Precision VLSI Cross-Sectioning and Staining

Abstract

Last year precision VLSI cross-sectioning and staining was introduced to IEEE IRPS. Included in this year's paper is how to implement a 4X productivity improvement of this cross-sectioning technique. Staining techniques are broken down so a failure analyst and/or process engineer can easily formulate and fine tune a stain, also a list of most commonly used stain formulations.