{"title":"基于TiN电极的氧化钇基忆阻器性能改进及神经形态和模式识别的器件缩放","authors":"Sanjay Kumar;Shalu Rani","doi":"10.1109/TMAT.2025.3579714","DOIUrl":null,"url":null,"abstract":"Herein, we present a CMOS-compatible fabrication process, in-depth materials, and electrical analysis of yttrium oxide (Y<sub>2</sub>O<sub>3</sub>)-based memristive devices having a device size of 100 μm<sup>2</sup>. The fabricated devices exhibit improved performance by incorporating TiN electrodes and device scaling and efficiently emulate the various low-power neuromorphic and pattern recognition tasks. The fabricated memristive devices exhibit stable bipolar resistive switching behavior with an excellent endurance beyond 50,000 cycles and retention properties exceeding 10<sup>6</sup> s by maintaining a very high ON/OFF ratio of 10<sup>4</sup>. Additionally, the fabricated devices show remarkable stability in the device switching voltages under cycle-to-cycle (C2C) and device-to-device (D2D) wherein, the coefficient of variability (<italic>C</i><sub>V</sub>) in the device switching voltages in C2C and D2D is 4.95% and 11.39%, respectively. Moreover, the fabricated devices efficiently emulate the synaptic response by emulating potentiation, depression, paired-pulse facilitation (PPF), and paired-pulse depression (PPD) and also exhibit the device conductance tunability under the variations in the pulse width as similar to the biological synapse counterpart. Furthermore, the fabricated devices efficiently show the pattern recognition task by achieving an accuracy of 88.2% for the handwriting MNIST dataset. Therefore, the present work opens a new horizon in the field of miniaturized artificial synapses and neuromorphic computing to perform various operations.","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"2 ","pages":"72-79"},"PeriodicalIF":0.0000,"publicationDate":"2025-06-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Improved Performance of Yttrium Oxide-Based Memristor Through TiN Electrodes and Device Scaling for Neuromorphic and Pattern Recognition\",\"authors\":\"Sanjay Kumar;Shalu Rani\",\"doi\":\"10.1109/TMAT.2025.3579714\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Herein, we present a CMOS-compatible fabrication process, in-depth materials, and electrical analysis of yttrium oxide (Y<sub>2</sub>O<sub>3</sub>)-based memristive devices having a device size of 100 μm<sup>2</sup>. The fabricated devices exhibit improved performance by incorporating TiN electrodes and device scaling and efficiently emulate the various low-power neuromorphic and pattern recognition tasks. The fabricated memristive devices exhibit stable bipolar resistive switching behavior with an excellent endurance beyond 50,000 cycles and retention properties exceeding 10<sup>6</sup> s by maintaining a very high ON/OFF ratio of 10<sup>4</sup>. Additionally, the fabricated devices show remarkable stability in the device switching voltages under cycle-to-cycle (C2C) and device-to-device (D2D) wherein, the coefficient of variability (<italic>C</i><sub>V</sub>) in the device switching voltages in C2C and D2D is 4.95% and 11.39%, respectively. Moreover, the fabricated devices efficiently emulate the synaptic response by emulating potentiation, depression, paired-pulse facilitation (PPF), and paired-pulse depression (PPD) and also exhibit the device conductance tunability under the variations in the pulse width as similar to the biological synapse counterpart. Furthermore, the fabricated devices efficiently show the pattern recognition task by achieving an accuracy of 88.2% for the handwriting MNIST dataset. Therefore, the present work opens a new horizon in the field of miniaturized artificial synapses and neuromorphic computing to perform various operations.\",\"PeriodicalId\":100642,\"journal\":{\"name\":\"IEEE Transactions on Materials for Electron Devices\",\"volume\":\"2 \",\"pages\":\"72-79\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2025-06-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Transactions on Materials for Electron Devices\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/11036620/\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Transactions on Materials for Electron Devices","FirstCategoryId":"1085","ListUrlMain":"https://ieeexplore.ieee.org/document/11036620/","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Improved Performance of Yttrium Oxide-Based Memristor Through TiN Electrodes and Device Scaling for Neuromorphic and Pattern Recognition
Herein, we present a CMOS-compatible fabrication process, in-depth materials, and electrical analysis of yttrium oxide (Y2O3)-based memristive devices having a device size of 100 μm2. The fabricated devices exhibit improved performance by incorporating TiN electrodes and device scaling and efficiently emulate the various low-power neuromorphic and pattern recognition tasks. The fabricated memristive devices exhibit stable bipolar resistive switching behavior with an excellent endurance beyond 50,000 cycles and retention properties exceeding 106 s by maintaining a very high ON/OFF ratio of 104. Additionally, the fabricated devices show remarkable stability in the device switching voltages under cycle-to-cycle (C2C) and device-to-device (D2D) wherein, the coefficient of variability (CV) in the device switching voltages in C2C and D2D is 4.95% and 11.39%, respectively. Moreover, the fabricated devices efficiently emulate the synaptic response by emulating potentiation, depression, paired-pulse facilitation (PPF), and paired-pulse depression (PPD) and also exhibit the device conductance tunability under the variations in the pulse width as similar to the biological synapse counterpart. Furthermore, the fabricated devices efficiently show the pattern recognition task by achieving an accuracy of 88.2% for the handwriting MNIST dataset. Therefore, the present work opens a new horizon in the field of miniaturized artificial synapses and neuromorphic computing to perform various operations.