一掩膜镍微制簧片继电器

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI:10.1109/MEMSYS.2000.838512

S. Roth, C. Marxer, G. Feusier, N. D. de Rooij

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引用次数: 4

摘要

本文报道了一种末端检测用簧片继电器的制作及实验结果。通过接近装置附近的外部磁铁来检测终点。由于镍材料具有良好的磁性和电沉积能力，因此选择镍材料来实现该装置。制造过程只需要一个光刻步骤。该继电器采用本实验室研制的55 /spl μ m厚正阻光刻工艺制备。进行了电气、静态和动态特性测试。最终芯片尺寸为长3mm，宽1mm，厚0.4 mm。

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One mask nickel micro-fabricated reed relay

This paper reports on the fabrication and experimental results of a reed relay for end-course detection application. The end-course is detected by approaching an external magnet near the device. Nickel material has been chosen for the realisation of the device because of its good magnetic properties and its ability to be electrodeposited. The fabrication process requires a single photolithography step. The relay has been fabricated using a 55 /spl mu/m thick positive resist photopatterning process developed in our laboratory. Electrical, static and dynamic characterisations have been performed. The final chip dimensions are 3 mm long, 1 mm wide and 0.4 mm thick.

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Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)

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