Optics express最新文献

Characterization of EUV masks multilayer defect based on neural networks and dark-field microscopy. 基于神经网络和暗场显微镜的EUV掩模多层缺陷表征。

IF 3.4 2区物理与天体物理

Optics express Pub Date : 2026-10-05 DOI: 10.1364/OE.604490

Hanzhi Zhang, Bochao Li, Zhenlong Zhao, Youzhi Xue, Xiaowei Song, Jingquan Lin

{"title":"Characterization of EUV masks multilayer defect based on neural networks and dark-field microscopy.","authors":"Hanzhi Zhang, Bochao Li, Zhenlong Zhao, Youzhi Xue, Xiaowei Song, Jingquan Lin","doi":"10.1364/OE.604490","DOIUrl":"https://doi.org/10.1364/OE.604490","url":null,"abstract":"The current yield of defect-free extreme ultraviolet (EUV) masks in high-volume manufacturing (HVM) is limited by multilayer defects, which can be mitigated through defect compensation. In this process, characterizing the geometric morphology parameters, defect types (bump/pit), and the number of defect-induced deformed layers is crucial for compensation. EUV dark-field microscopy (EUV-DFM) is a widely adopted technique for mask defect inspection, offering high sensitivity and throughput. However, existing EUV-DFM studies have yet to fully exploit the image information, resulting in limited characterization capabilities. This paper proposes a novel defect characterization method that integrates EUV-DFM with neural networks. Developed, trained, and evaluated using simulated EUV-DFM data, the proposed method enables the characterization of detailed defect morphology, including both deformed multilayer surfaces and smoothed ones. Simulation results demonstrate that the proposed method achieves a mean absolute percentage error (MAPE) of 0.75% and 1.40% for geometric morphology reconstruction of bump and pit defects, respectively, and a MAPE of 0.35% for the number of defect-induced deformed layers, while also maintaining robustness. This method demonstrates the potential to enhance the defect characterization capability of EUV-DFM and provides a novel approach for multilayer defect characterization in HVM. This methodology is expected to play a significant role in realizing the 'zero-defect' EUV mask manufacturing process.","PeriodicalId":19691,"journal":{"name":"Optics express","volume":"34 20","pages":"37068-37081"},"PeriodicalIF":3.4,"publicationDate":"2026-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149112936","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Broadband sum-, difference-frequency generation and enhancement governed by Tamm state. 宽带和频、差频的产生和增强由塔姆邦管理。

IF 3.4 2区物理与天体物理

Optics express Pub Date : 2026-10-05 DOI: 10.1364/OE.608675

Zhi-Jian Zhang, Fu-Pei Wu, Kai-Bo Qin, Hai-Feng Zhang

引用次数: 0

Phase modulated dynamic illumination for HDR laser projection using off-axis diffraction and spatial superposition. 基于离轴衍射和空间叠加的HDR激光投影相位调制动态照明。

IF 3.4 2区物理与天体物理

Optics express Pub Date : 2026-10-05 DOI: 10.1364/OE.610492

Bin Guo, Dabo Guo, Guang Yuan, Yunchuan Chen

{"title":"Phase modulated dynamic illumination for HDR laser projection using off-axis diffraction and spatial superposition.","authors":"Bin Guo, Dabo Guo, Guang Yuan, Yunchuan Chen","doi":"10.1364/OE.610492","DOIUrl":"https://doi.org/10.1364/OE.610492","url":null,"abstract":"The dynamic range of laser projection is constrained by light leakage from the spatial light modulator (SLM), remaining significantly below the limits of human visual perception. By redistributing the illumination intensity with a phase-only SLM, the dynamic range of the laser projection system can be effectively extended. However, phase modulation inevitably generates a zero-order beam, which prevents the formation of a pure dark state in the illumination field and limits further improvement in dynamic range. Although various zero-order beam suppression methods have been proposed, they often reduce diffraction efficiency or decrease the contrast of the modulated illumination field. In this research, we propose a dynamic illumination method for High Dynamic Range (HDR) laser projection. The proposed method generates a high contrast ratio illumination field while maintaining a uniformity of 95.85%. Based on this method, we further construct an HDR laser projection system using a phase light modulator (PLM) and a digital micromirror device (DMD). Experimental results based on the Video Electronics Standards Association (VESA) contrast test pattern demonstrate that the maximum luminance reaches 190.31 cd/m2, the minimum luminance is reduced to 0.14 cd/m2, and the dynamic range is extended by 8.47 times. These results provide effective support for the development of HDR laser projection technology.","PeriodicalId":19691,"journal":{"name":"Optics express","volume":"34 20","pages":"37175-37186"},"PeriodicalIF":3.4,"publicationDate":"2026-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149113028","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Chirp compensation of water-window attosecond pulses with thin liquid sheets. 薄液片水窗阿秒脉冲啁啾补偿。

IF 3.4 2区物理与天体物理

Optics express Pub Date : 2026-10-05 DOI: 10.1364/OE.610755

Dianhong Dong, Bing Xue, Hushan Wang, Eiji J Takahashi, Yuxi Fu

{"title":"Chirp compensation of water-window attosecond pulses with thin liquid sheets.","authors":"Dianhong Dong, Bing Xue, Hushan Wang, Eiji J Takahashi, Yuxi Fu","doi":"10.1364/OE.610755","DOIUrl":"https://doi.org/10.1364/OE.610755","url":null,"abstract":"Chirp control remains a key challenge for practical applications of water-window isolated attosecond pulses. In this numerical investigation, we propose thin liquid sheets as continuously tunable dispersive optical elements for chirp compensation of water-window attosecond pulses. The complex refractive indices of representative liquids are reconstructed by combining near-edge absorption data with tabulated X-ray optical constants and through the Kramers-Kronig relation. The resulting transmission and group-delay dispersion are then used to evaluate the compression of isolated attosecond pulses obtained from strong-field-approximation simulations. We show that the pre-edge dispersion of liquid water below the oxygen K-edge can compensate for the negative attochirp of long-trajectory harmonic emission in the 470-530 eV range, compressing the pulse from approximately 201 as to 67 as with a transmitted energy fraction of about 31.8%. Near the nitrogen K-edge, liquid nitrogen and liquid ammonia enable analogous compression in the 320-400 eV range, yielding pulse durations of approximately 54-56 as. These results indicate that free-standing liquid sheets can serve as flexible, self-refreshing, and thickness-tunable dispersive soft-X-ray optics for attosecond pulse compression.","PeriodicalId":19691,"journal":{"name":"Optics express","volume":"34 20","pages":"38632-38644"},"PeriodicalIF":3.4,"publicationDate":"2026-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149113109","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Deep learning-assisted recognition of space-time wave packets carrying orbital angular momentum in scattering media. 散射介质中携带轨道角动量时空波包的深度学习辅助识别。

IF 3.4 2区物理与天体物理

Optics express Pub Date : 2026-10-05 DOI: 10.1364/OE.610777

Sarmad Maqsood, Duvarakanath SenthilKumar, Mbaye Diouf

{"title":"Deep learning-assisted recognition of space-time wave packets carrying orbital angular momentum in scattering media.","authors":"Sarmad Maqsood, Duvarakanath SenthilKumar, Mbaye Diouf","doi":"10.1364/OE.610777","DOIUrl":"https://doi.org/10.1364/OE.610777","url":null,"abstract":"In this paper, we investigate the robustness and classification performance of conventional Laguerre-Gaussian orbital angular momentum (LG-OAM) beams and space-time wave packet orbital angular momentum (ST-OAM) beams in a scattering medium. Experimental interference patterns are analyzed using the proposed VortexNet deep-learning framework, which performs OAM-state classification while quantitatively evaluating image quality through the peak signal-to-noise ratio (PSNR) and the structural similarity index measure (SSIM) under identical scattering conditions. Our results show that LG-OAM beams degrade significantly during propagation, with low image quality (PSNR ≈ 15 dB, SSIM ≈ 0.26). In contrast. the ST-OAM beams preserve their structural integrity, achieving higher fidelity (PSNR ≈ 21-25 dB, SSIM ≈ 0.75), corresponding to an improvement of ∼6-10 dB in PSNR. This enhanced physical robustness leads to improved learning performance, with VortexNet reaching ∼99-100% accuracy for ST-OAM with fast convergence (∼5 epochs), compared with ∼85% validation accuracy and ∼25 epochs required for LG-OAM. The results demonstrate that ST-OAM significantly enhances resilience against scattering, improving both signal fidelity and deep-learning-based classification performance. These findings highlight ST-OAM as a promising platform for robust optical communication and imaging in complex dynamic environments.","PeriodicalId":19691,"journal":{"name":"Optics express","volume":"34 20","pages":"37988-38001"},"PeriodicalIF":3.4,"publicationDate":"2026-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149113125","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Q-switching Gaussian burst pulse in distributed Bragg reflector Yb-doped double-clad fiber laser with taper active length of 4 cm. 锥形有效长度为4 cm的分布布拉格反射器掺镱双包层光纤激光器中的调q高斯突发脉冲。

IF 3.4 2区物理与天体物理

Optics express Pub Date : 2026-10-05 DOI: 10.1364/OE.613263

Shuai Wang, Cheng Zhou, Man-Man Sun, Ban-Yu Xiong, Qiang Zhao

{"title":"Q-switching Gaussian burst pulse in distributed Bragg reflector Yb-doped double-clad fiber laser with taper active length of 4 cm.","authors":"Shuai Wang, Cheng Zhou, Man-Man Sun, Ban-Yu Xiong, Qiang Zhao","doi":"10.1364/OE.613263","DOIUrl":"https://doi.org/10.1364/OE.613263","url":null,"abstract":"The first demonstration of generating Q-switched a Gaussian burst pulse in distributed Bragg reflector Yb-doped fiber laser based on strong nonlinear effect and saturable absorption is presented. The strong nonlinear effect mainly comes from the taper area with the length of 4 cm. The saturable absorption mainly comes from the 40 cm long Yb3+-doped fiber (The actual length is 36 cm (= 40 cm - 4 cm).). When the taper active fiber is spliced into the linear cavity of the fiber laser, a stable Gaussian burst pulse with 25 sub-pulses is obtained by adjusting the pump power. The Gaussian burst pulse's spectrum with the central wavelength of 1064.93 nm and a 3 dB bandwidth of 0.14 nm is shown in the optical spectrum analyzer. The radio frequency spectrum of the Gaussian burst pulse has fundamental peak at a frequency of 28.2 kHz with a signal-to-noise ratio of 30.3 dB. Both maximum pulse energy and minimum pulse width of the burst pulse are 22.105 μJ and 226.938 μs at the pump power of 518 mW, respectively. To our knowledge, this is the first report of taper active fiber with strong nonlinear effect to generate the Gaussian burst pulse.","PeriodicalId":19691,"journal":{"name":"Optics express","volume":"34 20","pages":"38064-38071"},"PeriodicalIF":3.4,"publicationDate":"2026-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149113130","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Realization of movable wireless TDM-PONs via low-latency dual-stage predictive beam tracking. 利用低延迟双级预测波束跟踪实现可移动无线tdm - pon。

IF 3.4 2区物理与天体物理

Optics express Pub Date : 2026-10-05 DOI: 10.1364/OE.612737

Anzi Xu, Chao Zhang, Yujie Di, Yingjie Shao, Lian-Kuan Chen

{"title":"Realization of movable wireless TDM-PONs via low-latency dual-stage predictive beam tracking.","authors":"Anzi Xu, Chao Zhang, Yujie Di, Yingjie Shao, Lian-Kuan Chen","doi":"10.1364/OE.612737","DOIUrl":"https://doi.org/10.1364/OE.612737","url":null,"abstract":"Passive optical networks (PONs) have matured into a dominant solution for high-speed optical access, leveraging their inherent point-to-multipoint architecture in multi-user scenarios. Recently, emerging applications such as Low-Altitude Economy (LAE) and undersea mining monitoring require technology that supports user mobility and high-speed data links. This paper investigates the feasibility of employing TDM-PON for the above applications. To realize movable Optical Network Units (ONUs), the key challenge is maintaining robust optical link alignment against beam offset induced by moving ONUs. To address this, we propose a Dual-stage Predictive Tracking Network (DPT-Net) that decomposes predictive beam tracking into two sub-neural networks, realizing real-time predictive control. By modifying commercially available 1-Gbit/s Ethernet PON (EPON) transceivers, we experimentally demonstrate a wireless TDM-PON system that supports mobile ONUs for the first time. The neural network-based parallel prediction-and-steering pipeline reduces tracking latency by 38.5% compared to conventional proportional-integral-derivative (PID)-based sequential tracking under the same tracking hardware configuration. The standard deviation of the laser beam position is maintained below 1.64 mm during high-speed motion. Experimental results show that the system achieves average downlink and uplink throughputs of 805 Mbit/s and 798 Mbit/s, respectively, at an ONU velocity of 18 cm/s. In a multi-user scenario, aggregate downlink and uplink rates reach 940 Mbit/s and 868 Mbit/s, respectively, demonstrating seamless integration of optical wireless links into existing PON infrastructures.","PeriodicalId":19691,"journal":{"name":"Optics express","volume":"34 20","pages":"38445-38457"},"PeriodicalIF":3.4,"publicationDate":"2026-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149113142","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Deconvolution method for extreme ultraviolet broadband imaging spectrometry using dispersion-matched zone plates. 色散匹配带板的极紫外宽带成像光谱反褶积方法。

IF 3.4 2区物理与天体物理

Optics express Pub Date : 2026-10-05 DOI: 10.1364/OE.606992

Mats Brinkman, Oscar Versolato, Ievgeniia Babenko, Marcelo Ackermann, Muharrem Bayraktar

引用次数: 0

Polarization-vector-guided stereo matching in textureless scenes. 偏振矢量导向的无纹理场景立体匹配。

IF 3.4 2区物理与天体物理

Optics express Pub Date : 2026-10-05 DOI: 10.1364/OE.607248

Xin Wang, Tianci Han, Xinying Ji, Riffat Tehseen, Xiyuan Luo, Rongrong Guan, Tong Zhang, Fei Liu, Yanyan Liu, Pingli Han

引用次数: 0

Decoupled equalization of polarization and transmitter IQ skew in digital subcarrier multiplexing systems. 数字副载波复用系统中极化和发射机IQ偏差的解耦均衡。

IF 3.4 2区物理与天体物理

Optics express Pub Date : 2026-10-05 DOI: 10.1364/OE.609627

Hong Lin, Jing Zhang, Shaohua Hu, Bo Xu, Kun Qiu

{"title":"Decoupled equalization of polarization and transmitter IQ skew in digital subcarrier multiplexing systems.","authors":"Hong Lin, Jing Zhang, Shaohua Hu, Bo Xu, Kun Qiu","doi":"10.1364/OE.609627","DOIUrl":"https://doi.org/10.1364/OE.609627","url":null,"abstract":"Transmitter (Tx) IQ skew induces aliasing of symmetric subcarriers in digital subcarrier multiplexing (DSCM) systems. This impairment further couples with channel effects and laser phase noise (LPN), thus degrading the performance of traditional polarization demultiplexing and carrier phase recovery. In this paper, we propose a decoupled equalization scheme based on a designed training sequence to mitigate the interference of transmitter IQ skew on polarization rotation and LPN when these impairments are compensated independently. We start out by designing a strictly linear (SL) 2 × 2 MIMO equalizer for polarization demultiplexing based on the designed training sequence to achieve more accurate channel estimation, which is attributed to the insensitivity of the designed training sequence to aliasing induced by Tx IQ skew. Then, we use a PLL-embedded widely linear 2 × 2 (PLLE WL 2 × 2) MIMO to compensate for the LPN and Tx IQ skew simultaneously. This can mitigate the coupled effect of LPN and Tx IQ skew. Through experiments on 100-GBaud PM 16-QAM DSCM coherent optical fiber transmission consisting of eight 12.5-Gbaud subcarriers, we find that the proposed improved equalization scheme can achieve a 0.53-dB Q2 factor gain with 3-ps Tx IQ skew compared with the traditional equalization configuration. Besides, it also achieves performance comparable to that of a 4 × 4 WL filter with a 26.9% reduction in DSP complexity in terms of required real-valued multiplications.","PeriodicalId":19691,"journal":{"name":"Optics express","volume":"34 20","pages":"38156-38170"},"PeriodicalIF":3.4,"publicationDate":"2026-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149113167","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0