Sulfonation of Poly(phthalazinone ether ketone) for MEMS humidity sensor

Abstract

A simple sulfonation process for Poly(phthalazinone ether ketone) (PPEK) was proposed with concentrated sulfonic acid. Various degrees of sulfonation (DS) were realized through the control of reaction time and temperature. Then, sulfonated PPEK (SPPEK) was applied in humidity sensors with MEMS electrodes. Both spray-coating and drop-casting methods were used to optimize the sensing performance. DS influence on the behavior of humidity sensors was investigated with the optimum coating method.