用串联的压电元件对物理传感器的输出电压倍增进行验证

2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI:10.1109/MEMSYS.2018.8346735

K. Kanda, Taiki Ushita, T. Fujita, K. Maenaka

{"title":"用串联的压电元件对物理传感器的输出电压倍增进行验证","authors":"K. Kanda, Taiki Ushita, T. Fujita, K. Maenaka","doi":"10.1109/MEMSYS.2018.8346735","DOIUrl":null,"url":null,"abstract":"For the first time, it is experimentally validated that the output voltage from series-connected piezoelectric elements on MEMS structure can be multiplied without degradation. The output voltage has been degraded for conventional devices (piezoelectric voltage-output sensors) based on the series-connected piezoelectric elements because of parasitic capacitances. The elimination of the parasitic capacitance by using not Si but polymer for structural material achieves output voltage multiplication.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Validation of output voltage multiplication by using series-connected pizeoelectric elements for physical sensors\",\"authors\":\"K. Kanda, Taiki Ushita, T. Fujita, K. Maenaka\",\"doi\":\"10.1109/MEMSYS.2018.8346735\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"For the first time, it is experimentally validated that the output voltage from series-connected piezoelectric elements on MEMS structure can be multiplied without degradation. The output voltage has been degraded for conventional devices (piezoelectric voltage-output sensors) based on the series-connected piezoelectric elements because of parasitic capacitances. The elimination of the parasitic capacitance by using not Si but polymer for structural material achieves output voltage multiplication.\",\"PeriodicalId\":400754,\"journal\":{\"name\":\"2018 IEEE Micro Electro Mechanical Systems (MEMS)\",\"volume\":\"17 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 IEEE Micro Electro Mechanical Systems (MEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2018.8346735\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2018.8346735","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

首次通过实验验证了MEMS结构上串联压电元件的输出电压可以成倍增加而不降低。由于寄生电容的存在，基于压电元件串联的传统器件(压电电压输出传感器)的输出电压出现了下降。采用聚合物而非硅作为结构材料消除了寄生电容，实现了输出电压倍增。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Validation of output voltage multiplication by using series-connected pizeoelectric elements for physical sensors

For the first time, it is experimentally validated that the output voltage from series-connected piezoelectric elements on MEMS structure can be multiplied without degradation. The output voltage has been degraded for conventional devices (piezoelectric voltage-output sensors) based on the series-connected piezoelectric elements because of parasitic capacitances. The elimination of the parasitic capacitance by using not Si but polymer for structural material achieves output voltage multiplication.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2018 IEEE Micro Electro Mechanical Systems (MEMS)

自引率

0.00%

发文量