Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002.最新文献_第2页

Metallization proximity studies for copper spiral inductors on silicon 硅上铜螺旋电感的金属化接近研究

Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002. Pub Date : 2002-04-08 DOI: 10.1109/ICMTS.2002.1193165

C. Sia, K. S. Yeo, S. Chu, Z. Zeng, T. H. Lee

引用次数: 14

A consistent and scalable PSPICE HFET-Model for DC- and S-parameter-simulation 用于直流参数和s参数仿真的一致和可扩展的PSPICE hfet模型

Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002. Pub Date : 2002-04-08 DOI: 10.1109/ICMTS.2002.1193173

S. Ehrich, R. Bertenburg, M. Agethen, A. Brennemann, W. Brockerhoff, F. Tegude

引用次数: 1

Impact of probe configuration and calibration techniques on quality factor determination of on-wafer inductors for GHz applications 探头配置和校准技术对千兆赫应用晶圆电感质量因子测定的影响

Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002. Pub Date : 2002-04-08 DOI: 10.1109/ICMTS.2002.1193164

R. Havens, L. Tiemeijer, L. Garnbus

引用次数: 13

Electrical CD characterisation of binary and alternating aperture phase shifting masks 二元和交变孔径移相掩模的电CD特性

Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002. Pub Date : 2002-04-08 DOI: 10.1109/ICMTS.2002.1193162

S. Smith, M. Mccallum, A. Walton, J. Stevenson

引用次数: 17

Triple-junction colour sensor fully compatible with CMOS technology: results of a test chip 完全兼容CMOS技术的三结彩色传感器:测试芯片的结果

Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002. Pub Date : 2002-04-08 DOI: 10.1109/ICMTS.2002.1193199

G. Betta, N. Zorzi, Pierluigi Bellutti, M. Boscardin, G. Soncini

引用次数: 5

BSIM4.1 DC parameter extraction on 50 nm n-pMOSFETs BSIM4.1 50 nm n- pmosfet直流参数提取

Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002. Pub Date : 2002-04-08 DOI: 10.1109/ICMTS.2002.1193182

D. Souil, G. Guégan, G. Bertrand, O. Faynot, S. Deleonibs, G. Ghibaudo

引用次数: 5

Methodology for defect impact studies under conditions of low electrical testing coverage 低电气测试覆盖率条件下缺陷影响研究的方法学

Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002. Pub Date : 2002-04-08 DOI: 10.1109/ICMTS.2002.1193193

A. Skumanich, E. Ryabova

引用次数: 1

Test structures for a MEMS SiO/sub x//metal process MEMS SiO/sub /金属工艺的测试结构

Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002. Pub Date : 2002-04-08 DOI: 10.1109/ICMTS.2002.1193197

M. Hill, C. O’Mahony, P. Hughes, B. Lane, A. Mathewson

引用次数: 0

Passive multiplexer test structure for fast and accurate contact and via fail rate evaluation 无源多路复用测试结构，用于快速准确的接触和通过故障率评估

Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002. Pub Date : 2002-04-08 DOI: 10.1109/ICMTS.2002.1193190

C. Hess, B. Stine, L. Weiland, T. Mitchell, M. Karnett, K. Gardner

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引用次数: 12

An assessment of physical and electrical design rule based statistical process monitoring and modeling (PEDR-SPMM): for foundry manufacturing line of multiple-product mixed-run 基于统计过程监控和建模(PEDR-SPMM)的多产品混运铸造生产线物理和电气设计规则评估

Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002. Pub Date : 2002-04-08 DOI: 10.1109/ICMTS.2002.1193171

K. Doong, S. Hsieh, S.C. Lin, L. Hung, R.J. Wang, Binson Shen, J.W. Hisa, J. Guo, I. Chen, K. L. Young, C. Hsu

引用次数: 1