新型声波微混频器

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI:10.1109/MEMSYS.2000.838598

V. Vivek, E. S. Kim

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引用次数: 48

摘要

本文介绍了一种新型的菲涅耳环形扇形致动器(FASA)和基于FASA的PZT基板微混频器。该驱动器在液体中产生强大的横向声推力，在微混合流体中非常有效。在FASA上使用合适的电极模式和各种FASA元件的组合，几乎可以产生任何横向流体运动。我们基于FASA元素开发了以下三种微混频器:重叠设计，四扇区设计和六扇区设计。在自制的FASA和微混频器上的实验结果证实了理论和仿真的正确性。

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Novel acoustic-wave micromixer

This paper describes a novel Fresnel Annular Sector Actuator (FASA) and FASA-based micromixers built on PZT substrate. This actuator generates strong lateral acoustic thrusts in liquid, and is very effective in micromixing fluids. Almost any lateral fluidic motion can be produced with appropriate electrode patterns on FASA and with a combination of various FASA elements. We have developed the following three micromixers based on FASA elements: overlap design, four-sector design and six-sector design. Experimental results obtained on the fabricated FASA and micromixers confirm the theory and simulation.

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Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)

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