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2018 IEEE Micro Electro Mechanical Systems (MEMS)最新文献

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Transparent graphene-AZO/ZNO/glass surface acoustic wave device for electronics and lab-on-a-chip applications 用于电子和芯片上实验室应用的透明石墨烯- azo /ZNO/玻璃表面声波器件
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346487
Jian Zhou, D. Xiao, Z. X. Song, Ming Zhuo, Xuezhong Wu
{"title":"Transparent graphene-AZO/ZNO/glass surface acoustic wave device for electronics and lab-on-a-chip applications","authors":"Jian Zhou, D. Xiao, Z. X. Song, Ming Zhuo, Xuezhong Wu","doi":"10.1109/MEMSYS.2018.8346487","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346487","url":null,"abstract":"This paper reports the fabrication of transparent surface acoustic wave (SAW) resonators using novel graphene-AZO composite structure as the transparent electrodes. Transparent SAW resonators exhibited resonant frequency of 88.2 MHz at wavelength of 32 μm. and signal amplitudes up to 18 dB were obtained with the transparency above 80%. Temperature sensing showed the transparent SAW device had a positive temperature coefficient of frequency of ∼24.6 ppm/K. Humidity sensing was also conducted, demonstrating its application in humidity environment. Moreover, particle concentration using the transparent SAW devices have been achieved, demonstrating the great potential for applications in transparent electronics and MEMS.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"28 6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126972247","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Sticker microfluidics: A toolbox of combinable sacrificial templates for instrument-free customization of complex microfluidic systems in one-piece 贴纸微流体:一个可组合的牺牲模板工具箱，用于复杂微流体系统的无仪器定制
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346505
Xiaochen Lai, Bingyu Lu, Haixia Yu, Dachao Li
{"title":"Sticker microfluidics: A toolbox of combinable sacrificial templates for instrument-free customization of complex microfluidic systems in one-piece","authors":"Xiaochen Lai, Bingyu Lu, Haixia Yu, Dachao Li","doi":"10.1109/MEMSYS.2018.8346505","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346505","url":null,"abstract":"This paper reports an all-in-one toolbox which allows instrument-free customization of integrated microfluidic systems. Unlike the modular design of combining multiple microfluidic chips in previous literatures, this work, for the first time, proposes a ‘template sticker’ method: sacrificial templates for microfluidic components are batch produced in the form of stickers and packaged into a toolbox; a wettability guided emulsion linking method is employed to thoroughly connect the sticker templates; the end user only need to combine various template stickers to create a customized, one-piece microfluidic system. The newly-proposed toolbox enables easy and rapid operation, providing the first instrument-free solution to the fabrication of an integrated complex microfluidic system. The fabricated device has well-defined microscale features and excellent flexibility while the whole process is inexpensive and time-saving, making the toolbox suitable for both batch production and device prototyping.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"74 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123897059","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
High dynamic range CMOS-MEMS capacitive accelerometer array 高动态范围CMOS-MEMS电容式加速度计阵列
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346725
Metin G. Guney, Xiaoliang Li, V. P. Chung, J. Paramesh, T. Mukherjee, G. Fedder
{"title":"High dynamic range CMOS-MEMS capacitive accelerometer array","authors":"Metin G. Guney, Xiaoliang Li, V. P. Chung, J. Paramesh, T. Mukherjee, G. Fedder","doi":"10.1109/MEMSYS.2018.8346725","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346725","url":null,"abstract":"This paper reports on the design and characterization of a high-g CMOS-MEMS capacitive accelerometer array with 92 mG bias stability and ± 50 kG designed input range with a validated 91 dB dynamic range. The on-chip integration of the read-out circuitry and the MEMS transducer minimizes sense-node parasitic capacitance, hence improving sensitivity and dynamic range. The small size and mass of individual accelerometer cells ensure high-g survivability. Averaging the signals from the accelerometer cells across the array improves the signal to noise ratio, hence improving the dynamic range.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121344226","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
Switchable liquid shutter for security and design of mobile electronic devices 可开关液体百叶窗，用于移动电子设备的安全性和设计
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346469
Jeongmin Lee, Yuna Park, S. Chung
{"title":"Switchable liquid shutter for security and design of mobile electronic devices","authors":"Jeongmin Lee, Yuna Park, S. Chung","doi":"10.1109/MEMSYS.2018.8346469","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346469","url":null,"abstract":"This paper presents a new type of switchable liquid shutter for the security and design of mobile devices. The switching operation with sequential EWOD actuation and its response time are investigated using high-speed images. The operation of the liquid shutter mounted on a smartphone is successfully demonstrated for a proof of concept. The proposed liquid shutter not only allows a simple design to be easily miniaturized and integrated with electronic devices but also provides fast and robust switching operation.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"6 5","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114104674","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Pneumatically driven PDMS micropillars for the investigation of cell-cell interaction 用于细胞-细胞相互作用研究的气动驱动PDMS微柱
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346555
Kaori Furuike, A. Shima, Y. Morimoto, S. Takeuchi
{"title":"Pneumatically driven PDMS micropillars for the investigation of cell-cell interaction","authors":"Kaori Furuike, A. Shima, Y. Morimoto, S. Takeuchi","doi":"10.1109/MEMSYS.2018.8346555","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346555","url":null,"abstract":"We propose pneumatically driven PDMS micropillars (PDMS actuator) for the investigation of intercellular communication at a single-cell level. Cells usually organize large and complex networks. For detailed investigation of intercellular communication, downsizing the network is important. In this device, cell-sized micropillars are actuated by air pressure so that the adjacent cells on micropillars contact each other at an arbitrary timing. This actuator is also able to give mechanical stretch to coupled cells. We believe that this technology would contribute to the study of single-cell analysis of intercellular communication and the relationship between intercellular communication and mechanical stress.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116329816","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Acceleration insensitive hemispherical shell resonators using pop-up rings 使用弹出环的加速度不敏感半球形壳谐振器
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346716
M. M. Torunbalci, Sen Dai, A. Bhat, S. Bhave
{"title":"Acceleration insensitive hemispherical shell resonators using pop-up rings","authors":"M. M. Torunbalci, Sen Dai, A. Bhat, S. Bhave","doi":"10.1109/MEMSYS.2018.8346716","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346716","url":null,"abstract":"This work introduces DICE (Deep Isotropic Chemical Etching) process for fabrication of highly symmetric 3D Hemispherical Shell Resonators (HSR) based on HNA etching of <111> silicon using a pop-up ring mask. The proposed method is used to fabricate 650 nm thick SiO2 hemispherical shell with a diameter of 180 μm, demonstrating a 3D symmetry of 99%. The quality factor (Q) of the wine glass n=2 mode is measured as 31542 at 100 kHz with a frequency mismatch of 512 Hz (Δf/fr=0.5%) between the two n=2 degenerate modes. COMSOL simulations show that a symmetric shell resonator has simultaneous shock insensitivity to in-plane and out-of-plane acceleration.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114818626","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
An ultrasensitive humidity sensor based on SnO2-modified MoS2 nanocomposite at low-humidity range 基于sno2改性MoS2纳米复合材料的低湿度超灵敏湿度传感器
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346705
Ya-Lan Zhao, Bin Yang, Jingquan Liu, Xiang Chen, Xiaolin Wang, Chunsheng Yang
{"title":"An ultrasensitive humidity sensor based on SnO2-modified MoS2 nanocomposite at low-humidity range","authors":"Ya-Lan Zhao, Bin Yang, Jingquan Liu, Xiang Chen, Xiaolin Wang, Chunsheng Yang","doi":"10.1109/MEMSYS.2018.8346705","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346705","url":null,"abstract":"This paper reports an ultrasensitive capacitive humidity sensor for low-humidity detecting environment, which employs SnO2-modified MoS2 (SnO2/MoS2) hybrid nanocomposite film as sensing layer and interdigital electrodes with narrow gap of 15 μm on sapphire substrate. The testing results show that the sensor of SnO2/MoS2 (10: 1) composite has the best sensitivity of 387.5 μF/%RH at the humidity range of 0–20% relative humidity (RH). To our best knowledge, this sensitivity value is higher than that of all reported humidity sensors at low-humidity range. Moreover, the humidity sensor also has fast response (15s), little hysteresis and good repeatability.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"62 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124006483","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Wearable muscle training and monitoring device 可穿戴式肌肉训练和监测装置
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346480
Y. Takei, M. Yoshida, T. Takeshita, Takeshi Kobayashi
{"title":"Wearable muscle training and monitoring device","authors":"Y. Takei, M. Yoshida, T. Takeshita, Takeshi Kobayashi","doi":"10.1109/MEMSYS.2018.8346480","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346480","url":null,"abstract":"We developed a wearable device that can electrically stimulate muscle and measure the muscle activities simultaneously. This device is composed only of flexible material such as textile electrode printed on cloth and 5μm-thick piezoresistive silicon, polyimide substrate and PDMS. By deploying this device on sportswear, muscle training and motion assist by electric muscle stimulation become possible, monitoring muscle activity simultaneously.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115842233","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Magnetic-free radio frequency circulator based on spatiotemporal commutation of MEMS resonators 基于MEMS谐振器时空换流的无磁射频环行器
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346507
Yao Yu, Giuseppe Michetti, Ahmed Kord, D. Sounas, Flavius V. Pop, P. Kulik, Michele Pirro, Z. Qian, A. Alú, M. Rinaldi
{"title":"Magnetic-free radio frequency circulator based on spatiotemporal commutation of MEMS resonators","authors":"Yao Yu, Giuseppe Michetti, Ahmed Kord, D. Sounas, Flavius V. Pop, P. Kulik, Michele Pirro, Z. Qian, A. Alú, M. Rinaldi","doi":"10.1109/MEMSYS.2018.8346507","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346507","url":null,"abstract":"This paper reports on the first demonstration of a magnetic-free radio-frequency (RF) Microelectromechanical Resonant Circulator (MIRC). For the first time, magnetic-free non-reciprocity is achieved by imparting an effective angular momentum bias to a MEMS resonant circuit. The angular momentum is efficiently realized through spatiotemporal modulation of three strongly coupled high-Q (>1000) Aluminum Nitride (AlN) Contour Mode MEMS Resonators (CMRs) with signals of the same magnitude and phase difference of 1200. Differently from previous demonstrations based on varactor-based frequency modulation of low-Q LC networks, in this work the spatiotemporal modulation of the high-Q MEMS resonators is implemented by means of switched capacitors which minimizes the complexity of the modulation network, increases the modulation efficiency and mitigates the fundamental linearity limitations associated with solid-state varactors. Furthermore, due to the high Q of the MEMS resonators employed, strong non-reciprocity is achieved with an ultra-low modulation frequency of ∼120 kHz (∼0.08% of the RF frequency, orders of magnitude lower than previous demonstrations) which directly enables a total power consumption of only ∼38 μW which, to the best of our knowledge, is the lowest ever reported for magnetic-free RF circulators based on temporally modulated circuits.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"117 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115848808","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 39
Automated flow-based/digital microfluidic platform integrated with onsite electroporation process for multiplex genetic engineering applications 自动化流动/数字微流控平台集成现场电穿孔过程，用于多种基因工程应用
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346785
K. Iwai, David Ando, Peter W. Kim, Phillip C. Gach, M. Raje, Todd A. Duncomb, Joshua V. Heinemann, T. Northen, H. Martín, N. Hillson, P. Adams, A. Singh
{"title":"Automated flow-based/digital microfluidic platform integrated with onsite electroporation process for multiplex genetic engineering applications","authors":"K. Iwai, David Ando, Peter W. Kim, Phillip C. Gach, M. Raje, Todd A. Duncomb, Joshua V. Heinemann, T. Northen, H. Martín, N. Hillson, P. Adams, A. Singh","doi":"10.1109/MEMSYS.2018.8346785","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346785","url":null,"abstract":"We present a novel automated flow-based/digital microfluidic platform integrated with onsite electroporation function. In addition to high-throughput arraying of microdroplets and mixing of DNA parts and cells, proposed platform is capable of multiplexed electroporation process and dual optical detection of expressed fluorescence on chip. Unlike conventional microtiter plate based reactions, our platform would allow completely automated and robust genetic engineering steps using drastically smaller amounts of reagents and can be useful for gene editing processes such as CRISPR/Cas9 for synthetic biology applications.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131915563","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
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