A. Hensel, Christian Schwarzer, C. Merz, T. Stoll, M. Kaloudis, J. Franke
{"title":"Generation of 3-dimensional power modules for high temperature applications by thermal copper coating processes","authors":"A. Hensel, Christian Schwarzer, C. Merz, T. Stoll, M. Kaloudis, J. Franke","doi":"10.1109/EPTC47984.2019.9026619","DOIUrl":"https://doi.org/10.1109/EPTC47984.2019.9026619","url":null,"abstract":"The market of power electronics is a rapidly growing field with many new trends and technologies. Rising junction temperatures, progressive miniaturization and high demanding application environments result in increasing requirements regarding the efficiency, lifetime expectation and flexibility of modern power electronic devices. Therefore, a novel approach to adapt the 3-dimensional mechatronic integrated device (3D-MID) technology has been investigated. By combining innovative metallization processes like plasma-based coating technologies with robust substrate materials such as ceramics and superior interconnection technologies like pressureless silver-sintering, the manufacturing of highly integrated and highly efficient power modules will be evaluated. Therefore, a ceramic substrate is coated with a selective structured copper layer to generate the electric circuit path on which the bare-die components like sensors or power switches are mounted. The top-level interconnection can be generated by standard process like Al-wire bonding or even Cu-wire bonding technologies. Since the current industry standard, is almost at its limit with regards to space efficient module design and thermal management capabilities. This approach enables even the design of spatial circuit carries which allows an improved freedom of design concerning the functional integration in small spaces at harsh environments, while the usage of high performance materials and processes expands current limitations regarding as well the operating temperature and ambient temperature.","PeriodicalId":244618,"journal":{"name":"2019 IEEE 21st Electronics Packaging Technology Conference (EPTC)","volume":"281-282 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133011211","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. Park, Jae Hak Lee, J. Song, S. Kim, Seongheum Han
{"title":"Evaluation of Crack Propagation at the Interconnection Interface Induced by Warpage of Fan-Out Wafer-Level-Package","authors":"A. Park, Jae Hak Lee, J. Song, S. Kim, Seongheum Han","doi":"10.1109/EPTC47984.2019.9026606","DOIUrl":"https://doi.org/10.1109/EPTC47984.2019.9026606","url":null,"abstract":"This study is to evaluate crack propagation possibility at the interconnection interface of FOWLP induced by warpage. The strain energy release rate (SERR) around the region of interests was calculated using Finite element (FE) analysis. The estimated SERR was compared with the measured critical SERR to predict the risk of the crack propagation at the interface. Moreover, a parametric study was performed to analyze the sensitivity of design parameters to define the most critical one affects crack propagation. This study may give ideas of delamination at the interconnection interface and the main parameter results in the failure induced by warpage of FOWLP.","PeriodicalId":244618,"journal":{"name":"2019 IEEE 21st Electronics Packaging Technology Conference (EPTC)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116087041","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Nico Setiawan Effendi, Jeong-Sik Park, B. Kim, Kyoung-Joon Kim
{"title":"A Heat Transfer Correlation for the Hollow Hybrid Fin Heat Sink Subjected to Air Impingement","authors":"Nico Setiawan Effendi, Jeong-Sik Park, B. Kim, Kyoung-Joon Kim","doi":"10.1109/EPTC47984.2019.9026585","DOIUrl":"https://doi.org/10.1109/EPTC47984.2019.9026585","url":null,"abstract":"This work shows the development of a Nusselt number correlation for the prediction of the heat transfer performance of the hollow hybrid fin heat sink (HHFHS) under impinging airflow conditions. The HHFHS consists of an array of hollow pin fins with radially integrated plate fins and perforations near fin bases. The hollow fin channel, the perforation, and the radial plate fins of the HHF provide surface area enhancement and mass reduction. The CFD analysis of more than 200 cases from multiple combinations of geometric parameters and flow conditions were utilized to develop a Nusselt number correlation. Using these results, the Nusselt number was correlated by considering Reynold and Prandtl numbers, heat sink area, outer fin diameter, plate fin width, fin height, and base length. Despite the tremendous number of geometric and flow variables, the correlation predictions and the CFD results show reasonable agreement.","PeriodicalId":244618,"journal":{"name":"2019 IEEE 21st Electronics Packaging Technology Conference (EPTC)","volume":"74 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126096157","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Numerical Investigation on Heat Transfer Enhancement with Perforated Square Micro-Pin Fin Heat Sink for Electronic Cooling Application","authors":"D. Gupta, P. Saha, Somnath C. Roy","doi":"10.1109/EPTC47984.2019.9026623","DOIUrl":"https://doi.org/10.1109/EPTC47984.2019.9026623","url":null,"abstract":"In this paper, heat transfer enhancement through perforated square micro-pin fins (edge = 180 microns) has been analyzed through numerical simulation. A three-dimensional model has been developed on computational fluid dynamics (CFD) to study the effect of perforation number (One, Two and three) and shape of perforation (Circular and square) on the solid square micro-pin fin heat sink. The ratio of the perforation edge/diameter to the micro-pin fin edge is taken less than 0.375 that doesn't affect the conduction rate. The staggered array is considered for the arrangement of the perforated micro-pin fin on the heat sink due to non-overlapping wakes. Copper is used as a material of the fins and the heat sink. The flow of air and heat transfer characteristics are studied numerically on ANSYS Fluent for the range of Reynolds number ($100leqtext{Re} < 650$). A constant heat flux $(dot{Q}=50 text{kWm}^{-} {}^{2})$ is applied at the bottom of the heat sink and an ambient temperature of 300K is considered. The size of the fins, the shape of the perforation and the number of perforation are counted as the prime geometric parameter for the calculation of most efficient heat sink. Thermal performance is calculated for every case and results are compared with the solid square micro-pin fins under the same working condition. Numerical results indicate that micro heat sink with perforation up to three gives better performance than the solid square micro heat sink, which shows that there is great potential to use perforated micro-pin fin heat sink for heat augmentation on electronic devices with high power density.","PeriodicalId":244618,"journal":{"name":"2019 IEEE 21st Electronics Packaging Technology Conference (EPTC)","volume":"51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122349975","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"28 GHz one-sided directional slot array antenna for 5G application","authors":"T. Ide, H. Kanaya","doi":"10.1109/EPTC47984.2019.9026687","DOIUrl":"https://doi.org/10.1109/EPTC47984.2019.9026687","url":null,"abstract":"This paper presents a design of one-sided directional slot array antenna for 28 GHz-band 5G application. The antenna element is composed of top metal, dielectric substrate, and bottom metal layer. The antenna has $1times 2$ sub array, combined with 2 antenna elements into 1 sub array. The Extremely high frequency (EHF) signal is fed by CPW transmission line. From the simulation and measurement result of return loss, antenna gain is presented in this paper. The gain of proposed antenna is 7 dBi at $1times 2$ antenna.","PeriodicalId":244618,"journal":{"name":"2019 IEEE 21st Electronics Packaging Technology Conference (EPTC)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124778512","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Wireless Micro Energy Harvesting Circuit for Sensor System","authors":"Shunsuke Hatanaka, H. Kanaya","doi":"10.1109/EPTC47984.2019.9026709","DOIUrl":"https://doi.org/10.1109/EPTC47984.2019.9026709","url":null,"abstract":"This paper presents the design of the wireless micro energy harvesting circuit for sensor network systems without any batteries. The circuit is composed of a series resonant circuit and RF-to-DC converting circuit. For multiband operation, bandpass filter theory is utilized. The simulation and measurement results are presented in this paper. The measurement output voltage is over 2.2 V at 920 MHz while input power is −4 dBm as a power source.","PeriodicalId":244618,"journal":{"name":"2019 IEEE 21st Electronics Packaging Technology Conference (EPTC)","volume":"1995 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125562686","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Mechanical property of new concept about Cu core bump formation For high reliability PKG","authors":"J. Son, Haksan Jeong, S.G. Lee, Y. Lee, S. Jung","doi":"10.1109/EPTC47984.2019.9026666","DOIUrl":"https://doi.org/10.1109/EPTC47984.2019.9026666","url":null,"abstract":"Nowadays, 2D structure of PKG needs to change to 2.5D or 3D structure for high performance of PKG. The standoff property was required to prevent the Si chip damage and electrical short when solder joint is located between substrate and interposer. So, CCSB (Cu Core Solder Ball) is the most popular candidate of interconnection material for 2.5D PKG. However, controlling of plated solder composition has limitation due to difficult deposition over 3 elements by electroplating system. So, SAC305 composition was plated for CCSB product. In this paper, we studied Cu bump formation of new concept. At first, Cu bump was formed with combination with 1st reflowed solder bump and specially controlled Cu ball which is the surface treatment layer to get good wetting property of liquid solder by additional reflow. The applied solder is the Sn-2.5Ag-0.8Cu-0.05Ni-1Bi (MXT02) for high reliability. New concept Cu bump showed higher joint strength than general CCSB product. Therefore, new concept of Cu core ball will show higher reliability, easy application and more fine pitch then general CCSB product.","PeriodicalId":244618,"journal":{"name":"2019 IEEE 21st Electronics Packaging Technology Conference (EPTC)","volume":"95 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129077788","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"A Physical Model for Thin-Film Magnetic Inductors","authors":"Evan Sun, R. Singh, S. Raju","doi":"10.1109/EPTC47984.2019.9026610","DOIUrl":"https://doi.org/10.1109/EPTC47984.2019.9026610","url":null,"abstract":"This paper presents a new, physical model implemented in Verilog-A for thin-film magnetic power inductors. Using analytical equations to model the device behavior can be highly complex and inaccurate. Instead, an equivalent circuit model was proposed using simulated behavior and physical measurements to model the relationship between physical device dimensions and inductor phenomena such as parasitic capacitances, AC power losses, and current saturation. Behavior was verified against high frequency electromagnetic field (HFSS) simulations and physical measurements, demonstrating a high degree of accuracy across a wide frequency range leading up to the self-resonant frequency. To our knowledge, this is the first scalable, physical model for thin-film magnetic power inductors that allows designers to accurately simulate behavior across a wide range of frequencies, opening the way for future implementation of thin-film magnetic power inductors in microelectronics.","PeriodicalId":244618,"journal":{"name":"2019 IEEE 21st Electronics Packaging Technology Conference (EPTC)","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129988615","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Reliability Study of Low Cost TSV-Free Interposer (TFI)","authors":"H. Li, M. Kawano, P. S. Lim, F. Che, H. Chua","doi":"10.1109/EPTC47984.2019.9026704","DOIUrl":"https://doi.org/10.1109/EPTC47984.2019.9026704","url":null,"abstract":"The detail process integration of low cost TSV-Free interposer (TFI) was successfully developed and demonstrated. TFI was protected by the underfill and molding compound after Si substrate fully removal. The TFI chips with under bump metallization (UBM) are subjected to thermal cycling (TC) and highly accelerated stress tests (HAST). There is no yield loss after 1000 TC and HAST for TFI chips. Reliability of temperature cycling on board (TCoB) with/without underfill were tested and experimental data are consistent with the results of TC reliability simulation.","PeriodicalId":244618,"journal":{"name":"2019 IEEE 21st Electronics Packaging Technology Conference (EPTC)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121171952","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
P. Mackowiak, M. Wilke, M. Wöhrmann, Robert Gernhard, K. Zoschke, K. Lang, Martin Scheider-Ramelow, H. Ngo
{"title":"Fabrication of High Voltage Capable TSV Using Backside via Last Process and Laser Abblation of Dry Film BCB","authors":"P. Mackowiak, M. Wilke, M. Wöhrmann, Robert Gernhard, K. Zoschke, K. Lang, Martin Scheider-Ramelow, H. Ngo","doi":"10.1109/EPTC47984.2019.9026598","DOIUrl":"https://doi.org/10.1109/EPTC47984.2019.9026598","url":null,"abstract":"The use of TSV (Through Silicon Via) technology has widely spread in the past decade. Its advantages in complexity reduction of the RDL (Redistribution Layer) and shortening the total routing length and also the reduction of total resistance of the RDL plus the possibility of higher integration lead to the successfully implementation. All these advantages are attractive for new application, which has been assembled and designed with planar technologies and wire bonding technologies before. Our target application are avalanche photo diodes, which are powered with high voltage. Standard TSV Process is designed with thin inorganic passivation liner deposition like silicon dioxide using PECVD which cannot withstand very high voltages because of breakthrough of the oxide [1]. Optical arrays with a higher pixel count cannot be unbundled in a conventional RDL anymore. The limit will be in the range of an 8x8 diode array. Making use of interposer technology this limitation can be overcome. In the presented work we used Backside Via Last TSV approach and used dry film BCB as passivation layer in the Via which has been opened using a 248 nm excimer laser. We measured the leakage current of the powered devices and observed a very low leakage currents as low as 15 pA at 160 V and a breakthrough of above 250 V","PeriodicalId":244618,"journal":{"name":"2019 IEEE 21st Electronics Packaging Technology Conference (EPTC)","volume":"124 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115827079","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}