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21st International Reliability Physics Symposium最新文献

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Electromigration-Induced Extrusions in Multi-Level Technologies 多层次电迁移诱导挤压技术
21st International Reliability Physics Symposium Pub Date : 1983-04-01 DOI: 10.1109/IRPS.1983.361985
J. Lloyd
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引用次数: 5
Precision VLSI Cross-Sectioning and Staining 精密VLSI横切与染色
21st International Reliability Physics Symposium Pub Date : 1900-01-01 DOI: 10.1109/irps.1983.362006
T. Mills
{"title":"Precision VLSI Cross-Sectioning and Staining","authors":"T. Mills","doi":"10.1109/irps.1983.362006","DOIUrl":"https://doi.org/10.1109/irps.1983.362006","url":null,"abstract":"Last year precision VLSI cross-sectioning and staining was introduced to IEEE IRPS. Included in this year's paper is how to implement a 4X productivity improvement of this cross-sectioning technique. Staining techniques are broken down so a failure analyst and/or process engineer can easily formulate and fine tune a stain, also a list of most commonly used stain formulations.","PeriodicalId":334813,"journal":{"name":"21st International Reliability Physics Symposium","volume":"4052 3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127553143","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Mass Spectrometric Measurement of Moisture Workshop 质谱测量湿度车间
21st International Reliability Physics Symposium Pub Date : 1900-01-01 DOI: 10.1109/irps.1983.361993
B. A. M. Radc, R. Harris
{"title":"Mass Spectrometric Measurement of Moisture Workshop","authors":"B. A. M. Radc, R. Harris","doi":"10.1109/irps.1983.361993","DOIUrl":"https://doi.org/10.1109/irps.1983.361993","url":null,"abstract":"","PeriodicalId":334813,"journal":{"name":"21st International Reliability Physics Symposium","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127457743","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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