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2018 IEEE Micro Electro Mechanical Systems (MEMS)最新文献

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Pattern projector using superposition of double microlens arrays for hybrid 3D endoscope 混合三维内窥镜双微透镜阵列叠加投影
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 2018-01-21 DOI: 10.1109/MEMSYS.2018.8346578
Sung-Pyo Yang, Jae-Bum Kim, K. Jeong
{"title":"Pattern projector using superposition of double microlens arrays for hybrid 3D endoscope","authors":"Sung-Pyo Yang, Jae-Bum Kim, K. Jeong","doi":"10.1109/MEMSYS.2018.8346578","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346578","url":null,"abstract":"This work reports the superposition of double microlens arrays (MLAs) to generate high-density irregular dot pattern projector for hybrid three-dimensional endoscope. MLAs were fabricated on a large scale with thermoplastic photoresist (PR) with Teflon coating and additional parylene coating to have high fill-factor and curvature. Fabricated MLAs were aligned with dynamic rotation between them to generate high-density diffraction pattern with uniformity using monochromatic laser light source. With projected structured laser pattern, 3D object with no texture on its surface was able to calculate the gradually changing disparity values along the object surface.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121698064","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Ultra sensitive optomechanical microdisk resonators with very large scale integration process 具有超大规模集成工艺的超灵敏光机械微盘谐振器
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 2018-01-21 DOI: 10.1109/MEMSYS.2018.8346687
M. Hermouet, M. Sansa, L. Banniard, A. Fafin, M. Gely, P. Allain, E. G. Santos, I. Favero, T. Alava, G. Jourdan, S. Hentz
{"title":"Ultra sensitive optomechanical microdisk resonators with very large scale integration process","authors":"M. Hermouet, M. Sansa, L. Banniard, A. Fafin, M. Gely, P. Allain, E. G. Santos, I. Favero, T. Alava, G. Jourdan, S. Hentz","doi":"10.1109/MEMSYS.2018.8346687","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346687","url":null,"abstract":"Nano-optomechanical resonators have demonstrated in the last few years their enormous potential for applications such as mass and chemical sensing. Operation in liquid of such resonators has been demonstrated very recently by two groups, showing that biosensing could potentially be performed. Nonetheless, going a step further towards the next generation of high-end biosensors requires scaling up the fabrication process and being able to perform this type of measurement routinely. This paper reports the first Very Large Scale Integration silicon optomechanical microdisk resonators with state-of-the-art performance: high optical-Q and optomechanical coupling allow the Brownian noise of these resonators to be easily resolved at few 100 MHz in ambient air with many different devices and we show how optical performance is maintained in liquid.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"32 11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124820193","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Wireless closed-loop control of centrifugo-pneumatic valving towards large-scale microfluidic process integration 面向大规模微流控过程集成的离心-气动阀无线闭环控制
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 2018-01-21 DOI: 10.1109/MEMSYS.2018.8346781
D. Kinahan, S. M. Delgado, Lourdes Albina Nirupa Julius, Adam J. Mallette, David Saenz-Ardila, Rohit Mishra, C. Miyazaki, J. Korvink, D. Mager, J. Ducrée
{"title":"Wireless closed-loop control of centrifugo-pneumatic valving towards large-scale microfluidic process integration","authors":"D. Kinahan, S. M. Delgado, Lourdes Albina Nirupa Julius, Adam J. Mallette, David Saenz-Ardila, Rohit Mishra, C. Miyazaki, J. Korvink, D. Mager, J. Ducrée","doi":"10.1109/MEMSYS.2018.8346781","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346781","url":null,"abstract":"We present for the first time an integrated wirelessly powered Arduino processor and Bluetooth interface that are co-rotated with the cartridge to allow large-scale process integration on a centrifugal microfluidic platform. This highly modular, electronically controlled “Lab-on-a-Disc” system (eLoaD) can independently actuate up to 128 normally-closed valves by an array of microheaters during rotation for comprehensive, highly parallelized sample-to-answer automation. Additionally, we implement real-time optical (colour intensity) measurement for closed-loop control of liquid handling, sample preparation and detection.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"76 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127459710","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
First microphones based on an in-plane deflecting micro-diaphragm and piezoresistive nano-gauges 第一个基于面内偏转微膜片和压阻式纳米计的麦克风
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 2018-01-21 DOI: 10.1109/MEMSYS.2018.8346531
H. Lhermet, T. Verdot, A. Berthelot, B. Desloges, F. Souchon
{"title":"First microphones based on an in-plane deflecting micro-diaphragm and piezoresistive nano-gauges","authors":"H. Lhermet, T. Verdot, A. Berthelot, B. Desloges, F. Souchon","doi":"10.1109/MEMSYS.2018.8346531","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346531","url":null,"abstract":"For the first time, functional in-plane deflection microphones have been fabricated, validating a new concept based on a diaphragm moving in the plane of the substrate and inducing strain on piezoresistive Si nano-gauges. Such architecture, integrating furthermore a back cavity, leads to microphones with a smaller footprint that preserve at the same time high performance, and is therefore adapted for the achievement of miniature sensors and their integration for medical applications or consumer electronics.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131497573","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Laser-actuated centrifugo-pneumatic flow control towards ‘sample-to-answer’ integrated detection of multi-marker panels at the point-of-care 激光驱动的离心机-气动流量控制对多标记板在护理点的“样品到答案”集成检测
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 2018-01-21 DOI: 10.1109/MEMSYS.2018.8346774
Rohit Mishra, Glen Reilly, M. Agnew, Alexander Garvey, C. Rogers, Elaine Andrade, Hui Ma, Sean M. Fitzgerald, Julia Zapatero, R. O’Kennedy, J. Ducrée
{"title":"Laser-actuated centrifugo-pneumatic flow control towards ‘sample-to-answer’ integrated detection of multi-marker panels at the point-of-care","authors":"Rohit Mishra, Glen Reilly, M. Agnew, Alexander Garvey, C. Rogers, Elaine Andrade, Hui Ma, Sean M. Fitzgerald, Julia Zapatero, R. O’Kennedy, J. Ducrée","doi":"10.1109/MEMSYS.2018.8346774","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346774","url":null,"abstract":"Point-of-care diagnostics devices require user-friendly automation of multi-step / multi-reagent bioana-lytical protocols. We demonstrate, for the first time, Laser-actuated, Centrifugo-Pneumatic Valves (LCPVs) which open on-demand by ablating a remotely connected polymeric membrane with an instrument-based laser. Due to its small footprint, isolation of radiation-induced heating from the biological fluids and independence of radial position & contact-angle, the novel LCPV technology enables large-scale integration of flexibly customizable and operationally robust centrifugal microfluidic “Lab-on-a-Disc” (LoaD) systems. As a pilot application, we demonstrate the detection of Fatty Acid Binding Protein and Myeloperoxidase, both potential biomarkers used for cardiovascular disease (CVD) determination.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114807576","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Microneedle-based system for minimally invasive continuous monitoring of glucose in the dermal interstitial fluid 用于真皮间质液中葡萄糖的微创连续监测的微针系统
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 2018-01-01 DOI: 10.1109/MEMSYS.2018.8346574
F. Ribet, G. Stemme, N. Roxhed
{"title":"Microneedle-based system for minimally invasive continuous monitoring of glucose in the dermal interstitial fluid","authors":"F. Ribet, G. Stemme, N. Roxhed","doi":"10.1109/MEMSYS.2018.8346574","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346574","url":null,"abstract":"We present a minimally invasive continuous glucose monitoring (CGM) device. The system consists in an ultra-miniaturized electrochemical sensor probe (70 × 700 × 50 μm3) inserted into the lumen of a hollow silicon microneedle. The implantable portion of the system is 50-fold smaller than state-of-the-art commercial products, thus enabling glucose monitoring in the dermis and a less invasive insertion procedure. Passive interstitial fluid extraction is achieved, making the daily use of this system practically viable. Moreover, the sensor positioning provides minimal delay in tracking glycaemia (5–10 minutes lag), due to the minimal distance between sensing electrodes and microneedle opening. The demonstrated system has therefore the potential to enable minimally invasive, fast and reliable CGM in patients affected by diabetes.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125745204","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Sulfonation of Poly(phthalazinone ether ketone) for MEMS humidity sensor MEMS湿度传感器用聚酞嗪酮磺化研究
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 2018-01-01 DOI: 10.1109/MEMSYS.2018.8346605
Xiaohui Leng, Yiming Wang, Fei Wang
{"title":"Sulfonation of Poly(phthalazinone ether ketone) for MEMS humidity sensor","authors":"Xiaohui Leng, Yiming Wang, Fei Wang","doi":"10.1109/MEMSYS.2018.8346605","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346605","url":null,"abstract":"A simple sulfonation process for Poly(phthalazinone ether ketone) (PPEK) was proposed with concentrated sulfonic acid. Various degrees of sulfonation (DS) were realized through the control of reaction time and temperature. Then, sulfonated PPEK (SPPEK) was applied in humidity sensors with MEMS electrodes. Both spray-coating and drop-casting methods were used to optimize the sensing performance. DS influence on the behavior of humidity sensors was investigated with the optimum coating method.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123519138","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Soft X-ray-charged multilayered piezoelectret with embedded electrode for push-button energy harvesting 带有嵌入式电极的软x射线多层压电体，用于按钮能量收集
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346637
Jia Lu, Yuji Suzuki
{"title":"Soft X-ray-charged multilayered piezoelectret with embedded electrode for push-button energy harvesting","authors":"Jia Lu, Yuji Suzuki","doi":"10.1109/MEMSYS.2018.8346637","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346637","url":null,"abstract":"In this report, we propose a push-button-type kinetic energy harvester using a soft-X-ray-charged multilayered piezoelectret. With the aid of embedded electrodes, the bias voltage is directly applied to each unit cell. With our 9-layer early prototype, output power of 9.9 μJ has been obtained for 0.75 mm displacement within 0.3 s. d33 as high as 14000 pC/N is realized, which is 10 times higher than that for previous piezoelectrets. Power generation by pushing with a finger has also been demonstrated.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115323600","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Gas sensor based on a metal oxide nanowire forest built on a suspended carbon nano-heater 基于悬浮碳纳米加热器上的金属氧化物纳米线森林的气体传感器
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346703
Y. Lim, Seungwoo Lee, Yeong Min Kwon, J. M. Baik, Heungjoo Shin
{"title":"Gas sensor based on a metal oxide nanowire forest built on a suspended carbon nano-heater","authors":"Y. Lim, Seungwoo Lee, Yeong Min Kwon, J. M. Baik, Heungjoo Shin","doi":"10.1109/MEMSYS.2018.8346703","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346703","url":null,"abstract":"This paper reports a novel metal oxide nanowire (MOx NW) based gas senor built on a suspended carbon nanowire heater allowing ultra-low power consumption. This sensing platform was fabricated using only wafer level batch fabrication processes such as carbon-MEMS, atomic layer deposition, and hydrothermal growth processes. Owing to the mechanical rigidity, the suspended carbon nanowire allows selective circumferential growth of MOx NWs on its surface. The suspended carbon NW and MOx NWs are electrically separated with a thin HfO2 layer. In addition, the suspended high-aspect-ratio geometry of the carbon NW enables MOx NWs to be heated with ultra-low power Joule heating. The architecture of the suspended nanowire forest ensures efficient gas access to the sensing sites, detecting NO2 as low as 100 ppb.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"4 23","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120828062","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Microneedle roller electrode array (M-REA): A new tool for in vivo low-voltage electric gene delivery 微针滚轮电极阵列(M-REA):一种体内低压基因传递的新工具
2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2018.8346572
D. Huang, Deyao Zhao, Yuanyu Huang, Zicai Liang, Zhihong Li
{"title":"Microneedle roller electrode array (M-REA): A new tool for in vivo low-voltage electric gene delivery","authors":"D. Huang, Deyao Zhao, Yuanyu Huang, Zicai Liang, Zhihong Li","doi":"10.1109/MEMSYS.2018.8346572","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346572","url":null,"abstract":"This paper reports a novel device, so-called microneedle roller electrode array (M-REA), for minimally invasive in vivo electric gene delivery, which utilizes parallel circular blades with microneedle arrays on the edge as electrodes. The microneedle arrays are fabricated by planar laser micromachining. Owing to reduced resistance by penetrating stratum corneum and small gaps between electrodes, electric gene delivery by electroporation can be achieved under low voltage. Additionally, our device provides ability of large area electroporation and causes less damage on the target tissue, benefiting from rolling operation, less invasiveness, good biocompatibility and low voltage. Furthermore, low cost fabrication and convenient operation offer vast potential for practical clinical applications.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127270043","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
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