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2018 IEEE Micro Electro Mechanical Systems (MEMS)最新文献

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Bulk modulus measurement of microfluidics by longitudinal bulk acoustic wave sensors 纵向体声波传感器测量微流体体模量
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346690
Yao Lu, Hongxiang Zhang, Yuan Jiang, H. Zhang, W. Pang, Menglun Zhang
{"title":"Bulk modulus measurement of microfluidics by longitudinal bulk acoustic wave sensors","authors":"Yao Lu, Hongxiang Zhang, Yuan Jiang, H. Zhang, W. Pang, Menglun Zhang","doi":"10.1109/MEMSYS.2018.8346690","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346690","url":null,"abstract":"In this paper, we measured bulk modulus of microfluidics using bulk acoustic wave (BAW) MEMS sensors. The 2.5 GHz resonant sensor interacted with fluids by longitudinal bulk acoustic waves. Measurement experiments were carried out on 1 pL glycerol-water sample droplets, and the results were compared with theoretical models. We showed that the longitudinal acoustic wave sensors are sensitive to bulk modulus of microfluidics (sensitivity of 12.42 MHzm2N−1). We also validated that the sensors are insensitive to viscosity, which is another important liquid property usually measured by shear acoustic wave sensors.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"83 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116101273","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
An experiment-based model for focused ion beam simulation and the process design optimization 基于实验的聚焦离子束模拟模型及工艺优化设计
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346595
Yuan Li, Y. Xing, Hui Zhang, Xiaoli Qiu
{"title":"An experiment-based model for focused ion beam simulation and the process design optimization","authors":"Yuan Li, Y. Xing, Hui Zhang, Xiaoli Qiu","doi":"10.1109/MEMSYS.2018.8346595","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346595","url":null,"abstract":"An experiment-based model, which differs from the current curve fitting and particle motion models, is presented for simulating the Focused Ion Beam (FIB) process and guiding the scan strategy and parameter design. This approach applies Gaussian function fitting on both etching and deposition, and builds an expectation difference function to describe the distance changes between the distribution centers of the etching and the redeposition, which shows good performance in solving the redeposition effect and its attenuation. Through a series of basic experiments, we optimize the model parameters and demonstrate that this method can effectively simulate the dynamic process of FIB sputtering. This model and the optimized parameters are further applied to the scan strategy and process parameter optimization for the complex Micro/Nano-structure realizations using FIB.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"119 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116518287","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Validation of output voltage multiplication by using series-connected pizeoelectric elements for physical sensors 用串联的压电元件对物理传感器的输出电压倍增进行验证
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346735
K. Kanda, Taiki Ushita, T. Fujita, K. Maenaka
{"title":"Validation of output voltage multiplication by using series-connected pizeoelectric elements for physical sensors","authors":"K. Kanda, Taiki Ushita, T. Fujita, K. Maenaka","doi":"10.1109/MEMSYS.2018.8346735","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346735","url":null,"abstract":"For the first time, it is experimentally validated that the output voltage from series-connected piezoelectric elements on MEMS structure can be multiplied without degradation. The output voltage has been degraded for conventional devices (piezoelectric voltage-output sensors) based on the series-connected piezoelectric elements because of parasitic capacitances. The elimination of the parasitic capacitance by using not Si but polymer for structural material achieves output voltage multiplication.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122415981","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
MEMS-based near-zero power infrared wireless sensor node 基于mems的近零功率红外无线传感器节点
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346470
Vageeswar Rajaram, Z. Qian, Sungho Kang, N. McGruer, M. Rinaldi
{"title":"MEMS-based near-zero power infrared wireless sensor node","authors":"Vageeswar Rajaram, Z. Qian, Sungho Kang, N. McGruer, M. Rinaldi","doi":"10.1109/MEMSYS.2018.8346470","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346470","url":null,"abstract":"This paper reports on the first demonstration of an infrared (IR) wireless sensor node (WSN) with near-zero standby power consumption. The prototype presented here employs a plasmonically-enhanced micromechanical photoswitch (PMP) that exploits the energy contained in the impinging IR spectral band of interest itself, to perform passive sensing and digitizing functions. The palm-sized IR WSN demonstrated in this work comprises a vacuum-packaged PMP (IR power threshold ∼284 nW, lithographically-defined IR absorptance: ∼89% at 4.6 μm, 0.75 μm bandwidth) connected to a CMOS load-switch which wakes up a coin battery-powered sub 1-GHz wireless microcontroller to transmit data when the IR signal of interest is detected. The standby power consumption for the IR WSN was measured to be just ∼2.6 nW: a >1900X improvement over state-of-the-art pyroelectric IR WSNs, while offering integrated spectral-selectivity. This work represents the first demonstration of an OFF-but-alert WSN that awakens only in the presence of a signal of interest, resulting in near-unlimited battery-life when deployed to detect infrequent but time-critical events.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122693850","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 16
Robust, ultra sensitive MOEMS inertial sensor read out with infrared light 鲁棒，超灵敏的MOEMS惯性传感器读出与红外光
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346715
W. Hortschitz, A. Kainz, G. Kovács, H. Steiner, M. Stifter, T. Sauter, J. Schalko, A. Jachimowicz, F. Keplinger
{"title":"Robust, ultra sensitive MOEMS inertial sensor read out with infrared light","authors":"W. Hortschitz, A. Kainz, G. Kovács, H. Steiner, M. Stifter, T. Sauter, J. Schalko, A. Jachimowicz, F. Keplinger","doi":"10.1109/MEMSYS.2018.8346715","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346715","url":null,"abstract":"High performance applications such as the detection of seismic activity or structural health monitoring require sensors with low resonance frequencies. For micro-electro-mechanical-system (MEMS) accelero-meters and vibration sensors it is crucial to lower the resonance frequency in order to increase its sensitivity or bandwidth. In contrast to commercial devices which exhibit resonance frequencies of more than 500 Hz, we present extremely sensitive, optically read-out devices with resonances down to 45 Hz. This low resonance frequency was mainly achieved by fabricating the complete seismic mass from one single crystal silicon block. Compared to previously reported work the resonance frequency could be lowered from over 940 Hz down to 45 Hz while the resolution was massively increased from 7.6 μg/sqrt(Hz) to 1.17 μg/sqrt(Hz) (@4 Hz).","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"232 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123025530","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Tunable thermo-triboelectric energy harvesting using human body heat for self-powered applications 可调热摩擦电能量收集利用人体热自供电应用
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346643
Dong-Gun Lee
{"title":"Tunable thermo-triboelectric energy harvesting using human body heat for self-powered applications","authors":"Dong-Gun Lee","doi":"10.1109/MEMSYS.2018.8346643","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346643","url":null,"abstract":"We demonstrate a novel tunable thermo-triboelectric energy harvesting system for the use of human body heat as an energy source of self-powered applications. Magneto-Thermoelectric Generator platforms have potential to provide new approach for thermal energy harvesting. The concept of MTG stems from a radically different technology developed by UCLA/KPU research community for harvesting of thermal energy. The proposed approach can convert thermal energy from human body heat into electricity by pairing triboelectric effect and MTG concept. The focus of this research is to determine the technical feasibility of presented technology platform for the consistent and efficient power performance using low temperature gradient from human body heat, including experimental characterization of a prototype fabricated.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128577150","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
High sensitive and large area force plate for ground reaction force measurement of ant running 用于蚂蚁奔跑地面反力测量的高灵敏度、大面积测力板
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346695
S. Kohyama, Hidetoshi Takahashi, T. Takahata, I. Shimoyama
{"title":"High sensitive and large area force plate for ground reaction force measurement of ant running","authors":"S. Kohyama, Hidetoshi Takahashi, T. Takahata, I. Shimoyama","doi":"10.1109/MEMSYS.2018.8346695","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346695","url":null,"abstract":"This paper reports on a MEMS force plate for measurement of total ground reaction force (GRF) of an ant during running. To achieve both high force sensitivity and ensuring area for ant running with several steps, the MEMS force plate consisted of two cantilever chips and one plate which were fabricated separately. The force plate was designed to measure vertical directional force with the force resolution under 0.5 μΝ. Using the fabricated MEMS force plate, we measured the GRF of Messor aciculatus. The results showed that the fluctuation of the ground reaction force was 3.7 % to the body weight of the ant.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128965037","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Experimental investigation of damping factors in 20% scandium-doped aluminum nitride laterally vibrating resonators 20%掺钪氮化铝横向振动谐振器阻尼因子的实验研究
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346673
Zachary Schaffer, L. Colombo, Abhay S. Kochhar, G. Piazza, S. Mishin, Y. Oshmyansky
{"title":"Experimental investigation of damping factors in 20% scandium-doped aluminum nitride laterally vibrating resonators","authors":"Zachary Schaffer, L. Colombo, Abhay S. Kochhar, G. Piazza, S. Mishin, Y. Oshmyansky","doi":"10.1109/MEMSYS.2018.8346673","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346673","url":null,"abstract":"This paper reports experimental investigation of damping factors for 20% Scandium-doped Aluminum Nitride (ScAlN) laterally vibrating resonators (LVRs). ScAlN films for LVRs are very promising since they enable greater electromechanical coupling (kt2) than undoped AlN films (∼ 2X for 20% doping), but have generally exhibited lower quality factors (Qs) [1,2]. This work is the first to study what damping factors impact the performance of these devices and provide preliminary design guidelines to attain high Qs. Different ScAlN LVR geometries are analyzed and devices tested in air, under vacuum, and at cryogenic temperatures (11 K). Anchor losses and thermoelastic damping (TED) are evaluated and compared to AlN LVRs. Similarities in thermal scaling of Qs in ScAlN resonators indicate that the source of TED is similar to AlN devices.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124756170","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
An improved sensitivity AlN microcantilever humidity sensor using interdigital transducers actuated very high resonant mode and graphene oxide sensing layer 一种采用数字间换能器驱动的高谐振模式和氧化石墨烯传感层的灵敏度改进的AlN微悬臂式湿度传感器
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346709
Xianhao Le, Fangyi Ma, Dongsheng Li, Jintao Pang, Zhen Xu, Chao Gao, Jin Xie
{"title":"An improved sensitivity AlN microcantilever humidity sensor using interdigital transducers actuated very high resonant mode and graphene oxide sensing layer","authors":"Xianhao Le, Fangyi Ma, Dongsheng Li, Jintao Pang, Zhen Xu, Chao Gao, Jin Xie","doi":"10.1109/MEMSYS.2018.8346709","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346709","url":null,"abstract":"This paper presents a novel interdigital transducers (IDTs) actuated AlN microcantilever humidity sensor coated with graphene oxide (GO) thin film as sensing layer. Utilizing the IDTs, the microcantilever can operate at very high resonant mode to achieve significant high sensitivity. Compared with the normal electrodes actuated microcantilever sensor with the same size, the sensitivity of the IDTs actuated microcantilever sensor is increased by more than 10 times. Moreover, very little hysteresis, excellent short term repeatability, fast response and short recovery times (less than 10 s) of the sensors are obtained.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129676018","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
A Kirigami-inspired, extremely stretchable, high areal-coverage micro-supercapacitor patch 一个受kirigami启发的，高度可拉伸的，高面积覆盖的微型超级电容器贴片
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346641
Renxiao Xu, Aaron Hung, A. Zverev, Caiwei Shen, Lauren Irie, Geoffrey Ding, Michael Whitmeyer, Liangjie Ren, Brandon Griffin, Jack Melcher, Lily Zheng, X. Zang, Liwei Lin
{"title":"A Kirigami-inspired, extremely stretchable, high areal-coverage micro-supercapacitor patch","authors":"Renxiao Xu, Aaron Hung, A. Zverev, Caiwei Shen, Lauren Irie, Geoffrey Ding, Michael Whitmeyer, Liangjie Ren, Brandon Griffin, Jack Melcher, Lily Zheng, X. Zang, Liwei Lin","doi":"10.1109/MEMSYS.2018.8346641","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346641","url":null,"abstract":"We present an extremely stretchable micro-supercapacitor patch (reversible stretchability >282.5%, with <2% change in capacitance retention) with high areal-coverage of functional electronic components (76.2%). Our device is 2.4–9.4 times more stretchable than the state-of-the-art stretchable supercapacitors using the Accordion construct, and enjoys 4 times higher areal-coverage than the previously reported stretchable supercapacitors with the Island-Bridge construct. The Kirigami-inspired design is the key to both high stretchability and high areal-coverage. We envision our stretchable micro-supercapacitor patch (and other power-supply microdevices with a similar design) to be highly desirable in future flexible, stretchable, and wearable systems.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"90 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129892412","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
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