Fabricating fresnel mirrors imaged in visible light region by ultra precision manufacturing technology

Weiguo Zhang, Fenglei Liu, Guodong Zhu, Deqiang Wang, Xin Xiong, C. Du
{"title":"Fabricating fresnel mirrors imaged in visible light region by ultra precision manufacturing technology","authors":"Weiguo Zhang, Fenglei Liu, Guodong Zhu, Deqiang Wang, Xin Xiong, C. Du","doi":"10.1109/3M-NANO.2016.7824966","DOIUrl":null,"url":null,"abstract":"Fresnel mirror can greatly improve the compactness of imaging system, which has many advantages such as light, thin, and easy to integrate. Due to the limitations of the shape precision and the surface roughness by available fabrication technology, most Fresnel mirrors can only be used for illuminating and focusing areas. This paper presents a Fresnel mirrors ultra precision forming method, which can turn the Fresnel mirrors with an excellent imaging performance in visible light region. The surface roughness of the Fresnel mirror can be achieved as small as 1 nm, and the surface accuracy can be up to 0.23 lambda @ 632.8 nm after removing the spherical aberration, which make this kind of Fresnel mirror extremely promising for applications in ultrathin and light optical imaging system.","PeriodicalId":273846,"journal":{"name":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"100 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/3M-NANO.2016.7824966","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

Abstract

Fresnel mirror can greatly improve the compactness of imaging system, which has many advantages such as light, thin, and easy to integrate. Due to the limitations of the shape precision and the surface roughness by available fabrication technology, most Fresnel mirrors can only be used for illuminating and focusing areas. This paper presents a Fresnel mirrors ultra precision forming method, which can turn the Fresnel mirrors with an excellent imaging performance in visible light region. The surface roughness of the Fresnel mirror can be achieved as small as 1 nm, and the surface accuracy can be up to 0.23 lambda @ 632.8 nm after removing the spherical aberration, which make this kind of Fresnel mirror extremely promising for applications in ultrathin and light optical imaging system.
利用超精密制造技术制备可见光区成像菲涅耳镜
菲涅尔反射镜可以大大提高成像系统的紧凑性,具有轻、薄、易集成等优点。由于现有制造技术对形状精度和表面粗糙度的限制,大多数菲涅耳反射镜只能用于照明和聚焦区域。本文提出了一种菲涅耳反射镜的超精密成形方法,可使具有优异成像性能的菲涅耳反射镜在可见光区域内成形。菲涅耳反射镜的表面粗糙度可小至1 nm,去除球差后的表面精度可达0.23 lambda @ 632.8 nm,这使得这种菲涅耳反射镜在超薄、轻光学成像系统中具有极大的应用前景。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 求助全文
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信