Triple-junction colour sensor fully compatible with CMOS technology: results of a test chip

G. Betta, N. Zorzi, Pierluigi Bellutti, M. Boscardin, G. Soncini
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引用次数: 5

Abstract

We show that a triple-junction photosensor can been obtained within a CMOS n-well technology with no additional process steps but a simple layout modification of the p-channel-stop mask. Results from the electrooptical characterisation of a specially designed test chip proved that the wavelength selectivity of the sensor can be used for colour detection and confirmed the device full compatibility with CMOS technology.
完全兼容CMOS技术的三结彩色传感器:测试芯片的结果
我们表明,在CMOS n阱技术中,不需要额外的工艺步骤,只需对p通道停止掩模进行简单的布局修改,就可以获得三结光敏器。通过对一个特殊设计的测试芯片的电光特性测试,证明了该传感器的波长选择性可用于颜色检测,并证实了该器件与CMOS技术的完全兼容性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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