Hongcheng Lian, Jun Luo, Xianming Zhang, L. Qi, Huaiyuan Qu
{"title":"Development of a droplet generation equipment for nano carbon thin films printing","authors":"Hongcheng Lian, Jun Luo, Xianming Zhang, L. Qi, Huaiyuan Qu","doi":"10.1109/3M-NANO.2016.7824913","DOIUrl":null,"url":null,"abstract":"Nano carbon thin films have great potential applications in advanced microelectronics. However, the film fabrication approaches are still undesirable. This paper proposed a uniform droplet spraying equipment for printing nano carbon thin films. A drop-on-demand (DOD) droplet generator and uniform droplet spraying equipment for nano carbon suspension inks were developed to print nano carbon thin films. An interchangeable nozzle design was adopted for easy cleaning and changing of nozzles. Uniform nano carbon thin films were fabricated, which provided a low-cost and fast method to print nano carbon thin films.","PeriodicalId":273846,"journal":{"name":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/3M-NANO.2016.7824913","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
Nano carbon thin films have great potential applications in advanced microelectronics. However, the film fabrication approaches are still undesirable. This paper proposed a uniform droplet spraying equipment for printing nano carbon thin films. A drop-on-demand (DOD) droplet generator and uniform droplet spraying equipment for nano carbon suspension inks were developed to print nano carbon thin films. An interchangeable nozzle design was adopted for easy cleaning and changing of nozzles. Uniform nano carbon thin films were fabricated, which provided a low-cost and fast method to print nano carbon thin films.