Youjung Kim, Jinhyun Lee, Jin-Kyo Seo, H. Han, Inseong Hwang, S. Yoon, Bongyoung Yoo
{"title":"Electrodeposition of Ru on Nanoscale Trench Patterns","authors":"Youjung Kim, Jinhyun Lee, Jin-Kyo Seo, H. Han, Inseong Hwang, S. Yoon, Bongyoung Yoo","doi":"10.1149/2162-8777/ad4677","DOIUrl":"https://doi.org/10.1149/2162-8777/ad4677","url":null,"abstract":"\u0000 Ru deposition in advanced technology nodes can improve performance by providing low resistance in nanoscale features. In this study, we reported the electrochemical reactions of Ru3+ on an Ru surface using multi-cyclic voltammetry (CV) and behavior of additives during Ru electrodeposition using linear sweep voltammetry (LSV) and potentiostatic measurements. Disodium 3,3'-dithiobis(1-propanesulfonate) (SPS), polyvinylpyrrolidone (PVP), and a bromide ion (Br-) were added for bottom-up filling. We investigated the suppression behavior of PVP. The current density and the onset potential of suppressor breakdown were affected by the suppressor concentration. PVP interacted synergistically with Br- and showed additional suppression. PVP formed a suppressing layer with Br- after formation of a bromide layer. SPS could reduce roughness during electrodeposition of Ru. Based on these results, nano-trenches were filled with Ru using the optimized additive condition.","PeriodicalId":504734,"journal":{"name":"ECS Journal of Solid State Science and Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2024-05-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141022518","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Negative Dielectric Constant in Novel Structure of PA-GO Composite /MnO2/Fe3O4/n-Si","authors":"A. Ashery, Samia Gad, G. Turky","doi":"10.1149/2162-8777/ad467a","DOIUrl":"https://doi.org/10.1149/2162-8777/ad467a","url":null,"abstract":"\u0000 We present a novel structure of PA-GO composite /MnO2/Fe3O4/n-Si arranged by simple technique and examined by scanning electron microscope, X-ray diffraction, and Raman spectroscopy. The negative dielectric constant appeared for all voltages at frequencies of 103, 102, 10 Hz, proving that the dielectric constant has negative values only at frequencies above one megahertz 106Hz. Also, the dielectric loss has negative values with temperature at all voltages and high frequencies. This structure also has a low dielectric loss tangent from 4 to 50 with all voltages and temperatures and high rectification ratio reach to 1200 times, and high Rj. The performance of dielectric constant, dielectric loss, and dielectric loss tangent depend on the change of frequencies and voltages. The electrical properties of this structure were examined by conventional, dv/dlnI, and the Nord and Cheung method. The ideality factor fluctuates between 3.09 and 3.29, and the barrier height is in the range of 0.56 to 0.58 at room temperature. We found similar results using different methods of measuring the electrical properties. This indicates that the structure is a promising material for preparing diodes, supercapacitor, and high storage devices.","PeriodicalId":504734,"journal":{"name":"ECS Journal of Solid State Science and Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2024-05-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141021679","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Kihong Park, Wookyung Jeon, Pengzhan Liu, Sang-Hyuk Jeon, Seokjun Hong, Sanghyeon Park, Taesung Kim
{"title":"Effects of Gas-Dissolved Water for Ceria Nanoparticles on the SiO2 Film Surface in Post-CMP Cleaning","authors":"Kihong Park, Wookyung Jeon, Pengzhan Liu, Sang-Hyuk Jeon, Seokjun Hong, Sanghyeon Park, Taesung Kim","doi":"10.1149/2162-8777/ad4678","DOIUrl":"https://doi.org/10.1149/2162-8777/ad4678","url":null,"abstract":"\u0000 As a trend of using colloidal and smaller ceria nanoparticles (CNPs) at the shallow trench isolation (STI) chemical mechanical polishing (CMP) in semiconductor manufacturing, post-CMP cleaning challenges in the removal of residual CNPs on the SiO2 film surface became much more challenging. We investigated the reduction/oxidation of ceria nanoparticles (CNPs) by hydrogen gas-dissolved water (H2 GDW), carbon dioxide gas-dissolved water (CO2 GDW), and oxygen gas-dissolved water (O2 GDW). The concentration of Ce3+ on the CNPs changed from 18.64% to 19.48%, 20.31% to 21.94%, and 21.27% to 19.22%, respectively, after immersion in H2 GDW, CO2 GDW, and O2 GDW for 3 to 12 h. Following the Ce3+ concentration of the CNP surface, adhesion energies between CNPs immersed in H2 GDW, CO2 GDW, and O2 GDW for 6 hours with SiO2 surface were 6.06E-16 J, 6.18E-16 J, and 4.83E-16 J. Cleaning experiments under megasonic conditions revealed the efficacy of H2 GDW and O2 GDW in removing residual CNPs from SiO2 surfaces. The residual cerium (Ce) ion concentrations remaining on the SiO2 film surface after cleaning, were 0.06, 0.41, and 0.10 ppb for H2 GDW, CO2 GDW, and O2 GDW, respectively.","PeriodicalId":504734,"journal":{"name":"ECS Journal of Solid State Science and Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2024-05-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141022842","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Tunable EOT Scaling Down to 0. 55 nm for HfO2-Based Gate-Stacks on Ge Substrate by In Situ H2 Plasma Treatment","authors":"Hui-Hsuan Li, Shang-Chiun Chen, YuHsien Lin, ChaoHsin Chien","doi":"10.1149/2162-8777/ad430a","DOIUrl":"https://doi.org/10.1149/2162-8777/ad430a","url":null,"abstract":"\u0000 We propose a continuous fabrication method for HfO2-based gate stacks on a Ge bulk p-type metal–oxide–semiconductor capacitor (pMOSCAP) with HfGeOx interfacial layer by H2 plasma treatment through in situ plasma-enhanced atomic layer deposition. The electrical characteristics showed that the proper hydrogen plasma treatment could obtain an aggressively scaled equivalent oxide thickness of approximately 0.55 nm and a relatively low gate leakage current of 8 × 10-4 A/cm2 under PMA 500C.","PeriodicalId":504734,"journal":{"name":"ECS Journal of Solid State Science and Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2024-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140662328","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
D. Kabouchi, Z. Fadil, R. El Fdil, C. Raorane, B. Kabouchi, A. Mhirech, E. Salmani, S. Kim, A. M. Tighezza, P. Rosesaih
{"title":"Investigation of the Magnetic Features of the Fullerene-Dimer-Like Nanostructure (C60)2: A Monte Carlo Study","authors":"D. Kabouchi, Z. Fadil, R. El Fdil, C. Raorane, B. Kabouchi, A. Mhirech, E. Salmani, S. Kim, A. M. Tighezza, P. Rosesaih","doi":"10.1149/2162-8777/ad430b","DOIUrl":"https://doi.org/10.1149/2162-8777/ad430b","url":null,"abstract":"\u0000 The current investigation employs Monte Carlo simulations to explore the magnetic features of a Fullerene-dimer-like nanostructure (C60)2 characterized by the spin σ-1. It explores how the coupling interaction Jσ, the biquadratic parameter K, the external magnetic H and the crystal D fields influence the thermal and magnetic features of the nanostructure, particularly the blocking temperature (TB). The results also highlight the dependence of hysteresis cycles and the coercive magnetic field Hc on the values of Jσ, K, and D, with significant variations at lower temperatures. The findings indicate the distinctive magnetic behavior of the Fullerene-dimer-like nanostructure (C60)2 potentially useful in various technological applications.","PeriodicalId":504734,"journal":{"name":"ECS Journal of Solid State Science and Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2024-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140664869","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Dinesh M A, Vinay Kumar, Raghvendra Kumar, Vibha Rani Gupta, Subramanian Venkatachalam, V. Dayal
{"title":"Investigating a Cylindrical Dielectric Resonator Antenna Fabricated with Li3MgNbO5 Microwave Dielectric Ceramic","authors":"Dinesh M A, Vinay Kumar, Raghvendra Kumar, Vibha Rani Gupta, Subramanian Venkatachalam, V. Dayal","doi":"10.1149/2162-8777/ad4239","DOIUrl":"https://doi.org/10.1149/2162-8777/ad4239","url":null,"abstract":"\u0000 This work aims to fabricate a single-feed line Cylindrical Dielectric Resonator Antenna (CDRA) using low-temperature sintered Li3MgNbO5 microwave dielectric ceramic as a resonator, excited in HEM11ẟ mode. The ceramic synthesized using the conventional solid-state route resulted in a single-phase material exhibiting a cubic structure with an Fm-3m space group. The densely packed cylindrical disk of the ceramic was subsequently characterized for its microwave dielectric behaviour in TE01δ mode using the Hakki-Coleman method. The dielectric permittivity (εr) measures 14.4, with a loss factor (tan δ) nearly equal to 4.01×10-4 and a temperature coefficient (τf) of -50.9 ppm/°C. The antenna design was executed using the high-frequency structure simulator design software, utilizing the dielectric ceramic as the resonator, Cu strip as the feedline, and FR4 as the substrate. The maximum energy was coupled to the antenna when the resonator was placed at 11.75 mm on the substrate. The fabricated CDRA, using appropriate simulated parameters, resonated at 7.67 GHz, offering a return loss (S11) of -32.64 dB and an impedance bandwidth of 10.73%. Furthermore, the CDRA displayed a voltage standing wave ratio of 1.04, ensuring a nearby ideal impedance match and a bandwidth of 810 MHz to support high-speed data transmission.","PeriodicalId":504734,"journal":{"name":"ECS Journal of Solid State Science and Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2024-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140669703","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Mohammed Al-Bujasim, Metin Gençten, K. B. Dönmez, M. B. Arvas, N. Karatepe, Y. Şahin
{"title":"A Tripartite Composite Incorporating Nitrogen-Doped Graphene Oxide, Polypyrrole, and Silica for Lithium-Ion Battery Anodes","authors":"Mohammed Al-Bujasim, Metin Gençten, K. B. Dönmez, M. B. Arvas, N. Karatepe, Y. Şahin","doi":"10.1149/2162-8777/ad423b","DOIUrl":"https://doi.org/10.1149/2162-8777/ad423b","url":null,"abstract":"\u0000 In this study, N-doped graphene oxide-polypyrrole-silica (NGO-PPy-SiO2) composite was employed as a possible anode in Li-ion batteries. The chronoamperometric technique was employed to synthesize NGO, and within this study two samples were produced, one characterized by a high polypyrrle content (N1) and the other by a low polypyrrle content (N2). N2 has the maximum initial discharge capacity of 785 mAh/g at 0.1C, which is greater than N1's capacity of 501 mAh/g. The initial coulombic efficiency of the first cycle is around 72%, whereas the ICE of N2 is approximately 60%. N1 demonstrates outstanding cycling performance for 100 cycles at high rate (10 C) with maintain capacity as 100% and coulombic efficiency of 100%, as well as extremely stable capacity during the cycling. N2 has a maintain capacity of ≈ 79% and excellent coulombic efficiency, however the capacity during cycling is not as stable as N1.","PeriodicalId":504734,"journal":{"name":"ECS Journal of Solid State Science and Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2024-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140667460","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Charge-Traps, Thermal Stability and Water-Uptakes of CaSiO3/EP and SiO2/EP Nanocomposites from Molecular Simulations and First-Principles Calculations","authors":"Yanyan Zhang, Weifeng Sun","doi":"10.1149/2162-8777/ad423a","DOIUrl":"https://doi.org/10.1149/2162-8777/ad423a","url":null,"abstract":"\u0000 Various analytical methods were employed to elucidate the effects of filling nano-calcium-silicate or nano-silica on the electronic property, water-uptake, and thermal stability of an amine-crosslinked epoxy (EP) polymer. Molecular-mixture models consisting of a nanofiller or several calcium ions and EP crosslinked macro-molecules were used to simulate local regions of nanofiller/matrix interface or ion-infiltrated matrix, calculating their density of electron-states by first-principles method to determine whether and how the nanofillers introduce charge traps into EP matrix. Calcium cations on nanofiller surface dissociate away from coordinating with silicon-oxygen tetrahedron and infiltrate into void spaces in EP matrix, leaving a larger free volume at filler/matrix interface than in matrix. Calcium cations dissolved in EP matrix adsorbed in the low electrostatic potential region or coordinate with carbonyl groups in EP matrix and thus introduce a miniband of deep electron traps at energy levels >1eV lower than conduction band minimum of the amine-crosslinked EP polymer. Even at room temperature, thermal vibrations can break coordinate bonds between calcium cations and silicon-oxygen framework on calcium-silicate nanofiller surface and make considerable calcium ions infiltrating void spaces within EP matrix, leading to comprehensive improvements of cohesive energy, thermal stability, and charge trapping ability in the calcium-silicate/EP nanocomposite.","PeriodicalId":504734,"journal":{"name":"ECS Journal of Solid State Science and Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2024-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140666412","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Akash Ramasamy, S. A, Hariharan Rajalakshmi Mohanraj, D. John Thiruvadigal
{"title":"DFT Calculations on Defect Induced and Doped ASiNR for Sensing the COPD Breath Biomarker","authors":"Akash Ramasamy, S. A, Hariharan Rajalakshmi Mohanraj, D. John Thiruvadigal","doi":"10.1149/2162-8777/ad40cf","DOIUrl":"https://doi.org/10.1149/2162-8777/ad40cf","url":null,"abstract":"\u0000 COPD is a respiratory disease with a high mortality rate worldwide. The major cause of death in COPD patients is due to late diagnosis. Early detection of COPD is crucial for significantly reducing the risk of death but is challenging to attain. A distinguished way to early diagnosis is by using the nanosensor for sensing the COPD breath biomarkers. For the first time, we report an armchair silicene nanoribbon (ASiNR) as a promising sensing material for the diagnosis of hexanal a COPD breath biomarker. In this present study, the density functional theory (DFT) with Grimme D2 corrected approach was incorporated to observe the ground state electronic properties and adsorption mechanism of hexanal on the pristine, defect induced (D) and B-, C-, and N-doped ASiNR systems. N-ASiNR systems show the highest adsorption energy value among previously reported works due to the presence of strong covalent interaction, and it does not show recovery at room temperature. The B-ASiNR system with higher charge transfer exhibits large work function change with the fastest recovery at room temperature in 1.81 s. Our results confirms B-doped ASiNR system acts as an efficient reusable work function-based sensor for the early diagnosis of COPD at room temperature.","PeriodicalId":504734,"journal":{"name":"ECS Journal of Solid State Science and Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2024-04-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140685587","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Xinran Bi, Weipeng Dai, Xiaocheng Lu, Zidong Zhang, Junhui Men
{"title":"Biomass-Derived Integrated Hierarchical Porous Carbon Embedded with Ni@C Nanoparticles for High-Performance and Cost-Effective Microwave Absorbent Design","authors":"Xinran Bi, Weipeng Dai, Xiaocheng Lu, Zidong Zhang, Junhui Men","doi":"10.1149/2162-8777/ad4059","DOIUrl":"https://doi.org/10.1149/2162-8777/ad4059","url":null,"abstract":"\u0000 High-performance and cost-effective microwave absorbing materials are of vital importance in not only military but also civil fields. Here, an in-situ generation-carbonization one-step method is proposed to synthesize excellent absorbents based on a common solid waste, willow catkins. The results demonstrate that the microwave absorption performance has been successfully improved owing to the magnetic particles, the core-shell nanoparticles, and the hierarchical porous structure, which results in strong conductivity loss, dielectric loss, magnetic loss, interface polarization, and multiple scattering. The maximum reflection loss (RLmax) reaches up to -50.66 dB and -49.09 dB, respectively, at 16.6 and 17.1 GHz with the thickness of 1.65 mm, resulting in double-peak absorption. What’s more, the effective absorption bandwidth (EAB, RL<−10 dB) can get up to 5.7 GHz (from 12.4 to 18 GHz) with the thickness of 1.84 mm. Great absorption performance can be obtained simply through impregnation and carbonization, which constructs a fruitful and cost-effective paradigm for resource utilization of solid waste such as willow catkins.","PeriodicalId":504734,"journal":{"name":"ECS Journal of Solid State Science and Technology","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2024-04-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140690141","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}