I. Mok, JaeHun Bae, WonMyoung Ki, HoDol Yoo, S. Ryu, SooHyun Kim, Gyuick Jung, Taekyeong Hwang, Wonchul Do
{"title":"Wafer Level Void-Free Molded Underfill for High-Density Fan-out Packages","authors":"I. Mok, JaeHun Bae, WonMyoung Ki, HoDol Yoo, S. Ryu, SooHyun Kim, Gyuick Jung, Taekyeong Hwang, Wonchul Do","doi":"10.1109/EPTC50525.2020.9315128","DOIUrl":"https://doi.org/10.1109/EPTC50525.2020.9315128","url":null,"abstract":"In this study, experiments and mold flow simulation results are presented for a void-free wafer level molded underfill (WLMUF) process with High-Density Fan-Out (HDFO) test vehicles using a wafer-level compression molding process. The redistribution layer (RDL)-first technology was applied with 3 layers of a fine-pitch RDL structure. The test samples comprised $11.5 times 12.5-text{mm}^{2}$ die with tall copper (Cu) pillars around the die. Destructive analysis was used to clearly inspect MUF voids on the whole wafer area. The molded wafer was ground to the bump area where the MUF voids exist using a mold grinding machine and MUF voids were inspected through a high-resolution scope. The WLMUF characteristics of the conventional compression molding process with various epoxy molding compound (EMC) types have been investigated. A void-free WLMUF process was achieved by applying an optimized EMC dispensing method and parameters. These results are verified through the mold flow simulation, which correlated to the experimental results. Finally, the void-free WLMUF HDFO samples passed reliability tests of temperature cycling (TC), high temperature storage (HTS) and Unbiased Highly Accelerated Stress Test (UHAST) after moisture resistance test (MRT) Level 3.","PeriodicalId":6790,"journal":{"name":"2020 IEEE 22nd Electronics Packaging Technology Conference (EPTC)","volume":"55 1","pages":"419-424"},"PeriodicalIF":0.0,"publicationDate":"2020-12-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80306666","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
J. Ahn, Jungyeop Kim, young-Seok Kim, Jeong-Geun Moon, Oh-Gul Kwon, Kyungyea Park, Sun-Yong Lee, Kwang-Seop Youm, J. Jeong, E. Ahn
{"title":"Reliability Study of Direct Au (Au-Cu plating) Surface Treatment on PKG Substrate","authors":"J. Ahn, Jungyeop Kim, young-Seok Kim, Jeong-Geun Moon, Oh-Gul Kwon, Kyungyea Park, Sun-Yong Lee, Kwang-Seop Youm, J. Jeong, E. Ahn","doi":"10.1109/EPTC50525.2020.9315136","DOIUrl":"https://doi.org/10.1109/EPTC50525.2020.9315136","url":null,"abstract":"Recent developments in electronics have led to the pursuit of highly efficient technologies that reduce resistance and minimize signal loss rates. While Direct Au Surface Treatment in PKG Substrate is one of the ways to minimize signal loss rates, Direct Au Surface Treatment is not preferred option due to lack of technology and reliability issues. In this paper, the surface adhesion (reliability) of PKG substrates with Direct Au surface treatment is studied. After heat treatment of substrates, Cu was not detected during surface component analysis using SEM/EDS equipment, and sufficient wire bonding and soldering were obtained through dedicated tester, It was confirmed that the test results did not fluctuate significantly even after heat treatment. Results of this experiment show that there is no problem with Direct Au surface treatment surface adhesion. The results of this study can be used as a reference to type of surface treatment can be applied to PKG substrates and a guide to the type of analysis should be made to verify the reliability of surface treatment in semiconductor packages.","PeriodicalId":6790,"journal":{"name":"2020 IEEE 22nd Electronics Packaging Technology Conference (EPTC)","volume":"19 1","pages":"326-329"},"PeriodicalIF":0.0,"publicationDate":"2020-12-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84183181","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
T. Chakraborty, P. Goradia, S. Verhaverbeke, Han-Wen Chen, C. Buch, Prayudi Lianto
{"title":"New and Unique CMP Material Solution for the Enablement of High Removal Rate Polymer CMP and other Advanced Packaging Applications","authors":"T. Chakraborty, P. Goradia, S. Verhaverbeke, Han-Wen Chen, C. Buch, Prayudi Lianto","doi":"10.1109/EPTC50525.2020.9314866","DOIUrl":"https://doi.org/10.1109/EPTC50525.2020.9314866","url":null,"abstract":"Polymer materials like epoxy mold compounds (EMC), polyimides (PI) are used in the advanced packaging applications. Chemical mechanical planarization (CMP) is a process useful in removing undesired surface topography and surface defects and in forming features on a substrate by removing excess deposited material. However, removal rates (RR) of polymers are too low by conventional CMP to be useful in advanced packaging technology. A novel slurry system has been developed. A two-step sequence combining both high-speed mechanical abrasion with novel slurries for coarse polishing and conventional polymer CMP technology for final fine polishing has been evaluated. A removal rate of more than $10 mu mathrm{m}/min$ has been observed for EMC which is roughly one order of magnitude higher than that obtained with conventional CMP process. A final fine polish step with a regular CMP slurry has almost restored the initial roughness in case of PI. The novel slurry has shown high RR for multiple substrates and has shown about 7:1 selectivity for PI removal against copper. This solution can bring grinding and CMP under one platform with more process control compared to grinding alone.","PeriodicalId":6790,"journal":{"name":"2020 IEEE 22nd Electronics Packaging Technology Conference (EPTC)","volume":"28 1","pages":"41-43"},"PeriodicalIF":0.0,"publicationDate":"2020-12-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90915053","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
S. Buenviaje, R. Rodriguez, Rammil A. Seguido, F. R. Gomez
{"title":"Process Optimization Study on Leadframe Surface Enhancements for Delamination Mitigation","authors":"S. Buenviaje, R. Rodriguez, Rammil A. Seguido, F. R. Gomez","doi":"10.1109/EPTC50525.2020.9315025","DOIUrl":"https://doi.org/10.1109/EPTC50525.2020.9315025","url":null,"abstract":"Package delamination has been a recurring problem in the semiconductor industry. Material interfaces are weak regions which are susceptible to fracture. Leadframe technology has been ramping-up the development of new solutions to mitigate the risks of delamination. In this study, die attach process parameters of certain leadframe improvements were optimized by design of experiment and hypothesis testing. The results have shown optimal response at 3% anti-EBO and 70%-85% dimple coverage. The latter had greater impact on die shear strength and bond line thickness. The better performance of higher dimple coverage was attributed to a more extensive mechanical anchoring of polymer chains of adhesives onto the etched leadframe.","PeriodicalId":6790,"journal":{"name":"2020 IEEE 22nd Electronics Packaging Technology Conference (EPTC)","volume":"33 12 1","pages":"95-100"},"PeriodicalIF":0.0,"publicationDate":"2020-12-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82770875","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Roll-to-Roll Gravure Printing of Electric Heaters on Polymeric Substrates","authors":"X. Shan, V. Sunappan, B. Salam, B. Lok","doi":"10.1109/EPTC50525.2020.9315005","DOIUrl":"https://doi.org/10.1109/EPTC50525.2020.9315005","url":null,"abstract":"We have developed a roll-to-roll (R2R) processing system with gravure printing & coating functions for manufacturing printed electronic devices on flexible substrates. The R2R processing system is equipped with a gravure printing module, a coating module and a lamination module, several devices have been fabricated with pilot production volume. In this paper, we will report our achievement of using the R2R processing system to manufacturing micro heaters with low cost and high throughput. The heaters can be printed on either PET or TPU films or transferred from TPU films to fabrics for different applications such as heating for seats, shoes as well as winter vest; about 80 □C has been achieved when a 4V power source is used.","PeriodicalId":6790,"journal":{"name":"2020 IEEE 22nd Electronics Packaging Technology Conference (EPTC)","volume":"19 1","pages":"210-212"},"PeriodicalIF":0.0,"publicationDate":"2020-12-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82952046","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Resolution of Tie Bar Protrusion Issue in Over-Molded Plastic Package","authors":"Bal Lajom, Jan Joseph Miranda, Gerry Alvano","doi":"10.1109/EPTC50525.2020.9314865","DOIUrl":"https://doi.org/10.1109/EPTC50525.2020.9314865","url":null,"abstract":"The tie bars are critical component of the leadframe as it provides structural support to the entire package body during assembly. Its design must be strong enough to withstand the mechanical stresses but should be optimal to be effectively cut during singulation. Common issues such as premature singulation can be associated with poor designs. Tie bar protrusion, on the other hand is typically linked to tool wear-out or incorrect tooling tolerances. In the development of the Over-Molded Plastic (OMP) package, the tie bar protrusion was resolved by adding enhancement features on the cutting tool and via leadframe design change. The heatsink of the package is initially connected to the tie bars through riveting. After singulation, tie bars protruding outside the package outline poses risk of electrical shorting to the adjacent leads or with other components in the PCB. One key customer required a specific package size to be shorter than the standard (called short package OMP). This requirement led to the qualification of new mold tool and new leadframe design. Initial trial showed that the design requirement specification is not met because tie bar protrusions are appearing randomly. Mechanical stress modelling revealed a potential issue on the leadframe design. Further review with the leadframe supplier also revealed some manufacturing limitations that need to be comprehended for new designs to avoid similar issue. The leadframe for short package OMP was redesigned to correct the flaws identified from the stress modelling. In addition, a design improvement in the cutting tool was evaluated. Evaluation results showed that both solutions are successful in eliminating the protrusion issue. Because of these corrective actions, the business continuity with the key customer was guaranteed. The learnings also enabled better development lead times by eliminating the potential risk, thus meeting the first-time right target for new package development.","PeriodicalId":6790,"journal":{"name":"2020 IEEE 22nd Electronics Packaging Technology Conference (EPTC)","volume":"16 1","pages":"112-115"},"PeriodicalIF":0.0,"publicationDate":"2020-12-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72941505","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Rachel Lee Siew Tan, J. N. Tey, W. T. Kerk, B. Lok
{"title":"Roll-to-Roll Manufacturing of Printed Biosensor Electrodes for ECG Monitoring","authors":"Rachel Lee Siew Tan, J. N. Tey, W. T. Kerk, B. Lok","doi":"10.1109/EPTC50525.2020.9315165","DOIUrl":"https://doi.org/10.1109/EPTC50525.2020.9315165","url":null,"abstract":"The increase in popularity of wearable electronics for health and wellness monitoring drives manufacturing of components for these devices. Components for these devices has to be thin and flexible to ensure conformity to human body for accurate signal capturing. In this work, we demonstrated the fabrication of biosensor electrodes for electrocardiography (ECG) monitoring on a 300 mm web-width roll-to-roll processing system. These biosensor electrodes fabricated are thin and flexible, collects ECG signals even when user is in motion and has the ability to withstand machine washing up to 50 wash cycles.","PeriodicalId":6790,"journal":{"name":"2020 IEEE 22nd Electronics Packaging Technology Conference (EPTC)","volume":"76 1","pages":"213-215"},"PeriodicalIF":0.0,"publicationDate":"2020-12-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75197766","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Sajay Bhuvanendran Nair Gourikutty, D. Choong, Ruiqi Lim, M. R. Damalerio, J. Oh, Yuri Kim, I. Bae, Ming-Yuan Cheng
{"title":"Temperature detection system for Renal Denervation Catheter application","authors":"Sajay Bhuvanendran Nair Gourikutty, D. Choong, Ruiqi Lim, M. R. Damalerio, J. Oh, Yuri Kim, I. Bae, Ming-Yuan Cheng","doi":"10.1109/EPTC50525.2020.9315073","DOIUrl":"https://doi.org/10.1109/EPTC50525.2020.9315073","url":null,"abstract":"Hypertension, in other words called high blood pressure, is a chronic and serious medical condition that considerably increases the risks of other ailments associated with the heart, brain, and kidney. Minimally invasive catheter-based renal denervation procedure is an effective way to treat hypertension for patients whose blood pressure level was unable to be brought under control by medication. However, for such systems an accurate temperature monitoring system is required to control the ablation power for a successful procedure and to avoid unwanted tissue damage. In this paper, the development of a platinum-based resistance temperature detector is presented. The temperature sensor is modeled using finite element analysis simulation and realized by silicon microfabrication. To ensure the performance of each fabricated sensor die, the test and characterization methodology of the sensor is translated and carried out using fully automatic test equipment. In this work, we are able to achieve a relatively large change in resistance of more than 15% with respect to the temperature change from 20 °C to 85 °C. Platinum as sensor material provided a linear relationship between change in resistance and temperature. This biocompatible resistance temperature detector sensor with its linear and consistent performance will allow us to accurately monitor the temperature in the renal denervation application.","PeriodicalId":6790,"journal":{"name":"2020 IEEE 22nd Electronics Packaging Technology Conference (EPTC)","volume":"71 1","pages":"198-202"},"PeriodicalIF":0.0,"publicationDate":"2020-12-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89422122","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Sun Mei, Lim Teck Guan, Xie Dan Peng, C. T. Chong, S. Bhattacharya
{"title":"FOWLP RF Passive Circuit Designs for 77GHz MIMO radar applications","authors":"Sun Mei, Lim Teck Guan, Xie Dan Peng, C. T. Chong, S. Bhattacharya","doi":"10.1109/EPTC50525.2020.9315111","DOIUrl":"https://doi.org/10.1109/EPTC50525.2020.9315111","url":null,"abstract":"Fan-Out Wafer-Level-Packaging (FOWLP) that directly molds the bare die inside the package with the antenna fabricating on the package stands out a very elegant and compact solution for 77GHz MIMO radar. This paper presents key RF passive circuit designs used to implement such MIMO radar, including RDL lines, power dividers and solder ball connections. The presented RF passive circuit low loss designs and studies are important to ensure FOWLP AiP performance for 77GHz MIMO radar applications.","PeriodicalId":6790,"journal":{"name":"2020 IEEE 22nd Electronics Packaging Technology Conference (EPTC)","volume":"16 1","pages":"445-448"},"PeriodicalIF":0.0,"publicationDate":"2020-12-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75833418","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Hyung-Do Lee, Han-Gyu Kim, Jeong-Geun Moon, Hyo-Sang Jang, Byeong-Hwa Kang, P. Kim, C. Park, Su-Nam Kim, Seunghwan Hong, Hwa-Dong Oh, E. Ahn
{"title":"Improvement of PCB reliability under HAST conditions by enhancing adhesion of DFSR on PPG","authors":"Hyung-Do Lee, Han-Gyu Kim, Jeong-Geun Moon, Hyo-Sang Jang, Byeong-Hwa Kang, P. Kim, C. Park, Su-Nam Kim, Seunghwan Hong, Hwa-Dong Oh, E. Ahn","doi":"10.1109/EPTC50525.2020.9315143","DOIUrl":"https://doi.org/10.1109/EPTC50525.2020.9315143","url":null,"abstract":"The miniaturization trend in the contemporary electronics market continuously demands for printed circuit boards (PCBs) that are thinner and can house more electronic components, which makes manufacturing of PCBs of high reliability more challenging. Development efforts, accordingly, are deployed to reinforce stiffness of raw materials of PCBs, for example, adopting high stiffness dry film solder resists (DFSR) containing higher levels of inorganic fillers instead of using solder resist ink. This increase in the level of inorganic fillers, in contrast, results in the reduction of the resin content, which leads to decrease in the adhesion of the DFSR, thus reducing the reliability under high temperature and humidity conditions. In this study, Method to improve the reliability of PCBs with DFSR containing higher levels of fillers under high temperature and humidity conditions is proposed.","PeriodicalId":6790,"journal":{"name":"2020 IEEE 22nd Electronics Packaging Technology Conference (EPTC)","volume":"1 1","pages":"53-56"},"PeriodicalIF":0.0,"publicationDate":"2020-12-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73897072","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}