2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)最新文献

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An improved crescent electrode in electrowetting-based microfludic 电润湿微流控中改进的新月形电极
Hongli Jin
{"title":"An improved crescent electrode in electrowetting-based microfludic","authors":"Hongli Jin","doi":"10.1109/3M-NANO.2016.7824919","DOIUrl":"https://doi.org/10.1109/3M-NANO.2016.7824919","url":null,"abstract":"Electrode is a vital component in the digital microfludic based on electrowetting on dielectric(EWOD), in order to improve the driving performance, this paper proposed a novel improved crescent electrode shape, establish the EWOD device model through the finite element method(FEM) to compute the driving force of the droplet. The result shows that droplet's electrostatic force on the proposed electrode shape is more stable, the standard deviation is decreased by 41.18% compared with the crescent electrode, and during droplet crossing two adjacent electrodes, the minimum actuation force of droplet on the proposed electrode is 5.9μN which is improved by 23.43% compared with the crescent electrode. And in addition, the proposed electrode is composed of two symmetrical sub electrodes, hence the droplet bidirectional movement has the same driving performance, it is more consistent with the manipulation of droplet in practical application.","PeriodicalId":273846,"journal":{"name":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130816019","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Fabrication of micropolarizers by electron beam lithography 电子束光刻技术制备微偏振片
Yinxue Fan, M. Yu, Shuyi Li, Zuobin Wang, Zhengxun Song
{"title":"Fabrication of micropolarizers by electron beam lithography","authors":"Yinxue Fan, M. Yu, Shuyi Li, Zuobin Wang, Zhengxun Song","doi":"10.1109/3M-NANO.2016.7824986","DOIUrl":"https://doi.org/10.1109/3M-NANO.2016.7824986","url":null,"abstract":"A method for the fabrication of micropolarizer arrays by electron beam lithography was presented. The experimental results have illustrated the influences of exposure dose on the performance parameters of wire grids. The maximum transmittance and extinction ratios of wire grid arrays were obtained in the visible spectrum and the comparison results of the different depths of wire grids demonstrate the superiority of high depths. The performance of the two structures has shown that this work offers the possibility to improve the properties of the micropolarizers.","PeriodicalId":273846,"journal":{"name":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"24 4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132760864","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Preparation and characterisation of graphene oxide/ carbon nanotubes films 氧化石墨烯/碳纳米管薄膜的制备与表征
Xiao Wang, Yiwei Ren, M. Song, S. Alsawafi, Jie Jin
{"title":"Preparation and characterisation of graphene oxide/ carbon nanotubes films","authors":"Xiao Wang, Yiwei Ren, M. Song, S. Alsawafi, Jie Jin","doi":"10.1109/3M-NANO.2016.7824980","DOIUrl":"https://doi.org/10.1109/3M-NANO.2016.7824980","url":null,"abstract":"Three types of carbon nanotubes (CNTs) that were single-walled carbon nanotube (SWCNT), multi-walled carbon nanotubes (MWCNTs) and multi-walled carbon nanotubes with hydro xyl groups (MWCNTs-OH), were used to fabricate a series of graphene oxide (GO)/CNTs hybrid thin films by a simple solution casting method. The hybrid films showed excellent self-capacitance. The capacitance of the hybrid films was strongly dependent on the types of the CNTs and the size of GO/CNTs films. The hybrid films with MWCNTs or MWCNTs-OH incorporated showed significant high capacitance, compared with that of GO/SMCNT films. The maximal specific capacitance was 113.19 F/g observed in GO/ MWCNTs film with 83 wt% MWCNTs incorporated. The capacitance of the films was further elevated by altering the film sizes. The effects of the microstructure and film size on the electrical properties were assessed. Moreover, quantum effect was clearly observed in thick hybrid films. The origin of the quantum effect was revealed based on the analysis of the layer-by-layer structure of the hybrid films.","PeriodicalId":273846,"journal":{"name":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134582676","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Superresolution nanolithography technique based on polydimethylsiloxane soft mold 聚二甲基硅氧烷软模超分辨纳米光刻技术
Xiaochun Dong, Chuan-wang He, Pinghe Wang
{"title":"Superresolution nanolithography technique based on polydimethylsiloxane soft mold","authors":"Xiaochun Dong, Chuan-wang He, Pinghe Wang","doi":"10.1109/3M-NANO.2016.7824990","DOIUrl":"https://doi.org/10.1109/3M-NANO.2016.7824990","url":null,"abstract":"We report the design, analysis, and simulation of the superresolution nanolithography technique based on PDMS soft mold, which obtained the feature size smaller than 1/10 operating wavelength. The proposed nanolithography system consist of a periodic PDMS soft transparent mold, a thin silver layer, photoresist and substrate. The reason why we employ the PDMS soft mold is it can contact perfectly with silver layer. By adjusting the linewidth and the thickness of the silver layer, the optimal contrast were obtained. To analysis the superresolution nanolithography of proposed system, the electric field distributions and electric field intensity are given.","PeriodicalId":273846,"journal":{"name":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134360482","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A comparative investigation of drilling and milling micro holes using micro-EDM 用微细电火花加工钻铣微孔的对比研究
Yiquan Li, Wanwu Hou, Jinkai Xu, Huadong Yu
{"title":"A comparative investigation of drilling and milling micro holes using micro-EDM","authors":"Yiquan Li, Wanwu Hou, Jinkai Xu, Huadong Yu","doi":"10.1109/3M-NANO.2016.7824956","DOIUrl":"https://doi.org/10.1109/3M-NANO.2016.7824956","url":null,"abstract":"Micro Electrical Discharge Machining (micro-EDM), is one of the most important technologies for the machining of difficult-to-cut materials, and it can be considered as one of the most promising manufacturing process for fabricating micro holes. Micro-EDM is suitable for machining micro holes, while it is still hard to machining holes with high depth. The study will make a research on drilling and milling holes using micro-EDM, the milling process shows better performance especially for the holes with high depth to diameter ratio; while drilling process could gain higher processing speed and better geometrical properties of the micro-holes.","PeriodicalId":273846,"journal":{"name":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132199604","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Thermally controlled nanoobjects manipulation system based on composite Ti2NiCU/Pt nanotweezers 基于Ti2NiCU/Pt复合纳米镊子的热控纳米物体操纵系统
A. Zhikharev, P. Lega, V. Koledov, S. von Gratowski, A. Irzhak, M. Beresin, N. Kasyanov, G. Martynov
{"title":"Thermally controlled nanoobjects manipulation system based on composite Ti2NiCU/Pt nanotweezers","authors":"A. Zhikharev, P. Lega, V. Koledov, S. von Gratowski, A. Irzhak, M. Beresin, N. Kasyanov, G. Martynov","doi":"10.1109/3M-NANO.2016.7824943","DOIUrl":"https://doi.org/10.1109/3M-NANO.2016.7824943","url":null,"abstract":"We report the new system for manipulation of nanoobjects based on composite Ti2NiCu/Pt nanotweezers with shape memory effect. The design consists of the bimetallic Ti2NiCu/Pt shape memory nanotweezers placed on the tip of electrochemically etched tungsten needle. The semiconductor diode placed on the tip of the needle plays both role of resistive element of the heater and temperature sensor for feedback control loop closing. The device is compatible with existing positioning systems like OmniProbe®, Kleindiek®, etc. and may find numerous practical applications in various tasks of nanotechnology connected with 3D manipulation.","PeriodicalId":273846,"journal":{"name":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131965648","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Design of a flexure-based XY positioning stage with balanced axial forces on decoupling modules 解耦模块轴向力平衡的基于挠曲的XY定位平台设计
Zhen Zhang, Zhiqing Liu, P. Yan
{"title":"Design of a flexure-based XY positioning stage with balanced axial forces on decoupling modules","authors":"Zhen Zhang, Zhiqing Liu, P. Yan","doi":"10.1109/3M-NANO.2016.7824921","DOIUrl":"https://doi.org/10.1109/3M-NANO.2016.7824921","url":null,"abstract":"This paper presents a novel beam flexure-based XY positioning stage with an axial force balanced design of double parallelogram decoupling modules. By mean of connecting two decoupling modules along the same actuation axis, the axial forces are evenly applied to each side of the motion stage. Therefore the in-plane rotation can be significantly restricted. Also a redundant constraint is proposed to the guidance module to restrict its rotational motions. The monolithical fabrication of the spatial configuration of the proposed mechanism can be resorted to additive manufactured technology. Numerical simulation results validate the effectiveness of the proposed XY positioning stage.","PeriodicalId":273846,"journal":{"name":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133580270","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
The properties, preparation approaches and uses of microfluidic channels for terahertz absorption signatures detection in aqueous 微流控通道的性质、制备方法及其在水中太赫兹吸收特征检测中的应用
Mingkun Zhang, Zhongbo Yang, Mingjie Tang, Shihan Yan, Dongshan Wei, H. Cui, Chun-lei Du
{"title":"The properties, preparation approaches and uses of microfluidic channels for terahertz absorption signatures detection in aqueous","authors":"Mingkun Zhang, Zhongbo Yang, Mingjie Tang, Shihan Yan, Dongshan Wei, H. Cui, Chun-lei Du","doi":"10.1109/3M-NANO.2016.7824961","DOIUrl":"https://doi.org/10.1109/3M-NANO.2016.7824961","url":null,"abstract":"A microfluidic channels chip and its processing method and application are introduced for Terahertz (THz) absorption signatures detection of biomolecules in aqueous solution. Thousands of rectangular microchannels with a characteristic dimension of 2 μm and their reservoirs were precisely etched in a high resistivity silicon wafer by lithography and etching process, then the silicon wafer and a glass sheet were bonded to form a sealed microfluidic chip by anodic bonding technology. The chip can be sampled through the capillary action and the microfluidic pressure system. Three absorption signatures around 850, 928, 950 GHz of dissolved λ-DNA were obtained in 0.7∼1.0 THz band by using this chip and the coherent photomixing spectrometer. It is indicated that dispersion of biomolecular solution in 2 μm spaces between the tines of the grating in microchannels can reduce the water component in THz transmission detection, thereby reducing the water background absorption, effectively improve the signal strength of THz characteristic attenuation.","PeriodicalId":273846,"journal":{"name":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133232982","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Fabricating fresnel mirrors imaged in visible light region by ultra precision manufacturing technology 利用超精密制造技术制备可见光区成像菲涅耳镜
Weiguo Zhang, Fenglei Liu, Guodong Zhu, Deqiang Wang, Xin Xiong, C. Du
{"title":"Fabricating fresnel mirrors imaged in visible light region by ultra precision manufacturing technology","authors":"Weiguo Zhang, Fenglei Liu, Guodong Zhu, Deqiang Wang, Xin Xiong, C. Du","doi":"10.1109/3M-NANO.2016.7824966","DOIUrl":"https://doi.org/10.1109/3M-NANO.2016.7824966","url":null,"abstract":"Fresnel mirror can greatly improve the compactness of imaging system, which has many advantages such as light, thin, and easy to integrate. Due to the limitations of the shape precision and the surface roughness by available fabrication technology, most Fresnel mirrors can only be used for illuminating and focusing areas. This paper presents a Fresnel mirrors ultra precision forming method, which can turn the Fresnel mirrors with an excellent imaging performance in visible light region. The surface roughness of the Fresnel mirror can be achieved as small as 1 nm, and the surface accuracy can be up to 0.23 lambda @ 632.8 nm after removing the spherical aberration, which make this kind of Fresnel mirror extremely promising for applications in ultrathin and light optical imaging system.","PeriodicalId":273846,"journal":{"name":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"100 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121907094","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Efficient cell electrofusion chip based on micromanipulation 基于微操作的高效细胞电融合芯片
Junhui Zhu, Yong Wang, Ruihua Chen, Chengsong Shu, Changhai Ru
{"title":"Efficient cell electrofusion chip based on micromanipulation","authors":"Junhui Zhu, Yong Wang, Ruihua Chen, Chengsong Shu, Changhai Ru","doi":"10.1109/3M-NANO.2016.7824672","DOIUrl":"https://doi.org/10.1109/3M-NANO.2016.7824672","url":null,"abstract":"A novel cell electrofusion chip based on the micromanipulation technique was presented. A fast, accurate and flexible cell pairing method was developed for this chip. The chip prototype was fabricated on a indium tin oxide (ITO) substrate that was subsequently covered by a positive photoresist film (∼2 μm thickness). Micropore electrodes measuring 25μm in diameter were fabricated on the film by lithography. Electrode arrays with different spacing were manufactured and paired with tungsten needle for cell electrofusion experiment. Result showed that electrodes with a 10mm spacing can pair the cell efficiently, however electrodes with 0.5mm spacing could not attach the cells.","PeriodicalId":273846,"journal":{"name":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"72 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125929727","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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