高温MEMS用可注射聚合物衍生陶瓷的研制

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI:10.1109/MEMSYS.2000.838589

L. An, Wenge Zhang, V. Bright, M. Dunn, R. Raj

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引用次数: 11

摘要

本文报道了一种制造高温微机电系统的新工艺。该工艺包括四个步骤:(1)将液态聚合物前体浇注到具有所需结构的模具中;(2)加热填充的模具，使聚合物热固性凝固;(3)使用相同的液体聚合物作为粘合剂将不同的固体聚合物部件粘合在一起;(4)通过热分解将聚合物转化为陶瓷。该技术允许实现具有复杂三维多层结构的MEMS元件。由此产生的聚合物衍生陶瓷，基于硅，碳和氮的非晶合金，可以在高达1500/spl℃的温度下使用。

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Development of injectable polymer-derived ceramics for high temperature MEMS

In this paper, a novel processing technique for fabrication of high temperature MEMS is reported. The process consists of four steps: (1) casting a liquid polymer precursor into molds with desired structures; (2) heating the filled mold for thermosetting the polymer; (3) bonding different solid polymer parts together using the same liquid polymer as an adhesive; (4) converting the polymer to a ceramic by thermal decomposition. The technology allows implementation of MEMS components with complex three-dimensional, multi-layer structures. The resultant polymer-derived ceramics, based-on amorphous alloys of silicon, carbon and nitrogen, can be used at temperatures up to 1500/spl deg/C.

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Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)

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