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PORT: A piezoelectric optical resonance tuner PORT:压电光学谐振调谐器
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 2019-03-20 DOI: 10.1109/MEMSYS.2018.8346661
B. Dong, Hao Tian, M. Zervas, T. Kippenberg, S. Bhave
{"title":"PORT: A piezoelectric optical resonance tuner","authors":"B. Dong, Hao Tian, M. Zervas, T. Kippenberg, S. Bhave","doi":"10.1109/MEMSYS.2018.8346661","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346661","url":null,"abstract":"This abstract presents an aluminum nitride (AlN) piezoelectric actuator for tuning optical resonance modes of silicon nitride photonic resonators. The AlN actuator is fabricated on top of a thick silicon dioxide cladding that encapsulates the nitride resonator and waveguide. The PORT is defined by undercutting the cladding layer with a lateral silicon etch. It tunes the optical wavelength by 20pm on applying 60 V to the top electrode with a 0.5nA current draw. The thick oxide cladding preserves the resonator's loaded quality factor Qoptical of 64,000 across the entire tuning range. The first bending mode is at 1.1MHz enabling a tuning speed of <1 μs.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-03-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131203018","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Fast and controllable elastocapillary flow channels using suspended membranes 快速和可控的弹性毛细管流动通道使用悬浮膜
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 2018-04-26 DOI: 10.1109/MEMSYS.2018.8346769
S. Fishlock, David Steele, S. Puttaswamy, G. Lubarsky, César Navarro, William P. Burns, J. McLaughlin
{"title":"Fast and controllable elastocapillary flow channels using suspended membranes","authors":"S. Fishlock, David Steele, S. Puttaswamy, G. Lubarsky, César Navarro, William P. Burns, J. McLaughlin","doi":"10.1109/MEMSYS.2018.8346769","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346769","url":null,"abstract":"The ability to control the fluid velocity and flow rate in microfluidic paper-based analytical devices (μPADS) will help to enable more sensitive and flexible point-of-care (POC) diagnostics. We present an elastocapillary channel design, for fluid flow in porous membranes, which enables an increase in flow velocity by a factor of up to 4.45 compared with a porous membrane used in a standard, non-suspended, format. The increase in flow rate is controllable with varying channel width, and is enabled by using an elastocapillary action, where the flexible porous membrane is suspended over a rigid substrate and deformed during fluid imbibition. This enabling technology is particularly useful in POC diagnostics, where small samples need be rapidly transported and mixed with minimal loss of volume.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-04-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125038059","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Resonant pressure sensing using a micromechanical cantilever actuated by fringing electrostatic fields 由边缘静电场驱动的微机械悬臂梁的谐振压力传感
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 2018-04-26 DOI: 10.1002/HTTPS://DOI.ORG/10.1109/MEMSYS.2018.8346688
N. Krakover, B. R. Hic, S. Krylov
{"title":"Resonant pressure sensing using a micromechanical cantilever actuated by fringing electrostatic fields","authors":"N. Krakover, B. R. Hic, S. Krylov","doi":"10.1002/HTTPS://DOI.ORG/10.1109/MEMSYS.2018.8346688","DOIUrl":"https://doi.org/10.1002/HTTPS://DOI.ORG/10.1109/MEMSYS.2018.8346688","url":null,"abstract":"We demonstrate a pressure-sensing approach based on the resonant operation of a single-crystal Si cantilever positioned near a flexible, pressurized membrane. The membrane deflection perturbs the electrostatic force acting on the cantilever and consequently alters the beam's resonant frequency. Sensitivity was enhanced by tailoring the actuating force nonlinearities through fringing electrostatic fields. With our coupled micromechanical system, we achieved frequency sensitivity to pressure and displacement of ≈ 30 Hz/kPa and −4 Hz/nm, respectively. Our results indicate that the suggested approach may have applications not only for pressure measurements, but also in a broad range of microelectromechanical resonant inertial, force, mass and bio sensors.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"87 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-04-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114071681","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Characteristic resonance features of SOI-CMOS-compatible silicon nanoelectromechanical doubly-clamped beams up to 330 MHz soi - cmos兼容硅纳米机电双箝位波束的特征共振特性，最高可达330 MHz
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 2018-04-26 DOI: 10.1109/MEMSYS.2018.8346603
Y. Tsuchiya, Yilin Feng, C. Giotis, N. Harada, M. Shikida, C. Dupré, E. Ollier, F. Hassani, H. Mizuta
{"title":"Characteristic resonance features of SOI-CMOS-compatible silicon nanoelectromechanical doubly-clamped beams up to 330 MHz","authors":"Y. Tsuchiya, Yilin Feng, C. Giotis, N. Harada, M. Shikida, C. Dupré, E. Ollier, F. Hassani, H. Mizuta","doi":"10.1109/MEMSYS.2018.8346603","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346603","url":null,"abstract":"This paper reports novel characteristic features of thermally-passivated Si nanoelectromechanical (NEM) beams fabricated via SOI-CMOS compatible processes with top-down hybrid EB/DUV lithography. Considerable difference of the resonance frequencies between the measurement results of the NEM beams with various lengths and the finite element simulation results suggests that effects of the undercut of the beam supports are serious for sub-micron beams. The resonance frequency of 332.57 MHz observed for an 800-nm-long beam is, to our knowledge, the highest ever as the fundamental resonance mode of lithographically-defined Si NEM beams. Clear change of the temperature dependence of the resonance frequencies with the varied beam lengths, observed for the first time, can be explained by considering effects of thermally-induced strain on the longer beams at higher temperatures.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-04-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124486855","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
A MEMS microphone inspired by Ormia for spatial sound detection 受Ormia启发的MEMS麦克风，用于空间声音检测
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 2018-04-26 DOI: 10.1109/MEMSYS.2018.8346532
Yansheng Zhang, R. Bauer, W. Whitmer, Joseph C. Jackson, J. Windmill, D. Uttamchandani
{"title":"A MEMS microphone inspired by Ormia for spatial sound detection","authors":"Yansheng Zhang, R. Bauer, W. Whitmer, Joseph C. Jackson, J. Windmill, D. Uttamchandani","doi":"10.1109/MEMSYS.2018.8346532","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346532","url":null,"abstract":"This work introduces a MEMS microphone with two pairs of orthogonal and joined sensor membranes, with independent acoustic directionality responses, leading to a 3D sound localization potential. This single microphone can thus be regarded as two individual bi-directional microphones. Combining this architecture with the fly Ormia ochracea's tympana mechanism, this microphone is also the first biomimetic MEMS microphone with piezoelectric sensing, designed for 2D sound localization.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"62 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-04-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132535799","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
Exploiting parallelism in resonators for large voltage gain in low power wake up radio front ends 利用谐振器中的并行性在低功率唤醒无线电前端实现大电压增益
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 2018-04-24 DOI: 10.1109/MEMSYS.2018.8346663
Ruochen Lu, T. Manzaneque, Yansong Yang, S. Gong
{"title":"Exploiting parallelism in resonators for large voltage gain in low power wake up radio front ends","authors":"Ruochen Lu, T. Manzaneque, Yansong Yang, S. Gong","doi":"10.1109/MEMSYS.2018.8346663","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346663","url":null,"abstract":"This paper reports a lithium niobate (LiNbO3) resonator array that, when used as a passive voltage amplifier, can produce a passive resonant voltage gain among the highest reported thus far for low-power wake-up radio front-ends. The high voltage gain is obtained by exploiting parallelism in the form of 56 arrayed identical shear horizontal mode resonators. The array of LiNbO3 devices is designed to simultaneously enable a large static capacitance of 1.05 pF, a spurious mode free response, and a large figure of merit (FoM=kt2-0 of 120, all of which are subsequently demonstrated for the first time for a large resonator array. As a result, voltage gains over 20 or 26 dB have been achieved for highly reactive loadings of typical CMOS wakeup radio front-end input. In addition to the high voltage gain, the array also features a high Q of 915, which produces to 3 dB FBW of 0.1% for filtering noise and interference in the RF ambience.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"77 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127293790","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 28
Spring-shaped stimuli-responsive hydrogel actuator for magnifying compression and expansion motions 用于放大压缩和膨胀运动的弹簧形刺激响应水凝胶执行器
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 2018-04-24 DOI: 10.1109/MEMSYS.2018.8346619
Koki Yoshida, S. Nakajima, R. Kawano, H. Onoe
{"title":"Spring-shaped stimuli-responsive hydrogel actuator for magnifying compression and expansion motions","authors":"Koki Yoshida, S. Nakajima, R. Kawano, H. Onoe","doi":"10.1109/MEMSYS.2018.8346619","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346619","url":null,"abstract":"This study describes stimuli-responsive hydrogel micro-actuators for compressive/expanding actuation of stimuli-responsive hydrogels. Inspired by living bioactuators such as a stalk in vorticella, we applied this spring-shaped structure to engineered stimuli-responsive hydrogel actuators to magnify its degree of deformation. We achieved the shrinkage degree of ∼0.2, which is the approximately 2 time smaller than that of bulk hydrogel material (shrinkage degree ∼0.4), without any modification of molecules. Furthermore, both compression and expansion motions were demonstrated by changing the pattern of stimuli-responsive part in the microsprings, indicating that our approach could enable wide variety of motions by their patterning condition of microsprings. Our large compression/expansion stimuli-responsive hydrogel microsprings have immense potential to be applied in various microengineering products including soft actuators, chemical sensors, and medical applications.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"104 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122567464","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Lithium niobate lateral overtone resonators for low power frequency-hopping applications 低功率跳频应用的铌酸锂横向泛音谐振器
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 2018-04-24 DOI: 10.1109/MEMSYS.2018.8346664
Ruochen Lu, T. Manzaneque, Yansong Yang, Ali Kourani, S. Gong
{"title":"Lithium niobate lateral overtone resonators for low power frequency-hopping applications","authors":"Ruochen Lu, T. Manzaneque, Yansong Yang, Ali Kourani, S. Gong","doi":"10.1109/MEMSYS.2018.8346664","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346664","url":null,"abstract":"This work reports the first lithium niobate (LiNbO3) lateral overtone bulk acoustic resonator (LOBAR) with a high figure-of-merit (FoM) for each overtone. We exploit electrode offset as a key parameter to excite both the even-order and the odd-order modes with uniform kt2. The fabricated device shows Qs (1966, 1215, and 1513) among the highest reported for LiNbO3 resonators at the equally-spaced resonances (446.4, 599.8, and 757.3 MHz). As a result, high FoMs of 83.6, 102.6 and 63.1 have been obtained simultaneously for aforementioned resonances. These FoMs significantly surpass those of the state-of-the-art overtone devices. With these qualities, frequency-hopping oscillators based on LiNbO3 LOBARs can be enabled for low power and phase-continuous frequency-hopping applications.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"144 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121661423","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 14
A MEMS rate integrating gyroscope based on catch-and-release mechanism for low-noise continuous angle measurement 一种基于捕获释放机制的MEMS速率积分陀螺仪，用于低噪声连续角度测量
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 2018-04-24 DOI: 10.1109/MEMSYS.2018.8346713
R. Gando, Shunta Maeda, K. Masunishi, Y. Tomizawa, E. Ogawa, Y. Hatakeyama, T. Itakura, T. Ikehashi
{"title":"A MEMS rate integrating gyroscope based on catch-and-release mechanism for low-noise continuous angle measurement","authors":"R. Gando, Shunta Maeda, K. Masunishi, Y. Tomizawa, E. Ogawa, Y. Hatakeyama, T. Itakura, T. Ikehashi","doi":"10.1109/MEMSYS.2018.8346713","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346713","url":null,"abstract":"We present two new techniques effective in realizing high precision MEMS Rate Integrating Gyroscope (RIG). First one is the application of the Catch-and-Release (CR) scheme, reported previously, to the RIG. We show that continuous angle measurement can be attained by catching and releasing a pair of CR-RIGs in a complementary manner. Direct angle measurement is also demonstrated by adopting a doughnut-shaped CR-RIG. Second one is a resistive tunable damper that can compensate the damping asymmetry, a major cause of the angle drift. In this tunable damper, the mechanical damping factor can be tuned by resistance and voltage. We show that the theoretical model fits well with the experimental results.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"270 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132786845","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 21
On-chip platelet production using three dimensional microchannel 片上血小板生产利用三维微通道
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 2018-04-24 DOI: 10.1109/MEMSYS.2018.8346498
H. Kumon, S. Sakuma, S. Nakamura, K. Eto, F. Arai
{"title":"On-chip platelet production using three dimensional microchannel","authors":"H. Kumon, S. Sakuma, S. Nakamura, K. Eto, F. Arai","doi":"10.1109/MEMSYS.2018.8346498","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346498","url":null,"abstract":"We succeeded in on-chip platelet production using a bioreactor with a curve-shaped 3D microchannel. In order to produce platelets from megakaryocytes (MKs) in a microfluidic chip, it is required to trap MKs and to apply fluid force to it. Since MKs have a relatively big distribution in their size, it is difficult to effectively trap MKs by using conventional microfluidic chips having uniformly patterned pillars with discrete pitch size. Thus, we proposed a curve-shaped 3D microchannel whose height gradually decreases along the flow pass to trap MKs of various size. We fabricated the curve-shaped 3D microchannel by using grey-scale lithography and deep reactive ion etching (DRIE) techniques. Since our microfluidic chip was packaged by a glass substrate, we can observe the processes of platelet production with a time-resolved technique. Through the experiments of on-chip platelet production using MKs induced from human induced pluripotent stem cells (hiPSCs), we successfully trapped the MKs of various size corresponding to the channel height. The trapped MKs were exposed to fluid force in the microchannel, and resulted in producing platelets.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"79 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125981427","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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