利用超精密制造技术制备可见光区成像菲涅耳镜

2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2016-07-01 DOI:10.1109/3M-NANO.2016.7824966

Weiguo Zhang, Fenglei Liu, Guodong Zhu, Deqiang Wang, Xin Xiong, C. Du

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引用次数: 1

摘要

菲涅尔反射镜可以大大提高成像系统的紧凑性，具有轻、薄、易集成等优点。由于现有制造技术对形状精度和表面粗糙度的限制，大多数菲涅耳反射镜只能用于照明和聚焦区域。本文提出了一种菲涅耳反射镜的超精密成形方法，可使具有优异成像性能的菲涅耳反射镜在可见光区域内成形。菲涅耳反射镜的表面粗糙度可小至1 nm，去除球差后的表面精度可达0.23 lambda @ 632.8 nm，这使得这种菲涅耳反射镜在超薄、轻光学成像系统中具有极大的应用前景。

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Fabricating fresnel mirrors imaged in visible light region by ultra precision manufacturing technology

Fresnel mirror can greatly improve the compactness of imaging system, which has many advantages such as light, thin, and easy to integrate. Due to the limitations of the shape precision and the surface roughness by available fabrication technology, most Fresnel mirrors can only be used for illuminating and focusing areas. This paper presents a Fresnel mirrors ultra precision forming method, which can turn the Fresnel mirrors with an excellent imaging performance in visible light region. The surface roughness of the Fresnel mirror can be achieved as small as 1 nm, and the surface accuracy can be up to 0.23 lambda @ 632.8 nm after removing the spherical aberration, which make this kind of Fresnel mirror extremely promising for applications in ultrathin and light optical imaging system.

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2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

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