Sensors and Actuators A-physical最新文献_第8页

Viscoelastic particle enrichment using a 3D-printed enrichment device 粘弹性颗粒富集使用3d打印富集装置

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-09-03 DOI: 10.1016/j.sna.2025.116992

Murat Serhatlioglu , Babak Rezaei , Adam Stovicek , Sonja Pikkupeura , Kirsten Hoestgaard-Jensen , Stephan Sylvest Keller , Arnaud Dechesne , Barth F. Smets , Anders Kristensen

{"title":"Viscoelastic particle enrichment using a 3D-printed enrichment device","authors":"Murat Serhatlioglu , Babak Rezaei , Adam Stovicek , Sonja Pikkupeura , Kirsten Hoestgaard-Jensen , Stephan Sylvest Keller , Arnaud Dechesne , Barth F. Smets , Anders Kristensen","doi":"10.1016/j.sna.2025.116992","DOIUrl":"10.1016/j.sna.2025.116992","url":null,"abstract":"<div><div>Sample enrichment is of paramount importance in studying complex cell populations such as blood cells, stem cells, and bacterial communities, as it enables to increase the concentration of target cells, enhances detection sensitivity for low-abundance members, and reduces interference from non-target components. Current enrichment techniques face limitations regarding modularity, dynamic size range, and design complexity.</div><div>Here, we present a feasibility study using projection micro-stereolithography 3D-printing technology to demonstrate a microfluidic device for size-based particle separation and enrichment. This device leverages the advantages of viscoelastic flow focusing and integrates a 3D-printed reverse nozzle with fused silica microcapillaries, thus enabling separating flow-focused particles of a specific size cutoff and their background. By varying the inlet capillary inner diameter, our device demonstrates tunable separation capabilities, as illustrated using polystyrene microparticles (1–10 <span><math><mi>μ</mi></math></span>m). Pilot experiments further show its applicability for enriching algae and stem cells from bacterial contaminants. With its low cost, rapid fabrication, modularity, and dual-outlet design that enables simultaneous collection of both target cells and contaminants, the 3D-printed microfluidic device offers a cost-effective alternative for a range of diagnostic and preparative applications.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 116992"},"PeriodicalIF":4.9,"publicationDate":"2025-09-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145019386","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Piezoelectric membrane sensor for pressure measurement: Theory and experiment 压力测量用压电膜传感器：理论与实验

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-09-02 DOI: 10.1016/j.sna.2025.117027

Yuli Pang , Xu Lu , Yunxiang Ma , Min Sun , Z.-Y. Cheng

{"title":"Piezoelectric membrane sensor for pressure measurement: Theory and experiment","authors":"Yuli Pang , Xu Lu , Yunxiang Ma , Min Sun , Z.-Y. Cheng","doi":"10.1016/j.sna.2025.117027","DOIUrl":"10.1016/j.sna.2025.117027","url":null,"abstract":"<div><div>This study presents a piezoelectric membrane pressure sensor by monitoring the resonant frequency shift (Δ<em>f</em>) that changes with the pressure difference (Δ<em>P</em>) across the membrane. Theoretical and experimental investigations reveal two critical pressure thresholds (Δ<em>P</em><sub><em>α</em></sub> and Δ<em>P</em><sub><em>β</em></sub>) determined by the competition between flexural rigidity (<em>D</em>) and tensile stress (<em>T</em>). Accordingly, three distinct operational ranges are defined: (1) a <em>D</em>-dominated range below Δ<em>P</em><sub><em>α</em></sub>, (2) a <em>T</em>-dominated range above Δ<em>P</em><sub><em>β</em></sub>, and (3) a transitional range with resonant peak perturbation between Δ<em>P</em><sub><em>α</em></sub> and Δ<em>P</em><sub><em>β</em></sub>. The sensor demonstrates effective pressure measurement capability in both <em>D</em>- and <em>T</em>-dominated ranges, with an operational upper limit determined by the maximum tolerable pressure difference (Δ<em>Pₘₐₓ</em>). The sensitivity (<em>S</em><sub>Δ<em>P</em></sub>) exhibits unique mode- and operational range-dependent characteristics: higher resonant modes exhibit higher sensitivity; <em>S</em><sub>Δ<em>P</em></sub> remains size-independent and exhibits relatively higher values below Δ<em>P</em><sub><em>α</em></sub>, but becomes size-dependent with reduced sensitivity above Δ<em>P</em><sub><em>β</em></sub>. These performance characteristics are analytically described using fundamental membrane parameters, including geometry (size <em>a</em>, thickness <em>t</em>) and material properties (Young's modulus <em>E</em>, density <em>ρ</em>). The dual-threshold behaviors and sensitivity characterizations provide comprehensive guidelines for design and optimization of piezoelectric membrane sensors in pressure measurement applications.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117027"},"PeriodicalIF":4.9,"publicationDate":"2025-09-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144996845","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Hilbert fractal-structured liquid metal electrodes with isotropic stretchability and high conductivity 具有各向同性拉伸性和高导电性的希尔伯特分形结构液态金属电极

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-09-02 DOI: 10.1016/j.sna.2025.117030

Chunge Wang , Ning Zhang , Chen Liu , Niyou Wang , Su Ryon Shin , Zhixin Jia , Yuanyuan Huang , Qianqian Wang , Sheng Zhang

{"title":"Hilbert fractal-structured liquid metal electrodes with isotropic stretchability and high conductivity","authors":"Chunge Wang , Ning Zhang , Chen Liu , Niyou Wang , Su Ryon Shin , Zhixin Jia , Yuanyuan Huang , Qianqian Wang , Sheng Zhang","doi":"10.1016/j.sna.2025.117030","DOIUrl":"10.1016/j.sna.2025.117030","url":null,"abstract":"<div><div>Stretchable electrodes with high conductivity and isotropic strain response are crucial for next-generation wearable electronics but remain challenging to achieve. In this work, a Hilbert fractal microchannel electrode filled with silver-coated copper doped eutectic gallium–indium liquid metal is presented. The fractal geometry provides uniform stress dispersion and balanced mechanical behavior in both principal directions, while the doped liquid metal improves interfacial adhesion and electrical stability. The electrodes exhibit an initial resistance of 0.59 Ω, with relative resistance changes of less than 30 % at 100 % strain in both the X and Y directions. The directional deviation is minimal, with percentage deviation values of 5.78 % at low strain and 1.38 % at high strain. They maintain stable performance after 100 loading cycles and across a temperature range of 20–60 °C, with a conductivity of approximately 7200 S/cm. Demonstrations in LED circuits and wrist-bending tests show nearly identical electromechanical responses under dynamic multidirectional deformation. These results address the persistent trade-off between stretchability and isotropy in flexible conductors and provide a scalable platform for applications in health monitoring, human–machine interfaces, and soft robotics.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117030"},"PeriodicalIF":4.9,"publicationDate":"2025-09-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145019383","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A simple and extremely-sensitive non-invasive coupled-line microwave sensor for biomedical monitoring applications 一种用于生物医学监测应用的简单且非常敏感的非侵入性耦合线微波传感器

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-09-02 DOI: 10.1016/j.sna.2025.117026

Maryam Arabahmadi , Valiollah Mashayekhi , Reza Asgharivaskasi , Nima Azadi-Tinat , Mohsen Koohestani

{"title":"A simple and extremely-sensitive non-invasive coupled-line microwave sensor for biomedical monitoring applications","authors":"Maryam Arabahmadi , Valiollah Mashayekhi , Reza Asgharivaskasi , Nima Azadi-Tinat , Mohsen Koohestani","doi":"10.1016/j.sna.2025.117026","DOIUrl":"10.1016/j.sna.2025.117026","url":null,"abstract":"<div><div>This paper presents a novel and extremely sensitive microwave sensor based on a coupled-line microstrip configuration. The proposed design offers a simple yet effective method for measuring and analyzing the dielectric properties of liquids, specifically tailored for biomedical monitoring applications. A glass capillary tube, serving as a sample holder, is strategically positioned above the coupled-line to exploit the region of strong electromagnetic field concentration. When liquid samples with varying relative permittivity flow through the capillary tube, their interaction with the electromagnetic fields induces noticeable shifts in the transmission zero. The sensor, measuring 80 <em>×</em> 21 <em>×</em> 0<em>.</em>787 mm<sup>3</sup>, is fabricated on a low-loss moderate-cost Rogers RO4003 substrate. Its performance was experimentally validated using water-ethanol mixtures and real blood samples, demonstrating a sensitivity of approximately 5<em>.</em>4 <span><math><mfrac><mrow><mi>MHz</mi></mrow><mrow><mo>∆</mo><msubsup><mrow><mi>ε</mi></mrow><mrow><mi>r</mi></mrow><mrow><mo>′</mo></mrow></msubsup></mrow></mfrac></math></span> at a frequency of 6.75 GHz. Experiments were also conducted using real human blood samples under fasting and non-fasting conditions. A strong correlation was observed between the simulated and measured results. The sensor offers several key advantages, including a simple structure, ease of fabrication, tunable operating frequency, seamless integration with other circuit systems, non-invasive operation, cost-effectiveness, and reusability of the capillary tube. These features make it a highly promising solution for diverse biomedical sensing applications.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117026"},"PeriodicalIF":4.9,"publicationDate":"2025-09-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145004784","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Integrated flexible sensors with amplifier circuit for pH and temperature analysis 集成柔性传感器与放大器电路的pH和温度分析

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-09-01 DOI: 10.1016/j.sna.2025.117024

Guangli Liu , Xiaoxia Shu , Jiaxin Li , Ting Xu , Cong Sui , Shengzhao Zhang , Runhuai Yang

{"title":"Integrated flexible sensors with amplifier circuit for pH and temperature analysis","authors":"Guangli Liu , Xiaoxia Shu , Jiaxin Li , Ting Xu , Cong Sui , Shengzhao Zhang , Runhuai Yang","doi":"10.1016/j.sna.2025.117024","DOIUrl":"10.1016/j.sna.2025.117024","url":null,"abstract":"<div><div>Low ionic content of sweat markers and the weak bioelectrical signals necessitate the design of high-performance signal conditioning circuits to enhance the functionality of the sensors. In this paper, pH sensor based on a polyaniline (PANI) membrane and an NTC thermistor are used to sense sweat pH and temperature, respectively. The linearity, reproducibility, selectivity, and long-term stability PANI pH sensors are evaluated using electrochemical workstation. The sensitivity of pH sensor is 55.32 mV/pH in the range of pH 4–10. The flexible printed circuit board (FPCB) integrates the LT1462 amplifier with low bias input current enhancing the response signal gain of the pH sensor, which achieves a measured slope of 76.41 mV/pH, significantly exceeding the conventional Nernst theoretical value of 59.16 mV/pH at 25°C. The pH sensor integrated with FPCB is applied to detect actual samples, such as food and synthetic sweat, and the results are consistent with commercial pH meter. Finally, the wearable sweat sensing system was integrated with sensors, FPCB, power supply battery and hydrogel patch for the real-time monitoring of temperature and pH, indicating the reliability for practical application. The results of this study are expected to be applied in the fields of health monitoring and sports physiology research.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117024"},"PeriodicalIF":4.9,"publicationDate":"2025-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144989269","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

NFC-integrated transparent photovoltaic device for future electronics application 面向未来电子应用的nfc集成透明光伏器件

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-09-01 DOI: 10.1016/j.sna.2025.117025

Md Arifur Rahman Barno , Shuvaraj Ghosh , Malkeshkumar Patel , Sourov Hossain , Sanh Vo Thi , Cho Seung Hee , Yejun Seo , Sungtek Kahng , Joondong Kim

{"title":"NFC-integrated transparent photovoltaic device for future electronics application","authors":"Md Arifur Rahman Barno , Shuvaraj Ghosh , Malkeshkumar Patel , Sourov Hossain , Sanh Vo Thi , Cho Seung Hee , Yejun Seo , Sungtek Kahng , Joondong Kim","doi":"10.1016/j.sna.2025.117025","DOIUrl":"10.1016/j.sna.2025.117025","url":null,"abstract":"<div><div>Near-field communication (NFC) technology involves short-range wireless communication between common electronic devices, such as smart cards, car keys, and house and office keys. NFC enables contactless data transfer, secure authentication, and power transfer through electromagnetic fields, greatly facilitating easy and convenient applications and data use. Conversely, transparent photovoltaics (TPVs), which combine visible transparency with solar energy conversion, are being developed for applications where conventional opaque solar cells are unlikely to be feasible, such as building or vehicle windows. This research proposes to combine NFC and TPV to obtain power generation and secure wireless communication in a single device, specifically on a glass substrate, using a sputtering technique. The device will facilitate future electronics to communicate using NFC and TPV cells offer the advantage of harvesting energy in the visible range and blocking harmful ultraviolet radiation from sunlight. In the fabricated NFC-integrated TPV device, an approximately 200 nm thick NFC coil (ITO/Ag) exhibited an inductance of over 2 microhenries at the resonant frequency of 13.56 MHz. This coil can successfully read NFC card and illuminate a red-light-emitting diode using wireless power. Additionally, the titanium-doped zinc oxide (Ti:ZnO) TPV shows approximately 70 % transparency with an open-circuit voltage of 305 mV under 365 nm illumination at an intensity of 38 mW/cm<sup>2</sup>. By exploring innovative fabrication techniques and materials, we aim to develop a multifunctional substrate that efficiently combines functionalities such as wireless communication and power generation for battery-free security locks, energy-efficient smart windows, and other applications, thereby optimizing space utilization and promoting sustainable energy solutions.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117025"},"PeriodicalIF":4.9,"publicationDate":"2025-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145004783","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Spatial-temporal attention augmented graph convolution method based on human posture response 基于人体姿态响应的时空注意增强图卷积方法

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-08-31 DOI: 10.1016/j.sna.2025.117017

Lei Tian, Zhanhao Yang, Jiachen Yang, Chengshen Lao, Jiahuan Hu

{"title":"Spatial-temporal attention augmented graph convolution method based on human posture response","authors":"Lei Tian, Zhanhao Yang, Jiachen Yang, Chengshen Lao, Jiahuan Hu","doi":"10.1016/j.sna.2025.117017","DOIUrl":"10.1016/j.sna.2025.117017","url":null,"abstract":"<div><div>The requirements for the timely response of on-site lighting in stage performances or smart classrooms are becoming increasingly refined. Existing studies have neither focused on real-time human pose estimation in stage performances nor lacked the integrated integration of real-time human motion analysis and lighting control mechanisms. To this end, we propose a spatial-temporal graph convolutional neural network (ST-E-GCN) that integrates an enhanced efficient channel attention mechanism (EECA). By establishing a dynamic mapping function between joint angular velocity and channel weights, we solve the bottleneck of insufficient decoupling of spatial-temporal features in traditional skeleton action recognition models in dance movements such as high-speed rotation. This model innovatively introduces a motion dynamics perception mechanism, increasing the feature weights of centrifugal joints to 2.3 times the benchmark value and significantly enhancing the discriminative representation of key motion joints. Based on this, an embedded control system was designed. Through the optimized DMX512 protocol parsing, the ST-E-GCN classification results were mapped to multi-channel PWM signals to achieve lighting control. The experimental results show that on the AIST dance dataset, our method improves the movement classification accuracy by 4.87 % compared to the baseline. The hardware system can achieve precise synchronization of lights and performers' actions. It meets the real-time response and precise adjustment requirements for lighting control.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117017"},"PeriodicalIF":4.9,"publicationDate":"2025-08-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145045746","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

The graphene sandwich structure flexible strain sensor for health monitoringa 用于健康监测的石墨烯夹层结构柔性应变传感器

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-08-30 DOI: 10.1016/j.sna.2025.117022

Shuo Dong , Qiaohua Feng , Yunbo Shi

{"title":"The graphene sandwich structure flexible strain sensor for health monitoringa","authors":"Shuo Dong , Qiaohua Feng , Yunbo Shi","doi":"10.1016/j.sna.2025.117022","DOIUrl":"10.1016/j.sna.2025.117022","url":null,"abstract":"<div><div>In recent years, the rapid development of flexible wearable electronic devices, particularly in the fields of human health monitoring and human-computer interaction, has made flexible sensors a hot research topic, with flexible pressure sensors being the most widely used. However, many flexible pressure sensors face issues such as complex preparation processes, high production costs, and poor overall performance. Therefore, there is a rapidly increasing demand for flexible pressure sensors with excellent performance, simple preparation processes, and low manufacturing costs in fields such as health monitoring and human motion signal monitoring. In this study, a simple and efficient lamination method was proposed to encapsulate graphene film in Ecoflex, preparing a flexible Ecoflex/Graphene/Ecoflex strain sensor with a sandwich structure. The sensor exhibits excellent strain sensing performance, with a GF of 27.46 in the 0.5 %-30 % strain range and a GF of 132.83 in the 30 %-50 % strain range. The sensor has a wide measurement range of 0–80 %, a fast response time of 111 ms, and excellent repeatability and stability. Due to its excellent performance, the Ecoflex/ Graphene/Ecoflex flexible strain sensor easily monitors motion signals from the human face (between the eyebrows) and major joints (finger joints, wrist joints, elbow joints, and knee joints). It also achieves wireless transmission of monitoring data, demonstrating great application prospects in flexible wearable devices, human health monitoring, and human-computer interaction fields.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117022"},"PeriodicalIF":4.9,"publicationDate":"2025-08-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144922327","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Bionic self-powered wireless sensor devices based on triboelectric nanogenerator for river ecosystem monitoring 基于摩擦电纳米发电机的河流生态监测仿生自供电无线传感器装置

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-08-30 DOI: 10.1016/j.sna.2025.117023

Chenxi Li , Xiuji Xia , Mingying Hu , Yutong Wang , Tianyu Li

{"title":"Bionic self-powered wireless sensor devices based on triboelectric nanogenerator for river ecosystem monitoring","authors":"Chenxi Li , Xiuji Xia , Mingying Hu , Yutong Wang , Tianyu Li","doi":"10.1016/j.sna.2025.117023","DOIUrl":"10.1016/j.sna.2025.117023","url":null,"abstract":"<div><div>Current sensors used for river monitoring, especially devices targeting low-flow rivers, still face challenges such as high costs, difficulties in supplying power, and limited measurement ranges. This study describes a Bionic self-powered wireless sensor device based on triboelectric nanogenerator. This economical method successfully overcomes the drawbacks of traditional sensors by combining a triboelectric nanogenerator with a turbine inspired by fish biology. At 0.5 m/s flow velocity, the bio-inspired turbine exhibits 56.1 % more instantaneous torque than hybrid turbines, allowing for precise low-flow monitoring (0.1–3 m/s range) with 0.995 R2. Its simplified design and small 50 mm TENG component save production costs while preserving measuring accuracy. In order to provide thorough environmental monitoring, the system also includes integrated temperature and humidity sensors and solar panels for self-powering. This invention, which combines bionic engineering and triboelectric nanogenerator technology, offers an environmentally beneficial way to manage water resources, especially in low-velocity settings where conventional sensors function poorly. Energy harvesting and flow sensing are accomplished simultaneously by the integrated design, which is a helpful development in environmental monitoring infrastructure.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117023"},"PeriodicalIF":4.9,"publicationDate":"2025-08-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144989267","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Design of hybrid actuation piezoelectric MEMS scanning mirror with reduced nonlinearity 减小非线性的混合驱动压电MEMS扫描镜设计

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-08-29 DOI: 10.1016/j.sna.2025.117001

Hao-Chien Cheng , Mingching Wu , Weileun Fang

{"title":"Design of hybrid actuation piezoelectric MEMS scanning mirror with reduced nonlinearity","authors":"Hao-Chien Cheng , Mingching Wu , Weileun Fang","doi":"10.1016/j.sna.2025.117001","DOIUrl":"10.1016/j.sna.2025.117001","url":null,"abstract":"<div><div>MEMS scanning mirrors are compact, high-frequency devices widely used for precise light steering in applications such as image projection. However, conventional piezoelectric MEMS scanners often exhibit nonlinear behavior that distorts images and limits system performance. This study presents a novel hybrid-actuator design that integrates a normal force actuator and a transmission spring with a traditional clamped-clamped torsional actuator to reduce nonlinearity while enhancing the scanning angle. Finite element simulations were conducted to analyze the dynamic behavior and stress distribution of the design, followed by device fabrication on SOI wafers incorporating a KNN piezoelectric film. Experimental measurements demonstrate that the hybrid-actuator design effectively reduces nonlinearity, achieving a 44.6 % increase in scanning angle and producing significantly clearer projected images compared to conventional designs. Additionally, Fast Fourier Transform analysis of vibration signals revealed a substantial reduction in Total Harmonic Distortion (THD), decreasing from 43.8 % in the reference design to 14.8 % in the proposed design. This reduction in THD directly contributes to the mitigation of image blurriness, further highlighting the superior performance of the proposed scanner.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117001"},"PeriodicalIF":4.9,"publicationDate":"2025-08-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144911541","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0