{"title":"The Effect of Entrapped Krypton 85 Gas on Device Reliability","authors":"D. Fisch, T. Mozdzen, Gerow Roberts","doi":"10.1109/IRPS.1983.361968","DOIUrl":"https://doi.org/10.1109/IRPS.1983.361968","url":null,"abstract":"The effect of entrapped Kr85 radioactive gas upon the threshold voltage and junction leakage of MOS transistors is quantified through device modeling and accelerated testing. The interactions of transistor channel length, channel width, oxide thickness, radiation level, and exposure time are experimentally determined. A mathematical model is developed which predicts threshold voltage shifts as a function of these processing variables and the amount of entrapped Kr85 gas. This model is used to establish, from a reliability standpoint, acceptable levels of entrapped Kr85 for current and new generation devices.","PeriodicalId":334813,"journal":{"name":"21st International Reliability Physics Symposium","volume":"26 3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1983-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130362201","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
M. Luciano, W. Abadeer, T. Roy, J. M. Bauer, P. J. Czahor
{"title":"A Degradation Mechanism for Threshold Voltage Asymmetry and Subthreshold Leakage Slope with Reliability Implications","authors":"M. Luciano, W. Abadeer, T. Roy, J. M. Bauer, P. J. Czahor","doi":"10.1109/IRPS.1983.361992","DOIUrl":"https://doi.org/10.1109/IRPS.1983.361992","url":null,"abstract":"Degradation in subthreshold leakage slope and increased threshold voltage asymmetry, between forward and reverse directions, could occur in short-channel FET devices when operating, even for a very short, at sustaining conditions. With this degradation, devices become more susceptible to channel and substrate hot electron effects. Failure analysis of devices that exhibited these electrical characteristics revealed the presence of a surface defect in the channel at the junction of the diffusion being biased. The cause of this defect, the techniques used to delineate its presence and its effects on the device characteristics will be discussed.","PeriodicalId":334813,"journal":{"name":"21st International Reliability Physics Symposium","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1983-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126580220","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"An Appraisal of High Temperature Humidity Stress Tests for Assessing Plastic Encapsulated Semiconductor Components","authors":"R. Merrett, J. P. Bryant, R. Studd","doi":"10.1109/IRPS.1983.361964","DOIUrl":"https://doi.org/10.1109/IRPS.1983.361964","url":null,"abstract":"Very high temperature, high humidity lifetests and saturated storage ('pressure pot') tests are increasingly being adopted as rapid replacements for the standard 85°C/85% RH lifetests used to assess the susceptibility of plastic encapsulated ICs to moisture. It has also been suggested that a reduction in test time could be achieved by the detection of debonding between the plastic and the die, since debonding may be required to initiate the processes which eventually lead to failure. To evaluate the alternative techniques, CMOS from 6 manufacturers has been subjected to a series of biased lifetests up to 131°C/90% RH and to unbiased saturated storage tests up to 131°C, and a capacitance technique was used to detect the onset of debonding between the plastic and the die. It is concluded that debonding is only a necessary precondition for functional failure during (i) saturated storage tests and (ii) lifetests on specimens having a passivation which is defect free and either contains no phosphorus or has a low phosphorus content, and that in both cases corrosion will be confined to the bond pads. Such corrosion was produced by lifetests on oxide-passivated components, but the majority of failures during these tests were associated with two other corrosion features, namely localised corrosion of passivated tracks and uniform corrosion of all cathodic tracks, neither of which required debonding. There is evidence that the localised corrosion is associated with passivation defects and the uniform corrosion with the presence of phosphorus.","PeriodicalId":334813,"journal":{"name":"21st International Reliability Physics Symposium","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1983-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126037664","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Imaging Latch-Up Sites in LSI CMOS with a Laser Photoscanner","authors":"D. J. Burns, Jeffrey M. Kendall","doi":"10.1109/IRPS.1983.361971","DOIUrl":"https://doi.org/10.1109/IRPS.1983.361971","url":null,"abstract":"A non-destructive laser photoscanning technique has been used to analyze electrically induced latch-up circuit paths in a variety of commercially available bulk CMOS devices. The method and results are compared to those reported by others using electron beam induced current and liquid crystal techniques.","PeriodicalId":334813,"journal":{"name":"21st International Reliability Physics Symposium","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1983-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129061566","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"The Application of a Dynamic Technique to the Study of Electromigration Kinetics","authors":"R. Pasco, J. A. Schwarz","doi":"10.1109/IRPS.1983.361955","DOIUrl":"https://doi.org/10.1109/IRPS.1983.361955","url":null,"abstract":"A temperature-ramp technique is presented that enables determination of the kinetic parameters for electromigration processes. With this method, pre-exponentials and activation energies can be measured in a single experiment requiring a few hours. The technique is applicable to both practical and fundamental studies of electromigration. For example, in terms of the former, reliability factors for conductor lifetimes can be readily determined. As far as the latter, new conductor compositions can be rapidly screened to ascertain their electromigration behavior. Temperature-ramp Resistance Analysis to Characterize Electromigration (TRACE) has been applied to thin-film aluminum conductors. Results have yielded activation energies in agreement with literature values. Furthermore, the TRACE results have been used, along with resistivity results from the literature, to determine the current density effect on the pre-exponential factor. The value of the current density exponent thus determined is in accord with the range reported in the literature for Mean Time to Failure (MTF) experiments. The TRACE technique has also been used to determine the effect of hydrogen ambients on electromigration damage (EMD) kinetics for both aluminum and Al-2%Cu thin-film conductors. The effects of hydrogen ambients on EMD kinetics have been determined to be more complex than suggested by prior results in the literature.","PeriodicalId":334813,"journal":{"name":"21st International Reliability Physics Symposium","volume":"108 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1983-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121949384","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Mo-Gate MOS Devices Stability Under Long-Term Positive Bias-Temperature Stressing Test","authors":"T. Nozaki, H. Okabayashi, K. Higuchi","doi":"10.1109/IRPS.1983.361981","DOIUrl":"https://doi.org/10.1109/IRPS.1983.361981","url":null,"abstract":"To examine Mo-gate devices stability, long-term positive bias-temperature stressing tests were made. Degradation modes, two kinds of negative flat-band voltage shifts and a positive threshold voltage shift originating from surface state generation, and their dependence on device structures, such as Mo film thickness and gate length, were clarified. Device lifetime estimation was made on the basis of dagradation mode analysis and bias-temperature stressing test results. Degradation origin is discussed.","PeriodicalId":334813,"journal":{"name":"21st International Reliability Physics Symposium","volume":"277 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1983-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122763309","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
W. Swartz, J. Linn, J. M. Ammons, M. Kovac, K. Wilson
{"title":"The Adsorption of Water on Mietallic Packages","authors":"W. Swartz, J. Linn, J. M. Ammons, M. Kovac, K. Wilson","doi":"10.1109/IRPS.1983.361961","DOIUrl":"https://doi.org/10.1109/IRPS.1983.361961","url":null,"abstract":"This study presents data on both the chemical and physical processes of water adsorption/desorption on gold plated Kovar lids under various conditions of temperature cycling and ambients. In order to distinguish between chemical and physical adsorption of water on the surface, two analytical techniques have been employed. X-ray photoelectron spectroscopy (XPS), which is sensitive to a depth of approximately 20Å, provides the chemical data while the physical data are available via a quartz crystal oscillator technique which is sensitive to 1 Å (equivalent) of water on the surface. The data indicate that amounts of surface water can vary by more than an order of magnitude depending on materials and processing history. Under various operatinig conditions this surface water can be freed and thereby contribute to moisture related failure mechanisms.","PeriodicalId":334813,"journal":{"name":"21st International Reliability Physics Symposium","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1983-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125902280","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"A Source of Degradation of Plastic Encapsulated Devices","authors":"G. Kalmár, Z. Nényei","doi":"10.1109/IRPS.1983.361988","DOIUrl":"https://doi.org/10.1109/IRPS.1983.361988","url":null,"abstract":"Some chemical degradation effects in plastic encapsulated semiconductor devices are analysed by the use of pressurecooker tests. After summarising the possible sources of chlorine contamination and its degradation effects, our new results are presented indicating that chlorine contamination of semiconductor devices can also be caused by some washing and cleaning operations. Considering the sensitivity of semiconductor devices in plastic package against different chlorinated hydrocarbons, a group of safe cleaning agents is defined and recomended to device users and manufacturers. A CONSIDERABLE ATTENTION HAS BEEN PAID recently to the effects and origins of chlorine contamination of semiconductor devices. Failure analysis with dedicated instruments /EDS, SEM/ have shown the presence of chlorine in several degraded devices. It has been found, that the interconnecting metallization of semiconductor devices /Au-Al and Al-Al systems/ corrodes incomparably faster if chlorine impurities are present in addition to moisture traces. As possible sources of the chloride contamination mostly impurities, originating from the chip technológy and assembly or the encapsulat ing plastic material itself /-and in special cases , at devices built in circuits, the salt envia ronment-/ has been made responsible. 1,2 In this paper we intend to call attention to some physicochemical and chemical conditions which shall be observed in order to avoid chloride contamination during the cleaning, degreasing and plating operations of the plastic encapsulated devices, and also at post solder cleaning of assembled printed circuit boards.","PeriodicalId":334813,"journal":{"name":"21st International Reliability Physics Symposium","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1983-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128420527","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Implications QF a Model for Optimum Burn-In","authors":"A. Wager, D. L. Thompson, A. Forcier","doi":"10.1109/IRPS.1983.361998","DOIUrl":"https://doi.org/10.1109/IRPS.1983.361998","url":null,"abstract":"The importance of burn-in as a screen to reduce failure rates (particularly early fails) of LSI/VLSI devices, and thereby achieve reliability objectives, is discussed. A mathematical model is described wich predicts the burn-in duration required to achieve any desired field reliability improvement. Based on a Weibull temporal fail distribution, the effects of voltage and temperature acceleration and escapes are included. Escapes -- those devices which are delivered incompletely burned-in or with undetected fails due either to inadequate stress or test procedures -- are shown to be the key factor limiting improvement in early failure rates (EFR). The model is compared to 1980 field data which reflect EFR sensitivity to escape levels. The usefulness of the model for examining the sensitivity of burn-in parameters is demonstrated. Finally, a strategy of In Situ test as a means of controlling escapes is discussed.","PeriodicalId":334813,"journal":{"name":"21st International Reliability Physics Symposium","volume":"91 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1983-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132787537","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Effects of Substrate Thermal Characteristics on the Electromigration Behavior of Al Thin Film Conductors","authors":"C. J. Wu, M. McNutt","doi":"10.1109/IRPS.1983.361956","DOIUrl":"https://doi.org/10.1109/IRPS.1983.361956","url":null,"abstract":"Electromigration failure in aluminum conductors is strongly temperature activated, and reliable levels of current density do significantly raise the conductor temperature. However, the temperature increase and its ultimate effect on the conductor lifetime is related to device and substrate structure and to the pulsewidth and duty cycle of pulsed currents. This work describes simple but accurate models for thermal buildup in typical IC structures due to both constant and pulsed currents. The results are then included in predictive models for pulsed current electromigration lifetime. These models include temperature cycling and its effect on damage relaxation between pulses, and they are built up in a modular fashion from the basic constant current model. Experimental data is shown to support the theory.","PeriodicalId":334813,"journal":{"name":"21st International Reliability Physics Symposium","volume":"84 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1983-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132227399","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}