Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)最新文献

A normally closed in-channel micro check valve 通常关闭的通道内微型止回阀

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-09-25 DOI: 10.1109/MEMSYS.2000.838492

Xuan-Qi Wang, Y. Tai

引用次数: 37

Development of injectable polymer-derived ceramics for high temperature MEMS 高温MEMS用可注射聚合物衍生陶瓷的研制

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838589

L. An, Wenge Zhang, V. Bright, M. Dunn, R. Raj

引用次数: 11

Characterization of bi-directionally oscillating dynamic flow and frequency-dependent rectification performance of microdiffusers 微扩散器双向振荡动态流动特性及频率相关整流性能

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838551

Young-Ho Lee, T. Kang, Young‐Ho Cho

{"title":"Characterization of bi-directionally oscillating dynamic flow and frequency-dependent rectification performance of microdiffusers","authors":"Young-Ho Lee, T. Kang, Young‐Ho Cho","doi":"10.1109/MEMSYS.2000.838551","DOIUrl":"https://doi.org/10.1109/MEMSYS.2000.838551","url":null,"abstract":"This paper characterizes a bi-directionally oscillating dynamic flow in a planar microdiffuser in order to evaluate the flow rectification performance of the microdiffuser. In the theoretical study, we present a bidirectionally oscillating flow model, where the boundary layer thickness governs the flow rectification performance of the microdiffuser. In the experimental study, we fabricate two different microdiffuser prototypes, having the neck widths of 100 /spl mu/m (D100) and 300 /spl mu/m (D300), respectively. The prototypes, D100 and D300, show the maximum net flow rates of 116.6 /spl mu/l/min and 344.4 /spl mu/l/min, respectively, for an identical piezoelectric flow actuation using the sinusoidal drive voltage of 100 V p-p at 50 Hz. The flow rates measured from D100 and D300 are approximately 47% of the theoretical values estimated from the conventional unidirectional flow model for the net boundary layer thicker than the neck width. The experimental flow rate of D300, however, decreases from 47% of the theoretical values at the flow frequencies higher than 90 Hz, at which the net boundary layer thickness is reduced to the microdiffuser neck width. It is experimentally verified that the flow rectification performance and the net flow rate of the microdiffuser tend to decrease when the boundary layer thickness is smaller than the diffuser neck width.","PeriodicalId":251857,"journal":{"name":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117126456","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 3

A low temperature biochemically compatible bonding technique using fluoropolymers for biochemical microfluidic systems 一种低温生物化学相容性键合技术，用于生物化学微流控系统

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838553

A. Han, K. Oh, S. Bhansali, H. Thurman Henderson, C. Ahn

引用次数: 44

Novel acoustic-wave micromixer 新型声波微混频器

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838598

V. Vivek, E. S. Kim

引用次数: 48

One mask nickel micro-fabricated reed relay 一掩膜镍微制簧片继电器

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838512

S. Roth, C. Marxer, G. Feusier, N. D. de Rooij

引用次数: 4

Advanced hybrid integrated low-power telemetric pressure monitoring system for biomedical applications 用于生物医学应用的先进混合集成低功耗遥测压力监测系统

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838538

T. Eggers, C. Marschner, U. Marschner, B. Clasbrummel, R. Laur, J. Binder

引用次数: 79

Characterization of silicon isotropic etch by inductively coupled plasma etch in post-CMOS processing 电感耦合等离子体刻蚀后cmos工艺中硅各向同性刻蚀的表征

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838580

Xu Zhu, D. Greve, G. Fedder

引用次数: 27

A high resolution, electrostatically-driven commercial inkjet head 高分辨率，静电驱动的商用喷墨头

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838619

S. Kamisuki, M. Fujii, T. Takekoshi, C. Tezuka, M. Atobe

{"title":"A high resolution, electrostatically-driven commercial inkjet head","authors":"S. Kamisuki, M. Fujii, T. Takekoshi, C. Tezuka, M. Atobe","doi":"10.1109/MEMSYS.2000.838619","DOIUrl":"https://doi.org/10.1109/MEMSYS.2000.838619","url":null,"abstract":"A fully-micromachined, low power, large nozzle count and high resolution \"electrostatically actuated inkjet (SEAJet/sup TM/)\" head has been developed for a POS printer. As 3D multiple-step structured nozzles are required for straight and high frequency ink ejection, it was formed by ICP deep-RIE employing a \"multiple-step mask method\" which makes troublesome stereo-photolithography unnecessary and 128 nozzles/chip were fabricated simultaneously. The required thin, 2 /spl mu/m-thick pressure plates were formed by B doped etch-stop technology combined with two-step alkaline etching which enables smooth-surfaced and uniform (2.15/spl plusmn/0.35 (3 /spl sigma/)/spl mu/m) pressure plates. The typical driving voltage is 26.5 V and the SEAJet head has achieved the uniform ink ejection up to a driving frequency of 18 kHz. The life of the actuator has been confirmed to be more than 4 billion times actuation. The typical printing speed of the POS printer is 15 1/s (lines per second) for a rolled paper and 3 ppm (papers per min.) for A4 paper in 360 dpi (dots per inch) high resolution, a performance level that makes this the fastest inkjet POS printer in the world. The average power consumption was measured as only 0.525 mW/nozzle. It is only one-thousandth of that of a typical thermal inkjet.","PeriodicalId":251857,"journal":{"name":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","volume":"65 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126256406","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 61

An audio frequency filter application of micromachined thermally-isolated diaphragm structures 一种应用于微机械热隔离膜片结构的音频滤波器

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838505

Kwang-Hyun Lee, Hee-Jin Byun, Hyung-Kew Lee, Il-Joo Cho, J. Bu, E. Yoon

引用次数: 9