评价塑料封装半导体元件的高温湿应力试验

R. Merrett, J. P. Bryant, R. Studd
{"title":"评价塑料封装半导体元件的高温湿应力试验","authors":"R. Merrett, J. P. Bryant, R. Studd","doi":"10.1109/IRPS.1983.361964","DOIUrl":null,"url":null,"abstract":"Very high temperature, high humidity lifetests and saturated storage ('pressure pot') tests are increasingly being adopted as rapid replacements for the standard 85°C/85% RH lifetests used to assess the susceptibility of plastic encapsulated ICs to moisture. It has also been suggested that a reduction in test time could be achieved by the detection of debonding between the plastic and the die, since debonding may be required to initiate the processes which eventually lead to failure. To evaluate the alternative techniques, CMOS from 6 manufacturers has been subjected to a series of biased lifetests up to 131°C/90% RH and to unbiased saturated storage tests up to 131°C, and a capacitance technique was used to detect the onset of debonding between the plastic and the die. It is concluded that debonding is only a necessary precondition for functional failure during (i) saturated storage tests and (ii) lifetests on specimens having a passivation which is defect free and either contains no phosphorus or has a low phosphorus content, and that in both cases corrosion will be confined to the bond pads. Such corrosion was produced by lifetests on oxide-passivated components, but the majority of failures during these tests were associated with two other corrosion features, namely localised corrosion of passivated tracks and uniform corrosion of all cathodic tracks, neither of which required debonding. There is evidence that the localised corrosion is associated with passivation defects and the uniform corrosion with the presence of phosphorus.","PeriodicalId":334813,"journal":{"name":"21st International Reliability Physics Symposium","volume":"7 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1983-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"16","resultStr":"{\"title\":\"An Appraisal of High Temperature Humidity Stress Tests for Assessing Plastic Encapsulated Semiconductor Components\",\"authors\":\"R. Merrett, J. P. Bryant, R. Studd\",\"doi\":\"10.1109/IRPS.1983.361964\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Very high temperature, high humidity lifetests and saturated storage ('pressure pot') tests are increasingly being adopted as rapid replacements for the standard 85°C/85% RH lifetests used to assess the susceptibility of plastic encapsulated ICs to moisture. It has also been suggested that a reduction in test time could be achieved by the detection of debonding between the plastic and the die, since debonding may be required to initiate the processes which eventually lead to failure. To evaluate the alternative techniques, CMOS from 6 manufacturers has been subjected to a series of biased lifetests up to 131°C/90% RH and to unbiased saturated storage tests up to 131°C, and a capacitance technique was used to detect the onset of debonding between the plastic and the die. It is concluded that debonding is only a necessary precondition for functional failure during (i) saturated storage tests and (ii) lifetests on specimens having a passivation which is defect free and either contains no phosphorus or has a low phosphorus content, and that in both cases corrosion will be confined to the bond pads. Such corrosion was produced by lifetests on oxide-passivated components, but the majority of failures during these tests were associated with two other corrosion features, namely localised corrosion of passivated tracks and uniform corrosion of all cathodic tracks, neither of which required debonding. There is evidence that the localised corrosion is associated with passivation defects and the uniform corrosion with the presence of phosphorus.\",\"PeriodicalId\":334813,\"journal\":{\"name\":\"21st International Reliability Physics Symposium\",\"volume\":\"7 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1983-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"16\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"21st International Reliability Physics Symposium\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IRPS.1983.361964\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"21st International Reliability Physics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRPS.1983.361964","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 16

摘要

超高温、高湿寿命测试和饱和储存(“压力罐”)测试越来越多地被采用,作为标准85°C/85% RH寿命测试的快速替代,用于评估塑料封装ic对水分的敏感性。也有人建议,减少测试时间可以通过检测塑料和模具之间的脱粘来实现,因为脱粘可能需要启动最终导致失败的过程。为了评估替代技术,来自6家制造商的CMOS进行了高达131°C/90% RH的一系列偏置寿命测试和高达131°C的无偏置饱和存储测试,并使用电容技术来检测塑料和模具之间的脱粘。得出的结论是,在(i)饱和储存试验和(ii)无缺陷、不含磷或磷含量低的钝化试样的寿命试验中,脱粘只是功能失效的必要前提,在这两种情况下,腐蚀都将局限于粘结垫。这种腐蚀是由氧化钝化组件的寿命试验产生的,但这些试验中的大多数失效与另外两个腐蚀特征有关,即钝化轨道的局部腐蚀和所有阴极轨道的均匀腐蚀,两者都不需要剥离。有证据表明,局部腐蚀与钝化缺陷有关,而均匀腐蚀与磷的存在有关。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
An Appraisal of High Temperature Humidity Stress Tests for Assessing Plastic Encapsulated Semiconductor Components
Very high temperature, high humidity lifetests and saturated storage ('pressure pot') tests are increasingly being adopted as rapid replacements for the standard 85°C/85% RH lifetests used to assess the susceptibility of plastic encapsulated ICs to moisture. It has also been suggested that a reduction in test time could be achieved by the detection of debonding between the plastic and the die, since debonding may be required to initiate the processes which eventually lead to failure. To evaluate the alternative techniques, CMOS from 6 manufacturers has been subjected to a series of biased lifetests up to 131°C/90% RH and to unbiased saturated storage tests up to 131°C, and a capacitance technique was used to detect the onset of debonding between the plastic and the die. It is concluded that debonding is only a necessary precondition for functional failure during (i) saturated storage tests and (ii) lifetests on specimens having a passivation which is defect free and either contains no phosphorus or has a low phosphorus content, and that in both cases corrosion will be confined to the bond pads. Such corrosion was produced by lifetests on oxide-passivated components, but the majority of failures during these tests were associated with two other corrosion features, namely localised corrosion of passivated tracks and uniform corrosion of all cathodic tracks, neither of which required debonding. There is evidence that the localised corrosion is associated with passivation defects and the uniform corrosion with the presence of phosphorus.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信