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Three-dimensional hierarchical and superhydrophobic graphene gas sensor with good immunity to humidity 具有良好抗湿性的三维分层超疏水石墨烯气体传感器
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346702
Jin Wu, K. Tao, J. Miao, L. Norford
{"title":"Three-dimensional hierarchical and superhydrophobic graphene gas sensor with good immunity to humidity","authors":"Jin Wu, K. Tao, J. Miao, L. Norford","doi":"10.1109/MEMSYS.2018.8346702","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346702","url":null,"abstract":"Superhydrophobic reduced graphene oxide (RGO) with unique 3D hierarchical structures is synthesized by exploiting one-step spark plasma sintering (SPS) within 60 s for high-performance NO2 detection. The effective removal of oxygenated groups and generation of 3D hierarchical structures in SPS render the RGO superhydrophobic. The superhydrophobicity makes the fabricated RGO sensor exceptionally immune to high relative humidity (RH). Specifically, the RGO sensor exhibits a response degradation less than 5.5% to 1 ppm NO2 when the RH increases from 0% to 70%. Importantly, an integrated microheater array is employed to remarkably activate the RGO-based NO2 sensor, boosting the sensitivity. Consequently, the NO2 sensor displays a high sensitivity (25.5 ppm−1) and an extremely low limit of detection (9.1 ppb). The boosted NO2 sensing performance is attributed to superhydrophobicity, 3D hierarchical structures with high specific surface area (850 m2/g), abundant defect sites and thermal activation with microheaters.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"95 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134256957","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Low-profile rotational electret generator using print circuit board for energy harvesting from arm swing 低轮廓旋转驻极体发电机，利用印刷电路板从手臂摆动中收集能量
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346526
T. Miyoshi, M. Adachi, Kuniko Suzuki, Yiran Liu, Yuji Suzuki
{"title":"Low-profile rotational electret generator using print circuit board for energy harvesting from arm swing","authors":"T. Miyoshi, M. Adachi, Kuniko Suzuki, Yiran Liu, Yuji Suzuki","doi":"10.1109/MEMSYS.2018.8346526","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346526","url":null,"abstract":"Rotational electret energy harvester (EH) is prototyped for powering low-power electronics from human motion. Stator with electrodes and rotor with electret are fabricated using flexible print circuit board (PCB) technology, which makes it easier to combine with metal ball bearing for rotational support. The maximum thickness for the rotational part including the eccentric mass is as thin as 3.3 mm. Output power up to 80 μW has been obtained from arm swing during walking at 1.45 m/s in our initial test.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130858565","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 28
AlN-on-Si MEMS resonator bounded by wide acoustic bandgap two-dimensional phononic crystal anchors 以宽带隙二维声子晶体锚定为界的AlN-on-Si MEMS谐振器
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346658
M. W. Siddiqi, Joshua E-Y Lee
{"title":"AlN-on-Si MEMS resonator bounded by wide acoustic bandgap two-dimensional phononic crystal anchors","authors":"M. W. Siddiqi, Joshua E-Y Lee","doi":"10.1109/MEMSYS.2018.8346658","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346658","url":null,"abstract":"We report an AlN-on-Si Lamb wave resonator with a unique wide acoustic bandgap (ABG) phononic crystal (PnC) structure at its anchors that provides an almost 4-fold increase in quality factor (Q). We show that the wider ABG provides for greater suppression of anchor loss and thus higher Q relative to a narrower ABG. Compared to more common circular void PnC structures, the unique PnC structures presented herein based on solid disks offer a 9-fold increase in the ABG size (82MHz vs. 9MHz) at a similar center frequency around 142MHz. The measured improvements in Q over multiple devices are consistent with finite element simulations on tuning the ABG size.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"210 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133440852","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Surface plasmonic resonance modulation by MEMS-elastomer hybrid system mems -弹性体混合系统的表面等离子体共振调制
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346680
Yu-Tang Hu, S. Lo, Yi-Chu Chen, Chih-Liang Pan, C. Lo
{"title":"Surface plasmonic resonance modulation by MEMS-elastomer hybrid system","authors":"Yu-Tang Hu, S. Lo, Yi-Chu Chen, Chih-Liang Pan, C. Lo","doi":"10.1109/MEMSYS.2018.8346680","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346680","url":null,"abstract":"A hybrid system consisting of a driving mechanism in the form of a microelectromechanical system (MEMS), and a tunable surface plasmonic resonance (SPR) from a deformable elastomer with nanostructures is proposed and evaluated in this work. The MEMS isotropically stretches and expands the elastomer film, which in turn moves the integrated SPR nanostructures into controllable positions, resulting in different SPRs. Under various MEMS operating conditions, arbitrary electromagnetic (EM) responses can be modulated from a single SPR design. The system sequentially filtering white light to various outgoing spectra by the proposed tunable SPR is a possible method for EM modulation. Theoretical design, numerical simulation, and analysis were comprehensively conducted to support the proposed system.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131418366","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Microfluidic oxygen sensor based on silica gels for longterm experiments 基于硅胶的长期实验微流控氧传感器
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346783
Frank Bunge, S. van den Driesche, A. Waite, U. Mirastschijski, M. Vellekoop
{"title":"Microfluidic oxygen sensor based on silica gels for longterm experiments","authors":"Frank Bunge, S. van den Driesche, A. Waite, U. Mirastschijski, M. Vellekoop","doi":"10.1109/MEMSYS.2018.8346783","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346783","url":null,"abstract":"Long-term measurements of dissolved oxygen in microfluidic systems are challenging because of the photo-oxidation of the required sensing film which consumes oxygen and because of the fluctuation of temperature that increases the uncertainty. We present a microfluidic chip made of glass and silicon with integrated phosphorescent elements composed from a matrix out of silica gel and an oxygen sensitive dye (PtTFPP). Our device has a 36 times lower oxygen consumption rate compared to conventional films, which uses an organic matrix. Furthermore, the influence of the temperature is eliminated by integrating a temperature sensor and heating elements on the chip.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128852041","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Single needle electrode-topped amplifier package (STACK) for in vivo applications 用于体内应用的单针电极顶部放大器封装(STACK)
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346513
Yuto Kita, H. Kubo, H. Sawahata, S. Yamagiwa, Xian Long Angela Leong, R. Numano, K. Koida, M. Ishida, T. Kawano
{"title":"Single needle electrode-topped amplifier package (STACK) for in vivo applications","authors":"Yuto Kita, H. Kubo, H. Sawahata, S. Yamagiwa, Xian Long Angela Leong, R. Numano, K. Koida, M. Ishida, T. Kawano","doi":"10.1109/MEMSYS.2018.8346513","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346513","url":null,"abstract":"We propose a single needle-topped amplifier package, so called STACK device, for use in a low invasive and a high signal-to-noise ratio neuronal recording from brain in vivo. Advantages of the proposed device include i) device minimization, ii) simplified on-chip MOS amplifier integration, and iii) the high device yield. The STACK device can be simply assembled by stacking three components: microneedle-electrode module, MOSFET amplifier module, and flexible interposer (Fig.1). The overall device geometry is ∼ 1 × 1 mm2 (∼ 1 mm in thickness), which size is applicable to small brain tissues, such as mice. The microneedle with a high impedance characteristic shows the signal-amplitude attenuation, which is improved by stacking the amplifier module. We also confirmed the neuronal recording capability of the STACK device, as demonstrated in the recording using a mouse's brain in vivo.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115459724","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A simple and flexible atmospheric microplasma generation device with patternable microfluidic channels 一种简单灵活的大气微等离子体产生装置，具有可图案化的微流控通道
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346777
Tao Wang, M. Hu, Bin Yang, X. Wang, Jingquan Liu
{"title":"A simple and flexible atmospheric microplasma generation device with patternable microfluidic channels","authors":"Tao Wang, M. Hu, Bin Yang, X. Wang, Jingquan Liu","doi":"10.1109/MEMSYS.2018.8346777","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346777","url":null,"abstract":"This paper reports a simple-arranged and flexible microplasma generation device μPGD) which is mainly composed of a copper-polyimide-copper sandwich structure with predefined microfluidic channels and a sealed membrane to control the working gas. Uniform microplasmas of diverse patterns with controlled gas discharge on both flat and curved surfaces are successfully generated in the air atmosphere. The results of thermal and optical characteristics show that this device has low working temperature (around 40 oC) and high chemical reactivity. The μPGD is utilized to maskless etch and deposit various micropatterns with micron spatial resolution. Different micropatterns of photoresist film on both flat glass wafer and curved silicone tube are successfully fabricated by μPGD etching with He/O2 as working gas. Fluorocarbon film with dot arrays is also deposited on curved silicone tube by μPGD with the working gas of He/C3H8. By predefining the geometry of the microplasma array, different micropatterns can be fabricated with good pattern transfer fidelity. Results show that this device is flexible and is able to achieve maskless microfabrication on arbitrary surfaces with controlled gas discharge for various substrate materials, especially biological and heat-sensitive materials.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"106 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115769974","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A high-performance single-chip timing and inertial measurement unit with robust mode-matched gyroscopes 一个高性能的单芯片定时和惯性测量单元与鲁棒模式匹配陀螺仪
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346494
H. Wen, A. Daruwalla, Y. Jeong, Pranav Gupta, Jaehoo Choi, Chang-Shun Liu, F. Ayazi
{"title":"A high-performance single-chip timing and inertial measurement unit with robust mode-matched gyroscopes","authors":"H. Wen, A. Daruwalla, Y. Jeong, Pranav Gupta, Jaehoo Choi, Chang-Shun Liu, F. Ayazi","doi":"10.1109/MEMSYS.2018.8346494","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346494","url":null,"abstract":"This paper presents a single-chip timing and inertial measurement unit (TIMU) with high-frequency modematched gyroscopes, high-bandwidth accelerometers, and a high-frequency high-Q bulk acoustic wave (BAW) timing resonator integrated on a 4.5mm∗5.5mm platform using the HARPSS+ process, which enables vertical, horizontal, and 54°-slanted electrodes with scalable nano-gaps. The TIMU is the first single-chip IMU featuring 3-axis high-frequency quadrature-compensated resonant (i.e. mode-matched) gyroscopes. The 3-axis gyroscopes have high shock and vibration resistance and present sub-1°/√h angle random walk (ARW) and ∼10°/h bias instability (BI) limited by discrete electronics. The 3-axis accelerometers show sub-300μg/√Hz velocity random walk (VRW) and sub-100μg BI. The timing resonator has a high Q of 47k with a high frequency of 85MHz. Further improvements can be achieved with optimized interface electronics to meet high-end application requirements.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"163 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114446147","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 18
LED-based intracerebral optrode for simultaneous optical stimulation and electrophysiological recording 基于led的脑内光电电极，用于同时进行光刺激和电生理记录
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346568
Elisabeth Otte, S. Ayub, O. Paul, P. Rüther
{"title":"LED-based intracerebral optrode for simultaneous optical stimulation and electrophysiological recording","authors":"Elisabeth Otte, S. Ayub, O. Paul, P. Rüther","doi":"10.1109/MEMSYS.2018.8346568","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346568","url":null,"abstract":"We present a new type of optrode based on light-emitting diodes (LED) applying a 70μm-thin multifunctional stiffening structure made of silicon (Si). By combining optical and electrical functionalities in a single implantable device, we successfully addressed the requirement of reduced tissue damage during in vivo applications. The improved stiffener comprises apertures (100 μm diameter) used for confining the illumination area of the integrated LEDs and iridium oxide (IrOx) electrodes (40 μm diameter) for electrophysiological recordings. The novel dual-sided wafer-level micromachining process applies wafer bonding and grinding to process 70-μm-thin Si substrates. The lateral dimensions of the optrodes are defined mainly by the size of the commercial LEDs resulting in a shank width and thickness of 283 μm and 80 μm, respectively. The choice of IrOx as electrode material results in a low average electrical impedance of 43.1 kΩ at 1 kHz. Despite the aperture-confined illumination area, light intensities of 7.85 μW (emittance: 1 mW/mm2) well above the stimulation threshold are achieved at sub-milliwatt electrical power.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114836791","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Stretchable micro-doughnuts Kirigami bioprobe 可拉伸的微型甜甜圈
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346515
Yusuke Morikawa, S. Yamagiwa, H. Sawahata, R. Numano, K. Koida, M. Ishida, T. Kawano
{"title":"Stretchable micro-doughnuts Kirigami bioprobe","authors":"Yusuke Morikawa, S. Yamagiwa, H. Sawahata, R. Numano, K. Koida, M. Ishida, T. Kawano","doi":"10.1109/MEMSYS.2018.8346515","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346515","url":null,"abstract":"We have developed a ‘doughnuts’-shaped stretchable microelectrode array device using a Kirigami structure. The Kirigami device shows the transformation from the two-dimensional (2D) doughnuts shape into the three-dimensional (3D) cylindrical shape. The cylindrical shaped stretchable film is suitable for the sphere or columnar shaped biological tissues with a high adhesion, enabling it to fix the electrodes to the wet biological tissues without slip. We fabricated the doughnuts shaped Kirigami electrode device, and demonstrated the in vivo electrocardiogram (ECG) recording from a beating mouse's heart. In addition to the wrapping feature, our Kirigami device with the small Young's modulus can minimize the device-induced physical stress to the heart, offering low invasive ECG recording compared to conventional elastomer based stretchable devices.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"58 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114986595","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
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