NanotechnologyPub Date : 2024-11-21DOI: 10.1088/1361-6528/ad902d
Munsu Choi, Chulkyun Park, Juhee Hong
{"title":"Development and optimization of metal silicide EUV pellicle for 400W EUV lithography.","authors":"Munsu Choi, Chulkyun Park, Juhee Hong","doi":"10.1088/1361-6528/ad902d","DOIUrl":"10.1088/1361-6528/ad902d","url":null,"abstract":"<p><p>In the extreme ultraviolet lithography (EUVL) process, extreme ultraviolet (EUV) pellicles serve as thin, transparent membranes that shield the photomask (reticle) from particle contamination, thereby preserving photomask pattern integrity, reducing chip failure risks, and enhancing production yields. The production of EUV pellicles is highly challenging due to their mechanical fragility at nanometer-scale thicknesses and the need to endure the rigorous conditions of the EUVL environment, which include high temperatures and hydrogen radicals. Consequently, extensive research has been conducted on a variety of materials, such as carbon-based and silicon-based substances, for the development of EUV pellicles. This study explores the feasibility of implementing metal silicide (MeSi<i><sub>x</sub></i>) pellicles for high-power EUVL applications. We successfully fabricated MeSi<i><sub>x</sub></i>pellicles in two dimensions: a 10 mm × 10 mm sample and a full-size 110 mm × 144 mm pellicle. We then evaluated their optical, mechanical, thermal, and chemical properties, as well as their lifespan. The pellicles demonstrated over 90% transmittance and less than 0.04% reflectance. The films exhibited a deflection of 300<i>μ</i>m under a 2 Pa differential pressure and an ultimate tensile strength exceeding 2 GPa. The thermal emissivity was measured at 0.3. Additionally, the durability of the pellicles was validated through exposure to 20,000 wafers using a 400 W EUV power (offline test: 20 W cm<sup>-2</sup>). The transmittance variations of the pellicles were evaluated by comparing the measurements obtained before and after exposure to 400 W EUV power.</p>","PeriodicalId":19035,"journal":{"name":"Nanotechnology","volume":" ","pages":""},"PeriodicalIF":2.9,"publicationDate":"2024-11-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142605192","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
NanotechnologyPub Date : 2024-11-20DOI: 10.1088/1361-6528/ad8e6c
Antun Lovro Brkić, Antonio Supina, Davor Čapeta, Lucija Dončević, Lucija Ptiček, Šimun Mandić, Livio Racané, Ida Delač
{"title":"Stability and reversibility of organic molecule modifications of CVD-synthesized monolayer MoS<sub>2</sub>.","authors":"Antun Lovro Brkić, Antonio Supina, Davor Čapeta, Lucija Dončević, Lucija Ptiček, Šimun Mandić, Livio Racané, Ida Delač","doi":"10.1088/1361-6528/ad8e6c","DOIUrl":"10.1088/1361-6528/ad8e6c","url":null,"abstract":"<p><p>We investigated the stability of monolayer MoS<sub>2</sub>samples synthesized using chemical vapor deposition and subsequently modified with organic molecules under ambient conditions. By analyzing the optical signatures of the samples using photoluminescence spectroscopy, Raman spectroscopy, and surface quality using atomic force microscopy, we observed that this modification of monolayer MoS<sub>2</sub>with organic molecules is stable and retains its optical signature over time under ambient conditions. Furthermore, we show the reversibility of the effects induced by the organic molecules, as heating the modified samples restores their original optical signatures, indicating the re-establishment of the optical properties of the pristine monolayer MoS<sub>2</sub>.</p>","PeriodicalId":19035,"journal":{"name":"Nanotechnology","volume":" ","pages":""},"PeriodicalIF":2.9,"publicationDate":"2024-11-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142576399","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Effect of SiCN thin film interlayer for ZnO-based RRAM.","authors":"Woon-San Ko, Myeong-Ho Song, Jun-Ho Byun, Do-Yeon Lee, So-Yeon Kwon, Jong-Sin Hyun, Dong-Hyeuk Choi, Ga-Won Lee","doi":"10.1088/1361-6528/ad83d9","DOIUrl":"10.1088/1361-6528/ad83d9","url":null,"abstract":"<p><p>This study investigates the effect of silicon carbon nitride (SiCN) as an interlayer for ZnO-based resistive random access memory (RRAM). SiCN was deposited using plasma-enhanced chemical vapor deposition with controlled carbon content, achieved by varying the partial pressure of tetramethylsilane (4MS). Our results indicate that increasing the carbon concentration enhances the endurance of RRAM devices but reduces the on/off ratio. Devices with SiCN exhibited lower operating voltages and more uniform resistive switching behavior. Oxygen migration from ZnO to SiCN is examined by x-ray diffraction and x-ray photoelectron spectroscopy analyses, promoting the formation of conductive filaments and lowering set voltages. Additionally, we examined the impact of top electrode oxidation on RRAM performance. The oxidation of the Ti top electrode was found to reduce endurance and increase low resistive state resistance, potentially leading to device failure through the formation of an insulating layer between the electrode and resistive switching material. The oxygen storage capability of SiCN was further confirmed through high-temperature stress tests, demonstrating its potential as an oxygen reservoir. Devices with a 20 nm SiCN interlayer showed significantly improved endurance, with over 500 switching cycles, compared to 62 cycles in those with a 5 nm SiCN layer. However, the thicker SiCN layer resulted in a notably lower on/off ratio due to reduced capacitance. These findings suggest that SiCN interlayers can effectively enhance the performance and endurance of ZnO-based RRAM devices by acting as an oxygen reservoir and mitigating the top electrode oxidation effect.</p>","PeriodicalId":19035,"journal":{"name":"Nanotechnology","volume":" ","pages":""},"PeriodicalIF":2.9,"publicationDate":"2024-11-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142391985","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
NanotechnologyPub Date : 2024-11-20DOI: 10.1088/1361-6528/ad902b
Xu Chen, Jian Yue, Xiongjun Xu, Jiajun Chen, Xuechan Huang, Yukai Huang, Yang Yang, Feng Li, Tianwang Li
{"title":"Surface different charge ligands for modulating selenium nanoparticles formation and activating the interaction with proteins for effective anti-Herpes simplex virus l infection.","authors":"Xu Chen, Jian Yue, Xiongjun Xu, Jiajun Chen, Xuechan Huang, Yukai Huang, Yang Yang, Feng Li, Tianwang Li","doi":"10.1088/1361-6528/ad902b","DOIUrl":"10.1088/1361-6528/ad902b","url":null,"abstract":"<p><p>Selenium-based nanoparticles exhibit antiviral activity by directly modulating immune function. Despite recent promising developments in utilizing selenium nanoparticles (Se NPs) against viral infections, the impact of surface ligand charge on the conformation and interaction with viral proteins, as well as the effectiveness of Se NPs in anti-Herpes simplex virus 1 (HSV-1) infection remains unexplored. In this study, three types of selenium nanoparticles (CTAB-Se, PVP-Se, SDS-Se) with distinct surface charges were synthesized by modifying the surface ligands. We found that apart from differences in surface charge, the size, morphology, and crystal structure of the three types of Se NPs were similar. Notably, although the lipophilicity and cellular uptake of SDS-Se with a negative charge were lower compared to positively charged CTAB-Se and neutrally charged PVP-Se, SDS-Se exhibited the strongest protein binding force during interaction with HSV-1. Consequently, SDS-Se demonstrated the most potent anti-HSV-1 activity and safeguarded normal cells from damage. The mechanistic investigation further revealed that SDS-Se NPs effectively inhibited the proliferation and assembly of HSV-1 by powerfully suppressing the key genes and proteins of HSV-1 at various stages of viral development. Hence, this study highlights the significant role of surface ligand engineering in the antiviral activity of Se NPs, presenting a viable approach for synthesizing Se NPs with tailored antiviral properties by modulating surface charge. This method holds promise for advancing research on the antiviral capabilities of Se NPs.</p>","PeriodicalId":19035,"journal":{"name":"Nanotechnology","volume":" ","pages":""},"PeriodicalIF":2.9,"publicationDate":"2024-11-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142605313","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
NanotechnologyPub Date : 2024-11-20DOI: 10.1088/1361-6528/ad8bc9
Zhenfei Hou, Gang Niu, Jie Li, Shengli Wu
{"title":"Improvement of N-type carbon nanotube field effect transistor performance using the combination of yttrium diffusion layer in HfO<sub>2</sub>dielectrics and metal contacts.","authors":"Zhenfei Hou, Gang Niu, Jie Li, Shengli Wu","doi":"10.1088/1361-6528/ad8bc9","DOIUrl":"10.1088/1361-6528/ad8bc9","url":null,"abstract":"<p><p>In this paper, we obtained n-type top-gate carbon nanotube (CNT) thin film field effect transistors (FET) with source/drain extensions structure through dielectrics optimization strategy, combining the yttrium layer with HfO<sub>2</sub>dielectric argon annealing process, and metal contacts. The mechanism for enhanced n-type conduction was explained as being due to the vertical diffusion of yttrium to the HfO<sub>2</sub>dielectric during argon annealing. This diffusion causes a bending of the energy band, which results in more positive fixed charges, and a reduction in the electron injection barrier between the low work function source/drain Cr electrode and CNT thin film. The optimized technology has great prospects for the low cost, large scale and high performance n-type CNT thin film FET to be used in integrated electronic devices.</p>","PeriodicalId":19035,"journal":{"name":"Nanotechnology","volume":" ","pages":""},"PeriodicalIF":2.9,"publicationDate":"2024-11-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142522500","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
NanotechnologyPub Date : 2024-11-19DOI: 10.1088/1361-6528/ad947f
Ahmed Nashaat, Abdulaziz Abu El-Fadl, Hiroyuki Nakamura, Mohamed Abdelkareem Kassem
{"title":"Synthesis and magnetic properties of NiCo<sub>2</sub>O<sub>4</sub>urchin-like nanofibers.","authors":"Ahmed Nashaat, Abdulaziz Abu El-Fadl, Hiroyuki Nakamura, Mohamed Abdelkareem Kassem","doi":"10.1088/1361-6528/ad947f","DOIUrl":"https://doi.org/10.1088/1361-6528/ad947f","url":null,"abstract":"<p><p>Single-phase NiCo2O4 (NCO) nanoparticles (NPs) with an average particle size of 12 (± 3.5) nm were successfully synthesized as aggregates in urchin-like nanofibers via a hydrothermal route. Magnetization data measured as functions of temperature and magnetic field suggest a superparamagnetic-like behavior at room temperature, a ferrimagnetic transition around a Curie temperature TC ~200 K, and a spin blocking transition at a blocking temperature TB ~90 K, as observed at a field of 100 Oe. The spin blocking nature has been investigated by analyses of the field-dependence of TB in the static magnetization and its frequency-dependence in the ac susceptibility data measured in zero-field cooling regime, both indicate a low-temperature spin glass-like state. Below TB, the coercivity increases monotonically up to 1.7 kOe with decreasing temperature down to 5 K. Our results indicate that the magnetic behavior of NCO NPs, which is mainly determined by the cations' ratio, oxidation states, and site-occupancy, can be controlled by a synthesis in appropriate particle size and morphology.</p>","PeriodicalId":19035,"journal":{"name":"Nanotechnology","volume":" ","pages":""},"PeriodicalIF":2.9,"publicationDate":"2024-11-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142682443","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Carbyne as a promising material for E-nose applications with machine learning.","authors":"Alexey Kucherik, Ashok Kumar, Abramov Andrey, Vladislav Samyshkin, Osipov Anton, Ilya Bordanov, Sergey Andreevich Shchanikov, Mahesh Kumar","doi":"10.1088/1361-6528/ad947c","DOIUrl":"https://doi.org/10.1088/1361-6528/ad947c","url":null,"abstract":"<p><p>There has been a lot of study and advancement in the area of carbon allotropes in the last several decades, driven by the exceptional and diverse physical and chemical characteristics of carbon nanomaterials. For example, nanostructured forms such as carbon nanotubes, graphene, and carbon quantum dots have the potential to revolutionize various industries [1-3]. The global scientific community continues to research in the field of creating new materials, particularly low-dimensional carbon allotropes such as carbon nanotubes (CNTs) and carbyne. Carbyne is a one-dimensional carbon allotrope with a large surface area, chemical reactivity, and gas molecule adsorption potential that makes it extremely sensitive to gases and electronic nose (E-nose) applications due to its linear sp-hybridized atomic chain structure. The primary objective of this work is to increase the sensitivity, selectivity, and overall efficiency of E-nose systems using a synergistic combination of carbyne-based sensing components with cutting-edge machine learning techniques. The exceptional electronic properties of carbyne, such as its high electron mobility and adjustable bandgap, enable rapid and specific adsorption of various gas molecules. Additionally, its significant surface area-to-volume ratio enhances the detection of trace concentrations. Our suggested advanced hybrid system utilises support vector machines (SVMs) and convolutional neural networks (CNNs) as sophisticated machine learning approaches to analyse data provided by carbyne sensors. These algorithms enhance the precision and durability of gas detection by effectively recognising intricate patterns and correlations in the sensor data. Empirical evidence suggests that E-nose systems based on carbyne have superior performance in terms of reaction time, sensitivity, and specificity compared to conventional materials. This research emphasises the revolutionary potential of carbyne in the advancement of next-generation gas sensing systems, which has significant implications for applications in environmental monitoring, medical diagnostics, and industrial process control.
.</p>","PeriodicalId":19035,"journal":{"name":"Nanotechnology","volume":" ","pages":""},"PeriodicalIF":2.9,"publicationDate":"2024-11-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142682410","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
NanotechnologyPub Date : 2024-11-19DOI: 10.1088/1361-6528/ad947e
Binowesley Ramakrishnan, Kirubaveni Savarimuthu, M Emimal
{"title":"Comparative performance analysis of unmixed and mixed metal oxide sensors for dual-sensing leveraging machine learning.","authors":"Binowesley Ramakrishnan, Kirubaveni Savarimuthu, M Emimal","doi":"10.1088/1361-6528/ad947e","DOIUrl":"https://doi.org/10.1088/1361-6528/ad947e","url":null,"abstract":"<p><p>This paper presents the synthesis of mixed metal oxide (BaTiO3: ZnO) (B: Z) sensors with various molar ratios using a low- temperature hydrothermal method for dual sensing applications (gas and acceleration). The sensor developed with an equal molar ratio of 1B:1Z, showcases superior performance compared to unmixed and alternative mixed metal oxide sensors. This equilibrium in ratios optimally enhances synergistic effects between elements B and Z, resulting in improved sensing properties. Furthermore, it contributes to structural stability, enhancing performance in gas and acceleration sensing. A decreased band gap of 2.82eV and a rapid turn-on voltage of 0.18V were achieved. The acceleration performance of 1B:1Z sensor exhibits a maximum voltage of 2.62 V at a 10 Hz resonant frequency and an output voltage of 2.52 V at 1 g acceleration, achieving an improved sensitivity of 3.889 V/g. In addition, the proposed gas shows a notable sensor response of ~63.45% (CO) and 58.29% (CH4) at 10 ppm with a quick response time of 1.19s (CO) and 8.69s (CH4) and recovery time of 2.09s (CO) and 8.69s (CH4). Challenges in selectivity are addressed using machine learning, employing various classification algorithms. Linear Discriminant Analysis (LDA) achieves superior accuracy in differentiating between CO and CH4, reaching 96.6 % for CO and 74.6 % for CH4 at 10 ppm. Understanding these concentration-dependent trends can guide the optimal use of the sensors in different current applications.
.</p>","PeriodicalId":19035,"journal":{"name":"Nanotechnology","volume":" ","pages":""},"PeriodicalIF":2.9,"publicationDate":"2024-11-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142682416","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
NanotechnologyPub Date : 2024-11-18DOI: 10.1088/1361-6528/ad9029
Shengyao Chen, Shu Wang, Wenqi Xiong, Zhican Zhou, Xiaoshan Du, Lijun Ma, Junqi Wang, Cong Wang, Xinzheng Zhang, Qian Liu
{"title":"Laser modulation of the FePS<sub>3</sub>memristors.","authors":"Shengyao Chen, Shu Wang, Wenqi Xiong, Zhican Zhou, Xiaoshan Du, Lijun Ma, Junqi Wang, Cong Wang, Xinzheng Zhang, Qian Liu","doi":"10.1088/1361-6528/ad9029","DOIUrl":"10.1088/1361-6528/ad9029","url":null,"abstract":"<p><p>Ternary two-dimensional (2D) material-based memristors have garnered significant attention in the fields of machine learning, neuromorphic computing due to their low power consumption, rapid learning, and synaptic-like behavior. Although such memristors often exhibit high ON/OFF ratios and exceptional pulse response characteristics, they have also to face some challenges concerning reusability and switching cycles, which arise from the filament instability issues. Here we propose a modulation strategy to improve performance of 2D-material memristors with synaptic and flexible features. By laser-modulating few-layer FePS<sub>3</sub>, we induced the formation of conductive filaments, realized a major improvement in performance of the FePS<sub>3</sub>memristors, achieving an ON/OFF ratio of nearly 10<sup>4</sup>, low power consumption at approximately 10<sup>-7</sup>W of single switching operation, and maintaining stability even after over 500 cycles. The performance promotion has been ascribed to enhancement of conductive filament induced by laser-modulation. Furthermore, we have identified the effectiveness of our laser modulation under strain by building the high-performance flexible FePS<sub>3</sub>memristor. Meanwhile, we discovered a novel strain-dominant erasure method for the flexible memristors. Our work confirms that laser modulation is a viable method for enhancing the performance of 2D material-based memristive devices.</p>","PeriodicalId":19035,"journal":{"name":"Nanotechnology","volume":" ","pages":""},"PeriodicalIF":4.6,"publicationDate":"2024-11-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142605296","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
NanotechnologyPub Date : 2024-11-18DOI: 10.1088/1361-6528/ad892a
Yejun Lee, Sunhwa Hong, Issac Moon, Chan-Jin Kim, Yunseok Lee, Byung Hee Hong
{"title":"Laser-assisted synthesis and modification of 2D materials.","authors":"Yejun Lee, Sunhwa Hong, Issac Moon, Chan-Jin Kim, Yunseok Lee, Byung Hee Hong","doi":"10.1088/1361-6528/ad892a","DOIUrl":"10.1088/1361-6528/ad892a","url":null,"abstract":"<p><p>Two-dimensional (2D) materials with unique physical, electronic, and optical properties have been intensively studied to be utilized for the next-generation electronic and optical devices, and the use of laser energy in the synthesis and modification of 2D materials is advantageous due to its convenient and fast fabrication processes as well as selective, controllable, and cost-effective characteristics allowing the precise control in materials properties. This paper summarizes the recent progress in utilizations of laser technology in synthesizing, doping, etching, transfer and strain engineering of 2D materials, which is expected to provide an insight for the future applications across diverse research areas.</p>","PeriodicalId":19035,"journal":{"name":"Nanotechnology","volume":" ","pages":""},"PeriodicalIF":2.9,"publicationDate":"2024-11-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142470513","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}