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2018 IEEE Micro Electro Mechanical Systems (MEMS)最新文献

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Acoustic tweezers for sub-MM microparticle manipulation 用于亚毫米级微粒操作的声学镊子
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346749
Lurui Zhao, E. S. Kim
{"title":"Acoustic tweezers for sub-MM microparticle manipulation","authors":"Lurui Zhao, E. S. Kim","doi":"10.1109/MEMSYS.2018.8346749","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346749","url":null,"abstract":"This paper reports a new design of an acoustic tweezers that can trap microparticles up to 0.5 mm in diameter through a 3-dimensional energy well formed in a bulk of liquid. The acoustic tweezers is built on a 1.02 mm thick lead zirconate titanate (PZT) substrate, with symmetric sectors (pie shaped when viewed from top) of air-cavity Fresnel lens. Each of the sectors is designed to have a different focal length, so that the acoustic waves from different sectors interfere with each other such that they produce a Bessel beam zone (with negative axial radiation force) along the center line perpendicular to the transducer surface. The negative radiation force traps and holds particles. The fabricated acoustic tweezers operating at 2.07 MHz has successfully been shown to trap polyethylene microsphere from 0.3 to 0.5 mm in diameter at 5 mm away from the transducer surface, providing a way to remotely manipulate large-size microparticles without physical contact to any rigid body.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117253855","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
The microscopic activation energy etching mechanism in anisotropic wet etching of quartz 石英各向异性湿法刻蚀的微观活化能刻蚀机理
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346591
Hui Zhang, Y. Xing, Jin Zhang, Yuan Li
{"title":"The microscopic activation energy etching mechanism in anisotropic wet etching of quartz","authors":"Hui Zhang, Y. Xing, Jin Zhang, Yuan Li","doi":"10.1109/MEMSYS.2018.8346591","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346591","url":null,"abstract":"This study explores the effect of external etching conditions (concentration or temperature) on anisotropic etch rates of quartz, and analyzes the reasons for the change of anisotropic etching characteristics in detail. Based on the particular atomic arrangements and the etch rates of several specific crystal planes, the proposed Microscopic Activation Energy Evaluation function (MAEE) based on Monte Carlo etching method (MC) clearly confirms the relationship among the macroscopic etch rate of a crystal plane, microscopic activation energies and atomic removal probabilities, explains the cause of anisotropy in wet etching of quartz from the perspective of microscopic atomic energy for the first time and specifies the roles of different types atoms in etching process. The successful predictions for the final structural profiles and topography of Z-cut and AT-cut wafers effectively verify the correctness of the MAEE evaluation function.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"113 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117280642","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Miniaturization of a grating-based SPR type near-infrared spectrometer by using vibration of a MEMS cantilever 利用MEMS悬臂梁振动实现基于光栅的SPR型近红外光谱仪小型化
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346648
Masaaki Oshita, Hidetoshi Takahashi, T. Kan
{"title":"Miniaturization of a grating-based SPR type near-infrared spectrometer by using vibration of a MEMS cantilever","authors":"Masaaki Oshita, Hidetoshi Takahashi, T. Kan","doi":"10.1109/MEMSYS.2018.8346648","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346648","url":null,"abstract":"This paper reports on a miniaturization method of near-infrared spectrometer based on a plasmonic near-infrared photodetector. The spectrometer has an n-typed Si cantilever with an Au diffraction grating for Surface Plasmon Resonance (SPR) generation. Mechanical vibration of the cantilever provides alternation of the angle of incidence of the light to be measured. Coupled to SPR, the light energy is transduced to photocurrent. Since the different incident angle corresponds to different SPR resonant wavelength, the electrical measurement data of photocurrent during the cantilever vibration provides the whole spectrum information of the incident light. In this time, we developed a spectrometer device and measured time varying series of photocurrent during the cantilever vibration. Waveforms of the series were clearly dependent on the incident wavelength, and coherent to the SPR theory.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"520 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123413554","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Perforated electrode for performance optimization of electrostatic energy harvester 用于静电能量采集器性能优化的穿孔电极
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346628
Yulong Zhang, Xinge Quo, Fei Wang
{"title":"Perforated electrode for performance optimization of electrostatic energy harvester","authors":"Yulong Zhang, Xinge Quo, Fei Wang","doi":"10.1109/MEMSYS.2018.8346628","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346628","url":null,"abstract":"We have proposed a novel design of perforated electrode structure for electrostatic vibration energy harvester. Holes with different diameters have been manufactured to optimize the air damping condition for the resonant device during vibration. Compared with the regular electrode, higher power output can be achieved at lower amplitude of external vibration source, which gives a large normalized power density. This design avoids the vacuum packaging which may cause surface charge decay and process complexity. For the device with 36 pores and diameter of 700 μm, a high power of 12 μW was generated at a low acceleration of 4.9 m/s2, which gives a high normalized power density of 0.25 mW/cm3/g2 at atmosphere.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116854637","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
A silicon resonant thermometer for high pressure and high temperature environment 用于高压和高温环境的硅谐振温度计
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346752
K. Kanno, M. Noro, T. Mitsuhashi, S. Yoshita, T. Mishima, T. Yoshida
{"title":"A silicon resonant thermometer for high pressure and high temperature environment","authors":"K. Kanno, M. Noro, T. Mitsuhashi, S. Yoshita, T. Mishima, T. Yoshida","doi":"10.1109/MEMSYS.2018.8346752","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346752","url":null,"abstract":"It is a challenge to develop a thermometer for highly precise silicon pressure sensor used under a high temperature environment such as 200°C; because using on-chip diode for temperature compensation is not desirable due to the leakage current. This paper reports a novel silicon resonant thermometer designed to overcome such a problem. The resonant thermometer is composed of a central beam supported by four beams with anchors and its resonant frequency depends only on the temperature and is not affected by pressure. Experimental results show that the frequency of the resonant thermometer has no dependence of pressure up to 3 MPa, and the accuracy of temperature measurement was 0.0019° C.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"97 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127106664","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Novel circular microchannels fabrication method for artery thrombosis investigation 新型环形微通道制备方法用于动脉血栓研究
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346559
Thanh-Qua Nguyen, Sangyoup Lee, W. Park
{"title":"Novel circular microchannels fabrication method for artery thrombosis investigation","authors":"Thanh-Qua Nguyen, Sangyoup Lee, W. Park","doi":"10.1109/MEMSYS.2018.8346559","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346559","url":null,"abstract":"This paper demonstrates the straightforward fabrication process of polydimethylsiloxane (PDMS) circular cross-section microfluidic channels by using air pressure to define the deformation of partially cured PDMS surface. Based on this technique, circular cross-section microchannel can be easily produced in a wide range of dimensions from 100 μm to 500 μm with simple bench top equipment. Using self-alignment and bonding with partially cured PDMS, this technique can eliminate air plasma activated bonding and tedious alignment processes. We successfully used the technique to fabricate multiple dimensions of circular microchannels to mimic the artery for investigating artery thrombosis phenomenon on a chip.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"70 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127263583","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Monolithically fabricated perforated polyimide separator for a planar lipid bilayer devi CE 用于平面脂质双分子层装置的单片制备穿孔聚酰亚胺分离器
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346477
T. Osaki, M. Kaneko, K. Araki, H. Uehara, T. Ura, H. Hirata, K. Kamiya, S. Fujii, N. Misawa, S. Takeuchi
{"title":"Monolithically fabricated perforated polyimide separator for a planar lipid bilayer devi CE","authors":"T. Osaki, M. Kaneko, K. Araki, H. Uehara, T. Ura, H. Hirata, K. Kamiya, S. Fujii, N. Misawa, S. Takeuchi","doi":"10.1109/MEMSYS.2018.8346477","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346477","url":null,"abstract":"We propose a batch fabrication of a perforated separator for formation of a planar lipid bilayer, aiming for commercial and mass production. A planar lipid-bilayer system increasingly attracts attention as a platform of nanopore-based biosensors, and a perforated separator is an essential component for reconstitution of a planar bilayer on such sensor devices. We therefore designed a mass-fabrication procedure of the separator, avoiding laborious processes. First, an array of microapertures was processed on a sheet of polyimide thin film (200 × 200 mm2) by chemical etching. Photo-reactive polyimide coverlays were then laminated and formed a frame of the apertures at both faces of the film as reinforcement. Approximately 300 pieces of monolithic separators were obtained by the procedure. Electrical properties (current noise level) of a planar bilayer were certified with the developed separator.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"53 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130037145","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A transient triboelectric nanogenerator with optical feedback 具有光反馈的瞬态摩擦电纳米发电机
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346633
Yoga Zhang, F. Zheng, Zhitao Zhou, Yulong Zhang, Fei Wang, H. Tao
{"title":"A transient triboelectric nanogenerator with optical feedback","authors":"Yoga Zhang, F. Zheng, Zhitao Zhou, Yulong Zhang, Fei Wang, H. Tao","doi":"10.1109/MEMSYS.2018.8346633","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346633","url":null,"abstract":"We report a transient triboelectric nanogenerator (TENG) with optical feedback that integrates the features of enhanced harvesting of biomechanical energy, biodegradability, and real-time monitoring of degradation behaviors. Naturally extracted silk fibroin proteins — which are biocompatible and biodegradable — are used as the frictional layer material in a sandwich-shaped TENG. By patterning the reflective grating nanostructures onto silk frictional layers, the energy conversion efficiency is improved due to the increased effective frictional area, and the device degradation can be monitored by monitoring the variation of the optical diffraction intensity. This work shines new light on the development of implantable and degradable energy harvesting devices with simultaneous optical feedback for degradation monitoring.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131320920","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Long, biocompatible and highly flexible cold atmospheric microplasma jet device for precise endoscopic therapies 用于精确内镜治疗的长，生物相容性和高度灵活的冷大气微等离子体喷射装置
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346563
Tao Wang, M. Hu, Bin Yang, X. Wang, Xiang Chen, Jingquan Liu
{"title":"Long, biocompatible and highly flexible cold atmospheric microplasma jet device for precise endoscopic therapies","authors":"Tao Wang, M. Hu, Bin Yang, X. Wang, Xiang Chen, Jingquan Liu","doi":"10.1109/MEMSYS.2018.8346563","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346563","url":null,"abstract":"We develop a long, biocompatible and highly flexible micron sized cold atmospheric pressure plasma jet device which has no thermal damage and electric shock to human body. The generated microplasma jet has strong sterilization effect and the dose applied can be controlled by adjusting the plasma treatment time and the gas composition. All these advantages make this device capable of in-vivo precise endoscopic therapies.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122940231","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Responsivity enhancement of CMOS-MEMS thermoelectric infrared sensor by heat transduction absorber design 利用热传导吸收器设计增强CMOS-MEMS热电红外传感器的响应性
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346473
Ting-Wei Shen, Ya-Chu Lee, Kai-Chieh Chang, W. Fang
{"title":"Responsivity enhancement of CMOS-MEMS thermoelectric infrared sensor by heat transduction absorber design","authors":"Ting-Wei Shen, Ya-Chu Lee, Kai-Chieh Chang, W. Fang","doi":"10.1109/MEMSYS.2018.8346473","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346473","url":null,"abstract":"This study presents a novel heat transduction absorber design to improve the responsivity of thermoelectric infrared sensor with serpentine thermocouple [1] using TSMC 0.18μm 1P6M standard CMOS process. Features of the proposed design (Fig.1a) are: (1) umbrella-like heat transduction structure providing a better heat-flow path, (2) absorber membrane with designed etching release holes to enhance absorption area/efficiency of infrared, and (3) serpentine thermocouple for large thermal resistance [1]. Thus, temperature difference between hot and cold junctions is increased, and the responsivity of IR sensor is significantly improved. Comparing with existing IR sensor [1] (Fig. 1b), the proposed design increases responsivity for 15-fold at 200mtorr.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123021025","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
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