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Evaluation of inflammatory markers in obstructive sleep apnea syndrome. 阻塞性睡眠呼吸暂停综合征炎症标志物的评价。
IF 2.9 4区 综合性期刊
Science Progress Pub Date : 2025-07-01 Epub Date: 2025-08-25 DOI: 10.1177/00368504251365874
Yildiz Ucar, Aynur Sahin
{"title":"Evaluation of inflammatory markers in obstructive sleep apnea syndrome.","authors":"Yildiz Ucar, Aynur Sahin","doi":"10.1177/00368504251365874","DOIUrl":"https://doi.org/10.1177/00368504251365874","url":null,"abstract":"<p><p>ObjectiveThis study aimed to investigate the relationship between systemic immune-inflammation indices and the severity of obstructive sleep apnea syndrome (OSAS). Specifically, we evaluated whether the Systemic immune-inflammation index (SII), systemic inflammation response index (SIRI), neutrophil-to-lymphocyte ratio (NLR), and pan-immune inflammation value (PIV) could serve as predictive or supplementary markers for OSAS prognosis and severity.MethodsA retrospective cross-sectional analysis was conducted on 263 patients diagnosed with OSAS. Based on the apnea-hypopnea index (AHI), patients were categorized into three groups: mild, moderate, and severe OSAS. Inflammatory markers including SII, SIRI, NLR, and PIV were calculated using routine hematological parameters and compared across the groups to determine their association with disease severity.ResultsAll examined inflammatory indices (NLR, SII, SIRI, and PIV) showed statistically significant differences across the OSAS severity groups. Specifically, these markers were significantly elevated in the severe OSAS group compared to the mild and moderate groups (<i>p</i> < .05). The results support the hypothesis that increased systemic inflammation is associated with more severe forms of OSAS.ConclusionsInflammatory markers such as SII, SIRI, NLR, and PIV may serve as useful tools in assessing OSAS severity and could assist in clinical decision-making. Given their ease of calculation from standard blood tests, these indices may offer practical value in evaluating prognosis and tailoring treatment strategies for patients with OSAS.</p>","PeriodicalId":56061,"journal":{"name":"Science Progress","volume":"108 3","pages":"368504251365874"},"PeriodicalIF":2.9,"publicationDate":"2025-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12378542/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144979264","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Comorbidity of PaO2/FiO2 and nonthyroidal illness syndrome synergistically predicts 28-day mortality in sepsis: A retrospective cohort study from the MIMIC-IV database. PaO2/FiO2合并症和非甲状腺疾病综合征协同预测败血症28天死亡率:来自MIMIC-IV数据库的回顾性队列研究
IF 2.9 4区 综合性期刊
Science Progress Pub Date : 2025-07-01 Epub Date: 2025-07-22 DOI: 10.1177/00368504251359356
Wei Song, Jian Wan, Song Chen, Cong Hui Fan, Qian Zhang, Fei Zhong, Tao Zhang, Ye Yuan, Xueke Wu, Yijiong Zhang, Zhen Han, Lixue Wu, Qingzhong Zhao
{"title":"Comorbidity of PaO<sub>2</sub>/FiO<sub>2</sub> and nonthyroidal illness syndrome synergistically predicts 28-day mortality in sepsis: A retrospective cohort study from the MIMIC-IV database.","authors":"Wei Song, Jian Wan, Song Chen, Cong Hui Fan, Qian Zhang, Fei Zhong, Tao Zhang, Ye Yuan, Xueke Wu, Yijiong Zhang, Zhen Han, Lixue Wu, Qingzhong Zhao","doi":"10.1177/00368504251359356","DOIUrl":"10.1177/00368504251359356","url":null,"abstract":"<p><p>ObjectiveThis study explores the prognostic value of combining the PaO<sub>2</sub>/FiO<sub>2</sub> ratio and nonthyroidal illness syndrome (NTIS) for predicting 28-day mortality in patients with sepsis.MethodsA retrospective cohort study was conducted using data from adult sepsis patients admitted to the ICU in the Medical Information Mart for Intensive Care IV (MIMIC-IV) database. Patients were divided into four groups based on PaO<sub>2</sub>/FiO<sub>2</sub> ratio levels and the presence of NTIS (Groups 1-4). Kaplan-Meier (K-M) analysis with the log-rank test was used to compare 28-day mortality among groups. Multivariate Cox regression was performed to evaluate the independent association between group classification and mortality. A restricted cubic spline (RCS) was used to explore the relationship between PaO<sub>2</sub>/FiO<sub>2</sub> ratio and 28-day mortality.ResultsA total of 599 sepsis patients were included in the analysis. Among the four P/F-NTIS stratified groups, Group 4 (P/F ≤ 200 mmHg with NTIS) exhibited the highest 28-day mortality rate (37.11%), significantly higher than Groups 1, 2, and 3 (<i>p</i> < .001). K-M analysis revealed a significantly lower survival probability in Group 4 (log-rank test, <i>p</i> < .001). Univariate Cox regression analysis identified P/F-NTIS classification as significant predictors of 28-day mortality. Multivariate Cox regression analysis confirmed that Group 4 was independently associated with increased 28-day mortality (HR = 1.70, 95% CI [1.08-2.69], <i>p</i> = .022). RCS analysis showed a nonlinear but statistically significant association between P/F ratio and 28-day mortality (<i>p</i> for nonlinearity = .242), further supporting the prognostic relevance of oxygenation status.ConclusionThe combined evaluation of the P/F and NTIS provides a more comprehensive risk stratification approach, allowing for improved 28-day mortality prediction in septic patients.</p>","PeriodicalId":56061,"journal":{"name":"Science Progress","volume":"108 3","pages":"368504251359356"},"PeriodicalIF":2.9,"publicationDate":"2025-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12290331/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144692567","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Does alendronate enhance survival rates in osteoporosis patients? A meta-analysis of randomized controlled trials. 阿仑膦酸钠能提高骨质疏松症患者的生存率吗?随机对照试验的荟萃分析。
IF 2.9 4区 综合性期刊
Science Progress Pub Date : 2025-07-01 Epub Date: 2025-09-03 DOI: 10.1177/00368504251348587
Rui Sun, Zhibin Lan, Gang Wu, Qi Ma, Di Xue, Xue Lin, Qunhua Jin
{"title":"Does alendronate enhance survival rates in osteoporosis patients? A meta-analysis of randomized controlled trials.","authors":"Rui Sun, Zhibin Lan, Gang Wu, Qi Ma, Di Xue, Xue Lin, Qunhua Jin","doi":"10.1177/00368504251348587","DOIUrl":"10.1177/00368504251348587","url":null,"abstract":"<p><p>ObjectivesThis systematic review and meta-analysis aims to evaluate whether alendronate therapy improves survival rates in patients with osteoporosis, in addition to its known benefits in reducing fracture risk.MethodsA comprehensive literature search was conducted across Embase, Web of Science, Medline, Cochrane Library, and ClinicalTrials.gov to identify randomized, placebo-controlled clinical trials involving alendronate therapy in osteoporosis patients. The primary outcome was overall survival. Data were extracted and analyzed using fixed-effects or random-effects models based on heterogeneity. The quality of evidence was assessed using the GRADE approach, and publication bias was evaluated using funnel plots.ResultsA total of 13 randomized controlled trials, involving 15,560 participants, were included in the meta-analysis. Alendronate treatment did not significantly improve survival rates in osteoporosis patients (RR, 1.00; 95% CI, 1.00-1.01). Subgroup analyses, including studies focusing on postmenopausal women and trials lasting three years or more, also showed no significant association between alendronate treatment and survival rates. The studies included in this analysis exhibited low heterogeneity, and no significant publication bias was detected.ConclusionsThe findings of this meta-analysis suggest that alendronate therapy does not enhance survival rates in osteoporosis patients, despite its effectiveness in reducing fracture risk. Therefore, the primary focus of osteoporosis treatment should remain on fracture prevention.PROSPERO registration number: CRD420251034567.</p>","PeriodicalId":56061,"journal":{"name":"Science Progress","volume":"108 3","pages":"368504251348587"},"PeriodicalIF":2.9,"publicationDate":"2025-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12408998/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144994590","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Exploring the protective effects of ischelium on rat brain ischemia-reperfusion injury. 探讨坐骨对大鼠脑缺血再灌注损伤的保护作用。
IF 2.9 4区 综合性期刊
Science Progress Pub Date : 2025-07-01 Epub Date: 2025-09-04 DOI: 10.1177/00368504251348147
Yanhong Chen, Wei Cheng, Boneng Xiao, Jia Tang, Ming Kuang, Liaoyi Xu, Xiaosa Xu, Hongying Liu
{"title":"Exploring the protective effects of ischelium on rat brain ischemia-reperfusion injury.","authors":"Yanhong Chen, Wei Cheng, Boneng Xiao, Jia Tang, Ming Kuang, Liaoyi Xu, Xiaosa Xu, Hongying Liu","doi":"10.1177/00368504251348147","DOIUrl":"10.1177/00368504251348147","url":null,"abstract":"<p><p>ObjectiveIschemic stroke, resulting from the interruption of blood supply to the brain, leads to cerebral ischemia, hypoxia, and necrosis, and is a prevalent disease characterized by high incidence, mortality, and disability rates. This study investigates the protective effects of ischelium on cerebral ischemia-reperfusion injury in a rat model, along with the potential mechanisms of action.MethodsWe established a rat cerebral ischemia-reperfusion model and administered different doses of ischelium as intervention across treatment groups. Multiple techniques were used to evaluate brain tissue damage, oxidative stress markers, inflammatory cytokine levels, and apoptosis, while also examining the expression of key proteins in the Nrf2/HO-1 antioxidant pathway and the HMGB1/TLR4/RAGE/NF-κB pro-inflammatory pathway.ResultsThe results indicate that ischemia-induced injury causes severe brain tissue damage and activates both the Nrf2/HO-1 antioxidant pathway and the HMGB1/TLR4/RAGE/NF-κB pro-inflammatory pathway, subsequently leading to oxidative stress, inflammation, and apoptosis. Treatment with ischelium significantly alleviated the brain tissue damage induced by cerebral ischemia-reperfusion, promoted the Nrf2/HO-1 antioxidant pathway, and suppressed the HMGB1/TLR4/RAGE/NF-κB inflammatory pathway. Ischelium also reduced MDA levels and increased SOD, CAT, and GSH levels, while inhibiting the production of pro-inflammatory cytokines IL-6, IL-1β, TNF-α and apoptosis.ConclusionsThese findings suggest that ischelium confers neuroprotective effects against cerebral ischemia-reperfusion injury, likely by regulating oxidative stress and neuroinflammation. Further investigations into the exact molecular mechanisms and clinical translations of ischelium may lead to novel therapeutic approaches for ischemic stroke.</p>","PeriodicalId":56061,"journal":{"name":"Science Progress","volume":"108 3","pages":"368504251348147"},"PeriodicalIF":2.9,"publicationDate":"2025-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12411720/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144994613","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Inverse association between dietary oxidative balance score and myocardial infarction in hypertensive patients: A cross-sectional study based on NHANES 1999-2018. 高血压患者膳食氧化平衡评分与心肌梗死的负相关:基于NHANES 1999-2018的横断面研究
IF 2.9 4区 综合性期刊
Science Progress Pub Date : 2025-07-01 Epub Date: 2025-07-29 DOI: 10.1177/00368504251362341
Zehao Jin, Xu Li, Ziyang Huang, Ya Lin, Xiaoyi Zhan, Jialin Liu, Kangwei Wang
{"title":"Inverse association between dietary oxidative balance score and myocardial infarction in hypertensive patients: A cross-sectional study based on NHANES 1999-2018.","authors":"Zehao Jin, Xu Li, Ziyang Huang, Ya Lin, Xiaoyi Zhan, Jialin Liu, Kangwei Wang","doi":"10.1177/00368504251362341","DOIUrl":"10.1177/00368504251362341","url":null,"abstract":"<p><p>ObjectiveHypertension is a major risk factor for myocardial infarction. However, the association between the dietary oxidative balance score and myocardial infarction risk among individuals with hypertension remains unclear. This study aimed to investigate the relationship between dietary oxidative balance score and the risk of myocardial infarction in hypertensive adults.MethodsIn this cross-sectional study, we analyzed data from 14,137 hypertensive participants in the National Health and Nutrition Examination Survey (NHANES) from 1999 to 2018. Dietary oxidative balance score was calculated based on the intake of 16 dietary components, including 14 antioxidants and two pro-oxidants. Logistic regression models were used to assess the association between dietary oxidative balance score and myocardial infarction, and restricted cubic splines were applied to explore potential nonlinear relationships.ResultsA significant inverse association was observed between dietary oxidative balance score and myocardial infarction risk. In the fully adjusted model, each one-point increase in dietary oxidative balance score was associated with a 2.4% reduction in the odds of myocardial infarction (OR: 0.976; 95% CI: 0.966-0.985). Compared to the lowest tertile, participants in the highest dietary oxidative balance score tertile had a 28.9% lower risk of myocardial infarction (OR: 0.711; 95% CI: 0.609-0.831). Although nonlinearity was not statistically significant, a threshold effect was observed, with the most pronounced risk reduction at lower dietary oxidative balance score levels.ConclusionHigher dietary oxidative balance score values were associated with a reduced risk of myocardial infarction in hypertensive patients. These findings suggest that dietary patterns emphasizing oxidative balance may serve as an effective strategy for myocardial infarction prevention in high-risk populations.</p>","PeriodicalId":56061,"journal":{"name":"Science Progress","volume":"108 3","pages":"368504251362341"},"PeriodicalIF":2.9,"publicationDate":"2025-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12317202/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144746129","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Application of metabolomics in acute respiratory distress syndrome: A narrative review. 代谢组学在急性呼吸窘迫综合征中的应用:综述。
IF 2.9 4区 综合性期刊
Science Progress Pub Date : 2025-07-01 Epub Date: 2025-07-30 DOI: 10.1177/00368504251356317
Xiu-Yan Song, Hao Qin, Wei Zhang
{"title":"Application of metabolomics in acute respiratory distress syndrome: A narrative review.","authors":"Xiu-Yan Song, Hao Qin, Wei Zhang","doi":"10.1177/00368504251356317","DOIUrl":"10.1177/00368504251356317","url":null,"abstract":"<p><p>Acute respiratory distress syndrome (ARDS) is a clinical condition characterized by damage and inflammation of the alveolar-capillary membrane, which is associated with high incidence and mortality rates. Metabolomics, a significant field of systematic biology, provides a novel perspective for understanding the pathophysiological mechanisms underlying ARDS by analyzing small molecule metabolites in biological samples. This narrative review explores the application of metabolomics in ARDS.</p>","PeriodicalId":56061,"journal":{"name":"Science Progress","volume":"108 3","pages":"368504251356317"},"PeriodicalIF":2.9,"publicationDate":"2025-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12317215/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144755232","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Late retroperitoneal recurrence of adult-type ovarian granulosa cell tumors: Two case reports and literature review. 成人型卵巢颗粒细胞瘤腹膜后晚期复发2例报告并文献复习。
IF 2.9 4区 综合性期刊
Science Progress Pub Date : 2025-07-01 Epub Date: 2025-09-04 DOI: 10.1177/00368504251376404
Yutao Wang, Ting Liu, Xi Deng, Shuben Sun
{"title":"Late retroperitoneal recurrence of adult-type ovarian granulosa cell tumors: Two case reports and literature review.","authors":"Yutao Wang, Ting Liu, Xi Deng, Shuben Sun","doi":"10.1177/00368504251376404","DOIUrl":"10.1177/00368504251376404","url":null,"abstract":"<p><p>Adult-type ovarian granulosa cell tumors are rare low-grade malignancies characterized by late recurrence and atypical clinical manifestations. This study reports two cases of recurrent adult-type ovarian granulosa cell tumor with distinct timelines and anatomical sites, including one case with two postoperative recurrences. We analyze their imaging features, surgical management, histopathology, postoperative follow-up, and review relevant literature. These cases highlight the importance of long-term follow-up and raise awareness of rare recurrence sites, emphasizing the diagnostic value of imaging and the need for individualized surveillance strategies in adult-type ovarian granulosa cell tumor patients.</p>","PeriodicalId":56061,"journal":{"name":"Science Progress","volume":"108 3","pages":"368504251376404"},"PeriodicalIF":2.9,"publicationDate":"2025-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12411711/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144994736","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Surgical management of giant neurofibroma in a pediatric patient: A case report. 小儿巨大神经纤维瘤的外科治疗:1例报告。
IF 2.9 4区 综合性期刊
Science Progress Pub Date : 2025-07-01 Epub Date: 2025-07-07 DOI: 10.1177/00368504251357509
Pidong Liu, Yanwei Sun
{"title":"Surgical management of giant neurofibroma in a pediatric patient: A case report.","authors":"Pidong Liu, Yanwei Sun","doi":"10.1177/00368504251357509","DOIUrl":"10.1177/00368504251357509","url":null,"abstract":"<p><p>Neurofibromas are benign peripheral nerve sheath tumors that occur in individuals with neurofibromatosis type 1. In pediatric patients, giant neurofibromas pose significant management challenges due to their large size and potential to cause functional impairments. Given their characteristic radiation resistance, indolent growth, and limited chemosensitivity, surgical intervention is frequently required to alleviate tumor-related symptoms, restore function, and mitigate complications. The two primary surgical difficulties are the high recurrence rates resulting from the infiltrative nature of giant neurofibromas and the risk of massive intraoperative hemorrhage. This case report details the surgical management of a pediatric giant neurofibroma, highlighting the multidisciplinary strategy and operative techniques employed to achieve optimal results.</p>","PeriodicalId":56061,"journal":{"name":"Science Progress","volume":"108 3","pages":"368504251357509"},"PeriodicalIF":2.9,"publicationDate":"2025-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12235097/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144577055","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Microplastics removal efficiency in wastewater treatment plants in Jordan. 约旦污水处理厂的微塑料去除效率。
IF 2.9 4区 综合性期刊
Science Progress Pub Date : 2025-07-01 Epub Date: 2025-09-04 DOI: 10.1177/00368504251376048
Ehab AlShamaileh, Mutaz Alzoubi
{"title":"Microplastics removal efficiency in wastewater treatment plants in Jordan.","authors":"Ehab AlShamaileh, Mutaz Alzoubi","doi":"10.1177/00368504251376048","DOIUrl":"10.1177/00368504251376048","url":null,"abstract":"<p><p>ObjectiveThis study aims to assess the concentration and removal efficiency of microplastics (MPs) at a major wastewater treatment plant in Jordan, a region with limited data on MP pollution.MethodsA field-based experimental study was conducted. Grab samples of 14 L were collected from both influent and effluent streams on a single sampling day. Wet sieving was used to isolate MPs in the 38-1000 µm range, followed by wet peroxide oxidation and optical microscopy for particle quantification and morphological classification.ResultsThe influent contained an average of 62.6 MPs/L, while the effluent had 23.8 MPs/L, resulting in an overall MP removal efficiency of 62%. Fibers and fragments were the most prevalent types in the effluent, indicating partial resistance to the treatment process.ConclusionThe results underscore the presence of residual MPs in treated wastewater and suggest a need for more robust filtration technologies and plastic management strategies to reduce environmental MP release.</p>","PeriodicalId":56061,"journal":{"name":"Science Progress","volume":"108 3","pages":"368504251376048"},"PeriodicalIF":2.9,"publicationDate":"2025-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12411719/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144994759","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
FEA-based optimal design of special suction cups temperature-controlled coatings. 基于有限元的特种吸盘温控涂层优化设计。
IF 2.9 4区 综合性期刊
Science Progress Pub Date : 2025-07-01 Epub Date: 2025-09-08 DOI: 10.1177/00368504251377216
Diqing Fan, Jianyu Liu, Shuo Zhang, Xintian Liu
{"title":"FEA-based optimal design of special suction cups temperature-controlled coatings.","authors":"Diqing Fan, Jianyu Liu, Shuo Zhang, Xintian Liu","doi":"10.1177/00368504251377216","DOIUrl":"10.1177/00368504251377216","url":null,"abstract":"<p><p>To address the growing demand for temperature control precision and uniformity in wafer processing, a specialized electrostatic chuck temperature control system based on thermal control coatings is proposed, aiming to enhance thermal management robustness and homogeneity. This study employs a zoned control methodology using metal-oxide conductive coatings on silicon carbide wafer heating plates. A quadrant-based thermal control coating model was established, and finite element analysis was conducted to compare temperature distribution characteristics across three geometric configurations: sectorial, spiral, and zoned designs. The zoned structure was identified as the optimal configuration. The heating mechanism and heat transfer principles of the specialized chuck were analyzed, encompassing thermal conduction, convection, and radiation, with key factors influencing temperature distribution elucidated. Finite element simulation was utilized to optimize the thermal control system design, incorporating structured meshing to ensure computational accuracy. Experimental results demonstrate that precise regulation of coating current variations achieves maximum temperature difference control below 0.2°C and surface temperature uniformity stabilized at approximately 0.05°C, validating the efficacy of the methodology. These findings establish a robust theoretical foundation for further optimization of temperature control systems in semiconductor thermal management applications.</p>","PeriodicalId":56061,"journal":{"name":"Science Progress","volume":"108 3","pages":"368504251377216"},"PeriodicalIF":2.9,"publicationDate":"2025-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12417647/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145014422","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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