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Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)最新文献

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Spiked biopotential electrodes 尖刺生物电位电极
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838537
P. Griss, P. Enoksson, H. Tolvanen-Laakso, P. Merilainen, S. Ollmar, G. Stemme
{"title":"Spiked biopotential electrodes","authors":"P. Griss, P. Enoksson, H. Tolvanen-Laakso, P. Merilainen, S. Ollmar, G. Stemme","doi":"10.1109/MEMSYS.2000.838537","DOIUrl":"https://doi.org/10.1109/MEMSYS.2000.838537","url":null,"abstract":"We describe the microfabrication, packaging and testing of a dry biopotential electrode (i.e. electrolytic gel is not required), The electrode consists of an array of micro-dimensioned, very sharp spikes (i.e. needles) designed for penetration of human skin which circumvents high impedance problems associated with layers of the outer skin. Deep reactive ion etching (DRIE) technology was used to fabricate the spikes. The main advantages of these electrodes include a fast and uncomplicated application procedure, low electrode-skin-electrode impedance (lower than standard electrodes), and comfortable use. The spiked electrode offers a promising alternative to standard electrodes in biomedical applications (i.e. monitoring EEG signals) and is of interest in research of new biomedical methods.","PeriodicalId":251857,"journal":{"name":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121989536","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 39
Glass- to-glass anodic bonding for high vacuum packaging of microelectronics and its stability 用于微电子高真空封装的玻璃-玻璃阳极键合及其稳定性
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838525
Duck‐Jung Lee, B. Ju, Yun‐Hi Lee, Jin Jang, M. Oh
{"title":"Glass- to-glass anodic bonding for high vacuum packaging of microelectronics and its stability","authors":"Duck‐Jung Lee, B. Ju, Yun‐Hi Lee, Jin Jang, M. Oh","doi":"10.1109/MEMSYS.2000.838525","DOIUrl":"https://doi.org/10.1109/MEMSYS.2000.838525","url":null,"abstract":"In this work, we have developed a new high vacuum packaging method using a glass-to-glass bonding for the application to microelectronic devices such as field emission display (FED). The glass-to-glass anodic bonding was established and optimized using introducing thin amorphous silicon (a-Si) interlayer. Also, we propose that the amount of oxygen ions is one of the important factors during the bonding process, as confirmed from the SIMS and XPS analyses for the reaction region of Si-O bond in interface. Our method was very effective to reduce the bonding temperature and make the high vacuum package of microelectronic devices over 10/sup -4/ Torr. Finally, to evaluate the vacuum sealing capability of a FED panel packaged by the method, the leak characteristics of the vacuum was examined by spinning rotor gauge (SRG) during 6 months and the electron emission properties of the panel were measured continuously for time variation during 26 days.","PeriodicalId":251857,"journal":{"name":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","volume":"47 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114324009","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 19
Fabrication of sub-micron structures with high aspect ratio for MEMS using deep X-ray lithography 利用深x射线光刻技术制造高纵横比的MEMS亚微米结构
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838585
H. Ueno, N. Nishi, S. Sugiyama
{"title":"Fabrication of sub-micron structures with high aspect ratio for MEMS using deep X-ray lithography","authors":"H. Ueno, N. Nishi, S. Sugiyama","doi":"10.1109/MEMSYS.2000.838585","DOIUrl":"https://doi.org/10.1109/MEMSYS.2000.838585","url":null,"abstract":"In this paper, we present the fabrication of sub-micron structures with high aspect ratio for practical and high performance microelectromechanical systems (MEMS) using deep X-ray lithography. It is necessary for practical and high performance MEMS to be fabricated microstructures with sub-micron widths and gaps (lines and spaces). In order to fabricate the sub-micron microstructures, sub-micron deep X-ray lithography has been investigated. As a result, a sub-micron PMMA structure with 0.2 /spl mu/m minimum width, 6 /spl mu/m length and 17 /spl mu/m height was fabricated by deep X-ray lithography using an X-ray mask with thick X-ray absorbers having sub-micron width.","PeriodicalId":251857,"journal":{"name":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130647913","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Electrical isolation of bulk silicon MEMS devices via thermomigration 体硅MEMS器件的热迁移电隔离
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838507
C. Chung, M. Allen
{"title":"Electrical isolation of bulk silicon MEMS devices via thermomigration","authors":"C. Chung, M. Allen","doi":"10.1109/MEMSYS.2000.838507","DOIUrl":"https://doi.org/10.1109/MEMSYS.2000.838507","url":null,"abstract":"Electrical isolation of bulk micromachined single crystal silicon MEMS devices is demonstrated using through-wafer junction isolation. Through-wafer npn junctions are fabricated using \"temperature gradient zone melting\" or \"thermomigration\" of aluminum in n-type silicon. The npn structures isolate various regions of the single crystal silicon from one another by acting as back-to-back diodes. Thermomigration is a potentially high-throughput process that is consistent with batch fabrication principles, avoids the necessity of a handle wafer, and retains the mechanical integrity of single crystal silicon. By use of this process, electrically isolated sensors and actuators can be fabricated from a single wafer of silicon. Breakdown voltages of multiple thermomigrated npn junctions in excess of 1500 V are demonstrated. The utility of this technique is shown by fabricating a comb-drive electrostatic actuator from a single silicon wafer and driving it at 162 Vpp.","PeriodicalId":251857,"journal":{"name":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","volume":"110 2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132453574","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
PZT actuated micromirror for nano-tracking of laser beam for high-density optical data storage 用于高密度光数据存储的PZT驱动微镜
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838557
Y. Yee, H. Nam, See‐Hyung Lee, J. Bu, Y. Jeon, Seong-Moon Cho
{"title":"PZT actuated micromirror for nano-tracking of laser beam for high-density optical data storage","authors":"Y. Yee, H. Nam, See‐Hyung Lee, J. Bu, Y. Jeon, Seong-Moon Cho","doi":"10.1109/MEMSYS.2000.838557","DOIUrl":"https://doi.org/10.1109/MEMSYS.2000.838557","url":null,"abstract":"A micromirror actuated by piezoelectric cantilevers is proposed as a fine-tracking device for high-density optical data storage. Metal/PZT/metal thin film actuators translate an integrated micromirror along the out-of-plane vertical direction. The parallel motion of the micromirror steers linearly the optical path of the reflected laser beam. Numerical analysis shows that the actuated micromirror can satisfy the tracking speed imposed by the requirement on the access time for the high-density optical data storage up to few tens Gbit/in/sup 2/. In this paper, preliminary characteristics of the micromachined PZT actuated micromirror (PAM) are reported. The design and the fabrication process of the PZT actuated micromirror are described. Only a 3600 /spl Aring/-thick PZT film deposited by sol-gel process shows both good electrical and mechanical characteristics for the actuators. The micromirror can be easily actuated up to several micrometers under low voltage operation condition.","PeriodicalId":251857,"journal":{"name":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129579402","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 29
Ultrasonically driven surface micromachined motor 超声波驱动表面微机械马达
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838487
V. Kaajakari, S. Rodgers, A. Lal
{"title":"Ultrasonically driven surface micromachined motor","authors":"V. Kaajakari, S. Rodgers, A. Lal","doi":"10.1109/MEMSYS.2000.838487","DOIUrl":"https://doi.org/10.1109/MEMSYS.2000.838487","url":null,"abstract":"The first-ever all-surface micromachined ultrasonic micro-rotor is presented. The rotor is actuated by electrically driving a piezoelectric PZT plate mounted at the back of the silicon die eliminating the need for interconnects and space consuming surface actuators. The rotor operates with a single phase sub-five volt peak-to-peak excitation in atmospheric pressure. The piezoelectric plate is adhesively mounted making the method suitable for actuating micromachines from any surface micromachine process. Two different modes of operation are demonstrated: pulsed and resonant. The pulse actuation results in low rotation rate (0.5-3 RPM) while resonant actuation results in a fast rotation (10-100 RPM). The ability to drive a geared down rotor (50:7), much smaller than the driving rotor indicates high torque output capability.","PeriodicalId":251857,"journal":{"name":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129811140","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 27
A wafer-integrated array of micromachined electrostatically-driven ultrasonic resonators for microfluidic applications 用于微流体应用的微机械静电驱动超声谐振器的晶圆集成阵列
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838486
B. Parviz, T. Chou, C. Zhang, K. Najafi, M. Muller, L. Bernal, P. Washabaugh
{"title":"A wafer-integrated array of micromachined electrostatically-driven ultrasonic resonators for microfluidic applications","authors":"B. Parviz, T. Chou, C. Zhang, K. Najafi, M. Muller, L. Bernal, P. Washabaugh","doi":"10.1109/MEMSYS.2000.838486","DOIUrl":"https://doi.org/10.1109/MEMSYS.2000.838486","url":null,"abstract":"A distributed micromachined ultrasound source is presented. Electrostatic actuators operating at frequencies exceeding 100 kHz are coupled to a Helmholtz resonator in order to achieve high output velocities. They consist of a 1200 /spl mu/m/spl times/1200 /spl mu/m/spl times/1.36 /spl mu/m composite diaphragm, a perforated P++ backplate and a 3 /spl mu/m air gap. The actuators cover the entire surface of a 4\" wafer and are grouped in four individually addressable quadrants. A robust micromachining technology with >80% yield, employing anodic glass-silicon bonding, dissolved wafer process and advanced deep silicon etching has been developed for fabrication of the actuator array. The dynamic behavior of the diaphragm was studied using laser interferometry, and operation was verified at 96 kHz by acoustic measurement.","PeriodicalId":251857,"journal":{"name":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116597399","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Dual-cantilever AFM probe for combining fast and coarse imaging with high-resolution imaging 将快速粗成像与高分辨率成像相结合的双悬臂AFM探针
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838502
M. Despont, H. Takahashi, S. Ichihara, Y. Shirakawabe, N. Shimizu, A. Inoue, W. Haberle, G. Binnig, P. Vettiger
{"title":"Dual-cantilever AFM probe for combining fast and coarse imaging with high-resolution imaging","authors":"M. Despont, H. Takahashi, S. Ichihara, Y. Shirakawabe, N. Shimizu, A. Inoue, W. Haberle, G. Binnig, P. Vettiger","doi":"10.1109/MEMSYS.2000.838502","DOIUrl":"https://doi.org/10.1109/MEMSYS.2000.838502","url":null,"abstract":"This paper presents a new scanning probe concept based on an integrated dual-cantilever device, which has been designed to reduce the tip-wear problem. It consists of two cantilevers, one having a robust blunt tip, the other having a sharp tip. By means of integrated bimorph actuators, such a cantilever can be used to switch between coarse and fast imaging with the blunt tip, and high-resolution imaging with the sharp tip. Hence the delicate sharp tip is used only when high resolution is required, which greatly increases the probe's lifetime. A high-sensitivity, constricted piezoresistive strain sensor is used for high-resolution imaging. Imaging with the dual-cantilever probe has been demonstrated successfully.","PeriodicalId":251857,"journal":{"name":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115463930","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 15
Batch fabricated flat winding shape memory alloy actuator for active catheter 批量制造的有源导管用平面缠绕形状记忆合金致动器
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838546
T. Mineta, T. Mitsui, Y. Watanabe, S. Kobayashi, Y. Haga, M. Esashi
{"title":"Batch fabricated flat winding shape memory alloy actuator for active catheter","authors":"T. Mineta, T. Mitsui, Y. Watanabe, S. Kobayashi, Y. Haga, M. Esashi","doi":"10.1109/MEMSYS.2000.838546","DOIUrl":"https://doi.org/10.1109/MEMSYS.2000.838546","url":null,"abstract":"Batch fabrication process of a shape memory alloy (SMA) sheet based on electrochemical pulsed etching with a sacrificial dummy metal layer has been studied and flat winding S-shape SMA actuators have been developed. The actuators are 38 /spl mu/m in thickness and generated forces from 40 to 95 mN were obtained according to the width from 410 to 170 /spl mu/m. The flat winding SMA actuator could realize active catheter with small outer diameter and wide inner working channel. The batch fabrication process was also applied to micromachining of NiTi super elastic alloy (SEA) for biasing spring of the catheter.","PeriodicalId":251857,"journal":{"name":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","volume":"121 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114639142","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
Dominated energy dissipation in ultrathin single crystal silicon cantilever surface loss 超薄单晶硅悬臂表面损耗的主导能量耗散
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI: 10.1109/MEMSYS.2000.838522
J. Yang, T. Ono, M. Esashi
{"title":"Dominated energy dissipation in ultrathin single crystal silicon cantilever surface loss","authors":"J. Yang, T. Ono, M. Esashi","doi":"10.1109/MEMSYS.2000.838522","DOIUrl":"https://doi.org/10.1109/MEMSYS.2000.838522","url":null,"abstract":"The effect of surface treatment in UHV chamber on Q factor of cantilevers with different thickness (60nm, 170nm and 500nm) and different surface orientation was investigated. When length L>30pm, Q factor is proportional to thickness, surface loss dominates. While L<30pm, support loss surpasses the surface loss. Heating can remove SiOz layer and absorbates, and result in an increase of Q factor. Hydrogen termination leads to a larger relative increase of Q factor in thinner structure than in thicker ones. Heating and H exposure improve Q values of Si(100) oriented cantilevers more than Si(ll0) oriented ones and result in the contrary resonance frequency response for these two surfaces.","PeriodicalId":251857,"journal":{"name":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124813041","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 16
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