A MEMS microphone inspired by Ormia for spatial sound detection

2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 2018-04-26 DOI:10.1109/MEMSYS.2018.8346532

Yansheng Zhang, R. Bauer, W. Whitmer, Joseph C. Jackson, J. Windmill, D. Uttamchandani

引用次数: 11

Abstract

This work introduces a MEMS microphone with two pairs of orthogonal and joined sensor membranes, with independent acoustic directionality responses, leading to a 3D sound localization potential. This single microphone can thus be regarded as two individual bi-directional microphones. Combining this architecture with the fly Ormia ochracea's tympana mechanism, this microphone is also the first biomimetic MEMS microphone with piezoelectric sensing, designed for 2D sound localization.

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受Ormia启发的MEMS麦克风，用于空间声音检测

这项工作介绍了一种MEMS麦克风，它具有两对正交和连接的传感器膜，具有独立的声学方向性响应，从而具有3D声音定位的潜力。因此，这个单一的麦克风可以被视为两个独立的双向麦克风。将这种结构与苍蝇Ormia ochracea的鼓膜机制相结合，该麦克风也是第一个具有压电传感的仿生MEMS麦克风，专为2D声音定位而设计。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2018 IEEE Micro Electro Mechanical Systems (MEMS)

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