Nanotechnology最新文献_第4页

A Hybrid Room-Temperature Chemiresistive Gas Sensor Assisted by Field Ionization of Nanowires. 纳米线场电离辅助的复合型室温化学电阻气体传感器。

IF 2.8 4区材料科学

Nanotechnology Pub Date : 2026-04-28 DOI: 10.1088/1361-6528/ae659e

Defeng Chen, Lunchao Zhong, Qinhua Gao, Yunkuan Wei, Yue Liu, Yuntao Yang, Wen-Huan Zhu, Hai Liu

{"title":"A Hybrid Room-Temperature Chemiresistive Gas Sensor Assisted by Field Ionization of Nanowires.","authors":"Defeng Chen, Lunchao Zhong, Qinhua Gao, Yunkuan Wei, Yue Liu, Yuntao Yang, Wen-Huan Zhu, Hai Liu","doi":"10.1088/1361-6528/ae659e","DOIUrl":"https://doi.org/10.1088/1361-6528/ae659e","url":null,"abstract":"This paper presents a novel gas sensor based on ionization-assisted chemiresistive mechanism. Several volatile organic compounds at ppm level can be differentiated through the physical field gas ionization by CuO nanowires followed by the chemical adsorption forward a molybdenum oxide electrode. Supplemented by the pre-ionization of nanotips, an elevation of chemiresistive response toward acetone up to 16 times has been achieved at room temperature. On the other hand, the chemosensitive oxide layer provides an additional resistance signal to the gas discharge current and threshold voltage of the ionizer, resulting in a higher gas susceptibility. The gas sensing signals including gas discharge current, threshold voltage, and chemiresistance can be interpreted by the gas ionization followed by adsorption mechanism in sequence. Both the ionization energy of the target gas and adsorption energy of ionized gas fragment deduced by the first-principles calculations perform plausible counterparts to the gas selectivity, and the opposite responses have been elucidated by the different charge transfer preferences between the ionized and neutral acetone molecule. This nanowire based hybrid ionization-chemiresistance device may provide a new route to efficiently identify the organic gases.","PeriodicalId":19035,"journal":{"name":"Nanotechnology","volume":" ","pages":""},"PeriodicalIF":2.8,"publicationDate":"2026-04-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147776961","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Synergistic defect passivation and energy band reconstruction via LiH₂PO₄additive for efficient inverted perovskite solar cells. 高效倒置钙钛矿太阳能电池的lih2po4添加剂协同缺陷钝化和能带重建。

IF 2.8 4区材料科学

Nanotechnology Pub Date : 2026-04-28 DOI: 10.1088/1361-6528/ae607f

Xiang Hong, Xinqian Xie, Chuiyu Li, Haiyan Li, Songwang Yang

{"title":"Synergistic defect passivation and energy band reconstruction via LiH2PO4additive for efficient inverted perovskite solar cells.","authors":"Xiang Hong, Xinqian Xie, Chuiyu Li, Haiyan Li, Songwang Yang","doi":"10.1088/1361-6528/ae607f","DOIUrl":"10.1088/1361-6528/ae607f","url":null,"abstract":"Inverted perovskite solar cells (PSCs) are fundamentally constrained by non-radiative recombination and energy-level mismatches. Herein, we introduce lithium dihydrogen phosphate (LiH2PO4) as a multifunctional precursor additive to regulate the crystallization kinetics and electronic structure of perovskite films. We demonstrate that LiH2PO4not only promotes highly (100)-textured grain growth and passivates deep-level defects but also induces a global energy band reconstruction. By correlating x-ray photoelectron spectroscopies and ultraviolet photoelectron spectroscopies, we disclose that the anomalous, simultaneous increase in core-level binding energies originates from a Fermi-level-driven rigid band shift coupled with the formation of a robust interfacial dipole. This dual-action mechanism effectively suppresses non-radiative recombination and eliminates charge extraction barrier. Consequently, the optimized inverted PSCs achieve a champion power conversion efficiency of 24.11%, along with enhanced open-circuit voltage, fill factor, and long-term environmental stability.","PeriodicalId":19035,"journal":{"name":"Nanotechnology","volume":" ","pages":""},"PeriodicalIF":2.8,"publicationDate":"2026-04-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147699226","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Myco-synthesis of Selenium Nanoparticles and their Anticancer Properties: A Review. 纳米硒的真菌合成及其抗癌性能研究进展

IF 2.8 4区材料科学

Nanotechnology Pub Date : 2026-04-28 DOI: 10.1088/1361-6528/ae65a0

Morenikeji Abel Oke, Elijah Adegoke Adebayo, Malik Maaza

{"title":"Myco-synthesis of Selenium Nanoparticles and their Anticancer Properties: A Review.","authors":"Morenikeji Abel Oke, Elijah Adegoke Adebayo, Malik Maaza","doi":"10.1088/1361-6528/ae65a0","DOIUrl":"https://doi.org/10.1088/1361-6528/ae65a0","url":null,"abstract":"The effective management and treatment of cancer have become complex and challenging because of its rapid, uncontrollable growth, ability to evade the immune system, and the development of resistance to treatments. Biogenically synthesized selenium nanoparticles (SeNPs) have gained attention owing to their anticancer properties. The synthesis and development of nanoparticles (NPs) using fungi offer a promising approach to creating new products in nanobiotechnology. Various mycological cultures and their derived substances are promising because they are easy to handle, environmentally friendly, and are considered safe, tolerant, and capable of impressive intracellular metal accumulation or uptake. Fungi are exceptional in their ability to secrete enzymes both intracellularly and extracellularly. Their ability to produce a diverse array of metabolites, including enzymes, polysaccharides, proteins, and other biomolecules, makes them valuable bioreactors for nanoparticle synthesis. Myco-synthesis of NPs has demonstrated effective mechanisms in producing different metal and metalloid NPs. Several studies have confirmed the practical applications of these NPs spanning copious fields, comprising agriculture, medicine, and industry, benefiting goods, services, and mankind. This work presented a comprehensive and critical review of the myco-synthesis of SeNPs and their anticancer potentials. It explores the exceptional properties of fungi as programmed bio-factories by systematically providing a comparative appraisal linking multiple fungal species, their synthesis condition, and secreted biomolecules to SeNPs physiological features. It provides a mechanistic insight into myco-synthesized SeNPs extracellular versus intracellular pathways and expounds how physiological properties influence the anticancer efficacy and biosafety. Finally, the work integrates the in vitro and in vivo evidence, offering a translational insight into the therapeutic potentials of myco-synthesized SeNPs.","PeriodicalId":19035,"journal":{"name":"Nanotechnology","volume":" ","pages":""},"PeriodicalIF":2.8,"publicationDate":"2026-04-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147776742","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Metal-ion doping in Pb-free Cu-based perovskites: luminescence, and application of light-emitting diodes and scintillators. 金属离子在无铅铜基钙钛矿中的掺杂：发光、发光二极管和闪烁体的应用。

IF 2.8 4区材料科学

Nanotechnology Pub Date : 2026-04-28 DOI: 10.1088/1361-6528/ae659d

Miaomiao Song, Boning Han, Dengke Li, Rui Ding, Zhenfu Song, Jizhong Song

{"title":"Metal-ion doping in Pb-free Cu-based perovskites: luminescence, and application of light-emitting diodes and scintillators.","authors":"Miaomiao Song, Boning Han, Dengke Li, Rui Ding, Zhenfu Song, Jizhong Song","doi":"10.1088/1361-6528/ae659d","DOIUrl":"https://doi.org/10.1088/1361-6528/ae659d","url":null,"abstract":"Metal halide perovskite materials have attracted extensive interest in optoelectronic devices owing to their superior optoelectronic properties, yet the lead toxicity and structural instability severely impede practical applications. Lead-free Cu-based perovskites, as potential alternatives, exhibit environmental benignity and favorable optoelectronic tunability, emerging as a research hotspot in materials science in recent years. This paper systematically reviewed the metal ion doping in Cs3Cu2I5 nanocrystals (NCs), with a focus on the regulatory mechanisms of crystal structure, luminescence properties, and optoelectronic applications. We summarized the modulation effects of metal-ion doping on lattice distortion, electronic structure, and defect density through A-site/B-site substitution. Meanwhile, we presented the luminescence optimization of photoluminescence (PL) and radioluminescence (RL) via defect passivation and energy level modulation. In addition, we indicated the applications of such NCs in light-emitting diodes (LEDs) and scintillators for radiation detection. Finally, we designated the current challenges and prospected directions for further improving material and device performance for further development of lead-free perovskites.","PeriodicalId":19035,"journal":{"name":"Nanotechnology","volume":" ","pages":""},"PeriodicalIF":2.8,"publicationDate":"2026-04-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147776744","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Electrospun dual-layer core-shell janus membranes for unidirectional water transport and biphasic thymol release. 静电纺双层核壳Janus膜的单向水输送和双相百里香酚释放。

IF 2.8 4区材料科学

Nanotechnology Pub Date : 2026-04-27 DOI: 10.1088/1361-6528/ae5cad

Fan Li, Dan Huang, Zhuoming Chen, Binjie Xin, Yu Wu

{"title":"Electrospun dual-layer core-shell janus membranes for unidirectional water transport and biphasic thymol release.","authors":"Fan Li, Dan Huang, Zhuoming Chen, Binjie Xin, Yu Wu","doi":"10.1088/1361-6528/ae5cad","DOIUrl":"10.1088/1361-6528/ae5cad","url":null,"abstract":"The development of Janus nanofibrous membranes represents a promising strategy for advanced moisture management and multifunctional materials. However, the practical application of biobased functional agents is often limited by their rapid release and short functional duration. To address this challenge, a novel dual-layer Janus nanofibrous membrane with dual core-shell structures was proposed by sequential coaxial electrospinning. The asymmetric structure consists of a hydrophobic inner layer composed of poly(lactic acid) (PLA) encapsulating thymol (THY), and a hydrophilic outer layer incorporating poly(vinyl alcohol) (PVA) and THY into poly(ethylene oxide)/chitosan (PEO/CS). Compared to the conventional Janus membranes with single structural nanofiber, PEO/CS@PVA/THY-PLA@THY (PCPT-PT) achieves biphasic release of THY through a hierarchical design integrating a dual-layer structure with core-shell fibers in both layers. CS and THY localized in the inner-side of polymer provide an initial rapid diffusion for immediate antibacterial action, while the THY encapsulated deeply in both layers ensures a biphasic and sustained release for prolonged efficacy. The membrane exhibits robust mechanical properties, with a dry tensile strength of 4.76 ± 0.21 MPa and a wet tensile strength of 1.67 ± 0.13 MPa, a high swelling ratio of 765.2% that enables efficient unidirectional moisture management, broad-spectrum antibacterial activity against bothE. coliandS. aureus, and excellent antioxidant performance, with a DPPH radical scavenging rate of 79.2% ± 1.5% and an ABTS radical scavenging rate of 99.92% ± 0.08%. This work provides a facile strategy for constructing multifunctional Janus membranes, showing great application potential in active food packaging, advanced moisture-wicking smart textiles and bioactive material substrates.","PeriodicalId":19035,"journal":{"name":"Nanotechnology","volume":" ","pages":""},"PeriodicalIF":2.8,"publicationDate":"2026-04-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147639026","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

XRL-QNet: an explainable reinforcement learning framework for optimizing and evaluating quantum dots fabrication. XRL-QNet：用于优化和评估量子点制造的可解释强化学习框架。

IF 2.8 4区材料科学

Nanotechnology Pub Date : 2026-04-27 DOI: 10.1088/1361-6528/ae6513

M Irshad Ahamed, Vivekanandhan A, Senthil Mahesh P C, Saahira Ahamed

{"title":"XRL-QNet: an explainable reinforcement learning framework for optimizing and evaluating quantum dots fabrication.","authors":"M Irshad Ahamed, Vivekanandhan A, Senthil Mahesh P C, Saahira Ahamed","doi":"10.1088/1361-6528/ae6513","DOIUrl":"https://doi.org/10.1088/1361-6528/ae6513","url":null,"abstract":"The development of quantum photonics relies on the availability of high-quality, on-demand single-photon sources. Most appropriate are semiconductor Quantum dots (QDs) with tunable emission spectra and discrete energy levels. Due to the spontaneous occurrence of growth being based on an intrinsic randomness in their spectral and spatial properties, their practical implementation is challenging. Scalability and efficiency have been compromised by the existing state of quantum dot measurement techniques, which rely heavily on manual spectrum analysis and lack real-time control over fabrication. XRL-QNet, a machine learning-based platform, is proposed here that leverages the current state-of-the-art RL algorithm, Proximal Policy Optimization (PPO), to optimize substrate temperature, material flux, and growth time, among other fabrication parameters, in real-time applications like molecular beam epitaxy (MBE) for semiconductor device manufacturing. Latent spectral features are obtained through the use of a CNN autoencoder and subsequently scored using a neural regression model that provides a confidence level and appropriateness score. The majority of determining quantum dot assessment spectral features are obtained via explainable AI (XAI) techniques, such as SHAP and LIME, to provide interpretability and transparency. High-performance QDs tailored to specific quantum applications can be synthesized using innovative, scalable, and automated methods, as XRL-QNet with PPO optimization closes the loop between fabrication process control and emission spectrum analysis.","PeriodicalId":19035,"journal":{"name":"Nanotechnology","volume":" ","pages":""},"PeriodicalIF":2.8,"publicationDate":"2026-04-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147776904","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Electrochemical selective epitaxial growth of Au microstructures at wafer scale. 晶片尺度上金微结构的电化学选择性外延生长。

IF 2.8 4区材料科学

Nanotechnology Pub Date : 2026-04-24 DOI: 10.1088/1361-6528/ae645c

Yalu Guan, Tianran Zhao, Jie Lin, Peng Jin

{"title":"Electrochemical selective epitaxial growth of Au microstructures at wafer scale.","authors":"Yalu Guan, Tianran Zhao, Jie Lin, Peng Jin","doi":"10.1088/1361-6528/ae645c","DOIUrl":"https://doi.org/10.1088/1361-6528/ae645c","url":null,"abstract":"Single-crystalline Au structures are an ideal building blocks for high-performance optoelectronic and electronic devices, and the precise alignment of Au functional units on largearea substrates serves as a core driver for advancing wafer-scale integration. However, the process faces two fundamental obstacles: (1) the deterministic positioning of pre-synthesized nanocrystals at target coordinates, and (2) morphological inhomogeneity accompanied by low fabrication yield in seed-mediated in-situ grown architectures. To date, the reliable fabrication of high-quality Au microstructures with precise spatial and crystallographic alignment, as well as chemically clean surfaces, on macroscopic substrates has not yet been realized. To address this critical challenge, we propose an electrochemical selective epitaxial deposition method based on surface state modulation, which enables the reliable fabrication of high-quality Au microstructures at the wafer scale. This mask-free growth strategy yields Au microstructures with atomically flat surfaces and a highly pure single crystallographic orientation. Our work provides a promising technical solution for the construction of high-performance optoelectronic integration platforms.","PeriodicalId":19035,"journal":{"name":"Nanotechnology","volume":" ","pages":""},"PeriodicalIF":2.8,"publicationDate":"2026-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147776391","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Metal-organic framework-derived sulfide-based bifunctional electrocatalyst for efficient water electrolysis in alkali solutions. 金属有机骨架衍生的硫化物基双功能电催化剂在碱溶液中的高效电解。

IF 2.8 4区材料科学

Nanotechnology Pub Date : 2026-04-24 DOI: 10.1088/1361-6528/ae645e

Meiling Hu, Yameng Song, Mi Zhang, Junge Yuan, Weixue Meng, Peijuan Zhang

{"title":"Metal-organic framework-derived sulfide-based bifunctional electrocatalyst for efficient water electrolysis in alkali solutions.","authors":"Meiling Hu, Yameng Song, Mi Zhang, Junge Yuan, Weixue Meng, Peijuan Zhang","doi":"10.1088/1361-6528/ae645e","DOIUrl":"https://doi.org/10.1088/1361-6528/ae645e","url":null,"abstract":"Metal-organic frameworks (MOFs) exhibit ultra-high specific surface areas and tunable porous structures. Thus, they can function as highly efficient electrocatalysts for water-splitting applications. However, the practical application of pristine MOFs is limited by insufficient active sites, sluggish charge transfer kinetics and the constrained activity and selectivity of single metal centres. To address these challenges, we developed a layered iron (Fe)-modified zinc (Zn)-cobalt sulfide (CoS) heterostructure on nickel foam (NF), denoted as Ni-Fe@Zn-CoS/NF, using a three-step synthesis strategy: (i) epitaxial growth of Zn-Co-MOF arrays, (ii) hydrothermal sulfidation and (iii) Fe-Ni electrodeposition. This approach resulted in a sponge-like architecture, which significantly enhanced electrocatalytic performance.The optimised electrocatalyst exhibited exceptional catalytic activity in 1-M potassium hydroxide, attaining overpotentials of 158 mV for the hydrogen evolution reaction and 214 mV for the oxygen evolution reaction to achieve a current density of 10 mA cm-2. When assembled in a symmetric electrolyser for overall water splitting, the system achieved a current density of 10 mA cm-2at 1.60 V and retained 95% of its original activity after continuous operation for 20 h. Our study presents a practical and efficient approach for improving the electrocatalytic performance and long-term stability of MOF-derived composite materials, demonstrating significant potential for water electrolysis applications.","PeriodicalId":19035,"journal":{"name":"Nanotechnology","volume":" ","pages":""},"PeriodicalIF":2.8,"publicationDate":"2026-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147776684","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Metal-assisted chemical etching for controllable fabrication of silicon nanochannels. 金属辅助化学蚀刻制备可控硅纳米通道。

IF 2.8 4区材料科学

Nanotechnology Pub Date : 2026-04-24 DOI: 10.1088/1361-6528/ae607e

Zixiu Chen, Nan An, Longfei Miao, Yuping Zhang, Yueming Zhai

{"title":"Metal-assisted chemical etching for controllable fabrication of silicon nanochannels.","authors":"Zixiu Chen, Nan An, Longfei Miao, Yuping Zhang, Yueming Zhai","doi":"10.1088/1361-6528/ae607e","DOIUrl":"10.1088/1361-6528/ae607e","url":null,"abstract":"Silicon nanochannels possess adjustable structural characteristics and excellent mechanical properties, and have great application potential in nanoelectromechanical systems, seawater desalination, and nanoreactors. However, achieving controllable synthesis and precise structural modulation remains highly challenging. Metal-assisted chemical etching (MACE), with its advantages of simple operation and low cost, has been widely used in the fabrication of silicon nanochannels. This study systematically investigates the morphological regulation mechanism of silicon nanochannels prepared via MACE, with a focus on analyzing the influence of etching solution composition, gold nanoparticle microstructure, and reaction time on the formation of helical structures. By combining thermomechanical molding for replicating nanochannel structures with electron microscopy characterization, comprehensive morphological analysis was achieved. The results indicate that an etching solution ratio of HF:H₂O₂:H₂O = 6:4:5 (v/v/v) yields helical nanochannels with greater length and higher yield. Increasing the HF proportion promotes the formation of helical structures; however, excessively high HF concentration leads to severe lateral etching, inhibiting deep channel propagation. The study further reveals an externally-driven mechanism for helical structure formation: the hydrogen bubbles generated during the reaction and the flow of the etching solution exert thrust on the nanoparticles, causing them to move and carve helical pathways.","PeriodicalId":19035,"journal":{"name":"Nanotechnology","volume":" ","pages":""},"PeriodicalIF":2.8,"publicationDate":"2026-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147699192","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Balancing ferroelectricity and endurance in Hf0.5Zr0.5O2 thin films through mixed-oxygen atomic layer deposition. 通过混合氧原子层沉积平衡Hf0.5Zr0.5O2薄膜的铁电性和耐久性。

IF 2.8 4区材料科学

Nanotechnology Pub Date : 2026-04-24 DOI: 10.1088/1361-6528/ae643b

Quanjiang Lv, Zhihan Li, Chuang Zuo, Shanli Ke, Qiming Jiao, Wei Xiong, Ming Zhou, Haohua Li, Jun-Lin Liu

{"title":"Balancing ferroelectricity and endurance in Hf0.5Zr0.5O2 thin films through mixed-oxygen atomic layer deposition.","authors":"Quanjiang Lv, Zhihan Li, Chuang Zuo, Shanli Ke, Qiming Jiao, Wei Xiong, Ming Zhou, Haohua Li, Jun-Lin Liu","doi":"10.1088/1361-6528/ae643b","DOIUrl":"https://doi.org/10.1088/1361-6528/ae643b","url":null,"abstract":"Simultaneous optimization of remanent polarization (2Pr) and long-term endurance remains a critical challenge for Hf0.5Zr0.5O2 (HZO)-based ferroelectric thin films in next-generation non-volatile memory technologies. Here, we introduce a sequenced mixed-oxidant atomic layer deposition (ALD) process that employs an initial deionized H2O pulse followed by controlled O3 exposure to decouple the inherent trade-off between strong ferroelectricity and reliability. The optimized Mix-10s sample delivers a high 2Pr ≈ 48 μC/cm 2 in ~10 nm-thick films, accompanied by wake-up-free characteristics and outstanding cycling stability, retaining 98.9% of the pristine polarization after 10 9 bipolar switching cycles with minimal fatigue. Structural and electrical characterizations, including grazing-incidence X-ray diffraction, transmission electron microscopy, piezoresponse force microscopy, and switching current analysis, reveal a cooperative defect-engineering mechanism. The initial H2O pulse introduces a moderate oxygen vacancy concentration that lowers the kinetic barrier for stabilizing the ferroelectric orthorhombic phase, whereas the subsequent O3 pulse removes residual carbon and hydrogen impurities and suppresses excessive vacancy accumulation, thereby mitigating domain wall pinning and leakage. This hybrid oxidant ALD approach provides a scalable and CMOS compatible pathway toward high-polarization, fatigue free hafnia-based ferroelectrics for advanced memory and neuromorphic applications.","PeriodicalId":19035,"journal":{"name":"Nanotechnology","volume":" ","pages":""},"PeriodicalIF":2.8,"publicationDate":"2026-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147777042","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0