基于sno2改性MoS2纳米复合材料的低湿度超灵敏湿度传感器

2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI:10.1109/MEMSYS.2018.8346705

Ya-Lan Zhao, Bin Yang, Jingquan Liu, Xiang Chen, Xiaolin Wang, Chunsheng Yang

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引用次数: 1

摘要

本文报道了一种用于低湿检测环境的超灵敏电容式湿度传感器，该传感器采用SnO2修饰的MoS2 (SnO2/MoS2)杂化纳米复合薄膜作为传感层，并在蓝宝石衬底上采用窄间隙为15 μm的数字间电极。测试结果表明，SnO2/MoS2(10:1)复合材料的传感器在0 ~ 20%相对湿度(RH)范围内灵敏度最高，为387.5 μF/%RH。据我们所知，在低湿度范围内，该灵敏度值高于所有报道的湿度传感器。此外，湿度传感器还具有响应快(15s)、滞后小、重复性好等特点。

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An ultrasensitive humidity sensor based on SnO2-modified MoS2 nanocomposite at low-humidity range

This paper reports an ultrasensitive capacitive humidity sensor for low-humidity detecting environment, which employs SnO2-modified MoS2 (SnO2/MoS2) hybrid nanocomposite film as sensing layer and interdigital electrodes with narrow gap of 15 μm on sapphire substrate. The testing results show that the sensor of SnO2/MoS2 (10: 1) composite has the best sensitivity of 387.5 μF/%RH at the humidity range of 0–20% relative humidity (RH). To our best knowledge, this sensitivity value is higher than that of all reported humidity sensors at low-humidity range. Moreover, the humidity sensor also has fast response (15s), little hysteresis and good repeatability.

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来源期刊

2018 IEEE Micro Electro Mechanical Systems (MEMS)

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