Plasma Chemistry and Plasma Processing最新文献_第9页

Experimental Study of the Discharge Characteristics of a Stepped-Nozzle Arc Plasma Torch 阶跃喷嘴电弧等离子炬放电特性的实验研究

IF 2.6 3区物理与天体物理

Plasma Chemistry and Plasma Processing Pub Date : 2024-06-07 DOI: 10.1007/s11090-024-10481-9

Kuan Li, Cheng Zhu, Yunfei Zhang, Zhaoyu Yu, Yuan Tian, Weidong Xia, Cheng Wang

{"title":"Experimental Study of the Discharge Characteristics of a Stepped-Nozzle Arc Plasma Torch","authors":"Kuan Li, Cheng Zhu, Yunfei Zhang, Zhaoyu Yu, Yuan Tian, Weidong Xia, Cheng Wang","doi":"10.1007/s11090-024-10481-9","DOIUrl":"10.1007/s11090-024-10481-9","url":null,"abstract":"<div>The stepped-nozzle arc plasma torch (SNAPT) is a promising arc source due to the advantages of high stability and high energy density, but the micro-time scale discharge characteristics have not yet been adequately investigated. In this study, a SNAPT was designed and studied, in order to investigate the effects of discharge current, gas flow rate, and nozzle morphology on the discharge characteristics. The results show that the volt-ampere characteristics of the SNAPT have an increasing curve when the gas flow rate is greater than 4 Nm3/h, and a decreasing curve when the gas flow rate is 3 Nm3/h. This result is related to the position of the arc root, and an arc constriction phenomenon occurs at high current and low gas flow rate. The thermal efficiency of the SNAPT decreases with the increasing current and decreasing gas flow rate, ranging from 69.6 to 82.3% within the experimental parameters. The optical emission spectroscopy results show that there are many active particles inside the plasma. The experimental parameters of the heavy particle temperature of 4851.5 to 9189.3 K and the electron temperature of 7846.9 to 10185.6 K both correspond to the Boltzmann distribution and are close to the local thermodynamic equilibrium state. Comparative experimental results show that the cylindrical-nozzle has the decreasing volt-ampere characteristics and higher voltages, but has large voltage fluctuations and poor stability compared with the stepped-nozzle. The results of the study are of guiding significance for design, selection of operating parameters, and application scenarios for this type of plasma torch.</div>","PeriodicalId":734,"journal":{"name":"Plasma Chemistry and Plasma Processing","volume":"44 4","pages":"1469 - 1492"},"PeriodicalIF":2.6,"publicationDate":"2024-06-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141372554","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Effect of Argon in Nitrogen Gliding Arc Plasma for Ammonium Ions Enrichment in Water 氮滑弧等离子体中的氩对水中铵离子富集的影响

IF 3.6 3区物理与天体物理

Plasma Chemistry and Plasma Processing Pub Date : 2024-05-28 DOI: 10.1007/s11090-024-10473-9

Indumathy Balakrishnan, Ananthanarasimhan Jayanarasimhan, Lakshminarayana Rao, Suraj Kumar Sinha, Yugeswaran Subramaniam

{"title":"Effect of Argon in Nitrogen Gliding Arc Plasma for Ammonium Ions Enrichment in Water","authors":"Indumathy Balakrishnan, Ananthanarasimhan Jayanarasimhan, Lakshminarayana Rao, Suraj Kumar Sinha, Yugeswaran Subramaniam","doi":"10.1007/s11090-024-10473-9","DOIUrl":"https://doi.org/10.1007/s11090-024-10473-9","url":null,"abstract":"This work investigates the effect of Ar addition on N2 gliding arc plasma to enhance ammonium ions concentration in water. The concentration of ammonium ion (left({text{N}text{H}}_{4}^{+}right)) increased by 50.2% when Ar gas was added upto 40% by volume to the N2 gliding arc plasma, thus indicating the significant contribution of Ar in ({text{N}text{H}}_{4}^{+}) synthesis. Adding 20% Ar in N2 resulted in a maximum ({ text{N}text{H}}_{4}^{+}) concentration of 16.5 ppm and a production rate of 1.31 mg hr-1. While adding 40% Ar into N2 plasma, the highest energy efficiency of 0.036 g-({text{N}text{H}}_{4}^{+})KWh−1was obtained with a specific energy input of 742.5 J/L. The mechanisms of ({ text{N}text{H}}_{4}^{+}) enrichment with Ar addition were investigated by studying the electrical properties, vibrational, rotational and electron temperature of the gliding arc plasma with respect to the addition of Ar concentration in N2 plasma. Results show that the addition of Ar raises the vibrational and electron temperatures, and decreases the rotational temperature of the gliding arc plasma. (As per the reviewer-2 suggestion, this line has been removed from the abstract). Particularly, the presence of 26.5% Ar by volume in N2 plasma results in a significant ion current, which generates high ionization of ({text{N}}_{2}^{+}).","PeriodicalId":734,"journal":{"name":"Plasma Chemistry and Plasma Processing","volume":"27 1","pages":""},"PeriodicalIF":3.6,"publicationDate":"2024-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141172070","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Metastable Helium Atom Creation Dynamics in High-Voltage Pulsed Discharge with Transverse Magnetic Field Effects 具有横向磁场效应的高压脉冲放电中氦原子的可迁移生成动力学

IF 2.6 3区物理与天体物理

Plasma Chemistry and Plasma Processing Pub Date : 2024-05-28 DOI: 10.1007/s11090-024-10478-4

K. M. Rabadanov, N. A. Ashurbekov, K. O. Iminov, G. Sh. Shakhsinov, M. Z. Zakaryaeva, A. A. Murtazaeva

引用次数: 0

Influence of Gas Type on Reactive Species Formation, Antimicrobial Activity, and Cytotoxicity of Plasma-Activated Water Produced in a Coaxial DBD Reactor 气体类型对同轴 DBD 反应器中产生的等离子活化水的反应物形成、抗菌活性和细胞毒性的影响

IF 2.6 3区物理与天体物理

Plasma Chemistry and Plasma Processing Pub Date : 2024-05-24 DOI: 10.1007/s11090-024-10475-7

F. S. Miranda, V. K. F. Tavares, D. M. Silva, N. V. M. Milhan, N. F. Azevedo Neto, M. P. Gomes, R. S. Pessoa, C. Y. Koga-Ito

{"title":"Influence of Gas Type on Reactive Species Formation, Antimicrobial Activity, and Cytotoxicity of Plasma-Activated Water Produced in a Coaxial DBD Reactor","authors":"F. S. Miranda, V. K. F. Tavares, D. M. Silva, N. V. M. Milhan, N. F. Azevedo Neto, M. P. Gomes, R. S. Pessoa, C. Y. Koga-Ito","doi":"10.1007/s11090-024-10475-7","DOIUrl":"10.1007/s11090-024-10475-7","url":null,"abstract":"<div>In this study, a coaxial dielectric barrier discharge (DBD) reactor was employed using various gases: compressed air (CA), helium (He), or argon (Ar) to produce plasma-activated water (PAW) from deionized water. The influence of these gases on the generation and quantification of reactive oxygen and nitrogen species (RONS) was examined. Their impact on PAW's physicochemical properties, including pH, oxygen reduction potential (ORP), and conductivity, was also assessed. In parallel, the efficacy of produced PAW against microbial species such as Staphylococcus aureus, Escherichia coli, and Candida albicans was evaluated, in addition to their cytotoxicity to mammalian cells. Notably, after a 10-min contact, a 99.99% reduction in S. aureus and E. coli was observed when CA and Ar were used, and reductions of 99.96% and 99.95% were seen when He was employed, respectively. For C. albicans, reductions of 12.05% with CA, 22.89% with Ar, and 39.76% with He was observed. After 30 min, a reduction of up to 53.41% was achieved with Ar. Additionally, PAW generated with all the gases were classified as non-cytotoxic. These findings underscore the potential of the coaxial DBD reactor system in PAW production, emphasizing its significant antimicrobial properties and low toxicity to mammalian cells.</div>","PeriodicalId":734,"journal":{"name":"Plasma Chemistry and Plasma Processing","volume":"44 4","pages":"1713 - 1733"},"PeriodicalIF":2.6,"publicationDate":"2024-05-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141100802","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Effect of Transient Spark Discharge and Plasma Activated Water Treatments against Fusarium graminearum Infected Wheat Grains under Laboratory Conditions 实验室条件下瞬态火花放电和等离子体活化水处理对禾谷镰刀菌感染小麦谷粒的影响

IF 2.6 3区物理与天体物理

Plasma Chemistry and Plasma Processing Pub Date : 2024-05-17 DOI: 10.1007/s11090-024-10479-3

Pratik Doshi, Vladimír Scholtz, Alexandra Oplíštilová, Josef Khun, Myron Klenivskyi, Jaroslav Julák, Michal Šerý, Božena Šerá

{"title":"Effect of Transient Spark Discharge and Plasma Activated Water Treatments against Fusarium graminearum Infected Wheat Grains under Laboratory Conditions","authors":"Pratik Doshi, Vladimír Scholtz, Alexandra Oplíštilová, Josef Khun, Myron Klenivskyi, Jaroslav Julák, Michal Šerý, Božena Šerá","doi":"10.1007/s11090-024-10479-3","DOIUrl":"10.1007/s11090-024-10479-3","url":null,"abstract":"<div>Over the last decade, more and more attention has been paid to applications of non-thermal plasma in agriculture, where it is used to decontaminate various microorganisms and to improve the seed germination. In this study, we present the results of a newly developed point-to-ring NTP transient spark discharge apparatus (NTP), plasma activated water (PAW) and their combined treatment on Durum wheat and Common wheat grains under laboratory conditions. Transient spark discharge treatment was used as direct treatment while indirect treatment of wheat grains was performed by PAW produced in point-to-plane NTP transient spark apparatus. We found that the degree of grain surface decontamination was in order NTP > PAW > combined treatment. In the case of Durum wheat grain germination, all treatments increased germination with increasing exposure times, while in the case of Common wheat, PAW treatment and combined treatment did not significantly increase the grain germination. In conclusion, plasma treatment has enormous potential for use in agriculture and its possibilities need to be fully explored.</div>","PeriodicalId":734,"journal":{"name":"Plasma Chemistry and Plasma Processing","volume":"44 4","pages":"1689 - 1712"},"PeriodicalIF":2.6,"publicationDate":"2024-05-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1007/s11090-024-10479-3.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140965715","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Study on Synergy Between Plasma and Composite Industry Wastes in Catalyzing HC Removal in Diesel Exhaust 等离子体与复合材料工业废料在催化去除柴油机废气中 HC 方面的协同作用研究

IF 2.6 3区物理与天体物理

Plasma Chemistry and Plasma Processing Pub Date : 2024-05-16 DOI: 10.1007/s11090-024-10477-5

Sakshi Vijay, B. S. Rajanikanth

{"title":"Study on Synergy Between Plasma and Composite Industry Wastes in Catalyzing HC Removal in Diesel Exhaust","authors":"Sakshi Vijay, B. S. Rajanikanth","doi":"10.1007/s11090-024-10477-5","DOIUrl":"10.1007/s11090-024-10477-5","url":null,"abstract":"<div>The increased usage of diesel in the past 20 years, particularly in developing countries like India, has resulted in serious concerns in abating gaseous pollutants such as oxides of nitrogen (NOX) and hydrocarbons (HC). On the other hand, the growing metallurgical processing industries leave behind tons of solid waste, making waste management a bigger issue. In the current work several industry wastes have been tested under discharge plasma environment for their catalytic properties in the removal of HCs from diesel exhaust. To explore the benefit of metal oxide components, present in industry wastes, a new approach was proposed in this work wherein two industrial wastes were blended to form a composite waste which was then powdered and bound to form pellets. Four such composite waste-based pellets, namely red mud + iron tailing, iron tailing + lignite ash, lignite ash + copper slag and red mud + oyster shells, were tested for their catalytic properties under plasma environment. Exhaust emanating from a 6 HP engine is sampled and studied for HC removal in a pulsed plasma reactor embedded with composite wastes. The pellets being porous in nature, studies were also conducted for HC adsorption by cascading composite wastes with plasma alone while treating the exhaust. All the composite wastes exhibited good plasma catalysis in HC removal (58–73%) when compared to that with plasma alone (31%). Further, there is a marked difference between plasma adsorption and plasma catalysis by a factor of 1.75–2.2 indicating synergy between plasma and metal oxides present in composite wastes while catalysing HC removal.</div>","PeriodicalId":734,"journal":{"name":"Plasma Chemistry and Plasma Processing","volume":"44 4","pages":"1529 - 1546"},"PeriodicalIF":2.6,"publicationDate":"2024-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140967719","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Dielectric-Boosted Gliding Arc Discharge for N2 Fixation into NOx 用于将 N2 固定为氮氧化物的介质增压滑动电弧放电

IF 2.6 3区物理与天体物理

Plasma Chemistry and Plasma Processing Pub Date : 2024-05-13 DOI: 10.1007/s11090-024-10474-8

Xiangyi Meng, Na Lu, Kefeng Shang, Nan Jiang

{"title":"Dielectric-Boosted Gliding Arc Discharge for N2 Fixation into NOx","authors":"Xiangyi Meng, Na Lu, Kefeng Shang, Nan Jiang","doi":"10.1007/s11090-024-10474-8","DOIUrl":"10.1007/s11090-024-10474-8","url":null,"abstract":"<div>Plasma nitrogen fixation technology is of great significance in solving the problem of nitrogen fertilizer resource shortage, saving energy and reducing carbon emission, promoting sustainable development of agriculture and promoting resource recycling. To enhance the efficiency and treatment capacity of the two-dimensional, blade-type gliding arc nitrogen fixation reaction, a dielectric-boosted gliding arc discharge reactor with a 50-mm-diameter quartz dielectric (DBGADΦ50) was used to conduct N2 fixation into NOx. The impact of reactor parameters and gas parameters on the nitrogen fixation reaction was systematically investigated in this study. The findings revealed that the DBGADΦ50 significantly improved the nitrogen fixation effect. At a specific input energy of 2.7 kJ/L, the concentration of NOx generated by the dielectric-boosted gliding arc air discharge was 1.12 times that of the conventional gliding arc discharge (GAD). By utilizing the DBGADΦ50 reactor, the energy efficiency of 6.83 g/kW h was achieved at a gas flow rate of 5.6 L/min. Appropriately increasing O2 concentration favors the production of NOx. In the DBGADΦ50, the NOx concentration was 1.33 times higher than that in the air atmosphere when the added O2 volume fraction reached 30%. Performance can be further enhanced by adding TiO2 catalyst particles to the surface of the quartz dielectric to form a catalyst layer approximately 5 mm thick. At an O2 concentration of 30%, the DBGADΦ50 reactor loaded with TiO2 increased NOx concentration by 26% and energy efficiency by 49%, respectively, resulting in an efficiency of 14.9 g/kW h compared to the case without catalyst.</div>","PeriodicalId":734,"journal":{"name":"Plasma Chemistry and Plasma Processing","volume":"44 4","pages":"1513 - 1528"},"PeriodicalIF":2.6,"publicationDate":"2024-05-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140927034","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Production of Alkaline Plasma Activated Tap Water Using Different Plasma Forming Gas at Sub-Atmospheric Pressure 在亚大气压下使用不同的等离子体形成气体生产碱性等离子体活化自来水

IF 2.6 3区物理与天体物理

Plasma Chemistry and Plasma Processing Pub Date : 2024-05-10 DOI: 10.1007/s11090-024-10464-w

Vikas Rathore, Karaket Watanasit, Suttirak Kaewpawong, Dhammanoon Srinoumm, Arlee Tamman, Dheerawan Boonyawan, Mudtorlep Nisoa

{"title":"Production of Alkaline Plasma Activated Tap Water Using Different Plasma Forming Gas at Sub-Atmospheric Pressure","authors":"Vikas Rathore, Karaket Watanasit, Suttirak Kaewpawong, Dhammanoon Srinoumm, Arlee Tamman, Dheerawan Boonyawan, Mudtorlep Nisoa","doi":"10.1007/s11090-024-10464-w","DOIUrl":"10.1007/s11090-024-10464-w","url":null,"abstract":"<div>The present study demonstrates the successful production of alkaline plasma-activated tap water (PATW), effectively addressing the challenge of acidity in traditional PATW for a range of applications. Through precise control of plasma-forming gases (oxygen, air, argon) and process parameters, particularly by producing PATW under sub-atmospheric pressure conditions, it becomes possible to shift the pH of acidic PATW towards the alkaline range. This transformation enhances its suitability for applications like agriculture, aquaculture, sterilization, wound healing, disinfection, and food preservation, etc.The investigation encompassed the characterization of plasma and the identification of various plasma species/radicals. The impact of different plasma-forming gases on the pH of PATW and the concentration of reactive species in PATW was thoroughly analyzed. Plasma generated using oxygen and argon resulted in the production of reducing or alkaline PATW, while the use of air and air-argon mixtures led to an acidic or oxidizing nature.The study also discussed the stability of nitrate ions, nitrite ions, and hydrogen peroxide in PATW, shedding light on their behavior over varying plasma treatment times and plasma-forming gas. Finally, the investigation explored the effects of gas flow rates, gas pressures, water volume, and plasma discharge powers on the concentration of H2O2 in PATW, providing valuable insights into optimizing the production process.</div>","PeriodicalId":734,"journal":{"name":"Plasma Chemistry and Plasma Processing","volume":"44 4","pages":"1735 - 1752"},"PeriodicalIF":2.6,"publicationDate":"2024-05-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140927028","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Critical Considerations in Power Measurements for the Precise Estimation of Energy Costs in Plasma NOx Synthesis 等离子氮氧化物合成中精确估算能源成本的功率测量关键考虑因素

IF 2.6 3区物理与天体物理

Plasma Chemistry and Plasma Processing Pub Date : 2024-05-09 DOI: 10.1007/s11090-024-10472-w

Ayman A. Abdelaziz, Yoshiyuki Teramoto, Dae-Yeong Kim, Tomohiro Nozaki, Hyun-Ha Kim

{"title":"Critical Considerations in Power Measurements for the Precise Estimation of Energy Costs in Plasma NOx Synthesis","authors":"Ayman A. Abdelaziz, Yoshiyuki Teramoto, Dae-Yeong Kim, Tomohiro Nozaki, Hyun-Ha Kim","doi":"10.1007/s11090-024-10472-w","DOIUrl":"10.1007/s11090-024-10472-w","url":null,"abstract":"<div>The great advantage of plasma technology in harnessing abundant clean energy for electrifying and decentralizing the chemical industry holds the promise of attaining carbon neutrality. Therefore, recent research efforts have been dedicated to reducing the energy costs of plasma processes to facilitate the commercialization of this technology. However, it has been noted an inconsistency in reporting energy costs across the literature resulted from inaccurate estimation of power consumption within the system, leading to the misevaluation of the process, its underlying mechanism, and the significance of critical factors. This study comprehensively addresses these challenges by discussing and refining methods for estimating power consumption in a plasma system. Insights are drawn from our ongoing research in plasma NOx synthesis, specifically a thorough analysis of the discharge dynamics in a recently developed reactor “high-frequency spark discharge” using a high-speed camera, ICCD camera, and high-performance oscilloscope at various pulse widths of the applied voltage. The investigation revealed the importance of accounting for the post-spark period in the voltage cycle during power estimation, as it demonstrates an influence on NOx synthesis. Furthermore, the study highlighted and addressed critical errors in power measurement and energy cost estimation in the literature. It is found that a significant error, exceeding ± 70%, arises from overlooking signals delay in the setup and improper adjustment of oscilloscope functions, particularly channel impedance, data averaging, bandwidth, and sampling rate. This paper serves as a valuable guide towards establishing standardized measurements toward the precise estimation of energy costs in plasma processes.</div>","PeriodicalId":734,"journal":{"name":"Plasma Chemistry and Plasma Processing","volume":"44 4","pages":"1493 - 1512"},"PeriodicalIF":2.6,"publicationDate":"2024-05-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140926954","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Diverse Texturing Characteristics Through Metal-Assisted Plasma Etching with Silver Nanowires 利用银纳米线进行金属辅助等离子体蚀刻实现多样化纹理特征

IF 2.6 3区物理与天体物理

Plasma Chemistry and Plasma Processing Pub Date : 2024-04-23 DOI: 10.1007/s11090-024-10469-5

Dong-Geon Lee, Hyun-Seung Ryu, Mi-Jin Jin, Doo-Seung Um, Chang-Il Kim

{"title":"Diverse Texturing Characteristics Through Metal-Assisted Plasma Etching with Silver Nanowires","authors":"Dong-Geon Lee, Hyun-Seung Ryu, Mi-Jin Jin, Doo-Seung Um, Chang-Il Kim","doi":"10.1007/s11090-024-10469-5","DOIUrl":"10.1007/s11090-024-10469-5","url":null,"abstract":"<div>The process of texturing silicon surfaces is critical for enhancing the performance of complementary metal–oxide–semiconductor image sensors that utilize silicon-based photodetectors. Traditional wet etching methods using strong acids or alkaline solutions have been commonly used but present challenges in precision, particularly for microscopic devices. As a viable alternative, dry etching processes using patterned metals and plasma are being explored. However, extensive studies across various metals are necessary. This study introduces a silicon nanotexturing process using silver nanowires and Cl2-based plasma. The etching mechanism involves accelerated etching through eddy currents and hole injection coupled with a diffusion phenomenon of silver. In this study, we examined variations in the etching profile with respect to etching time, upper and bottom radio-frequency powers, and process pressure. Additionally, we analyzed the effects of ion bombardment, enhanced by the introduction of Ar gas. The findings are expected to significantly contribute to the improvement of micro-optoelectronic devices.</div>","PeriodicalId":734,"journal":{"name":"Plasma Chemistry and Plasma Processing","volume":"44 4","pages":"1839 - 1852"},"PeriodicalIF":2.6,"publicationDate":"2024-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140670106","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0