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TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)最新文献

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Selective attachment of multiple cell types on thermally responsive polymer 多种细胞类型在热响应聚合物上的选择性附着
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1216931
Yanbing Wang, Xuanhong Cheng, Y. Hanein, A. Shastry, D. D. Denton, B. Ratner, K. Bohringer
{"title":"Selective attachment of multiple cell types on thermally responsive polymer","authors":"Yanbing Wang, Xuanhong Cheng, Y. Hanein, A. Shastry, D. D. Denton, B. Ratner, K. Bohringer","doi":"10.1109/SENSOR.2003.1216931","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1216931","url":null,"abstract":"Programmable surface chemistry has been achieved by depositing a temperature sensitive polymer onto arrays of micro-fabricated metallic heaters. Activating a single heater causes a localized change in the device surface chemistry from non-fouling to fouling in an aqueous environment. Two types of proteins and two types of cells were used to demonstrate localized immobilization of proteins and cells on such surface. These experiments show, for the first time, selective cell attachments on thermally responsive polymer controlled by a micro heater array. It suggests a new approach to realize proteomic chips and cell chips.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123947347","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Design considerations and realization of a novel micromechanical bi-stable switch 一种新型微机械双稳开关的设计考虑与实现
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1216960
M. Freudenreich, U. Mescheder, G. Somogyi
{"title":"Design considerations and realization of a novel micromechanical bi-stable switch","authors":"M. Freudenreich, U. Mescheder, G. Somogyi","doi":"10.1109/SENSOR.2003.1216960","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1216960","url":null,"abstract":"A new concept for a micro mechanical bi-stable switch is presented. The bi-stability is achieved by a mechanically pre-stressed toggle-lever. Using FEM (ANSYS) the design of the switch has been optimised for symmetrical switching behaviour, large stroke and low mechanical stress throughout the structure. An analytical model of the bi-stable switch has been developed which gives similar results as the FEM calculations. With a stroke of about 100 /spl mu/m the switch can be utilized for fibre switching.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"129 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131386212","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
A micromachined knife gate valve for high-flow pressure regulation applications 一种用于高流量压力调节应用的微加工刀闸阀
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1217170
Wouter van der Wijngaart, A.S. Ridgeway, G. Stemme
{"title":"A micromachined knife gate valve for high-flow pressure regulation applications","authors":"Wouter van der Wijngaart, A.S. Ridgeway, G. Stemme","doi":"10.1109/SENSOR.2003.1217170","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1217170","url":null,"abstract":"Cross-flow pressure regulating valve structures are attractive for high-flow pressure control applications due to the decreased actuation force required and the reduced device footprint area. A knife gate valve was fabricated, controlling a flow of 1.3 Nl/min at a supply pressure of 1.5 bar. The valve was microfabricated using deep reactive ion etching (DRIE) and silicon fusion bonding. The use of micromachined knife gate valves in pressure control systems enhances performance and cost savings can be realized.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"263 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132388008","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
A micromachined Knudsen pump for on-chip vacuum 微机械克努森泵片上真空
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1217167
S. Mcnamara, Y. Gianchandani
{"title":"A micromachined Knudsen pump for on-chip vacuum","authors":"S. Mcnamara, Y. Gianchandani","doi":"10.1109/SENSOR.2003.1217167","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1217167","url":null,"abstract":"This paper describes a single-chip micromachined implementation of a Knudsen pump-a type of vacuum pump that works by the principle of thermal transpiration, has no moving parts, and consequently offers high reliability. A 6-mask process was used to fabricate the pump from a glass substrate and a silicon wafer. A single stage pump and two integrated pressure sensors occupy 1.5 mm/spl times/2 mm. Measurements show that this device can evacuate a cavity to 0.46 atm while operating at atmospheric pressure and using 80 mW input power. Temperature measurements show thermal isolation on the order of 10/sup 4/ K/W between the polysilicon heater used to operate the pump and the rest of the device.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130152650","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
Post-packaging tuning of microresonators by pulsed laser deposition 脉冲激光沉积微谐振器封装后调谐
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1217141
M. Chiao, L. Lin
{"title":"Post-packaging tuning of microresonators by pulsed laser deposition","authors":"M. Chiao, L. Lin","doi":"10.1109/SENSOR.2003.1217141","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1217141","url":null,"abstract":"This paper presents a post-packaging tuning process for microresonators by PLD (Pulsed Laser Deposition). The microresonators are first hermetically packaged using the RTP (Rapid Thermal Processing) aluminum-to-silicon nitride bonding process. The resonator mass is then altered by adding materials on the surface of the structure using PLD to achieve the desired resonant frequency. The demonstrated tuning resolution is 0.5 % per laser shot with the laser beam spot size of 25/spl times/25 /spl mu/m/sup 2/, energy of 587 mJ/cm/sup 2/, pulse duration of 6 nano second, and 0.35 /spl mu/m-thick gold film as the deposition material for comb-drive microresonators resonating at 12.45 KHz.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"196 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134124178","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Electro-mechanical feedback for realization of a mechanical spectrum analyzer 机械频谱分析仪的机电反馈实现
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1217038
E. Cretu, L. Rocha, R. Wolffenbuttel
{"title":"Electro-mechanical feedback for realization of a mechanical spectrum analyzer","authors":"E. Cretu, L. Rocha, R. Wolffenbuttel","doi":"10.1109/SENSOR.2003.1217038","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1217038","url":null,"abstract":"An important feature of MEMS, still underutilized, is the tight coupling between the electrical and mechanical quantities in the micro domain. This paper demonstrates the benefits of such a functional coupling for a specific device: a real-time mechanical spectrum analyzer. A surface micromachined accelerometer was designed, with a voltage-controlled gain. By applying an harmonic common-mode voltage on the actuation capacitors, the intrinsic nonlinear coupling performs a correlation between the input acceleration and an electrically-controlled signal. To reduce the distortion, a differential, twin-accelerometer scheme is used. Time-multiplexed signal processing gives both the real and the imaginary components of the selected spectral line. A mechanical spectrum analyzer for low-frequency domains is obtained when the driving electrical frequency is swept over the range of interest. The operating principle has been confirmed by measurements, and is expected to yield new opportunities in the field of low-power, low-cost condition monitoring equipment.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"56 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134574243","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Fabrication and testing of vertically-actuated polycrystalline SiC micromechanical resonators for MHz frequency applications 用于MHz频率应用的垂直驱动多晶SiC微机械谐振器的制造和测试
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1216978
R. Wiser, C. Zorman, M. Mehregany
{"title":"Fabrication and testing of vertically-actuated polycrystalline SiC micromechanical resonators for MHz frequency applications","authors":"R. Wiser, C. Zorman, M. Mehregany","doi":"10.1109/SENSOR.2003.1216978","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1216978","url":null,"abstract":"Vertically-actuated micromechanical resonators operating at MHz frequencies were fabricated from phosphorus-doped polycrystalline silicon carbide (poly-SiC) films. The films were deposited on thin polysilicon sacrificial layers by atmospheric pressure chemical vapor deposition (APCVD) and surface micromachined into structures using a lift-off patterning technique. The resonators were tested under high vacuum conditions using a transimpedance amplifier-based circuit. The measured resonant frequencies were consistent with what was expected based on device designs and material properties; however, the quality factors were much lower than expected. Equivalent circuit modeling suggested that the low quality factors were due to the electrical resistance of the beams, which was unexpectedly high.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134195954","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
RF MEMS reliability 射频MEMS可靠性
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1216922
J. DeNatale, R. Mihailovich
{"title":"RF MEMS reliability","authors":"J. DeNatale, R. Mihailovich","doi":"10.1109/SENSOR.2003.1216922","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1216922","url":null,"abstract":"Device reliability is a key factor in the ultimate insertion of RF MEMS devices into operational systems. In particular, cycle lifetimes of contacting devices such as RF switches can be technically challenging due to the requirement of good contact electrical performance under operational stresses. This paper presents a general discussion of the reliability limiting mechanisms that can impact RF MEMS devices, with an emphasis on the issues relevant to RF switch cycling lifetimes.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134349200","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 37
Cross-coupling of the oscillation modes of vibratory gyroscopes 振动陀螺仪振荡模式的交叉耦合
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215279
M. Braxmaier, A. Gaisser, T. Link, A. Schumacher, I. Simon, J. Frech, H. Sandmaier, W. Lang
{"title":"Cross-coupling of the oscillation modes of vibratory gyroscopes","authors":"M. Braxmaier, A. Gaisser, T. Link, A. Schumacher, I. Simon, J. Frech, H. Sandmaier, W. Lang","doi":"10.1109/SENSOR.2003.1215279","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1215279","url":null,"abstract":"This paper reports for the first time on the results of the advanced gyroscope design of HSG-IMIT with the double decoupling mechanism. In connection with the measurement results, particularly to characterize the effectiveness of the decoupling, the cross-coupling of the driven oscillation and the detection oscillation is investigated, discussed and evaluated in detail by theoretical modeling. A description of the measurement signal and the so-called quadrature signal is deduced and a comparison with the gyroscopes of HSG-IMIT realized according to the single decoupling principle DAVED is accomplished.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"46 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132960195","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 37
The resonant micro fan gas pump for active breathing microchannels 用于主动呼吸微通道的谐振微风扇气泵
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1217168
R. Linderman, O. Nilsen, V. Bright
{"title":"The resonant micro fan gas pump for active breathing microchannels","authors":"R. Linderman, O. Nilsen, V. Bright","doi":"10.1109/SENSOR.2003.1217168","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1217168","url":null,"abstract":"This paper reports on the fluidic and mechanical performance of the resonant micro fan as an in-channel gas pump. Experiments with resonant fan arrays assembled within test channels were performed in order to observe the effects of changing fan length and resonant frequency with respect to volumetric flow rate in the channel. Flow rates of approximately 10 /spl mu/l/min were produced by single fans with the flow increasing to 25 /spl mu/l/min for three fans operated simultaneously in the same channel (the capability exists for many fans to be arrayed in a microchannel system). The ability of the micro fan to collect airborne suspended smoke particles was also experimentally examined.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128950789","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
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