完全兼容CMOS技术的三结彩色传感器:测试芯片的结果

Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002. Pub Date : 2002-04-08 DOI:10.1109/ICMTS.2002.1193199

G. Betta, N. Zorzi, Pierluigi Bellutti, M. Boscardin, G. Soncini

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引用次数: 5

摘要

我们表明，在CMOS n阱技术中，不需要额外的工艺步骤，只需对p通道停止掩模进行简单的布局修改，就可以获得三结光敏器。通过对一个特殊设计的测试芯片的电光特性测试，证明了该传感器的波长选择性可用于颜色检测，并证实了该器件与CMOS技术的完全兼容性。

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Triple-junction colour sensor fully compatible with CMOS technology: results of a test chip

We show that a triple-junction photosensor can been obtained within a CMOS n-well technology with no additional process steps but a simple layout modification of the p-channel-stop mask. Results from the electrooptical characterisation of a specially designed test chip proved that the wavelength selectivity of the sensor can be used for colour detection and confirmed the device full compatibility with CMOS technology.

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Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002.

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