Sensors and Actuators A-physical最新文献_第7页

Dual Sagnac interferometers for sensitivity-enhanced temperature sensing based on amplitude comparison function 基于振幅比较函数的双Sagnac干涉仪灵敏度增强温度传感

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-09-08 DOI: 10.1016/j.sna.2025.117000

Haoyan Liu , Fangshuo Shi , Wenbo Wang , Xinyu Cao , Lanxin Zhu , Huimin Huang , Yanjun Chen , Zhengbin Li

{"title":"Dual Sagnac interferometers for sensitivity-enhanced temperature sensing based on amplitude comparison function","authors":"Haoyan Liu , Fangshuo Shi , Wenbo Wang , Xinyu Cao , Lanxin Zhu , Huimin Huang , Yanjun Chen , Zhengbin Li","doi":"10.1016/j.sna.2025.117000","DOIUrl":"10.1016/j.sna.2025.117000","url":null,"abstract":"<div><div>A sensitivity-enhanced optical fiber temperature sensor based on dual Sagnac interferometers is proposed and experimentally demonstrated. In the proposed system, Sagnac interferometers are constructed by embedding different lengths of polarization-maintaining fibers into single-mode fibers, resulting in two Sagnac interferometers (SIs) with distinct transmission characteristics. As the temperature changes, the transmission spectra of the SIs shifts, resulting in changes in the output power of the system. To enhance the sensitivity to temperature, an amplitude comparison function is employed based on the power ratio of two outputs of the SIs. A temperature variation experiment based on the temperature-controlled chamber has been carried out for verification, validating the ability to detect slight temperature variations. Furthermore, the sensor based on the dual-SIs configuration effectively resolves the dead zone issue inherent in the single-SI configuration, achieving up to a 32.3-fold enhancement in sensitivity. Compared to conventional methods, the proposed temperature sensor has a simpler configuration and does not rely on complex instruments such as an optical spectrum analyzer, offering low-cost sensors with enhanced sensitivity for precision temperature measurements.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117000"},"PeriodicalIF":4.9,"publicationDate":"2025-09-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145019486","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A Highly sensitive LPFG torsion sensor with step-index cladding modulation 采用阶跃折射率包层调制的高灵敏度LPFG扭转传感器

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-09-08 DOI: 10.1016/j.sna.2025.117041

Jianyang Kang , Suihu Dang , Xingkai Wang , Kangjing Zeng , Yunfeng Bai , Yuanchong Wang , Liangping Xia , Chunlei Du

{"title":"A Highly sensitive LPFG torsion sensor with step-index cladding modulation","authors":"Jianyang Kang , Suihu Dang , Xingkai Wang , Kangjing Zeng , Yunfeng Bai , Yuanchong Wang , Liangping Xia , Chunlei Du","doi":"10.1016/j.sna.2025.117041","DOIUrl":"10.1016/j.sna.2025.117041","url":null,"abstract":"<div><div>Based on the current research on long-period fiber gratings (LPFGs), we propose a stepped LPFG torsion sensor designed to enhance the torsional sensitivity of existing sensors. The sensor combines CO2 laser polishing and pre-twisting techniques to increase the refractive index difference between neighboring notches. This method is effective in enhancing the introduction of elliptical birefringence to improve the torsional sensing sensitivity. Through comparative experiments, the effect of different pre-twist angles <span><math><mi>β</mi></math></span> on sensor sensitivity was studied. When the applied pre-twist force was greater, the residual twist force in the optical fiber was greater, and the corresponding twist sensitivity also increased. The experimental results demonstrate a torsional sensitivity of up to 0.45 nm/(rad/m) in the range of 0 to -18.48 rad/m. However, due to non-uniform modulation of elliptical birefringence, the sensitivity decreases to 0.362 nm/(rad/m) for the range of 0–18.48 rad/m. Furthermore, the temperature characteristics of the sensor were investigated, demonstrating a sensitivity of 65 pm/ °C within the measurement range of 20 °C to 110 °C. The results demonstrate that the proposed sensor offers a novel solution for enhancing torsional sensing performance, with significant application value in engineering measurement fields.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117041"},"PeriodicalIF":4.9,"publicationDate":"2025-09-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145019385","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Molecularly imprinted polymers in soft and flexible surfaces for biomedical applications 用于生物医学应用的柔软和柔性表面的分子印迹聚合物

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-09-07 DOI: 10.1016/j.sna.2025.117043

Hichem Moulahoum, Derya Nil Kisin, Didem Remziye Fidan, Sude Yilmaz, Faezeh Ghorbanizamani

{"title":"Molecularly imprinted polymers in soft and flexible surfaces for biomedical applications","authors":"Hichem Moulahoum, Derya Nil Kisin, Didem Remziye Fidan, Sude Yilmaz, Faezeh Ghorbanizamani","doi":"10.1016/j.sna.2025.117043","DOIUrl":"10.1016/j.sna.2025.117043","url":null,"abstract":"<div><div>The integration of molecularly imprinted polymers (MIPs) with soft and flexible substrates represents a promising yet underexplored approach in the field of wearable and implantable biosensors. While MIPs offer high chemical stability and selective molecular recognition akin to biological receptors, soft materials enable real-time, conformal sensing in dynamic and complex environments. This review critically examines recent advances in MIP fabrication and deposition strategies, as well as the development of flexible substrates, including polymers, textiles, paper, and bio-derived materials. Emphasis is placed on methods that merge imprinting with stretchable, biocompatible, and multifunctional materials for biomedical monitoring. Particular attention is paid to the challenges in imprinting large biomolecules and achieving scalable, durable sensor designs. By highlighting both achievements and current limitations, this work provides a roadmap for the design of next-generation wearable biosensors that integrate smart recognition with adaptable mechanical performance.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117043"},"PeriodicalIF":4.9,"publicationDate":"2025-09-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145019398","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Unveiling enhanced humidity sensing in Sb2O3 doped α-Fe2O3 composites 揭示Sb2O3掺杂α-Fe2O3复合材料增强的湿度传感

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-09-06 DOI: 10.1016/j.sna.2025.117029

Chetan Prakash Saini, A.P. Singh

{"title":"Unveiling enhanced humidity sensing in Sb2O3 doped α-Fe2O3 composites","authors":"Chetan Prakash Saini, A.P. Singh","doi":"10.1016/j.sna.2025.117029","DOIUrl":"10.1016/j.sna.2025.117029","url":null,"abstract":"<div><div>In this study, highly sensitive, and relative humidity (<span><math><mtext>%</mtext></math></span> RH) sensing material based on <span><math><mi>α</mi></math></span>-Fe<sub>2</sub>O<sub>3</sub>-Sb<sub>2</sub>O<sub>3</sub> composite is demonstrated. The composites were prepared using the conventional solid-state reaction route with different atomic weight concentrations of Sb<sub>2</sub>O<sub>3</sub> in <span><math><mi>α</mi></math></span>-Fe<sub>2</sub>O<sub>3</sub> (0, 3, 5 & 7%) to assess its impact on humidity sensing. The structural and optical properties of these composites were investigated using X-ray diffraction (XRD), scanning electron microscopy (SEM), Raman spectroscopy, FTIR spectroscopy, and UV–Vis diffuse reflectance spectroscopy. XRD and Raman showed the multiphase nature of these composites. The band gap of the composites increased with the Sb content. These compounds exhibited humidity sensitivity greater than 88% for a lower Sb content. SEM revealed that the porous structure and large surface area of that composite facilitated better interaction with water molecules, which was the key to this improved performance. These results indicate that 3 wt% Sb<sub>2</sub>O<sub>3</sub> significantly enhances the humidity-sensing efficiency of <span><math><mi>α</mi></math></span>-Fe<sub>2</sub>O<sub>3</sub>, making it an optimal candidate for the development of efficient humidity sensors.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117029"},"PeriodicalIF":4.9,"publicationDate":"2025-09-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145019396","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

An electrothermally actuated high amplification MEMS microgripper with integrated capacitive sensing for micromanipulation 一种集成电容传感的电热驱动高放大MEMS微夹持器

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-09-05 DOI: 10.1016/j.sna.2025.117038

Sajid Hussain , Hassan Elahi , Hamid Jabbar , Amir Hamza , Umar Shahbaz Khan , Muhammad Mubasher Saleem

{"title":"An electrothermally actuated high amplification MEMS microgripper with integrated capacitive sensing for micromanipulation","authors":"Sajid Hussain , Hassan Elahi , Hamid Jabbar , Amir Hamza , Umar Shahbaz Khan , Muhammad Mubasher Saleem","doi":"10.1016/j.sna.2025.117038","DOIUrl":"10.1016/j.sna.2025.117038","url":null,"abstract":"<div><div>The significant challenges in the development of Microelectromechanical Systems (MEMS) microgrippers are scalability, power efficiency and seamless integration. In this research paper, a MEMS microgripper is presented, which uses electrothermal actuation and capacitive sensing to address these challenges. A two–stage displacement amplification is incorporated to achieve a high amplification ratio of 14.2. The novel design effectively overcomes the challenge of achieving high jaw displacement for a low input voltage, enabling seamless integration of the device into practical applications. For the optimization of the design of microgripper, Finite Element Method (FEM) is carried out using COMSOL Multiphysics. The simulation results are employed to determine the maximum allowable actuation voltage of 12 V, for which the microgripper stays within its temperature and fracture limits. Furthermore, experimental validation of the microgripper’s performance is carried out using microprobes and a microscope equipped with a camera system. The experimental results indicate a maximum jaw displacement of 51.32 µm for the maximum actuation voltage of 12 V. Additionally, the capacitive sensor is calibrated for displacement measurement, offering a resolution of 0.041 pF/µm. An analytical gripping force model is developed to estimate the gripping force at the jaws. The microgripper can generate a maximum gripping force of 0.72 µN. The microgripper has successfully performed a microwire gripping task to demonstrate its versatility in micromanipulation and biomedical applications.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117038"},"PeriodicalIF":4.9,"publicationDate":"2025-09-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145060050","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Ultrasound-driven deep learning for glucose monitoring in flowing blood 超声驱动的深度学习在流动血液中的血糖监测

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-09-05 DOI: 10.1016/j.sna.2025.117028

Jeong Eun Lee , Alok Kumar Sharma , Taeyang Kwon , Badrinathan Sridharan , Daehun Kim , Juhyun Kang , Hae Gyun Lim

{"title":"Ultrasound-driven deep learning for glucose monitoring in flowing blood","authors":"Jeong Eun Lee , Alok Kumar Sharma , Taeyang Kwon , Badrinathan Sridharan , Daehun Kim , Juhyun Kang , Hae Gyun Lim","doi":"10.1016/j.sna.2025.117028","DOIUrl":"10.1016/j.sna.2025.117028","url":null,"abstract":"<div><div>Diabetes management requires frequent blood glucose monitoring, yet current methods remain invasive and inconvenient. We present a novel non-invasive approach for classifying blood glucose levels using ultrasound and deep learning. The proposed method employs a single-element ultrasound transducer to capture acoustic signals from flowing whole blood, which are then analyzed by a convolutional neural network (CNN) to determine the glucose concentration category. This approach combines ultrasound's non-invasive blood glucose monitoring capabilities with CNN pattern recognition to achieve high classification accuracy without preprocessing blood samples. In contrast to prior techniques, our approach can analyze unprocessed whole blood in real time. We validated the system on blood samples spanning a wide range of glucose concentrations. Experimental results demonstrate that the CNN can reliably distinguish multiple clinically relevant glycemic ranges directly from the raw ultrasound waveforms. The key advantages of this method are its non-invasive nature, the high accuracy enabled by artificial intelligence (AI)-based signal analysis, and the capability to operate on whole blood directly. This integrated ultrasound & CNN-based glucose classification system promises a convenient, needle-free solution for diabetes monitoring.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117028"},"PeriodicalIF":4.9,"publicationDate":"2025-09-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145045747","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Waterproof strain sensor based on superhydrophobic, conductive carbon-coated tussah silk for human motion detection under hydrated environment 基于超疏水导电碳包覆柞蚕丝的水合环境下人体运动检测的防水应变传感器

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-09-05 DOI: 10.1016/j.sna.2025.117040

Yinghai Shao , Yuhan Zhang , Haoqian Luo , Lei Wang , Yuguo Peng , Jipeng Cao , Lanjie Xu , Yue Zhang , Junchi Ma

{"title":"Waterproof strain sensor based on superhydrophobic, conductive carbon-coated tussah silk for human motion detection under hydrated environment","authors":"Yinghai Shao , Yuhan Zhang , Haoqian Luo , Lei Wang , Yuguo Peng , Jipeng Cao , Lanjie Xu , Yue Zhang , Junchi Ma","doi":"10.1016/j.sna.2025.117040","DOIUrl":"10.1016/j.sna.2025.117040","url":null,"abstract":"<div><div>Conductive silk-based composites, prepared via surface modification techniques, have found extensive applications in wearable sensor technologies due to their excellent bio-compatibility and mechanical toughness. However, there is a critical limitation of traditional silk-based strain sensors that failing under hydrated conditions. Herein, we developed a waterproof strain sensor based on superhydrophobic and conductive tussah silk (SCTS) via a facile coating strategy that synergistically combined the carbon composite (one-dimensional hydrophobic MWCNTs, zero-dimensional hydrophobic CB, and TPU) with silk skeleton. The coating exhibited unprecedented mechanical robustness, the superhydrophobicity maintained stable even after stretching cycles (50 % strain), impacts, hand-kneading, and sandpaper abrasion, attributed to elasticity and strong adhesion of the TPU. Additionally, the SCTS sensor demonstrated exceptional strain sensing capabilities, featuring a wide sensing range (up to 120 % strain), high sensitivity (GF of 7.52), and superior cyclic stability (exceeding 500 cycles at 20 % strain). Owing to these merits, this wearable sensor was successfully applied for monitoring human motions under hydrated environment. Most important, it could even operate in water that traditional silk-based sensors cannot realize. The proposed tussah silk based sensor, integrated bio-inspired superhydrophobicity with strain response functionality, offered transformative potential for aqueous-environment applications ranging from marine exploration to medical diagnostics.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117040"},"PeriodicalIF":4.9,"publicationDate":"2025-09-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145019384","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Laser-patterned Kirigami on conductive composites as multimodal sensors 导电复合材料多模态传感器的激光图案基里伽米

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-09-04 DOI: 10.1016/j.sna.2025.117039

H. Harija , Artem Prokopchuk , Enrico Langer , Aniket Chakaraborthy , B. Saran , Payel Majumdar , Anindya Nag , Andreas Richter , Mehmet E. Altinsoy

{"title":"Laser-patterned Kirigami on conductive composites as multimodal sensors","authors":"H. Harija , Artem Prokopchuk , Enrico Langer , Aniket Chakaraborthy , B. Saran , Payel Majumdar , Anindya Nag , Andreas Richter , Mehmet E. Altinsoy","doi":"10.1016/j.sna.2025.117039","DOIUrl":"10.1016/j.sna.2025.117039","url":null,"abstract":"<div><div>This article presents an innovative and cost-effective technique that results in fabric-based conductive sensors that are critical to enhancing wearable technology and health monitoring systems. The sensing element is made of a conductive polymer, Poly(3,4-ethylenedioxythiophene): poly(styrenesulfonate)(PEDOT: PSS), that has been deposited on a metalized knitted fabric. Kirigami designs are also produced on the sensors via laser patterning. The use of conductive fabric, such as Silitex®, a relatively new material in the sensor industry, has several benefits, including biocompatibility, washability, and flexibility. The piezoresistive effect serves as the basis for the proposed sensing technique. The fabrication of Kirigami-based PEDOT: PSS/Silver knitted fabric sensors takes advantage of the distinct mechanical properties of the Kirigami pattern as well as the conductive capabilities of PEDOT: PSS and silver materials. In this paper, the fabrication and characterization of conductive fabric composite-based Kirigami electrodes for multimodal sensing applications are presented. The evaluation of low-cost, highly sensitive temperature and strain sensors is also presented. Finally, a suitable measurement circuit is designed for the sensors and is interfaced with the data acquisition system. The sensitivity of the temperature sensor was obtained as −0.04–1.35 %/℃ for a temperature range of 25–100 ℃.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117039"},"PeriodicalIF":4.9,"publicationDate":"2025-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145004785","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Monolithic LIG-VIA embedded in colorless polyimide for durable interlayer channels 单片LIG-VIA嵌入无色聚酰亚胺，用于持久的层间通道

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-09-04 DOI: 10.1016/j.sna.2025.116969

Jungmin Hong , Eunseung Hwang , Yoon-Wha Song , Hyunkoo Lee , Youngchan Kim , Kee-Ryung Park , Junyeob Yeo , Jonghun Yoon , Junho Oh , Jun-Geol Ahn , Jinhyeong Kwon , Sukjoon Hong

{"title":"Monolithic LIG-VIA embedded in colorless polyimide for durable interlayer channels","authors":"Jungmin Hong , Eunseung Hwang , Yoon-Wha Song , Hyunkoo Lee , Youngchan Kim , Kee-Ryung Park , Junyeob Yeo , Jonghun Yoon , Junho Oh , Jun-Geol Ahn , Jinhyeong Kwon , Sukjoon Hong","doi":"10.1016/j.sna.2025.116969","DOIUrl":"10.1016/j.sna.2025.116969","url":null,"abstract":"<div><div>Protecting electronic circuits is essential for devices that directly interface with harsh external environments, as exposure to chemical contaminants and physical stimuli can lead to adverse effects, including corrosion, degradation, and disconnection. To address this challenge, we present an embedded monolithic vertical interconnect access (VIA) structure composed of conductive laser-induced graphene (LIG), fabricated through successive laser pyrolysis of a colorless polyimide (CPI) film in an out-of-plane orientation. This approach enables seamless integration between external functional units and internal conductive pathways, effectively isolating circuits from hazardous environments to ensure more robust and reliable operation. To evaluate its effectiveness, we tested two LIG network configurations—with and without the LIG-VIA (LIG-V)—under corrosive chemical conditions using 35 % H<sub>2</sub>O<sub>2</sub> solution. The results confirmed that the LIG-V structure imparts chemoresistive properties while retaining conductivity after 1000 cycles at 0.79 % bending strain under repetitive bending. Furthermore, we demonstrated that the final structure functions as either a standalone bidirectional input/output device or as an auxiliary component to enhance other functional elements, such as a thermochromic display. By integrating the LIG-V structure into a transparent CPI substrate, this work presents promising potential for applications in wearable monitoring devices and on-demand feedback stimulation systems, unlocking new possibilities for functional electronics in dynamic and demanding environments.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 116969"},"PeriodicalIF":4.9,"publicationDate":"2025-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145045745","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Study on betavoltaic battery with suspended 1.5 µm-Si thin film back-junction back-contact PN junction 悬浮式1.5µm-Si薄膜背结反接触PN结倍他伏打电池的研究

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-09-04 DOI: 10.1016/j.sna.2025.117031

Bo Wu, Meng Wu, Jinwen Zhang

{"title":"Study on betavoltaic battery with suspended 1.5 µm-Si thin film back-junction back-contact PN junction","authors":"Bo Wu, Meng Wu, Jinwen Zhang","doi":"10.1016/j.sna.2025.117031","DOIUrl":"10.1016/j.sna.2025.117031","url":null,"abstract":"<div><div>This paper investigated the structural and area influence on the fabrication yield and the characteristics of the diode and betavoltaic battery. Different structures and areas of the back-junction back-contact (BJBC) PN junction with suspended 1.5 µm-Si thin-film were prepared by microfabrication based on silicon-on-insulator (SOI) substrates. The samples were fixed and wire-bonded on a custom-designed-and-processed sample holder and PCB board on the SEM stage so that their betavoltaic battery performance was tested using high-energy electron beams to simulate the tritium source. Before splintered to chips, all devices on the 4-inch wafer maintained their structures well and exhibited good rectification characteristics. However, the larger area the suspended thin film was, the more severely it was damaged after splintering. The collection efficiency of radiation-generated carriers were enhanced by reducing collection electrode spacing and increasing the number of electrodes, thereby improving the battery performance, which proves the advantage of design flexibility in doping regions and electrode shapes in BJBC structures. The large device area made the reverse saturation current of the PN junction decreasing an order of magnitude and so resulted in the betavoltaic battery performance degradation. As a result, the optimal betavoltaic battery performance was achieved by 1.2 × 1.2 mm<sup>2</sup> area BJBC PN junction with the interdigitated structure of 10 µm-wide P⁺/N⁺ regions and 25 µm spacing, yielding <em>I</em><sub><em>sc</em></sub> = 0.729 µA, <em>V</em><sub><em>oc</em></sub> = 0.194 V, <em>P</em><sub><em>m</em></sub> = 84.1 nW, <em>η</em> = 1.09 %.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117031"},"PeriodicalIF":4.9,"publicationDate":"2025-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145019397","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0