped ZrO<sub>x</sub>. In this regard, dual-CF was assessed utilizing XPS, which revealed synergy between the field driven excess vacancies and O<sup>2−</sup> migration that led to phase transition in ZrO<sub>x</sub> (tetragonal to monoclinic) under the applied SET bias","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"3 ","pages":"75-81"},"PeriodicalIF":0.0,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147828929","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
1 MeV Proton-Induced Damage in $beta $-Ga2O3 Schottky Barrier Diodes Under Forward Bias 正偏压下$beta $-Ga2O3肖特基势垒二极管的1 MeV质子致损伤
IEEE Transactions on Materials for Electron Devices Pub Date : 2026-01-01 Epub Date: 2026-07-23 DOI: 10.1109/TMAT.2026.3716608
Jossue Montes;Junzhe Xie;Houqiang Fu;Yuji Zhao
{"title":"1 MeV Proton-Induced Damage in $beta $-Ga2O3 Schottky Barrier Diodes Under Forward Bias","authors":"Jossue Montes;Junzhe Xie;Houqiang Fu;Yuji Zhao","doi":"10.1109/TMAT.2026.3716608","DOIUrl":"https://doi.org/10.1109/TMAT.2026.3716608","url":null,"abstract":"This paper presents characterization and analysis of β-Ga<sub>2</sub>O<sub>3</sub> Schottky barrier diodes subjected to 1 MeV proton irradiation at fluences up to 10<sup>13</sup> p/cm<sup>2</sup>. The forward-bias current voltage characteristics showed significant degradation with increasing irradiation fluence. Extraction of key device electrical parameters based on model calculations showed that the main contribution to the radiation response was a change in the series resistance of the β-Ga<sub>2</sub>O<sub>3</sub> epilayer. The change in epilayer series resistance was associated with a change in effective doping density resulting from carrier removal by radiation-induced defects. Defect densities resulting from 1 MeV protons at the relevant fluence were confirmed with SRIM (Stopping and Range of Ions in Matter) and TRIM (Transport of Ions in Matter) simulations. These results are beneficial for the future development of Ga<sub>2</sub>O<sub>3</sub> electronics and optoelectronics in harsh environments.","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"3 ","pages":"87-91"},"PeriodicalIF":0.0,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148780941","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Ultrathin β-Ga2O3 Thin Films for Oxide Heterostructure Transistors 用于氧化异质结构晶体管的超薄β-Ga2O3薄膜
IEEE Transactions on Materials for Electron Devices Pub Date : 2026-01-01 Epub Date: 2026-06-25 DOI: 10.1109/TMAT.2026.3705978
Cheng-Lun Hsin;En-Lin Chen;Ruo-Yu Liu;Chia-Ying Wu;Chun-Wei Huang
{"title":"Ultrathin β-Ga2O3 Thin Films for Oxide Heterostructure Transistors","authors":"Cheng-Lun Hsin;En-Lin Chen;Ruo-Yu Liu;Chia-Ying Wu;Chun-Wei Huang","doi":"10.1109/TMAT.2026.3705978","DOIUrl":"https://doi.org/10.1109/TMAT.2026.3705978","url":null,"abstract":"We report the formation and device integration of an ultrathin (∼3–5 nm) β-phase Ga<sub>2</sub>O<sub>3</sub> film on SiO<sub>2</sub> using a low-temperature conversion method. Raman spectroscopy confirms monoclinic phase formation at extreme thickness scaling. Temperature-dependent transport (25–200 °C) reveals shallow donor–activated conduction with an activation energy of ∼0.06 eV. The film was integrated into an n-ZnO/n-Ga<sub>2</sub>O<sub>3</sub>/n-ZnO back-gated transistor with 300 nm SiO<sub>2</sub> dielectric. The device exhibits an on/off ratio of ∼1.5 × 10<sup>5</sup>, threshold voltage of ∼5.7 V, mobility of ∼1.35 cm<sup>2</sup>/V·s, and subthreshold swing of 524 mV/dec. Extracted interface trap density (∼5.6 × 10<sup>11</sup> cm<sup>−2</sup>eV<sup>−1</sup>) and moderate DIBL (∼0.093 V/V) indicate interface-trap–influenced electrostatics and partial drain-field coupling. These results demonstrate functional ultrathin β-Ga<sub>2</sub>O<sub>3</sub> channels while highlighting electrostatic and defect considerations for scaled oxide electronics.","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"3 ","pages":"82-86"},"PeriodicalIF":0.0,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148505425","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Orientation-Dependent Heteroepitaxy and Growth-Mediated Stabilization of (111) Rutile GeO2 on Rutile TiO2 by MOCVD (111)金红石GeO2在金红石TiO2上的定向异质外延及MOCVD生长介导的稳定性
IEEE Transactions on Materials for Electron Devices Pub Date : 2026-01-01 Epub Date: 2026-08-03 DOI: 10.1109/TMAT.2026.3719571
Imteaz Rahaman;Botong Li;Hunter D. Ellis;Bobby G. Duersch;Kai Fu
{"title":"Orientation-Dependent Heteroepitaxy and Growth-Mediated Stabilization of (111) Rutile GeO2 on Rutile TiO2 by MOCVD","authors":"Imteaz Rahaman;Botong Li;Hunter D. Ellis;Bobby G. Duersch;Kai Fu","doi":"10.1109/TMAT.2026.3719571","DOIUrl":"https://doi.org/10.1109/TMAT.2026.3719571","url":null,"abstract":"Rutile GeO<sub>2</sub> (r-GeO<sub>2</sub>) is a promising ultrawide bandgap semiconductor; however, achieving controlled epitaxial films remains challenging due to competing phases and growth kinetics. In this work, we demonstrate orientation-dependent growth of GeO<sub>2</sub> films on rutile TiO<sub>2</sub> substrates with (100), (110), (001), and (111) orientations using metal–organic chemical vapor deposition (MOCVD). Among the investigated orientations, the (111) surface supports the formation of continuous, predominantly r-GeO<sub>2</sub> films with comparatively reduced surface roughness, whereas the (001) orientation also enables rutile phase formation but with higher roughness, and the other orientations showed mixed phases and non-uniform morphologies. Reducing growth pressure improves crystalline quality, with the rocking curve full width at half maximum (FWHM) decreasing from 1.86° to 0.396° at 300 and 80 Torr, respectively. A direct comparison between continuous and seed-driven stepwise crystallization (SDSC) growth indicates that the segmented growth pathway assists rutile-phase stabilization under the present MOCVD conditions, whereas continuous growth yields amorphous films. The resulting films exhibit continuous morphology with comparatively reduced roughness (∼23 nm) and remain stable after water treatment. Under the present high-temperature X-ray diffraction conditions, amorphous films show no detectable crystallization up to 950 °C, suggesting that crystallization is strongly influenced by growth-mediated conditions. These results offer guidelines for the controlled growth of (111)-oriented r-GeO<sub>2</sub> films for ultrawide-bandgap semiconductor applications.","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"3 ","pages":"92-96"},"PeriodicalIF":0.0,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148836612","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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