一种用于高流量压力调节应用的微加工刀闸阀

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI:10.1109/SENSOR.2003.1217170

Wouter van der Wijngaart, A.S. Ridgeway, G. Stemme

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引用次数: 6

摘要

由于减少了所需的致动力和减少了设备占地面积，因此跨流压力调节阀结构对高流量压力控制应用具有吸引力。制作了一种刀闸阀，在1.5 bar的供应压力下控制流量为1.3 Nl/min。采用深度反应离子蚀刻(deep reactive ion etching, DRIE)和硅熔接技术制备了该阀。在压力控制系统中使用微加工刀闸阀可以提高性能并实现成本节约。

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A micromachined knife gate valve for high-flow pressure regulation applications

Cross-flow pressure regulating valve structures are attractive for high-flow pressure control applications due to the decreased actuation force required and the reduced device footprint area. A knife gate valve was fabricated, controlling a flow of 1.3 Nl/min at a supply pressure of 1.5 bar. The valve was microfabricated using deep reactive ion etching (DRIE) and silicon fusion bonding. The use of micromachined knife gate valves in pressure control systems enhances performance and cost savings can be realized.

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来源期刊

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)

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