Jungmin Hong , Eunseung Hwang , Yoon-Wha Song , Hyunkoo Lee , Youngchan Kim , Kee-Ryung Park , Junyeob Yeo , Jonghun Yoon , Junho Oh , Jun-Geol Ahn , Jinhyeong Kwon , Sukjoon Hong
{"title":"单片LIG-VIA嵌入无色聚酰亚胺,用于持久的层间通道","authors":"Jungmin Hong , Eunseung Hwang , Yoon-Wha Song , Hyunkoo Lee , Youngchan Kim , Kee-Ryung Park , Junyeob Yeo , Jonghun Yoon , Junho Oh , Jun-Geol Ahn , Jinhyeong Kwon , Sukjoon Hong","doi":"10.1016/j.sna.2025.116969","DOIUrl":null,"url":null,"abstract":"<div><div>Protecting electronic circuits is essential for devices that directly interface with harsh external environments, as exposure to chemical contaminants and physical stimuli can lead to adverse effects, including corrosion, degradation, and disconnection. To address this challenge, we present an embedded monolithic vertical interconnect access (VIA) structure composed of conductive laser-induced graphene (LIG), fabricated through successive laser pyrolysis of a colorless polyimide (CPI) film in an out-of-plane orientation. This approach enables seamless integration between external functional units and internal conductive pathways, effectively isolating circuits from hazardous environments to ensure more robust and reliable operation. To evaluate its effectiveness, we tested two LIG network configurations—with and without the LIG-VIA (LIG-V)—under corrosive chemical conditions using 35 % H<sub>2</sub>O<sub>2</sub> solution. The results confirmed that the LIG-V structure imparts chemoresistive properties while retaining conductivity after 1000 cycles at 0.79 % bending strain under repetitive bending. Furthermore, we demonstrated that the final structure functions as either a standalone bidirectional input/output device or as an auxiliary component to enhance other functional elements, such as a thermochromic display. By integrating the LIG-V structure into a transparent CPI substrate, this work presents promising potential for applications in wearable monitoring devices and on-demand feedback stimulation systems, unlocking new possibilities for functional electronics in dynamic and demanding environments.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 116969"},"PeriodicalIF":4.9000,"publicationDate":"2025-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Monolithic LIG-VIA embedded in colorless polyimide for durable interlayer channels\",\"authors\":\"Jungmin Hong , Eunseung Hwang , Yoon-Wha Song , Hyunkoo Lee , Youngchan Kim , Kee-Ryung Park , Junyeob Yeo , Jonghun Yoon , Junho Oh , Jun-Geol Ahn , Jinhyeong Kwon , Sukjoon Hong\",\"doi\":\"10.1016/j.sna.2025.116969\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>Protecting electronic circuits is essential for devices that directly interface with harsh external environments, as exposure to chemical contaminants and physical stimuli can lead to adverse effects, including corrosion, degradation, and disconnection. To address this challenge, we present an embedded monolithic vertical interconnect access (VIA) structure composed of conductive laser-induced graphene (LIG), fabricated through successive laser pyrolysis of a colorless polyimide (CPI) film in an out-of-plane orientation. This approach enables seamless integration between external functional units and internal conductive pathways, effectively isolating circuits from hazardous environments to ensure more robust and reliable operation. To evaluate its effectiveness, we tested two LIG network configurations—with and without the LIG-VIA (LIG-V)—under corrosive chemical conditions using 35 % H<sub>2</sub>O<sub>2</sub> solution. The results confirmed that the LIG-V structure imparts chemoresistive properties while retaining conductivity after 1000 cycles at 0.79 % bending strain under repetitive bending. Furthermore, we demonstrated that the final structure functions as either a standalone bidirectional input/output device or as an auxiliary component to enhance other functional elements, such as a thermochromic display. By integrating the LIG-V structure into a transparent CPI substrate, this work presents promising potential for applications in wearable monitoring devices and on-demand feedback stimulation systems, unlocking new possibilities for functional electronics in dynamic and demanding environments.</div></div>\",\"PeriodicalId\":21689,\"journal\":{\"name\":\"Sensors and Actuators A-physical\",\"volume\":\"395 \",\"pages\":\"Article 116969\"},\"PeriodicalIF\":4.9000,\"publicationDate\":\"2025-09-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Sensors and Actuators A-physical\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0924424725007757\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors and Actuators A-physical","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0924424725007757","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Monolithic LIG-VIA embedded in colorless polyimide for durable interlayer channels
Protecting electronic circuits is essential for devices that directly interface with harsh external environments, as exposure to chemical contaminants and physical stimuli can lead to adverse effects, including corrosion, degradation, and disconnection. To address this challenge, we present an embedded monolithic vertical interconnect access (VIA) structure composed of conductive laser-induced graphene (LIG), fabricated through successive laser pyrolysis of a colorless polyimide (CPI) film in an out-of-plane orientation. This approach enables seamless integration between external functional units and internal conductive pathways, effectively isolating circuits from hazardous environments to ensure more robust and reliable operation. To evaluate its effectiveness, we tested two LIG network configurations—with and without the LIG-VIA (LIG-V)—under corrosive chemical conditions using 35 % H2O2 solution. The results confirmed that the LIG-V structure imparts chemoresistive properties while retaining conductivity after 1000 cycles at 0.79 % bending strain under repetitive bending. Furthermore, we demonstrated that the final structure functions as either a standalone bidirectional input/output device or as an auxiliary component to enhance other functional elements, such as a thermochromic display. By integrating the LIG-V structure into a transparent CPI substrate, this work presents promising potential for applications in wearable monitoring devices and on-demand feedback stimulation systems, unlocking new possibilities for functional electronics in dynamic and demanding environments.
期刊介绍:
Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas:
• Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results.
• Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon.
• Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays.
• Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers.
Etc...