2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)最新文献

筛选
英文 中文
A microfluidic chip for terahertz spectral detection 一种用于太赫兹光谱检测的微流控芯片
Mengwan Liu, Daming Zhou, Mingkun Zhang, H. Cui, Deqiang Wang
{"title":"A microfluidic chip for terahertz spectral detection","authors":"Mengwan Liu, Daming Zhou, Mingkun Zhang, H. Cui, Deqiang Wang","doi":"10.1109/3M-NANO.2016.7824965","DOIUrl":"https://doi.org/10.1109/3M-NANO.2016.7824965","url":null,"abstract":"Fluidic chips as sample storage devices have been widely used to control and analyze traces of solutions by terahertz time domain spectroscopy (THz-TDS). This paper presents a fluidic chip fabricated with ultra-thick micro-fluidic structures utilizing SU-8 photoresist for THz spectral detection. The chip consists of 2 pieces of quartz windows and a photoresist structure serves as liquid cell between the windows. In order to reduce the attenuation of THz energy by the windows and guarantee measurement stability, an infrared quartz with thickness of 1mm is adopted as the windows. For the purpose of improving the signal-to-noise ratio (SNR) in the frequency band between 1.0 THz-1.5 THz, and making the liquid film thickness match the THz optical path, the structure depth is designed to be 50μm. Water absorption coefficient at 0.1THz-1.5THz was detected with this chip. The result indicates that the chip has a good stability for terahertz spectral detection.","PeriodicalId":273846,"journal":{"name":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"116 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117211558","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Design of a novel asymmetrical piezoelectric actuated microgripper for micromanipulation 一种新型非对称压电驱动微夹持器的设计
C. Liang, Fujun Wang, Yanling Tian, Dawei Zhang
{"title":"Design of a novel asymmetrical piezoelectric actuated microgripper for micromanipulation","authors":"C. Liang, Fujun Wang, Yanling Tian, Dawei Zhang","doi":"10.1109/3M-NANO.2016.7824942","DOIUrl":"https://doi.org/10.1109/3M-NANO.2016.7824942","url":null,"abstract":"In high precision micromanipulation task, microgripper is an important tool which directly affects the quality and efficiency of micro-object manipulation. This paper presents the design of a novel asymmetrical microgripper with just one jaw movable, which is driven by a stack piezoelectric ceramic actuator (SPCA). The main body of microgripper is compact flexure-based mechanical structure with a three-stage amplification which consists of a leverage mechanism, a bridge type mechanism and a parallelogram leverage mechanism. Based on the three-stage amplification, large and robust jaw displacements and parallel jaw grasping can be realized. The kinematic, static and dynamic analyses of the developed microgripper are carried out based on both Pseudo-rigid-body (PRB) model and finite element analysis (FEA). The results show that the microgripper exhibits good performance.","PeriodicalId":273846,"journal":{"name":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"102 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115720222","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Development of a droplet generation equipment for nano carbon thin films printing 纳米碳薄膜印刷用液滴生成设备的研制
Hongcheng Lian, Jun Luo, Xianming Zhang, L. Qi, Huaiyuan Qu
{"title":"Development of a droplet generation equipment for nano carbon thin films printing","authors":"Hongcheng Lian, Jun Luo, Xianming Zhang, L. Qi, Huaiyuan Qu","doi":"10.1109/3M-NANO.2016.7824913","DOIUrl":"https://doi.org/10.1109/3M-NANO.2016.7824913","url":null,"abstract":"Nano carbon thin films have great potential applications in advanced microelectronics. However, the film fabrication approaches are still undesirable. This paper proposed a uniform droplet spraying equipment for printing nano carbon thin films. A drop-on-demand (DOD) droplet generator and uniform droplet spraying equipment for nano carbon suspension inks were developed to print nano carbon thin films. An interchangeable nozzle design was adopted for easy cleaning and changing of nozzles. Uniform nano carbon thin films were fabricated, which provided a low-cost and fast method to print nano carbon thin films.","PeriodicalId":273846,"journal":{"name":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132656274","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Experimental study on tool wear mechanism of TC4 titanium alloy by laser assisted cutting 激光辅助切割TC4钛合金刀具磨损机理的实验研究
Jinkai Xu, Zhe Xu, Q. Du, Xuefeng Li, Zhichao Wang, Chuanpeng Chu, Huadong Yu
{"title":"Experimental study on tool wear mechanism of TC4 titanium alloy by laser assisted cutting","authors":"Jinkai Xu, Zhe Xu, Q. Du, Xuefeng Li, Zhichao Wang, Chuanpeng Chu, Huadong Yu","doi":"10.1109/3M-NANO.2016.7824670","DOIUrl":"https://doi.org/10.1109/3M-NANO.2016.7824670","url":null,"abstract":"In order to improve the cutting performance of titanium alloy, and to improve the durability of cutting tool, the experiment was carried out by using laser assisted cutting technology, the tool wear form of TC4 is studied during the cutting process. the results showed that the TC4 titanium alloy was cut by hard alloy tools, tool wear form is mainly bond, diffusion wear and spalling and cutting edge. Wear mechanism is mainly bond wear and cutting edge. Under the condition of laser heating, the tool wear is less and the wear form is changed, it is helpful to improve the tool wear mechanism and improve the tool life.","PeriodicalId":273846,"journal":{"name":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130809137","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Transferring porous layer from InP wafer based on the disturbance 基于扰动从InP晶圆转移多孔层
Yang Zhang, Liang Cao, X. Chai, Kaihua Liang, Yonglu Han, Yanqi Wang, Zhaoyang Wang, Shuting Wang, Z. Weng, Zuobin Wang
{"title":"Transferring porous layer from InP wafer based on the disturbance","authors":"Yang Zhang, Liang Cao, X. Chai, Kaihua Liang, Yonglu Han, Yanqi Wang, Zhaoyang Wang, Shuting Wang, Z. Weng, Zuobin Wang","doi":"10.1109/3M-NANO.2016.7824988","DOIUrl":"https://doi.org/10.1109/3M-NANO.2016.7824988","url":null,"abstract":"We present a new method to transfer the three dimensional (3D) porous layer from InP wafer based on the disturbance, during electrochemical etching of n-InP (100) with chronopotentiometry with current ramp in 3 mol-L−1 NaCl solution. The potential bursting phenomenon was observed due to the disturbing instantaneously. In addition, the correlation between the amplitude of the potential and the porous layers separated from the InP wafer was discussed.","PeriodicalId":273846,"journal":{"name":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125428459","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
A manufacturing method of achromatic focus metasurface 消色差聚焦超表面的制造方法
Zhe Li, Hengxu Zhang, Boqi Wu, Lianhe Dong, Yanjun Sun, Y. Leng, Li Wang
{"title":"A manufacturing method of achromatic focus metasurface","authors":"Zhe Li, Hengxu Zhang, Boqi Wu, Lianhe Dong, Yanjun Sun, Y. Leng, Li Wang","doi":"10.1109/3M-NANO.2016.7824951","DOIUrl":"https://doi.org/10.1109/3M-NANO.2016.7824951","url":null,"abstract":"The flat lens based on mate-surface can reduce the volume of optical components further and is very potential to use in compact and integrated optics, here we proposed a kind of dielectric meta-surface which works on two wavelengths at infrared waveband and can focus light without chromatic aberration. Because the dielectric sub-wavelength resonator can make different phase shift covering 0–2π and relatively high transmission for particular resonance wavelengths, the wave-front of transmitted light can be shaped to wanted. By using FDTD method, the parameters of the resonators are optimized. Numerical simulation and experiment have largely same results, showing that, at 5μm and 10.6μm two wavelength, TE mode incident the meta-surface, transmitted light will focus on one point.","PeriodicalId":273846,"journal":{"name":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116906544","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
DNA network structures induced by ferric ions on mica surfaces 云母表面铁离子诱导的DNA网络结构
Lu Zhao, Zuobin Wang, Wenxiao Zhang, Ying Wang, Xinyue Wang, Fenfen Guo
{"title":"DNA network structures induced by ferric ions on mica surfaces","authors":"Lu Zhao, Zuobin Wang, Wenxiao Zhang, Ying Wang, Xinyue Wang, Fenfen Guo","doi":"10.1109/3M-NANO.2016.7824983","DOIUrl":"https://doi.org/10.1109/3M-NANO.2016.7824983","url":null,"abstract":"This paper explores the changes of DNA network structures with different solution concentrations of DNAs and ferric ions by atomic force microscope (AFM). AFM is a powerful tool for both the observation and manipulation of biological molecules. DNA is an important life molecule to record the biological information and it is also a natural nano material which has great potential for the fabrication of molecular devices. The mica with a flat surface can be used as a substrate for observing DNA molecules, but the combination with DNA is not controllable, and the mica surface has to be modified. Here, we used ferric ions to induce DNA network structures and they were investigated by AFM. It was observed that when the concentration of DNA solution was low, there was no DNA network structures formed, and when the concentration of DNA solution was increased to 200–280ng/ul, DNA network structures were clearly formed.","PeriodicalId":273846,"journal":{"name":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114366726","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Back propagation neural networks based hysteresis modeling and compensation for a piezoelectric scanner 基于反向传播神经网络的压电扫描仪滞回建模与补偿
Yinan Wu, Yongchun Fang, Xiao Ren, Han Lu
{"title":"Back propagation neural networks based hysteresis modeling and compensation for a piezoelectric scanner","authors":"Yinan Wu, Yongchun Fang, Xiao Ren, Han Lu","doi":"10.1109/3M-NANO.2016.7824948","DOIUrl":"https://doi.org/10.1109/3M-NANO.2016.7824948","url":null,"abstract":"As the actuator of a common atomic force microscopy (AFM), a piezoelectric scanner has many advantages than other actuators, such as high precision of displacements on the nanoscale, high efficiency of electromechanical coupling, rapid response and so on. However, hysteresis nonlinearity of a piezoelectric scanner affects the positioning of the scanner and image quality of an AFM system. In this paper, a modeling method based on Back Propagation Neural Networks (BPNN) is proposed to compensate for hysteresis behavior. In particular, considering memory characteristics and frequency dependence of the hysteresis effect, firstly, we utilize a two hidden layers BPNN consisting of an input layer including the frequency and a section of the input voltage, two hidden layers, and an output layer to model for hysteresis. Subsequently, a method based on cubic spline interpolation is proposed to compensate for hysteresis behavior. Experiment results demonstrate the high precision of the obtained hysteresis model and the good performance of the proposed compensation method.","PeriodicalId":273846,"journal":{"name":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"173 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114746245","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Various patterns made by interference of surface waves 由于表面波的干涉而形成的各种图案
G. Liang, Qing-Nan Zhao
{"title":"Various patterns made by interference of surface waves","authors":"G. Liang, Qing-Nan Zhao","doi":"10.1109/3M-NANO.2016.7824963","DOIUrl":"https://doi.org/10.1109/3M-NANO.2016.7824963","url":null,"abstract":"A series of interference patterns are presented systematically by manipulating the surface waves (SWs) interference. Based on the numerical simulation, the periodic patterns in different lattices are presented by varying the opening angle and the number of SWs beams. According the diffraction order waves theory, the period of the pattern produced by two SWs interference can be calculated by a simplified equation. It illustrates the period is related to the diffraction order. And the included angle between the two SWs waves leads to the period changing as a sine curve. Additionally, it is shown that the number of SWs beams gives rise to different pattern types. Their period could be calculated by some general equations, which are agreed well with the simulation. At last, more complicated quasi-periodic and non-periodic patterns are demonstrated by superposing more SWs in different angle. What's more, infinite SWs interference superposition is analyzed. And the pattern is composed with many concentric rings, which is similar to the light of Bessel beam. This work gives a fundamental analysis for near field interference of SWs, which is helpful for nanoscale device design.","PeriodicalId":273846,"journal":{"name":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123474252","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Mems-based semi-packed gas chromatography column with wavy channel configuration 基于mems的波浪通道配置半填充气相色谱柱
Huan Yuan, Xiaosong Du, Yi Li, Yadong Jiang
{"title":"Mems-based semi-packed gas chromatography column with wavy channel configuration","authors":"Huan Yuan, Xiaosong Du, Yi Li, Yadong Jiang","doi":"10.1109/3M-NANO.2016.7824930","DOIUrl":"https://doi.org/10.1109/3M-NANO.2016.7824930","url":null,"abstract":"This paper reports the fabrication and performance of a semi-packed column with wavy channel configuration. The 2-m long, 80-μ m wide, and 300-μ m deep column is made by deep reactive-ion etching (DRIE) technology, and contains embedded circular posts of 30 μ m in diameter. The posts and curved groove increase the overall surface area of the column, which leading to higher separation efficiency. In order to achieve an even flow velocity in the channel, the arrangement position, shape, size of embedded posts are explored by the finite element method (FEM) in the semi-packed wavy gas chromatography column. The simulation results show that the gas samples experience less variation in the velocity profile of the semi-packed wavy column than the semi-packed rectangular MEMS column, and possess shorter mass transfer distance than the open one. The micro-fabricated column is used to separate normal alkanes from C5 to C12 to test its performance. The experimental separation results indicate that the theoretical plate number obtained by the proposed semi-packed wavy gas chromatography device is about 4 times higher than that obtained from the open rectangular column under the same injection conditions.","PeriodicalId":273846,"journal":{"name":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115294186","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
相关产品
×
本文献相关产品
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信